CN208976459U - A kind of wafer cleaner - Google Patents
A kind of wafer cleaner Download PDFInfo
- Publication number
- CN208976459U CN208976459U CN201821550420.7U CN201821550420U CN208976459U CN 208976459 U CN208976459 U CN 208976459U CN 201821550420 U CN201821550420 U CN 201821550420U CN 208976459 U CN208976459 U CN 208976459U
- Authority
- CN
- China
- Prior art keywords
- shaft
- mounting rack
- connect
- motor
- delivery pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 claims abstract description 28
- 230000007306 turnover Effects 0.000 claims description 23
- 238000009434 installation Methods 0.000 claims description 2
- 229920000742 Cotton Polymers 0.000 claims 1
- 239000010453 quartz Substances 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 241000478345 Afer Species 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
Abstract
The utility model relates to a kind of wafer cleaners, including conveyer belt one, conveyer belt two, mounting rack one, mounting rack two, the conveyer belt one is mounted on mounting rack one, the conveyer belt two is mounted on mounting rack two, shaft one is installed on the mounting rack one, shaft two and shaft three, the shaft one, cleaning roller is installed in shaft two and shaft three, shaft four is installed on the mounting rack two, shaft five and shaft six, the shaft four, shaft five and shaft six are equipped with cleaning roller, delivery pipe one is equipped with above the mounting rack one, the delivery pipe one is equipped with nozzle one, delivery pipe two is equipped with above the mounting rack two, the delivery pipe two is equipped with nozzle two, bearing plate one is installed on the mounting rack one, bearing plate two is installed on the mounting rack two.The utility model is realized the two-sided cleaning of quartz wafer, is improved cleaning efficiency, improve product quality by the setting of wafer cleaner.
Description
Technical field
The utility model relates to a kind of wafer cleaners.
Background technique
Cleaning after existing chip polishing is generally used artificial front and back sides cleaning, not only low efficiency, while also increasing
Labor cost.
Utility model content
A kind of in order to overcome the deficiencies of the prior art, the utility model provides wafer cleaner.
To solve the above problems, the technical scheme adopted by the utility model is
A kind of wafer cleaner, including conveyer belt one, conveyer belt two, mounting rack one, mounting rack two, the conveyer belt
One is mounted on mounting rack one, and the conveyer belt two is mounted on mounting rack two, is equipped with shaft on the mounting rack one
One, shaft two and shaft three are equipped with cleaning roller in the shaft one, shaft two and shaft three, on the mounting rack two
Shaft four, shaft five and shaft six, the shaft four are installed, shaft five and shaft six are equipped with cleaning roller, the peace
It shelves a top and is equipped with delivery pipe one, the delivery pipe one is equipped with nozzle one, is equipped with conveying above the mounting rack two
Pipe two, the delivery pipe two are equipped with nozzle two, are equipped with bearing plate one, the mounting rack two on the mounting rack one
On bearing plate two is installed, turnover mechanism is equipped between the bearing plate one and bearing plate two, the turnover mechanism includes
Clockwise and anticlockwise motor, turnover box, commutator, support frame, on the support frame, the turnover box side is set for the turnover box installation
There is shaft seven, the turnover box other side is equipped with shaft eight, and the shaft seven is connect with commutator, the positive and negative rotation electricity
Machine is connect with commutator, and the turnover box is hollow form, and one side of bearing plate is equipped with flapper, the activity
Baffle is connect with gas bar, and the gas bar is connect with cylinder.
As a preference, the delivery pipe one is equipped with delivery pump one.
As a preference, the delivery pipe two is equipped with delivery pump two.
As a preference, the shaft one is connect with motor one, the shaft two is connect with motor two, described
Shaft three is connect with motor three, and the shaft four is connect with motor four, and the shaft five is connect with motor five, and described turns
Axis six is connect with motor six.
There are multiple groups to clean sliver as a preference, the cleaning roller sets array.
By adopting the above-described technical solution, compared with prior art, the utility model is set by wafer cleaner
It sets, realizes the two-sided cleaning of quartz wafer, improve cleaning efficiency, improve product quality.
The utility model is described in further detail with reference to the accompanying drawings and detailed description simultaneously.
Detailed description of the invention
Fig. 1 is a kind of front view of wafer cleaner of the utility model.
Fig. 2 is a kind of positive view of wafer cleaner of the utility model.
Fig. 3 is a kind of axonometric drawing of wafer cleaner of the utility model.
Fig. 4 is a kind of partial view of wafer cleaner of the utility model.
In figure: 1, conveyer belt one, 2, conveyer belt two, 3, mounting rack one, 4, mounting rack two, 5, shaft one, 6, shaft two, 7,
Shaft three, 8, cleaning roller, 81, cleaning sliver, 9, shaft four, 10, shaft five, 11, shaft six, 12, delivery pipe one, 13, nozzle
One, 14, delivery pipe two, 15, nozzle two, 16, bearing plate one, 17, bearing plate two, 18, turnover mechanism, 181, clockwise and anticlockwise motor,
182, turnover box, 183, commutator, 184, support frame, 19, flapper, 20, gas bar, 21, cylinder, 22, delivery pump one, 23,
Delivery pump two, 24, motor one, 25, motor two, 26, motor three, 27, motor four, 28, motor five, 29, motor six.
Specific embodiment
Embodiment:
As shown in Figs 1-4, a kind of wafer cleaner, including conveyer belt 1, conveyer belt 22, mounting rack 1, mounting rack
24, the conveyer belt 1 is mounted on mounting rack 1, and the conveyer belt 22 is mounted on mounting rack 24, described
Shaft 1, shaft 26 and shaft 37 be installed, the shaft 1 is pacified in shaft 26 and shaft 37 on mounting rack 1
Equipped with cleaning roller 8, shaft 49, shaft 5 10 and shaft 6 11 be installed on the mounting rack 24, the shaft 49,
Shaft 5 10 and shaft 6 11 are equipped with cleaning roller 8, and one 3 top of mounting rack is equipped with delivery pipe 1, the conveying
Pipe 1 is equipped with nozzle 1, and 24 top of mounting rack is equipped with delivery pipe 2 14, and the delivery pipe 2 14 is equipped with
Nozzle 2 15 is equipped with bearing plate 1 on the mounting rack 1, is equipped with bearing plate 2 17 on the mounting rack 24,
Turnover mechanism 18 is equipped between the bearing plate 1 and bearing plate 2 17, the turnover mechanism 18 includes clockwise and anticlockwise motor
181, turnover box 182, commutator 183, support frame 184, the turnover box 182 is mounted on support frame 184, the overturning
182 side of box be equipped with shaft 7 185,182 other side of turnover box be equipped with shaft 8 186, the shaft 7 185 with change
It is connected to device 183, the clockwise and anticlockwise motor 181 is connect with commutator 183, and the turnover box 182 is hollow form, described
One 17 side of bearing plate is equipped with flapper 19, and the flapper 19 is connect with gas bar 20, the gas bar 20 and cylinder
21 connections.
Further, the delivery pipe 1 is equipped with delivery pump 1, is nozzle by the setting of delivery pump 1
One 13 provide high-pressure wash water.
Further, the delivery pipe 2 14 is equipped with delivery pump 2 23, is nozzle by the setting of delivery pump 2 23
2 15 provide high-pressure wash water.
Further, the shaft 1 is connect with motor 1, and the shaft 26 is connect with motor 2 25, described
Shaft 37 connect with motor 3 26, the shaft 49 is connect with motor 4 27, the shaft 5 10 and motor 5 28
Connection, the shaft 6 11 are connect with motor 6 29, drive shaft 1 to rotate by motor 1,2 25 band turn of motor
Axis 26 rotates, and motor 3 26 drives shaft 37 to rotate, and motor 4 27 drives shaft 49 to rotate, and motor 5 28 drives shaft five
10 rotations, motor 6 29 drives shaft 6 11 to rotate, thus shaft 1, shaft 26, shaft 37, shaft 49, shaft 5 10
With the cleaning roller rotation in shaft 6 11.
Further, the cleaning roller 8, which sets array, has multiple groups to clean sliver 81, cleans setting for sliver 81 by multiple groups
It sets, further ensures cleaning effect.
In the utility model, ejected wash water is become by high pressure water by delivery pump 1, and quartz is sprinkled upon by nozzle 1
After on chip, by shaft 1, the cleaning roller 8 of shaft 26 and shaft 37 cleans chip, and the chip after cleaning passes through
Bearing plate 1 slides into turnover box 182, then pushes gas bar 20 by cylinder 21, so that 19 uplink of flapper is pushed,
So that chip is stopped gliding, then drive turnover box 182 to rotate 180 degree by clockwise and anticlockwise motor 181, then by by afer rotates
It pours on conveyer belt 22, so that chip be made to overturn 180 degree, the another side of chip passes through shaft 49,5 10 He of shaft after overturning
In shaft 6 11 cleaning roller 8 rotation is cleaned, the chip after cleaning enter next station, and flapper 19 and overturning
The cooperation of box 182, realizes the overturning of chip, and turnover box 182 is obstructed box-packed in side, is conducive to the transhipment of chip, from
And realize the two-sided cleaning of chip.
By adopting the above-described technical solution, compared with prior art, the utility model is set by wafer cleaner
It sets, realizes the two-sided cleaning of quartz wafer, improve cleaning efficiency, improve product quality.
The utility model is not limited to above-mentioned preferred forms, and anyone should learn that under the enlightenment of the utility model
The structure change made, it is all that there is same or similar technical solution with the utility model, belong to the utility model
Protection scope.
Claims (5)
1. a kind of wafer cleaner, including conveyer belt one, conveyer belt two, mounting rack one, mounting rack two, it is characterised in that: institute
The conveyer belt one stated is mounted on mounting rack one, and the conveyer belt two is mounted on mounting rack two, on the mounting rack one
Shaft one, shaft two and shaft three are installed, cleaning roller is installed in the shaft one, shaft two and shaft three, it is described
Shaft four, shaft five and shaft six, the shaft four are installed, shaft five and shaft six are equipped with cleaning on mounting rack two
Roller, is equipped with delivery pipe one above the mounting rack one, and the delivery pipe one is equipped with nozzle one, on the mounting rack two
Side is equipped with delivery pipe two, and the delivery pipe two is equipped with nozzle two, is equipped with bearing plate one on the mounting rack one, described
Mounting rack two on bearing plate two is installed, between the bearing plate one and bearing plate two be equipped with turnover mechanism, described turns over
Rotation mechanism includes clockwise and anticlockwise motor, and turnover box, commutator, support frame, on the support frame, described turns over for the turnover box installation
Turn box side equipped with shaft seven, the turnover box other side is equipped with shaft eight, and the shaft seven is connect with commutator, described
Clockwise and anticlockwise motor connect with commutator, the turnover box be hollow form, one side of bearing plate be equipped with flapper,
The flapper is connect with gas bar, and the gas bar is connect with cylinder.
2. wafer cleaner as described in claim 1, it is characterised in that: the delivery pipe one is equipped with delivery pump one.
3. wafer cleaner as described in claim 1, it is characterised in that: the delivery pipe two is equipped with delivery pump two.
4. wafer cleaner as described in claim 1, it is characterised in that: the shaft one is connect with motor one, described
Shaft two connect with motor two, the shaft three is connect with motor three, and the shaft four is connect with motor four, described
Shaft five is connect with motor five, and the shaft six is connect with motor six.
5. wafer cleaner as described in claim 1, it is characterised in that: the cleaning roller, which sets array, has multiple groups to clean cotton
Item.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821550420.7U CN208976459U (en) | 2018-09-21 | 2018-09-21 | A kind of wafer cleaner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821550420.7U CN208976459U (en) | 2018-09-21 | 2018-09-21 | A kind of wafer cleaner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208976459U true CN208976459U (en) | 2019-06-14 |
Family
ID=66785056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821550420.7U Active CN208976459U (en) | 2018-09-21 | 2018-09-21 | A kind of wafer cleaner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208976459U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111299205A (en) * | 2019-12-06 | 2020-06-19 | 湖州南浔旧馆恒佳地板厂 | Clean material collecting equipment for annular boss wood |
| CN112845374A (en) * | 2021-01-08 | 2021-05-28 | 全茂林 | Hardware processing belt cleaning device |
-
2018
- 2018-09-21 CN CN201821550420.7U patent/CN208976459U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111299205A (en) * | 2019-12-06 | 2020-06-19 | 湖州南浔旧馆恒佳地板厂 | Clean material collecting equipment for annular boss wood |
| CN112845374A (en) * | 2021-01-08 | 2021-05-28 | 全茂林 | Hardware processing belt cleaning device |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |