CN101349809B - System for zooming and focusing based on MOEMS - Google Patents
System for zooming and focusing based on MOEMS Download PDFInfo
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- CN101349809B CN101349809B CN200810119430XA CN200810119430A CN101349809B CN 101349809 B CN101349809 B CN 101349809B CN 200810119430X A CN200810119430X A CN 200810119430XA CN 200810119430 A CN200810119430 A CN 200810119430A CN 101349809 B CN101349809 B CN 101349809B
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Abstract
The invention relates to an automatic zooming and focusing system based on MOMES, which comprises a first optical group, a second optical group and a detector, wherein the first optical group comprises a first deformation lens and a first reflector, the second optical group comprises a first positive lens, a first negative lens, a second positive lens, a second negative lens, a first reflector, a third negative lens, a second deformable lens, a third positive lens, a fourth negative lens, a fourth positive lens and a fifth negative lens, said optical elements are arranged in turn from object space to image space. The zooming optical system has good aberration correction, high detection accuracy, high stability, large zoom ratio, changeable target detection range and the ability for searching targets in a large range and quickly and accurately positioning the target.
Description
Technical field
The present invention relates to zoom and focusing system, in particular for Zooming method in the target detection and zoom lens control device based on MOEMS.
Background technology
In order to obtain imaging effect clearly, require optical module to possess good fast zoom ability.Traditional zoom system, pancreatic system is to change the effective focal length of optical system and the field angle of system by the mode that interval between the change optical system constituent element and structure are replaced; The wherein mechanical motion of optical system motion constituent element tube cam is driven by motor and gear drive usually, realizes zoom and focusing function, and the response time needs the hundreds of millisecond; Adopt structure replacement form to realize the system of zoom, then need adopt complicated changing over to produce physical construction.And oversizely be unfavorable for being installed in the small space detector.Native system adopts based on MOEMS (Micro-opto-electromechanical systems) device deformable mirror zoom and focusing function is provided, reduce system bulk, cancelled the bigger mechanical transmissioning piece of some responsive time constants, the total system dynamic response performance is improved greatly, reaction is quick, and that is adopted can reach～response time of 1ms based on the MOEMS deformable mirror.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of zoom and focusing system based on MOEMS, can satisfy on the space probe demand to zoom and focusing.
Should comprise first optical group, second optical group and detector based on zoom and the focusing system of MOEMS; First optical group comprises first deformable mirror and first catoptron, second optical group comprises first positive lens, first negative lens, first cemented doublet, second deformable mirror, second negative lens, second catoptron, second cemented doublet, second positive lens, the 3rd negative lens, system's optical element from the object side to the image side is followed successively by first deformable mirror of first optical group, first catoptron of first optical group, first positive lens of second optical group, first negative lens of second optical group, first cemented doublet of second optical group, second deformable mirror of second optical group, second negative lens of second optical group, second catoptron of second optical group, second cemented doublet of second optical group, second positive lens of second optical group, the 3rd negative lens of second optical group, wherein the optical axis included angle of the normal of first deformable mirror of first optical group and object space incident ray equals 11 °, the angle of first deformable mirror normal of first optical group and the first catoptron normal of first optical group equals 45 °, the angle of first catoptron normal of first optical group and second optical group, the first positive lens optical axis equals 56 °, first positive lens optical axis of second optical group and the first negative lens optical axis of second optical group are parallel and concentric, first negative lens optical axis of second optical group and the first cemented doublet optical axis of second optical group are parallel and concentric, the second deformable mirror centre normal angle of the first cemented doublet optical axis of second optical group and second optical group equals 45 °, second deformable mirror centre normal of second optical group and the second negative lens optical axis included angle of second optical group equal 45 °, second negative lens optical axis of second optical group and the second catoptron normal angle of second optical group equal 45 °, second catoptron normal of second optical group and the second cemented doublet optical axis included angle of second optical group equal 45 °, second cemented doublet optical axis of second optical group and the second positive lens optical axis of second optical group are parallel and concentric, second positive lens optical axis of second optical group and the 3rd negative lens optical axis of second optical group are parallel and concentric, the 3rd negative lens optical axis and the detector centre normal of second optical group are parallel and concentric, be reflected from first deformable mirror of object space incident ray in first optical group, again in the reflection of the first catoptron place of first optical group, the light of reflection enters second optical group, transmission is by second optical group, first positive lens, transmission is by second optical group, first negative lens, transmission is by second optical group, first cemented doublet, after second optical group, the second deformable mirror place is reflected, transmission is by second optical group, second negative lens, after second optical group, the second catoptron place is reflected, transmission is by second optical group, second cemented doublet, transmission is by second optical group, second positive lens, transmission arrives detector at last by second optical group the 3rd negative lens;
Effective benefit of the present invention is:
1, varifocal optical system compact conformation, volume is small and exquisite;
2, the varifocal optical system aberration correction is good, system's detection accuracy height, good stability.
3, varifocal optical system has very big zoom ratio, and the target detection variable range can be sought target in a big way, and realizes accurately locating fast;
Description of drawings
Fig. 1 is based on zoom and the focusing system structural representation of MOEMS;
Fig. 2 optical system diagram of the present invention;
Wherein: 1-first optical group, 2-second optical group, 3-first deformable mirror, 4-second deformable mirror, the 7-detector, first positive lens of 8-second optical group, first negative lens of 9-second optical group, first cemented doublet of 10-second optical group, second negative lens of 11-second optical group, first catoptron of 12-second optical group, second cemented doublet of 13 second optical group, second positive lens of 14-second optical group, the 3rd negative lens of 15-second optical group, the catoptron of 16-first optical group.
Embodiment
The optical focal length of first optical group and second optical group changes among the present invention, is to realize by the radius-of-curvature that changes first deformable mirror 3 and second deformable mirror 4, as Fig. 1.The zoom and the focusing system that are used for target detection among the present invention, it is constant that the axle of two optical group is gone up the interval in zoom and the focusing process, and the interval between first constituent element and the second constituent element internal optical component is constant, and system's focal length of first constituent element and second constituent element is variable.The object space incident ray enters first optical group 1 and second optical group 2 in order respectively among the present invention, in detector 7 places imaging.
The zoom and the focusing system that are used for target detection among the present invention, the axle of two optical group is gone up constant at interval in zoom and the focusing process, interval between first constituent element and the second constituent element internal optical component is constant, and system's focal length of first constituent element and/or second constituent element is variable.
Zoom and focusing system related among the present invention adopt two deformable mirrors.
The optical focal length of first optical group and second optical group changes among the present invention, is to realize by the face type that changes first deformable mirror 3 and second deformable mirror 4.
Zoom and focusing system related among the present invention adopt two deformable mirrors, and wherein first optical group 1 has 3, one catadioptric optical elements of one first deformable mirror or optical system 5, the second optical group 2 that one second deformable mirror 4 is arranged.
Related zoom and focusing system structure among the present invention, its detector 7 is transfixion in zoom and focusing process, and the micromirror position by on the control deformable mirror diverse location can change the corrugated shape by its light wave.Deformable mirror is being applied in the target detector, and when realizing zoom and focusing function, Design for optical system need be considered three constraints.First is the bore of deformable mirror and the position in system, with f/number and the dimensional requirement that satisfies system.Aperture diaphragm is at system's diverse location, and deformable mirror corrects aberration ability is variant, and the deformable mirror bore requires also different, therefore need the position of aperture diaphragm be optimized, to reach optimal system performance.Second is the focal length variations scope of deformable mirror, to satisfy system's zoom ratio.The micro mirror shift motion of deformable mirror very little (positive and negative 10 microns), the focal length variations of introducing is limited in scope, and needs the focusing variation range to design, to increase system's zoom ratio.The 3rd is the position of deformable mirror in system and the incident angle of light, proofreaies and correct to realize system aberration.The present invention controls above constraint.
Zooming range is 70～300 millimeters, and detector is 1/3 inch CCD, and the f/number of optical system when 70 millimeters of focal lengths is 4.6, and zoom system, pancreatic system viewing angle when 70 millimeters of focal lengths is ± 2.45 °, and viewing angle is ± 0.57 ° during 300 millimeters of focal lengths.8 meters of focusing ranges～infinite, infinite apart from the time can be to target localization, can adjust attitude in real time 8 meters object observing forms in the motion in the scope of infinite distance.
Optical system can realize 70～300 millimeters zoom and 8 meters～infinite focusing in present embodiment, in 70～300 millimeters zooming range, the aberration of optical system is realized proofreading and correct.
Aperture diaphragm is positioned at first optical group 1 in present embodiment, to reduce the physical dimension of zoom system, pancreatic system.Experiment showed, that when the f/number of system is constant when aperture diaphragm was positioned at second optical group 2, the optical element diameter in first optical group and second optical group before the aperture diaphragm was aperture diaphragm 1.5～2 times when being positioned at first optical group 1.
Zoom and focusing system in present embodiment based on deformable mirror, catoptron normal and optical axis included angle θ in first optical group
R1The normal of first deformable mirror and optical axis included angle θ in first optical group
R2, its angle closes and is:
θ
R1+θ
R2＝45° (2)
When the range of deformable mirror micro mirror was positive and negative 10 microns in present embodiment, the light deflection angle of the meridian ellipse of system and sagittal surface was limited, thereby had guaranteed the system aberration correction, that is:
θ
R2＜＝15° (3)
In present embodiment second optical group a slice catoptron and a deformable mirror are arranged all, wherein the light of second optical group through the reflection of second deformable mirror, through first mirror reflects of second optical group, arrives detector earlier more at last; Utilize deformable mirror can realize the characteristic of micro-curved transition and then change system focal length, each component structure parameter in the overall optical system has been done rational setting, aberration balancing and system optimization, make the optical system zoom ratio reach 4.3.During 70 millimeters of examples of implementation 1 system's focal lengths, the paraxial focal length of first deformable mirror is 703.63 millimeters, the paraxial focal length of second deformable mirror is-2294.95 millimeters, during 300 millimeters of system's focal lengths, the paraxial focal length of first deformable mirror is 1288.39 millimeters, and the paraxial focal length of second deformable mirror is-3410.27 millimeters; During 70 millimeters of examples of implementation 2 system's focal lengths, the paraxial focal length of first deformable mirror is 703.35 millimeters, the paraxial focal length of second deformable mirror is 755.01 millimeters, during 300 millimeters of system's focal lengths, the paraxial focal length of first deformable mirror is 1260.19 millimeters, the paraxial focal length of second deformable mirror is 4510.2 millimeters, and amount of bias is in the parameter area of commercial deformable mirror.
First deformable mirror 3 is confirmed as aperture diaphragm, and the deformable minute surface type is made as aspheric surface, and then deformable mirror can be realized better correction in optical system entrance pupil position to system aberrations such as spherical aberration, comas.
Claims (1)
1. based on zoom and the focusing system of MOEMS, comprise first optical group, second optical group and detector; First optical group comprises first deformable mirror and first catoptron, second optical group comprises first positive lens, first negative lens, first cemented doublet, second deformable mirror, second negative lens, second catoptron, second cemented doublet, second positive lens, the 3rd negative lens, system's optical element from the object side to the image side is followed successively by first deformable mirror of first optical group, first catoptron of first optical group, first positive lens of second optical group, first negative lens of second optical group, first cemented doublet of second optical group, second deformable mirror of second optical group, second negative lens of second optical group, second catoptron of second optical group, second cemented doublet of second optical group, second positive lens of second optical group, the 3rd negative lens of second optical group, it is characterized in that: the normal of first deformable mirror of first optical group and the optical axis included angle of object space incident ray equal 11 °, the angle of first deformable mirror normal of first optical group and the first catoptron normal of first optical group equals 45 °, the angle of first catoptron normal of first optical group and second optical group, the first positive lens optical axis equals 56 °, first positive lens optical axis of second optical group and the first negative lens optical axis of second optical group are parallel and concentric, first negative lens optical axis of second optical group and the first cemented doublet optical axis of second optical group are parallel and concentric, the second deformable mirror centre normal angle of the first cemented doublet optical axis of second optical group and second optical group equals 45 °, second deformable mirror centre normal of second optical group and the second negative lens optical axis included angle of second optical group equal 45 °, second negative lens optical axis of second optical group and the second catoptron normal angle of second optical group equal 45 °, second catoptron normal of second optical group and the second cemented doublet optical axis included angle of second optical group equal 45 °, second cemented doublet optical axis of second optical group and the second positive lens optical axis of second optical group are parallel and concentric, second positive lens optical axis of second optical group and the 3rd negative lens optical axis of second optical group are parallel and concentric, the 3rd negative lens optical axis and the detector centre normal of second optical group are parallel and concentric, be reflected from first deformable mirror of object space incident ray in first optical group, again in the reflection of the first catoptron place of first optical group, the light of reflection enters second optical group, transmission is by second optical group, first positive lens, transmission is by second optical group, first negative lens, transmission is by second optical group, first cemented doublet, after second optical group, the second deformable mirror place is reflected, transmission is by second optical group, second negative lens, after second optical group, the second catoptron place is reflected, transmission is by second optical group, second cemented doublet, transmission is by second optical group, second positive lens, transmission arrives detector at last by second optical group the 3rd negative lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810119430XA CN101349809B (en) | 2008-08-29 | 2008-08-29 | System for zooming and focusing based on MOEMS |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810119430XA CN101349809B (en) | 2008-08-29 | 2008-08-29 | System for zooming and focusing based on MOEMS |
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| CN101349809A CN101349809A (en) | 2009-01-21 |
| CN101349809B true CN101349809B (en) | 2010-09-29 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108830216B (en) * | 2018-06-11 | 2021-11-16 | 北京理工大学 | Continuous zooming target identification system and method with adjustable view field |
| CN111352211A (en) * | 2018-12-23 | 2020-06-30 | 辽宁中蓝电子科技有限公司 | Small-head high-resolution lens |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1466001A (en) * | 2002-06-24 | 2004-01-07 | 中国科学院光电技术研究所 | Ultraviolet light projection photoetching objective lens with self-adaption total reflection pole |
| CN1664650A (en) * | 2005-03-14 | 2005-09-07 | 中国科学院光电技术研究所 | Double wave front calibrator self-adaptive optical system |
| CN1941523A (en) * | 2005-09-30 | 2007-04-04 | 中国科学院物理研究所 | Wave front-distortion laser device in corrected resonance cavity |
-
2008
- 2008-08-29 CN CN200810119430XA patent/CN101349809B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1466001A (en) * | 2002-06-24 | 2004-01-07 | 中国科学院光电技术研究所 | Ultraviolet light projection photoetching objective lens with self-adaption total reflection pole |
| CN1664650A (en) * | 2005-03-14 | 2005-09-07 | 中国科学院光电技术研究所 | Double wave front calibrator self-adaptive optical system |
| CN1941523A (en) * | 2005-09-30 | 2007-04-04 | 中国科学院物理研究所 | Wave front-distortion laser device in corrected resonance cavity |
Non-Patent Citations (1)
| Title |
|---|
| CN 1466001 A,全文. |
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