KR100567137B1 - Magnetic transferring apparatus having a cylindrical shape for use in work transferring equipment - Google Patents

Abstract

Disclosed is a magnetic driving apparatus of a substrate transfer equipment capable of power transmission by a non-contact method. The magnetic drive device of such a substrate transfer device is rotatably provided inside the bath to connect a plurality of substrate transfer shafts for transferring the substrate to each other, and is rotatably provided inside the bath, and is connected to the drive shaft. A cylindrical inner magnetic part for rotating the drive shaft during transmission, and rotatably provided on the outside of the bath, and having a cylindrical shape is disposed so as to correspond between the inner magnetic part and the partition wall of the bath to correspond to the rotational force from the power source. When it is transmitted to the inner magnetic portion includes an outer magnetic portion for transmitting power in a non-contact manner.

Board, Transfer, Magnetic, Non-Contact, Power Transfer

Description

MAGNETIC TRANSFERRING APPARATUS HAVING A CYLINDRICAL SHAPE FOR USE IN WORK TRANSFERRING EQUIPMENT}

1 is a perspective view showing a substrate transfer device equipped with a magnetic drive device according to a preferred embodiment of the present invention.

Fig. 2 is a partially enlarged view showing on an enlarged scale an “A” portion shown in Fig. 1;

FIG. 3 shows the internal structure of the magnetic drive device shown in FIG.

Fig. 4 is a diagram showing a connection relationship between the drive shaft and the magnetic drive device shown in Fig. 2;

FIG. 5 is a schematic diagram showing a "B-B" cross section shown in FIG.

FIG. 6 shows another embodiment of the magnetic drive device shown in FIG. 3; FIG.

The present invention relates to a magnetic drive device for a substrate transfer device, and more particularly to a magnetic drive device for a substrate transfer device having a cylindrical magnetic drive unit for transmitting power to a drive shaft for transferring a substrate.

In general, substrates used in flat panel displays (FPDs), semiconductor wafers, LCDs, glass for photomasks, etc. are manufactured through processes such as etching, stripping, and rinsing.

In such a substrate processing line, a substrate transfer apparatus is provided to transfer a substrate, and the substrate transfer apparatus typically includes a plurality of transfer shafts for transferring a substrate, a driver for rotating the plurality of transfer shafts, and a power source for driving the drive unit. Is done.

The substrate transfer shaft of the substrate transfer apparatus is located inside the bath, and the power source is located outside the bath.

In addition, a power transmission shaft for transmitting power to the substrate transfer shaft inside the bath from a power source located outside the bath is installed through the bath. At this time, by sealing the one side wall of the bath passing through the power transmission shaft to maintain the airtight state of the bath.

Therefore, the power transmitted from the power source is transferred to the plurality of transfer shafts by the power transmission shafts installed through the partition walls to transfer the substrate.

However, in the case of sealing the penetrating portion in this manner, wear may occur due to the continuous rotation of the drive shaft, which may cause foreign matter such as dust to flow into the work space in the bath, thereby degrading the cleaning efficiency. There is a problem that may be leaked to the outside of the bath through the worn portion.

In addition, in order to compensate for the above-mentioned problems, a technology for transmitting power by a magnetic method without penetrating a partition of the bath is being developed.

In the prior art, the disk plates provided with a plurality of magnetics inside and outside the bath correspond to each other, and the disk plates on one side are rotated so that power is transmitted to the disks provided in the bath.

However, in the case of such a disk method, since the area of the disk facing each other inside and outside of the bath is limited, there is a problem in that there is a limit in the driving torque transmitted so that sufficient power cannot be transmitted.

Accordingly, an object of the present invention is to solve the above-mentioned problems, the object of the present invention is to improve the driving force by increasing the contact area by applying a cylindrical transmission method in place of the disk method of the limited contact area. It is to provide a driving device of the substrate transfer equipment.

In addition, the present invention provides a driving apparatus of a substrate transfer equipment that can prevent generation of foreign matters during rotation of a substrate feed shaft by transmitting power by a non-contact method using a magnetic method.

In addition, since the power is transmitted by a non-contact method without penetrating the partition wall of the bath to provide a driving device of the substrate transfer equipment that can improve the airtightness of the bath.

In order to realize the object of the present invention, the present invention comprises a drive shaft rotatably provided inside the bath to connect a plurality of substrate transfer shafts for transferring the substrate to each other; The upper part is rotatably mounted to the support frame protruding from the inside of the bath, and the rotor is at least one magnet is disposed along the circumferential direction so as to be rotatably provided in the interior of the bath, the worm shaft on the top A worm gear is connected to the worm shaft, and the worm gear is engaged with a worm wheel provided on a drive shaft to rotate the worm shaft when the worm shaft rotates; And rotatably provided on the outside of the bath, and having a cylindrical shape so as to correspond to the inner magnetic part and the partition wall of the bath therebetween so that when the rotational force is transmitted from a power source, the inner magnetic part is powered by a non-contact method. It provides a magnetic drive device of the substrate transfer equipment including an outer magnetic portion for transmitting the.

Hereinafter, with reference to the accompanying drawings will be described in detail the driving device of the substrate transfer equipment according to a preferred embodiment of the present invention.

As shown in FIG. 1, in the substrate transfer apparatus, a plurality of substrate transfer shafts 3 are arranged on the frame 1, and the substrate transfer shafts 3 are connected to each other by the drive shafts 7. When the drive shaft 7 rotates, the substrate transfer shafts 3 rotate to transfer the substrate G in a predetermined direction.

The substrate transfer apparatus is disposed inside the bath 5, and the chemical liquid is sprayed by the processing apparatuses disposed in the bath 5, preferably, the cleaning apparatuses, during the substrate transfer process, so that the substrate G is applied to the substrate G. Cleaning can be done.

In addition, the drive shaft 7 is rotated by the power transmitted from the power source 23 disposed outside the bath (5).

That is, as shown in Figure 2, one end of the plurality of substrate transfer shaft 3 is provided with a first rotary roller 4, the first rotary roller 4 is provided on the drive shaft (7) It is arranged to be spaced apart from the second rotating roller (9). At this time, the drive shaft 7 is rotatably disposed on the side of the frame 1 by the bracket (11).

Then, the first and second rotary rollers (4, 9) is a state in which the repulsive force is applied to each other by being provided with a magnetic, respectively.

Therefore, when the drive shaft 7 is rotated, the second rotary roller 9 is rotated, the first rotary roller 4 magnetically connected to the second rotary roller 9 by the repulsive force is rotated a large number The substrate feed shaft 3 can rotate.

In addition, the drive shaft 7 is connected to the magnetic drive device (21, 41) for transmitting power by connecting the inside and the outside of the bath (5) in a non-contact manner.

The magnetic drive devices 21 and 41 are rotatably provided inside the worm shaft 47 connected to the drive shaft 7 and the bath 5, and through the worm shaft 47 when power is transmitted. A cylindrical inner magnetic part 41 for rotating the drive shaft 7 and rotatably provided outside the bath 5, and having a cylindrical shape, the inner magnetic part 41 and the bath partition wall 13 have a cylindrical shape. The outer magnetic part 21 is disposed to correspond to each other and transmits power in a non-contact manner, and a power source 23 for rotating the outer magnetic part 21.

In the magnetic drive device having such a structure, the bath 5 forms a cylindrical partition 13 protruding upward on one side of a bottom edge thereof. An outer magnetic part 21 connected to the power source 23 is disposed outside the partition wall 13 of the bath 5, and an inner side in which the drive shaft 7 is rotated by the transmitted power. The magnetic parts 41 have a structure arranged to correspond to each other.

The outer magnetic portion 21 is rotatably provided in the outer frame 15 mounted on the outside of the bath (5). That is, the motor assembly is mounted as a power source 23 at the lower portion of the outer frame 15, and the outer magnetic portion 21 is connected to the rotation shaft 35 of the motor assembly. Therefore, when the power source 23 is driven, the outer magnetic portion 21 rotates.

2 and 3, the outer magnetic part 21 includes a central axis 37 connected to the power source 23 and an upper portion of the central axis 37 and at least on an outer circumferential surface thereof. It consists of a cylindrical housing 39 in which one or more outer magnets 31 are disposed.

In addition, the at least one magnet 31, as shown in Figure 5, a plurality of magnets 31 are disposed along the circumferential direction of the housing 39. In this case, the plurality of magnets 31 are arranged to neighbor the same poles.

That is, when the inner side is the N pole and the outer side is the S pole, neighboring magnets are also arranged such that the inner side is the N pole and the outer side is the S pole. Of course, a single cylinder magnet having a cylindrical shape, that is, a plurality of magnets, is also applicable.

The outer magnetic part 21 having such a magnet arrangement is disposed to correspond to the different poles with the inner magnetic part 41 and the partition wall 13 provided inside the bath 5 interposed therebetween.

The inner magnetic part 41 has an upper portion 43 rotatably mounted by a bearing 53 on a support frame 17 protruding from the inside of the bath 5, and has a cylindrical shape and is formed on the outer circumferential surface thereof. Consists of a rotor 42 in which two inner magnets 33 are arranged.

Then, the plurality of inner magnets 33 are arranged in the same structure as the outer magnetic portion 21, as shown in FIG.

That is, a plurality of inner magnets 33 are arranged along the circumferential direction of the rotor 42, and magnets having the same poles are arranged adjacent to each other.

In addition, the plurality of inner magnets 33 disposed as described above are disposed to face the different poles of the magnets 31 of the outer magnetic part 21.

Therefore, the inner and outer magnetic parts 41 and 21 are connected to each other by the attraction force by the magnetic force with the partition 13 therebetween.

As a result, when the outer magnetic portion 21 rotates, since the inner magnetic portion 41 is also connected to each other by the attraction force, power may be transmitted by being rotated in association.

3 and 4, the worm shaft 47 is connected to an upper portion 43 of the inner magnetic portion 41, and the worm gear 49 is connected to a predetermined portion of the worm shaft 47. Is placed. The worm gear 49 has a structure in which the worm gear 49 meshes with the worm wheel 51 provided in the drive shaft 7.

Therefore, when the inner magnetic part 41 rotates, the worm shaft 47 rotates, and at this time, the worm gear 49 of the worm shaft 47 and the worm wheel 51 of the drive shaft 7 are engaged with each other. Since it is in the sum state, the drive shaft 7 rotates.

Of course, the drive shaft 7 and the inner magnetic portion 41 may be connected by a method other than the worm gear method.

Hereinafter, with reference to the accompanying drawings will be described in more detail the operation of the magnetic drive device of the substrate transfer equipment according to an embodiment of the present invention.

As shown in FIGS. 1 to 5, in the case of transferring the substrate G, first, the power source 23 provided outside the bath 5 is driven. When the power source 23 is driven, the outer magnetic portion 21 rotates, and the plurality of magnets 31 arranged on the outer circumferential surface also rotate in cooperation.

At this time, the inner magnetic portion 41 is in a state in which the inner magnetic portion 41 corresponds to the outer magnetic portion 21 with the partition 13 of the bath 5 therebetween. The inner magnetic portion 41 and the outer magnetic portion 21 are in a state in which the attraction force acts by correspondence between different poles.

Therefore, when the outer magnetic portion 21 rotates, the inner magnetic portion 41 rotates in conjunction.

When the inner magnetic part 41 rotates as described above, the worm shaft 47 integrally provided rotates. At this time, the worm gear 49 of the worm shaft 47 and the worm wheel 51 of the drive shaft 7 are engaged with each other.

Accordingly, as the worm shaft 47 rotates, the driving shaft 7 rotates, and the second rotating roller 9 provided on the driving shaft 7 and the first rotating roller provided on the plurality of substrate transfer shafts 3 ( The power can be transmitted by the non-contact transmission method between 4).

As a result, it is possible to transfer the substrate by rotating the plurality of substrate transfer shafts 3.

On the other hand, Figure 6 shows a magnetic drive device according to another preferred embodiment of the present invention. As shown, the outer magnetic portion 70 is installed on the outer side of the bath 5 around the partition 78, and the worm shaft 47 is installed inside the bath 5 around the partition 78. It consists of an inner magnetic portion 72 connected to.

In the magnetic drive device having such a structure, the outer magnetic part 70 has a housing 77 connected to the rotation shaft 37 through a connecting shaft 74 and a circumferential direction on an outer circumferential surface of the housing 77. A plurality of outer magnets 76 are disposed, and a bearing 86 for rotatably supporting the housing 77 to the bath (5).

Therefore, when the rotational force is transmitted through the connecting shaft 74, the outer magnetic portion 70 rotates.

In addition, the inner magnetic part 72 is installed inside the bath 5 so as to correspond to each other with the outer magnetic part 70 and the partition wall 78 interposed therebetween.

The inner magnetic portion 72 includes a support frame 84 protruding upward from the inside of the bath 5, a rotor 80 rotatably mounted to the support frame 84, and the rotor 80. It consists of a plurality of inner magnets 82 disposed along the circumferential direction on the inner circumferential surface.

At this time, the auxiliary frame 75 is integrally attached to one side of the bath 5 by welding or the like, and the partition wall 78 protrudes upward from the auxiliary frame 75 to form the bath 5 inside and outside. Partition into

The outer magnets 76 and the inner magnets 82 are arranged so as to correspond to each other with the same poles interposed therebetween.

Therefore, when the outer magnetic portion 70 rotates as in the above-described embodiment, the inner magnetic portion 72 rotates due to the interaction by the magnetic force.

As described above, the substrate transfer apparatus using the magnetic method according to the preferred embodiment of the present invention transmits power by the non-contact method using the magnetic method, thereby preventing the occurrence of foreign substances during the rotation of the substrate feed shaft, thereby improving cleaning efficiency. There is this.

In addition, since power is transmitted by a non-contact method without penetrating the partition walls of the bath, there is an advantage of improving the airtightness of the bath.

In addition, there is an advantage in that the driving force is increased by increasing the contact area by applying the cylindrical transmission method as compared to the disk transmission method.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications can be made within the scope of the claims, the detailed description of the invention, and the scope of the accompanying drawings. It goes without saying that it belongs to the scope of the present invention.

Claims (6)

A drive shaft rotatably provided inside the bath to connect the plurality of substrate transfer shafts for transferring the substrate to each other; The upper part is rotatably mounted to the support frame protruding from the inside of the bath, and the rotor is at least one magnet is disposed along the circumferential direction so as to be rotatably provided in the interior of the bath, the worm shaft on the top A worm gear is connected to the worm shaft, and the worm gear is engaged with a worm wheel provided on a drive shaft to rotate the worm shaft when the worm shaft rotates; And It is rotatably provided on the outside of the bath, and has a cylindrical shape so as to correspond to the inner magnetic portion and the partition wall of the vessel therebetween when the rotational force is transmitted from a power source to power the non-contact method to the inner magnetic portion. Magnetic drive device of the substrate transfer equipment including an outer magnetic portion for transmitting. delete delete The substrate of claim 1, wherein the outer magnetic part comprises a housing having at least one magnet disposed on an outer circumferential surface thereof in a circumferential direction, and a central axis integrally connected to the power source mounted on an outer frame mounted to the outside of the bath. Magnetic drive of conveying equipment. According to claim 1, wherein the outer magnetic portion is made of a housing connected to the rotation axis of the power source, a plurality of outer magnets disposed in the circumferential direction on the outer peripheral surface of the housing, and a bearing for rotatably supporting the housing to the partition wall The inner magnetic part may include a support frame protruding upward from the inside of the bath, a rotor rotatably mounted to the support frame, and a plurality of inner magnets attached to the inner surface of the rotor. Magnetic drive. The magnetic driving device of claim 1, 4 or 5, wherein at least one magnet provided in the inner and outer magnetic parts is disposed so as to correspond to each other with opposite poles.

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