CN1873538A - 检查方法及采用该检查方法的液晶显示装置的制造方法 - Google Patents

检查方法及采用该检查方法的液晶显示装置的制造方法 Download PDF

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Publication number
CN1873538A
CN1873538A CNA2006100792720A CN200610079272A CN1873538A CN 1873538 A CN1873538 A CN 1873538A CN A2006100792720 A CNA2006100792720 A CN A2006100792720A CN 200610079272 A CN200610079272 A CN 200610079272A CN 1873538 A CN1873538 A CN 1873538A
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CN
China
Prior art keywords
pattern
area
exposure
seam
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006100792720A
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English (en)
Chinese (zh)
Inventor
山下敏广
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
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Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of CN1873538A publication Critical patent/CN1873538A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
CNA2006100792720A 2005-06-01 2006-04-25 检查方法及采用该检查方法的液晶显示装置的制造方法 Pending CN1873538A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005161038 2005-06-01
JP2005161038A JP2006337631A (ja) 2005-06-01 2005-06-01 検査方法及びこれを用いた液晶表示装置の製造方法

Publications (1)

Publication Number Publication Date
CN1873538A true CN1873538A (zh) 2006-12-06

Family

ID=37484041

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006100792720A Pending CN1873538A (zh) 2005-06-01 2006-04-25 检查方法及采用该检查方法的液晶显示装置的制造方法

Country Status (5)

Country Link
JP (1) JP2006337631A (ko)
KR (1) KR100812322B1 (ko)
CN (1) CN1873538A (ko)
SG (1) SG127790A1 (ko)
TW (1) TW200643582A (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102243382A (zh) * 2010-05-13 2011-11-16 上海天马微电子有限公司 液晶显示装置及其制作方法、检测及改善装置
CN101770096B (zh) * 2008-12-30 2012-05-23 塔工程有限公司 阵列测试装置和测量其基板上点位置的方法
CN101769878B (zh) * 2008-12-30 2012-07-04 塔工程有限公司 阵列测试装置、测量其基板的点位置的方法以及测量由照相机组件拍摄的点坐标的方法
CN109856930A (zh) * 2017-11-30 2019-06-07 京东方科技集团股份有限公司 对准标记、基板及其制作方法、曝光对准方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI613494B (zh) 2016-08-23 2018-02-01 友達光電股份有限公司 標記畫素單元、應用其之顯示裝置以及製作顯示裝置的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6077756A (en) * 1998-04-24 2000-06-20 Vanguard International Semiconductor Overlay target pattern and algorithm for layer-to-layer overlay metrology for semiconductor processing
JP2000277425A (ja) * 1999-03-26 2000-10-06 Nec Corp 電子線描画方法とその装置
JP3348783B2 (ja) * 1999-07-28 2002-11-20 日本電気株式会社 重ね合わせ用マーク及び半導体装置
JP4635354B2 (ja) * 2001-03-07 2011-02-23 株式会社ニコン 露光方法及び継ぎ誤差計測方法並びにデバイス製造方法
ATE286284T1 (de) * 2001-05-14 2005-01-15 Infineon Technologies Ag Verfahren zu durchführung einer ausrichtungsmessung von zwei mustern in unterschiedlichen schichten eines halbleiterwafers
US7190823B2 (en) * 2002-03-17 2007-03-13 United Microelectronics Corp. Overlay vernier pattern for measuring multi-layer overlay alignment accuracy and method for measuring the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101770096B (zh) * 2008-12-30 2012-05-23 塔工程有限公司 阵列测试装置和测量其基板上点位置的方法
CN101769878B (zh) * 2008-12-30 2012-07-04 塔工程有限公司 阵列测试装置、测量其基板的点位置的方法以及测量由照相机组件拍摄的点坐标的方法
CN102243382A (zh) * 2010-05-13 2011-11-16 上海天马微电子有限公司 液晶显示装置及其制作方法、检测及改善装置
CN102243382B (zh) * 2010-05-13 2014-12-31 上海天马微电子有限公司 液晶显示装置及其制作方法、检测及改善装置
CN109856930A (zh) * 2017-11-30 2019-06-07 京东方科技集团股份有限公司 对准标记、基板及其制作方法、曝光对准方法

Also Published As

Publication number Publication date
KR20060125476A (ko) 2006-12-06
KR100812322B1 (ko) 2008-03-10
TW200643582A (en) 2006-12-16
JP2006337631A (ja) 2006-12-14
SG127790A1 (en) 2006-12-29

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