CN1865097B - Substrate conveying device - Google Patents
Substrate conveying device Download PDFInfo
- Publication number
- CN1865097B CN1865097B CN2006100798657A CN200610079865A CN1865097B CN 1865097 B CN1865097 B CN 1865097B CN 2006100798657 A CN2006100798657 A CN 2006100798657A CN 200610079865 A CN200610079865 A CN 200610079865A CN 1865097 B CN1865097 B CN 1865097B
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- substrate
- mentioned
- roller
- carrying roller
- carrying
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- 239000000758 substrate Substances 0.000 title claims description 242
- 230000008093 supporting effect Effects 0.000 claims abstract description 41
- 230000008859 change Effects 0.000 claims abstract description 10
- 230000007246 mechanism Effects 0.000 claims description 26
- 230000001141 propulsive effect Effects 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 26
- 238000011144 upstream manufacturing Methods 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 235000014347 soups Nutrition 0.000 description 9
- 238000005406 washing Methods 0.000 description 8
- 239000003814 drug Substances 0.000 description 7
- 238000001035 drying Methods 0.000 description 6
- 238000009987 spinning Methods 0.000 description 6
- 230000007723 transport mechanism Effects 0.000 description 5
- 238000004506 ultrasonic cleaning Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/11—Roller frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
- B65G17/30—Details; Auxiliary devices
- B65G17/48—Controlling attitudes of load-carriers during movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
- B65G23/02—Belt- or chain-engaging elements
- B65G23/04—Drums, rollers, or wheels
- B65G23/08—Drums, rollers, or wheels with self-contained driving mechanisms, e.g. motors and associated gearing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The provided conveying device comprises a roller supporting device (22) to rotary support the roller (21) along its rotating axis (211) extended toward a drive shaft (23), which endows the roller (21) necessary incline for conveying. This invention can change the inclined pose of plate during conveying.
Description
Technical field
The present invention relates to a kind of base board delivery device that comes the conveyance substrate by a plurality of carrying rollers arranged side by side.
Background technology
In the past, known such base board delivery device, it well scatters from substrate surface in order to make the conditioning fluid of substrate surface being supplied with when the processing substrate, makes substrate bevelled posture come the conveyance substrate with relative processing substrate portion.As the substrate board treatment that has adopted this base board delivery device, such substrate board treatment is for example arranged, shown in following patent documentation 1, when receiving the substrate of flat-hand position, square end portion on the direction vertical with the substrate transferring direction in substrate transferring path moves to the top, thereby make substrate change to inclination attitude, downstream in processing substrate portion, square end portion on the direction vertical with the substrate transferring direction in substrate transferring path moves downwards, thereby makes substrate get back to flat-hand position.
In addition, in following patent documentation 2, such base plate cleaning device is disclosed, promptly, the substrate transferring roller has the maintenance roller and the anvil roll at the longitudinal direction two ends that are provided in S. A., and S. A. sets anvil roll is made the mode that keeps the roller side to become the top be tilted as fulcrum.In this base plate cleaning device, in the unit of the upstream side that is provided in the substrate cleaning part for the posture that changes substrate, a plurality of substrate transferring rollers are along with the substrate cleaning part near substrate transferring direction downstream, the angle of inclination that forms relative horizontal direction gently becomes the bevelled state from 0 ° to 15 °, and, be provided in a plurality of substrate transferring rollers of unit in the downstream of substrate cleaning part, form the angle of inclination and gently become the bevelled state from 0 ° to 15 °.Thus, the posture of substrate is slowly tilted to the substrate cleaning part, make the posture of substrate gently be returned to level when cleaning when finishing.
Patent documentation 1:JP spy opens flat 9-155306 communique.
Patent documentation 2:JP opens flat 5-79976 communique in fact.
Yet; the substrate board treatment of above-mentioned patent documentation 1 record; in order to change the posture of substrate; must after receiving substrate, suspend under the state of substrate transferring; make the one-sided rising in substrate transferring path or the action of decline; so before the substrate that carries out posture changing is taken out of from this substrate transferring path, can not conveyance next substrate, thus can not carry out posture changing continuously to a plurality of substrates.This becomes the major cause of the productive output raising that hinders substrate board treatment.
In addition, base plate cleaning device for above-mentioned patent documentation 2 records, because constitute each carrying roller in substrate transferring path, be anvil roll to be made the mode that keeps the roller side to become the top as fulcrum with S. A., make the angle of inclination gently tilt to set from 0 ° to 15 ° or from 15 ° to 0 °, so the anvil roll side of the longitudinal direction of the S. A. of carrying roller with keep roller side, the interval difference between the adjacent carrying roller.Promptly, shown in the skeleton diagram of Fig. 9, in anvil roll 6 sides that become the bevelled fulcrum, the interval S3 between the substrate transferring roller is even, and above the substrate transferring roller of maintenance roller 7 sides between interval S4 correspondingly become big with the angle of inclination of relative adjacent carrying roller.Therefore, anvil roll 6 sides of the longitudinal direction of the S. A. of carrying roller with keep roller 7 sides, the interval difference between the adjacent substrate transferring roller.Therefore, anvil roll 6 sides in substrate transferring path with keep roller 7 sides, in substrate transferring, can produce velocity contrast, thus can not be on the substrate transferring path straight conveyance substrate.
Summary of the invention
The present invention makes in order to address the above problem, and its purpose is to provide a kind of base board delivery device, and it can not lower the productive output of processing substrate, and straight conveyance substrate on the substrate transferring path changes to inclination attitude with substrate simultaneously.
Base board delivery device of the present invention comes the conveyance substrate by a plurality of carrying rollers arranged side by side, it is characterized in that having:
First supporting device, it is to a carrying roller in a plurality of carrying rollers, to support around its S. A. free rotation mode;
Second supporting device, its in making above-mentioned a plurality of carrying roller, with by the carrying roller of above-mentioned first supporting device supporting adjacent carrying roller around horizontal shaft be rotated and the state that tilted under, this carrying roller is supported to center on its S. A. free rotation mode, wherein, above-mentioned horizontal shaft extends on the direction vertical with the longitudinal direction middle body of the S. A. of above-mentioned a plurality of carrying rollers;
Rotary drive mechanism, it is rotated driving to the above-mentioned a plurality of carrying rollers that comprise two carrying rollers that supported by above-mentioned first supporting device and second supporting device,
By the carrying roller that drives by the rotation of above-mentioned rotary drive mechanism substrate is carried out conveyance, between two carrying rollers that above-mentioned first supporting device and second supporting device are supported, move this substrate, change the inclination attitude of this substrate.
According to this structure, because second supporting device centers on towards the horizontal shaft that extends perpendicular to the direction of the longitudinal direction middle body of its S. A. carrying roller and rotates and support carrying roller with the bevelled state, thereby give the inclination that carrying roller must have for the inclination attitude that changes substrate to it, so the interval between these adjacent carrying rollers is distolateral identical and do not have difference a square end side of the longitudinal direction of the S. A. of carrying roller and the opposing party.Therefore, a square end side and the opposing party in the direction vertical with the substrate transferring direction in substrate transferring path are distolateral, substrate transferring speed is identical, does not produce velocity contrast, so can be on the substrate transferring path that is made of above-mentioned a plurality of carrying rollers straight conveyance substrate.In addition, the substrate transferring path is knee-action not, owing to the inclination of giving by second supporting device to each carrying roller, the inclination attitude that makes the substrate in the conveyance slowly changes, therefore thereby the inclination attitude of a plurality of substrates of change that do not need to stop substrate transferring and can be continuous can not lower the productive output of processing substrate.
In addition, aforesaid base board delivery device, it is characterized in that, above-mentioned rotary drive mechanism rotates around its S. A. by above-mentioned horizontal shaft, and by being installed in the permanent magnet gear on the above-mentioned horizontal shaft, from the middle body of each S. A. of above-mentioned a plurality of carrying rollers, respectively above-mentioned a plurality of carrying rollers are transmitted rotary driving forces.
In this structure, above-mentioned horizontal shaft becomes and is used for giving the bevelled center of turn to carrying roller, utilize this horizontal shaft that permanent magnet gear is installed, transmit rotary driving force from the middle body of each S. A. of carrying roller to each carrying roller, so do not need other new spaces to be provided for sending the mechanism of the rotary driving force of spinning driver train.In addition, by using permanent magnet gear, the rotary driving force of spinning in future driver train is not sent to carrying roller because can not produce friction between member, can be maintained in the clean condition so can not produce dust etc. and transmit this rotary driving force.
In addition, aforesaid base board delivery device, it is characterized in that, above-mentioned rotary drive mechanism rotates around its S. A. by above-mentioned horizontal shaft, and by the driving band between each S. A. that is hung on above-mentioned horizontal shaft and above-mentioned a plurality of carrying rollers, from the middle body of each S. A. of above-mentioned a plurality of carrying rollers, respectively above-mentioned a plurality of carrying rollers are transmitted rotary driving forces.
According to this structure, above-mentioned horizontal shaft becomes and is used for giving the bevelled center of turn to carrying roller, utilize this horizontal shaft, and hang driving band between each S. A. of carrying roller, transmit rotary driving force from the middle body of each S. A. of carrying roller to each carrying roller, so do not need other new spaces to be provided for sending the mechanism of the rotary driving force of spinning driver train.In addition, because transmit propulsive effort by above-mentioned driving band, can do one's utmost to be reduced in the friction that produces between the member, and in the future the rotary driving force of spinning driver train is sent to carrying roller, can transmit this rotary driving force with clean conditions so can not produce dust etc.
In addition, aforesaid base board delivery device is characterized in that, on each S. A. of above-mentioned a plurality of carrying rollers, desired location on its longitudinal direction is provided with free roller, and this free roller does not send from the propulsive effort of above-mentioned rotary drive mechanism and rotates freely and support aforesaid substrate.
In this structure, even large-scale substrate bends in the conveyance of carrying roller, because above-mentioned free roller contact substrate surface and supporting substrates, thereby can lower from the loss of the rotary driving force of carrying roller when substrate transmits rotary driving force, and more failure-free make identical with the distolateral substrate transferring speed of a square end side of the vertical direction of the substrate transferring direction in substrate transferring path and other party, thereby more failure-free straight carry out substrate transferring on the substrate transferring path.
In addition, aforesaid base board delivery device is characterized in that, is set at the free roller on the S. A. of above-mentioned each carrying roller, with respect to the free roller that is set on the adjacent above-mentioned carrying roller, makes position on the S. A. longitudinal direction different and set.
In this structure, make free roller be above-mentioned irregular configuration, during curved substrate in conveyance, can enough less supporting-point this substrate is supported and keep substrate crooked slightly state, thereby can make substrate cooperate carrying roller more.
According to above-mentioned the present invention, the carrying roller that second supporting device is supported centers on above-mentioned horizontal shaft rotation and tilts, thereby make identical with the distolateral substrate transferring speed of a square end side of the vertical direction of the substrate transferring direction in substrate transferring path and other party, therefore can be on the substrate transferring path straight conveyance substrate.Substrate transferring path knee-action not in addition, owing to the inclination of giving by second supporting device to each carrying roller, the inclination attitude that makes the substrate in the conveyance slowly changes, thereby do not need to stop the conveyance of substrate and the inclination attitude of a plurality of substrates of change that can be continuous, thereby can not lower the productive output of processing substrate.
According to above-mentioned the present invention, because utilize the above-mentioned horizontal shaft of the centre of gration that becomes carrying roller permanent magnet gear is installed, transmit rotary driving force to each carrying roller, so can subdue the needed space of the mechanism that is used to be provided with the rotary driving force that sends the spinning driver train.In addition, by using permanent magnet gear, can between member, not produce dust and be maintained in the clean condition and transmit this rotary driving force.
According to above-mentioned the present invention, utilization becomes the above-mentioned horizontal shaft of the center of turn of carrying roller, between each S. A. of this horizontal shaft and carrying roller, hang driving band, thereby transmit rotary driving force to each carrying roller, so can subdue the needed space of the mechanism that is used to be provided with the rotary driving force that sends the spinning driver train.In addition,, can very lower the friction that between member, produces, transmit this rotary driving force with clean conditions owing to transmit propulsive effort by above-mentioned driving band.
According to above-mentioned the present invention, even large-scale substrate bends in the conveyance of carrying roller, because above-mentioned free roller contact substrate surface and supporting substrates, thereby can lower from the loss of the rotary driving force of carrying roller when substrate transmits rotary driving force, and more failure-free make identical with the distolateral substrate transferring speed of a square end side of the vertical direction of the substrate transferring direction in substrate transferring path and the opposing party, thereby more failure-free straight carry out substrate transferring on the substrate transferring path.
According to above-mentioned the present invention, can support with the state that less supporting-point roughly keeps having taken place in the conveyance slight curvature of crooked substrate, thereby can make substrate adapt to carrying roller more.
Description of drawings
Fig. 1 is the instruction diagram of substrate board treatment that expression has the base board delivery device of an embodiment of the present invention.
Fig. 2 is the birds-eye view of substrate introduction part.
Fig. 3 is the lateral plan of the substrate introduction part seen from the arrow a direction of Fig. 2.
Fig. 4 is the lateral plan of the substrate introduction part seen from the arrow b direction of Fig. 2.
Fig. 5 is the block diagram of the permanent magnet gear of expression permanent magnet gear of rotating driveshaft and carrying roller.
Fig. 6 is the block diagram of inclination attitude of schematically representing to constitute the carrying roller of substrate introduction part.
Fig. 7 is the lateral plan of the inclination attitude of each carrying roller of expression.
Fig. 8 is the figure that other embodiments of the mechanism that drives carrying roller are rotated in expression.
Fig. 9 is the block diagram of inclination attitude of schematically representing the carrying roller of substrate transferring mechanism in the past.
The specific embodiment
Below, with reference to the base board delivery device of description of drawings an embodiment of the present invention.Fig. 1 is the instruction diagram of substrate board treatment that expression has the base board delivery device of an embodiment of the present invention.As shown in the drawing, substrate board treatment 1 series connection is equipped with: receive substrate introduction part 2, inside from the substrate B of preceding operation have substrate B the processing space processing equipment main body 3 and will handle after substrate B be handed off to the substrate leading-out portion 4 of operation afterwards.Substrate board treatment 1 is according to the order conveyance substrate of substrate introduction part 2, processing equipment main body 3 and substrate leading-out portion 4, and substrate B is implemented predetermined process.This substrate introduction part 2 or substrate leading-out portion 4 are embodiments of base board delivery device of the present invention.
Substrate B in the past operation moves into substrate introduction parts 2 by the upstream side that is made of conveyer or manipulator etc. the mechanism 20 that continues, and then the driving by transport mechanism 5 imports substrate B to handling apparatus body 3 from substrate introduction part 2, implements predetermined process.After this was handled, substrate B was shifted into substrate leading-out portion 4, was exported to next operation in the downstream end of substrate leading-out portion 4 by the downstream that is made of conveyer or manipulator etc. the mechanism 40 that continues.
In processing equipment main body 3, be provided with the transport mechanism 5 that constitutes by roller-belt.Each the roller 51 relative horizontal direction that constitutes transport mechanism 5 are obliquely installed, and its axle center is positioned at respect to the conveyance direction of substrate B and vertical face.The angle of inclination of each roller 51 in the processing equipment main body 3 all is set at same angle, thereby forms substrate transferring path 5a.Thus, substrate B in processing equipment 3 with inclination attitude on the 5a of substrate transferring path by conveyance, be subjected to predetermined process simultaneously.
In the present embodiment, form above-mentioned processing equipment main body 3 like this, that is, series connection is equipped with medicine and washes portion 31, washing portion 32 and drying section 37.Medicine is washed 31 pairs of pros and cons by the substrate B of transport mechanism 5 conveyances of portion and is supplied with the soup of stipulating, cleans (medicine is washed) substrate B.Wash portion 31 at medicine and be equipped with soup supply nozzle 31b up and down, by soup supply nozzle 31b ejection soup up and down, to the pros and cons supply of chemical of substrate B in the mode that clips substrate transferring path 5a.Under the situation that this soup exists, handle on the 5a of substrate transferring path, being carried out scratch brushing (brushing) with a plurality of brush 31f, thereby be cleaned by the pros and cons of the substrate B of conveyance.
Supply to the soup on the substrate B, promptly contain the soup of pollutants, flow down along the dip plane of substrate B owing to cleaning base plate B.Thus, can the high cleanup action of performance in short scavenging period.And, because flow down fast,, can also lower the consumption of soup so can lower the soup amount of having of substrate B along the dip plane of substrate B, can carry out good control in addition and do.
Substrate B after 32 pairs of above-mentioned medicines by transport mechanism 5 conveyances of washing portion are washed supplies with rinse water, thereby cleans (washing).The inside of washing portion 32 is divided into low-pressure water supply unit 33, high pressure water supply unit 34, ultrasonic cleaning water supply unit 35 and pure water supply unit 36.The substrate B that washes portion 31 and derived from medicine imports low-pressure water supply unit 33, high pressure water supply unit 34, ultrasonic cleaning water supply unit 35 and pure water supply unit 36 in turn, after the washing that this substrate is implemented regulation is handled, derives to drying section 37.
Low-pressure water supply unit 33 has the low-pressure water supply nozzle 33a that sets up and down in the mode that clips substrate transferring path 5a, high pressure water supply unit 34 has the high pressure water supply nozzle 34a. that sets equally in addition, be provided with super sonic water supply nozzle 35a at ultrasonic cleaning water supply unit 35, this super sonic water supply nozzle 35a is with the surface of ejiction opening towards the substrate B that passes through substrate transferring path 51a, and pure water supply unit 36 is provided with the pure water supply nozzle 36a. that sets up and down in the mode that clips substrate transferring path 5a
In the washing portion 32 that constitutes by a series of like this low-pressure water supply unit 33, high pressure water supply unit 34, ultrasonic cleaning water supply unit 35 and pure water supply unit 36, by bevelled roller 51 in the face vertical with substrate B conveyance direction, with bevelled posture conveyance substrate B, thus at each supply unit 33,34,35,36, the water of the cleaning usefulness that substrate B is supplied with flows down the dip plane of substrate B apace, thereby can only allow minimal rinse water enter the drying section 37 in downstream.
Drying section 37 is used for the dry substrate B that derives from the pure water supply unit 36 of washing portion 32, has a pair of air knife 37b with the mode upper and lower settings that clips substrate transferring path 5a in inside.In this drying section 37, same with among the medicine washing trough 31a, roller 51 with the vertical face of the conveyance direction of substrate B in relative horizontal direction tilt, control that can be good is dried attached to the rinse water on the substrate B thus.The substrate B that is through with in the processing of drying section 37 is taken out of substrate leading-out portion 4, derives to next operation by the downstream mechanism 40 that continues.
Below, describe at substrate introduction part 2.Fig. 2 is the birds-eye view of substrate introduction part 2, Fig. 3 is the lateral plan from the being seen substrate introduction part 2 of arrow a direction of Fig. 2, Fig. 4 is the lateral plan from the being seen substrate introduction part 2 of arrow b direction of Fig. 2, Fig. 5 is the block diagram of the permanent magnet gear 215 of expression permanent magnet gear 231 of axle drive shaft 23 and carrying roller 21, Fig. 6 is the block diagram of inclination attitude of schematically representing to constitute the carrying roller 21 of substrate introduction part 2, and Fig. 7 is the lateral plan of the inclination attitude of each carrying roller 21 of expression.In addition, figure 3 illustrates, and omit the diagram of other different carrying rollers 21 of angle of inclination from the carrying roller 21 of the being seen front side of the arrow a direction of Fig. 2 and roller supporting device 22 etc.
As mentioned above, substrate introduction part 2 will continue substrate B that mechanism 20 receives to 3 conveyances of processing equipment main body from upstream side, but be to make from the upstream side substrate B that mechanism 20 receives with flat-hand position that continues, change to the posture that on the vertical direction of relative substrate transferring direction, is inclined relative to horizontal, substrate B is taken out of handle apparatus body 3 then.
In substrate introduction part 2, set a plurality of carrying rollers 21 like this, the S. A. 211 of carrying roller is extended towards the direction vertical with the substrate transferring direction, and make each carrying roller 21 be in the state that relative horizontal surface has predetermined angle of inclination respectively.The S. A. 211 of each carrying roller 21 with the state that around this S. A. 211, can rotate freely by 22 supportings of roller supporting device (first or second supporting device).This roller supporting device 22 has two side wall portion 22a in both ends of the S. A. 211 that supports carrying roller 21 and the bottom surface sections 22b of these side wall portions 22a is installed, bottom surface sections 22b extends on the longitudinal direction of carrying roller 21, between the side wall portion 22a at the longitudinal direction both ends that are located at bottom surface sections 22b respectively, setting up the S. A. 211 of carrying roller 21.These roller supporting devices 22 are installed with above-mentioned predetermined angle of inclination respectively, by these roller supporting devices 22 difference axle supporting carrying rollers 21, make each carrying roller 21 have above-mentioned predetermined angle of inclination, thereby constitute the substrate transferring path.
On the S. A. 211 of each carrying roller 21, be attached with roller 212 at the both ends of its longitudinal direction.S. A. 211 rotates driving by the rotary driving force from rotating driveshaft described later, and roller 212 accompanying rotation axles 211 are around S. A. 211 rotations.At the top mounting substrate B that is located at the roller 212 on each carrying roller 21, the S. A. 211 of carrying roller 21 and roller 212 be towards towards the rotation of the direction of processing equipment main body 3 sides, thus with the substrate B on the roller 212 to 3 conveyances of processing equipment main body.
And then, on the assigned position of S. A. 211 longitudinal directions of each carrying roller 21, even not to be fixed on the S. A. 211 S. A. 211 rotations also the state of idle running free roller 213. is installed promptly, free roller 213 is not accepted the transmission from the propulsive effort of rotating driveshaft, can rotate freely separately respectively with S. A. 211, and to support from the substrate B of below to conveyance on the roller 212 of carrying roller 21. the free roller 213 of each carrying roller 21 is as shown in Figure 2, for example on the carrying roller 21 that has, a free roller is installed in the position near the longitudinal direction central portion of S. A. 211; On another carrying roller 21 adjacent with this carrying roller 21, be separately installed with free roller on each midway location between S. A. 211 both ends and the longitudinal direction central portion. and in each continuous carrying roller 21, also can on the installation site identical, free roller 213. be installed as the whole base plate conveyance path that constitutes by a plurality of carrying rollers 21 with this two carrying rollers 21, when overlooking the configuration of the free roller 213 of finding, as shown in Figure 2, a plurality of free rollers 213 are irregular shape configuration. thus, even large substrate B is crooked in the conveyance of carrying roller 21, each free roller 213 also can touch substrate B lower surface, thereby at crooked slightly state lower support substrate B.
In addition, as mentioned above, become have each carrying roller 21 of bevelled below S. A. 211 end side, between each carrying roller 21, be provided with side deflector roll 214.This side deflector roll 214 has roller 214a and is installed in the S. A. 214b of the bottom of roller 214a, and this S. A. 214b can freely center on this S. A. 214b and be installed in rotatably on the bottom surface sections 22b of above-mentioned roller supporting device 22.On the carrying roller 21 of inclination attitude, when by the substrate B of carrying roller 21 conveyances because of its deadweight when the roller 212 that is in lower side moves, the sidepiece of this substrate B touches side deflector roll 214, side deflector roll 214 restricting substrate B move to the inclination lower side.As mentioned above, side deflector roll 214 can rotate freely owing to S. A. 214b, thus be accompanied by to processing equipment main body 3 direction conveyance substrate B, and to the direction rotation that does not hinder substrate B to move.
In the substantial middle portion of the longitudinal direction of above-mentioned a plurality of carrying rollers 21, thereunder be provided with towards each carrying roller 21 relatively and the rotating driveshaft (horizontal shaft) 23 that vertical direction is extended.This rotating driveshaft 23 is based on being rotated around this S. A. from the rotary driving force of figure CD-ROM drive motor slightly etc.At each carrying roller 21, become this S. A. 23 above position (the substantial middle portion of the longitudinal direction of carrying roller 21), be provided with permanent magnet gear 215.On the other hand, on axle drive shaft 23, each position (lower position of the permanent magnet gear 215 of each carrying roller 21) intersecting with carrying roller 21 is provided with permanent magnet gear 231.Each permanent magnet gear 231 of axle drive shaft 23 is configured in approaching and non-contacting position with the permanent magnet gear 215 of each carrying roller 21.Thus, when axle drive shaft 23 when rotating from the rotary driving force of above-mentioned CD-ROM drive motor etc., transmit rotary driving forces from the permanent magnet gear 231 of axle drive shaft 23 to the permanent magnet gear 215 of carrying roller 21.These CD-ROM drive motor, axle drive shaft 23 and permanent magnet gear 231 are examples of rotary drive mechanism of the present invention.But, not only be defined in the structure that constitutes rotary drive mechanism by CD-ROM drive motor, axle drive shaft 23 and permanent magnet gear 231.
As shown in Figure 5, the permanent magnet gear 215 of carrying roller 21 is at its side face mutual N utmost point band that is provided with permanent magnet and S utmost point band.On the other hand, each permanent magnet gear 231 of axle drive shaft 23 is provided with the N utmost point band and the S utmost point band of permanent magnet at its side face screw-shaped.Because the N utmost point band and the S utmost point band of the N utmost point band of the permanent magnet gear 215 of carrying roller 21 and the permanent magnet gear 231 of S utmost point band relative drive shaft 23, always to maintain the state of attracting each other under the immediate state, so when axle drive shaft 23 rotations, make the N utmost point band of permanent magnet gear 231 of axle drive shaft 23 and S utmost point band in turn when the S. A. direction moves, NS the two poles of the earth band of permanent magnet gear 215 side faces of carrying roller 21 can follow axle drive shaft 23 permanent magnet gear 231 NS the two poles of the earth band and move continuously.Therefore, the permanent magnet gear 215 of carrying roller 21 follow axle drive shaft 23 each permanent magnet gear 231 rotation and rotate, thereby rotary driving force is sent to each carrying roller 21 from axle drive shaft 23.
Then, with reference to Fig. 6 and Fig. 7, the inclination attitude of each carrying roller 21 of substrate introduction part 2 is described. in addition, the following inclination attitude of Shuo Ming each carrying roller 21, for example can be by being endowed like this, promptly, roller supporting device 22. is installed as shown in Figure 6 to the housing of substrate introduction part 2 is attached with the angle of inclination, each carrying roller 21 is provided with like this: from the carrying roller 21 of this substrate transferring direction upstream side, to the carrying roller 21 that becomes the downstream, on the vertical direction of the conveyance direction of relative substrate B, tilt from the posture increase slowly of level, the carrying roller 21 in downstream is provided with such leaning angle, promptly this leaning angle is and the identical leaning angle of each roller 51 in the processing equipment main body 3, or near the leaning angle of the leaning angle of each roller 51, can make on substrate B moves to roller 51 in the processing equipment main body 3 smoothly from substrate introduction part 2. for example, a plurality of carrying rollers 21 are provided with like this: the carrying roller 21 of substrate transferring direction upstream-most position is changed to above-mentioned horizontal direction, the above-mentioned relatively horizontal direction of roller of the downstream position of the substrate transferring direction of processing equipment main body 3 fronts is made as maximum with leaning angle. and these each carrying rollers 21 that sets between two carrying rollers 21 of upstream-most position and downstream position are provided with like this: tilt the gradually angle of regulation of the carrying roller 21 of relative adjacent upstream side, finally becoming the angle of inclination etc. of the carrying roller 21 of downstream position. the roller supporting device 22 that supports a side of these adjacent carrying rollers 21 is examples of first supporting device of the present invention, and the roller supporting device 22 of supporting the opposing party's carrying roller 21 is examples of second supporting device of the present invention.
The leaning angle that above-mentioned each carrying roller 21 is given forms as follows, that is, making each carrying roller 21 is that the center is rotated with the substantial middle position of its longitudinal direction, the state above or below an end that makes each carrying roller 21 be in its longitudinal direction is positioned at.For example, as shown in Figure 7, the longitudinal direction substantial middle position at the bottom surface sections 22b of each roller supporting device 22 can center on axle drive shaft 23 free rotation mode with roller supporting device 22, has been provided with the connecting portion 22c of axle drive shaft 23 built-in.And, make each carrying roller 21 rotate necessary angle of inclination, thereby each roller supporting device 22 is fixed on the housing of substrate introduction part 2 around 23 of axle drive shafts.As shown in Figure 6, utilize such structure, distolateral interval S1 and another distolateral interval S2 that the interval between the adjacent carrying roller 21 is configured to the longitudinal direction of carrying roller 21 is the interval that equates.
Then, describe at substrate leading-out portion 4.Substrate leading-out portion 4 will change to flat-hand position from the substrate B that processing equipment main body 3 is taken out of with inclination attitude, but a plurality of carrying rollers of formation substrate leading-out portion 4 also are to have identical structure with substrate introduction part 2 and each carrying roller 21.Promptly, the leaning angle of giving to each carrying roller of substrate leading-out portion 4 is set like this, middle position with the longitudinal direction of each carrying roller 21 is the center, and the state above or below an end that makes each carrying roller 21 be in longitudinal direction is positioned at is given certain angle to the carrying roller 21 of adjacent upstream side; During interval between more adjacent carrying roller, a distolateral interval of the longitudinal direction of carrying roller 21 is made as the interval that equates with another distolateral interval.But, at substrate leading-out portion 4, each carrying roller is the leaning angle identical with each roller 51 in the processing equipment main body 3 or near the leaning angle of the leaning angle of each roller 51 at the leaning angle of the upstream side of its substrate transferring direction, can make substrate leading-out portion 4 receive substrate B smoothly from the rollers 51 in the processing equipment main body 3; Ensuing a plurality of carrying roller, the relative carrying roller 21 of the adjacent upstream side angle that tilts to stipulate gradually in the moment at the carrying roller 21 that finally arrives downstream position, becomes flat-hand position.
For example, the angle of inclination that each carrying roller of aforesaid substrate introduction part 2 and substrate leading-out portion 4 is given is that the differential seat angle of the carrying roller of adjacent relatively upstream side is lower than 0.3 degree (preferably smaller or equal to 0.28 degree).In addition, 21 of each carrying rollers of this moment be spaced apart 100～200mm but less than 200mm (preferred 190mm), conveyance speed 15m/ branch, the substrate transferring direction length of substrate B is 2400mm.
The substrate introduction part 2 that forms when said structure continues mechanism 20 when receiving the substrate B of flat-hand position from upstream side, along with of the propelling of a plurality of carrying rollers 21 to the 3 direction conveyances of processing equipment main body, gently be the roughly the same inclination in angle of inclination with the substrate transferring path 5a that in processing equipment main body 3, forms, and then the substrate B that will become this inclination attitude is directed to processing equipment main body 3 by a plurality of carrying rollers 51 with the posture changing of substrate B.
In addition, the substrate B of the inclination attitude of taking out of from processing equipment main body 3, roughly still keep this inclination attitude and received by substrate leading-out portion 4, propelling along with the continuous mechanism of the side joint 40 direction conveyances downstream of a plurality of carrying rollers 21, gently the posture changing with substrate B is a flat-hand position, and then the substrate B that will become this flat-hand position is directed to the downstream mechanism 40 that continues.
According to such substrate introduction part 2 or substrate leading-out portion 4, because the substrate transferring speed distolateral with a square end side of the vertical direction of the substrate transferring direction in the substrate transferring path that is made of above-mentioned a plurality of carrying rollers and the opposing party is identical, do not produce velocity contrast, so can be on the substrate transferring path straight conveyance substrate B, follow this conveyance simultaneously, can change the inclination attitude of substrate B. in addition, the action of not rising or descend in the substrate transferring path, because can be by giving the inclination of each carrying roller 21, the inclination attitude of substrate B is changed, thereby need not stop substrate transferring for the posture that changes substrate B, can be continuous a plurality of substrate B are changed to inclination attitude. therefore, can not lower the productive output of processing substrate.
In addition, the present invention is not limited in the structure of above-mentioned embodiment, and various distortion can be arranged.For example, in the above-described embodiment, the permanent magnet gear 231 that can be by axle drive shaft 23 and the permanent magnet gear 215 of carrying roller 21 transmit rotary driving forces from the axle drive shaft 23 of substrate introduction part 2 to each carrying roller 21, but this rotary driving force connecting gear example only.For example, as shown in Figure 8, the driving band 28 of the O ring-type that moves on the side face of axle drive shaft 23 and carrying roller 21 with the rotation that is accompanied by axle drive shaft 23 and carrying roller 21 connects axle drive shafts 23 and each carrying roller 21, and it is also passable by this driving band 28 rotary driving force of moving axis 23 to be sent to each carrying roller 21.The rotary driving force connecting gear of substrate leading-out portion 4 is also identical.
In addition, in the above-described embodiment, be provided with a plurality of carrying rollers 21 in substrate introduction part 2, carrying roller 21 from the carrying roller 21 of the upstream side of substrate transferring direction to downstream, adjacent relatively in turn carrying roller and give certain angle of inclination, thereby can the inclination attitude of the substrate B of conveyance on the substrate transferring path that constitute at a plurality of carrying rollers 21 by these be changed, but the number of carrying roller 21 is not particularly limited.For example, the carrying roller 21 of the substrate transferring direction upstream side that the carrying roller 21 that has is adjacent relatively is endowed certain angle of inclination, even be not endowed inclination with any one other carrying roller 21 relative adjacent carrying roller 21 that are set up in parallel in these carrying rollers 21, can reach purpose of the present invention yet.Each carrying roller of substrate leading-out portion 4 too.
Claims (5)
1. a base board delivery device comes the conveyance substrate by a plurality of carrying rollers arranged side by side, it is characterized in that having:
First supporting device to a carrying roller in a plurality of carrying rollers, supports to center on its S. A. free rotation mode,
Second supporting device, in making above-mentioned a plurality of carrying roller, with by the carrying roller of above-mentioned first supporting device supporting adjacent carrying roller around horizontal shaft be rotated and the state that tilted under, this carrying roller is supported to center on its S. A. free rotation mode, wherein, above-mentioned horizontal shaft extends on the direction vertical with the longitudinal direction middle body of the S. A. of above-mentioned a plurality of carrying rollers
Rotary drive mechanism is rotated driving to the above-mentioned a plurality of carrying rollers that comprise two carrying rollers that supported by above-mentioned first supporting device and second supporting device;
By the carrying roller that drives by the rotation of above-mentioned rotary drive mechanism substrate is carried out conveyance, between two carrying rollers that above-mentioned first supporting device and second supporting device are supported, move this substrate, change the inclination attitude of this substrate.
2. base board delivery device as claimed in claim 1, it is characterized in that, above-mentioned rotary drive mechanism, rotate around its S. A. by above-mentioned horizontal shaft, and by being installed in the permanent magnet gear on the above-mentioned horizontal shaft, from the middle body of each S. A. of above-mentioned a plurality of carrying rollers, respectively above-mentioned a plurality of carrying rollers are transmitted rotary driving forces.
3. base board delivery device as claimed in claim 1, it is characterized in that, above-mentioned rotary drive mechanism, rotate around its S. A. by above-mentioned horizontal shaft, and by the driving band between each S. A. that is hung on above-mentioned horizontal shaft and above-mentioned a plurality of carrying rollers, from the middle body of each S. A. of above-mentioned a plurality of carrying rollers, respectively above-mentioned a plurality of carrying rollers are transmitted rotary driving forces.
4. as any described base board delivery device in the claim 1～3, it is characterized in that, on each S. A. of above-mentioned a plurality of carrying rollers, desired location on its longitudinal direction is provided with free roller, and this free roller does not send from the propulsive effort of above-mentioned rotary drive mechanism and rotates freely and support aforesaid substrate.
5. base board delivery device as claimed in claim 4, it is characterized in that, be set at the free roller on the S. A. of above-mentioned each carrying roller,, make position on the S. A. longitudinal direction different and set with respect to the free roller that is set on the adjacent above-mentioned carrying roller.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005147388 | 2005-05-19 | ||
| JP2005-147388 | 2005-05-19 | ||
| JP2005147388A JP2006321623A (en) | 2005-05-19 | 2005-05-19 | Substrate carrying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1865097A CN1865097A (en) | 2006-11-22 |
| CN1865097B true CN1865097B (en) | 2010-05-12 |
Family
ID=37424276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100798657A Expired - Fee Related CN1865097B (en) | 2005-05-19 | 2006-05-15 | Substrate conveying device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2006321623A (en) |
| KR (1) | KR100801367B1 (en) |
| CN (1) | CN1865097B (en) |
| TW (1) | TW200704305A (en) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009119359A (en) * | 2007-11-14 | 2009-06-04 | Tamura Koki:Kk | Remover of paper dust |
| CN101806674B (en) * | 2009-02-13 | 2011-08-24 | 北京京东方光电科技有限公司 | Glass substrate drawing device |
| JP5088591B2 (en) * | 2010-04-15 | 2012-12-05 | 株式会社ダイフク | Plate-shaped body transfer device |
| CN102506935A (en) * | 2011-10-28 | 2012-06-20 | 东莞市伟创东洋自动化设备有限公司 | Automatic inclining detection device |
| KR101234593B1 (en) * | 2011-11-15 | 2013-02-19 | 김영환 | Transfer unit using roller type wire connecting |
| CN103373586B (en) * | 2012-04-16 | 2015-12-16 | 鸿富锦精密工业（深圳）有限公司 | Conveyer |
| KR101263163B1 (en) | 2012-12-27 | 2013-05-10 | 주식회사 폴리쉘 | Apparatus for guiding producing of forming sheet |
| CN104658963B (en) * | 2013-11-19 | 2018-06-01 | 中芯国际集成电路制造(上海)有限公司 | A kind of cleaning method of perforate |
| CN105511331A (en) * | 2016-02-04 | 2016-04-20 | 罗建义 | Intelligent kitchen system |
| CN105759645A (en) * | 2016-02-04 | 2016-07-13 | 罗建义 | Intelligent kitchen system |
| CN105905582B (en) * | 2016-06-28 | 2019-03-12 | 佛山市冠哲金属实业有限公司 | A kind of collection device of ceiling fan blades |
| CN107799449B (en) * | 2017-10-23 | 2020-01-17 | 武汉华星光电半导体显示技术有限公司 | Substrate carrying clip and substrate carrying method |
| CN108033270A (en) * | 2017-11-23 | 2018-05-15 | 东旭科技集团有限公司 | Glass substrate conveying device and its operating method and glass substrate transmission system |
| CN107934547A (en) * | 2017-12-21 | 2018-04-20 | 东莞科耀机电设备有限公司 | A kind of pcb board material conveyer |
| CN109650011A (en) * | 2019-02-18 | 2019-04-19 | 杭州特翌智物流科技有限公司 | A kind of balance wheel sorting device |
| CN113307028A (en) * | 2021-04-27 | 2021-08-27 | 蔡燕山 | Production equipment of flat-panel display |
| CN113443840B (en) * | 2021-06-30 | 2022-07-29 | 福莱特玻璃集团股份有限公司 | Air knife for glass production and manufacturing |
| CN114424868B (en) * | 2022-01-06 | 2023-11-28 | 浙江亿睿智能装备有限公司 | Automatic shoe storing and taking cabinet capable of saving power |
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| JPS63197222U (en) | 1987-06-10 | 1988-12-19 | ||
| JP2683317B2 (en) * | 1993-11-19 | 1997-11-26 | マルヤス機械株式会社 | Conveyor |
| JPH09278172A (en) * | 1996-04-09 | 1997-10-28 | Murata Mach Ltd | Conveyor system |
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| JP3842565B2 (en) * | 2001-03-06 | 2006-11-08 | マルヤス機械株式会社 | Roller conveyor |
| KR100567137B1 (en) * | 2004-04-09 | 2006-04-05 | 주식회사 디엠에스 | Magnetic transferring apparatus having a cylindrical shape for use in work transferring equipment |
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- 2005-05-19 JP JP2005147388A patent/JP2006321623A/en not_active Abandoned
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- 2006-04-18 TW TW095113746A patent/TW200704305A/en not_active IP Right Cessation
- 2006-05-11 KR KR1020060042398A patent/KR100801367B1/en not_active IP Right Cessation
- 2006-05-15 CN CN2006100798657A patent/CN1865097B/en not_active Expired - Fee Related
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| CN1120511A (en) * | 1994-03-03 | 1996-04-17 | 果树栽培材料公司 | A device for conveying products, in particular fruit, adapted to sort these products as a function of predetermined selection criteria |
| CN1259477A (en) * | 1998-12-18 | 2000-07-12 | 兰佛朗哥·安扎尼 | Automatic loading/unloading products system |
| CN1541915A (en) * | 2003-04-28 | 2004-11-03 | 格鲁博-工厂布克哈特格鲁博E.K. | Device and system for conveying articles |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060120420A (en) | 2006-11-27 |
| CN1865097A (en) | 2006-11-22 |
| TWI309542B (en) | 2009-05-01 |
| JP2006321623A (en) | 2006-11-30 |
| TW200704305A (en) | 2007-01-16 |
| KR100801367B1 (en) | 2008-02-11 |
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Granted publication date: 20100512 Termination date: 20130515 |