CN1849017A - 氮化硅发热体以及其无压低温烧结制备方法 - Google Patents
氮化硅发热体以及其无压低温烧结制备方法 Download PDFInfo
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- CN1849017A CN1849017A CN 200510034046 CN200510034046A CN1849017A CN 1849017 A CN1849017 A CN 1849017A CN 200510034046 CN200510034046 CN 200510034046 CN 200510034046 A CN200510034046 A CN 200510034046A CN 1849017 A CN1849017 A CN 1849017A
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- silicon nitride
- oxide
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- heat generating
- aluminium
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- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 42
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000005245 sintering Methods 0.000 title claims abstract description 23
- 238000010438 heat treatment Methods 0.000 title claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 23
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000002360 preparation method Methods 0.000 claims abstract description 13
- 239000000395 magnesium oxide Substances 0.000 claims abstract description 12
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052582 BN Inorganic materials 0.000 claims abstract description 9
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910000420 cerium oxide Inorganic materials 0.000 claims abstract description 7
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000002994 raw material Substances 0.000 claims abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 5
- 239000010439 graphite Substances 0.000 claims abstract description 5
- 238000003825 pressing Methods 0.000 claims abstract description 4
- 239000000919 ceramic Substances 0.000 claims description 27
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 24
- 210000001161 mammalian embryo Anatomy 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- 239000011230 binding agent Substances 0.000 claims description 13
- 239000000377 silicon dioxide Substances 0.000 claims description 11
- 238000005516 engineering process Methods 0.000 claims description 10
- 229910017083 AlN Inorganic materials 0.000 claims description 6
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 6
- -1 yittrium oxide Chemical compound 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 238000000498 ball milling Methods 0.000 claims description 4
- 238000005485 electric heating Methods 0.000 claims description 4
- 238000007731 hot pressing Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000011812 mixed powder Substances 0.000 claims description 4
- 238000005303 weighing Methods 0.000 claims description 4
- 239000000654 additive Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
- 238000009472 formulation Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 239000003870 refractory metal Substances 0.000 claims description 2
- 235000015895 biscuits Nutrition 0.000 abstract 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 238000000227 grinding Methods 0.000 abstract 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract 1
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 229910003454 ytterbium oxide Inorganic materials 0.000 abstract 1
- 229940075624 ytterbium oxide Drugs 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- SNIOPGDIGTZGOP-UHFFFAOYSA-N Nitroglycerin Chemical compound [O-][N+](=O)OCC(O[N+]([O-])=O)CO[N+]([O-])=O SNIOPGDIGTZGOP-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000001458 anti-acid effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229960003711 glyceryl trinitrate Drugs 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- DCKVNWZUADLDEH-UHFFFAOYSA-N sec-butyl acetate Chemical compound CCC(C)OC(C)=O DCKVNWZUADLDEH-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000008400 supply water Substances 0.000 description 1
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 200510034046 CN1849017A (zh) | 2005-04-05 | 2005-04-05 | 氮化硅发热体以及其无压低温烧结制备方法 |
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CN 200510034046 CN1849017A (zh) | 2005-04-05 | 2005-04-05 | 氮化硅发热体以及其无压低温烧结制备方法 |
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CN1849017A true CN1849017A (zh) | 2006-10-18 |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101318822B (zh) * | 2008-07-04 | 2010-09-01 | 冷水江市明玉陶瓷工具有限责任公司 | 一种氮化硅复合陶瓷发热体 |
CN102170716A (zh) * | 2010-12-09 | 2011-08-31 | 江苏华盛精细陶瓷科技有限公司 | 氮化硅发热体的制作方法 |
CN102173803A (zh) * | 2011-01-25 | 2011-09-07 | 哈尔滨工业大学 | 一种以金属铝粉为铝源的非晶和纳米晶硅硼碳氮铝陶瓷复合材料的制备方法 |
CN102278778A (zh) * | 2010-06-09 | 2011-12-14 | 乐金电子(天津)电器有限公司 | 电热膜烧烤式微波炉 |
CN103096528A (zh) * | 2010-12-09 | 2013-05-08 | 江苏华盛精细陶瓷科技有限公司 | 一种氮化硅发热体的制作方法 |
CN103204682A (zh) * | 2012-01-16 | 2013-07-17 | 佛山市陶瓷研究所有限公司 | 一种高导热氮化铝陶瓷散热基片及其制备方法 |
CN101754497B (zh) * | 2010-01-20 | 2013-09-04 | 贺连英 | 氮化硅发热体及其制作方法 |
CN104715994A (zh) * | 2013-12-13 | 2015-06-17 | 中微半导体设备(上海)有限公司 | 电感耦合型等离子体处理腔室及其抗腐蚀绝缘窗口及制造方法 |
CN104860682A (zh) * | 2014-02-26 | 2015-08-26 | 东莞市国研电热材料有限公司 | 一种叠层共烧的陶瓷加热体的制备工艺 |
CN107277946A (zh) * | 2017-07-19 | 2017-10-20 | 合肥铭佑高温技术有限公司 | 一种高温陶瓷加热板 |
CN110560680A (zh) * | 2019-09-24 | 2019-12-13 | 深圳睿蚁科技有限公司 | 一种高导热发热丝的制备工艺 |
-
2005
- 2005-04-05 CN CN 200510034046 patent/CN1849017A/zh active Pending
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101318822B (zh) * | 2008-07-04 | 2010-09-01 | 冷水江市明玉陶瓷工具有限责任公司 | 一种氮化硅复合陶瓷发热体 |
CN101754497B (zh) * | 2010-01-20 | 2013-09-04 | 贺连英 | 氮化硅发热体及其制作方法 |
CN102278778A (zh) * | 2010-06-09 | 2011-12-14 | 乐金电子(天津)电器有限公司 | 电热膜烧烤式微波炉 |
CN102170716B (zh) * | 2010-12-09 | 2013-01-30 | 江苏华盛精细陶瓷科技有限公司 | 氮化硅发热体的制作方法 |
CN103096528A (zh) * | 2010-12-09 | 2013-05-08 | 江苏华盛精细陶瓷科技有限公司 | 一种氮化硅发热体的制作方法 |
CN102170716A (zh) * | 2010-12-09 | 2011-08-31 | 江苏华盛精细陶瓷科技有限公司 | 氮化硅发热体的制作方法 |
CN103096528B (zh) * | 2010-12-09 | 2015-04-08 | 江苏金盛陶瓷科技有限公司 | 一种氮化硅发热体的制作方法 |
CN102173803A (zh) * | 2011-01-25 | 2011-09-07 | 哈尔滨工业大学 | 一种以金属铝粉为铝源的非晶和纳米晶硅硼碳氮铝陶瓷复合材料的制备方法 |
CN102173803B (zh) * | 2011-01-25 | 2013-02-20 | 哈尔滨工业大学 | 一种以金属铝粉为铝源的非晶和纳米晶硅硼碳氮铝陶瓷复合材料的制备方法 |
CN103204682A (zh) * | 2012-01-16 | 2013-07-17 | 佛山市陶瓷研究所有限公司 | 一种高导热氮化铝陶瓷散热基片及其制备方法 |
CN104715994A (zh) * | 2013-12-13 | 2015-06-17 | 中微半导体设备(上海)有限公司 | 电感耦合型等离子体处理腔室及其抗腐蚀绝缘窗口及制造方法 |
CN104860682A (zh) * | 2014-02-26 | 2015-08-26 | 东莞市国研电热材料有限公司 | 一种叠层共烧的陶瓷加热体的制备工艺 |
CN104860682B (zh) * | 2014-02-26 | 2017-02-15 | 东莞市国研电热材料有限公司 | 一种叠层共烧的陶瓷加热体的制备工艺 |
CN107277946A (zh) * | 2017-07-19 | 2017-10-20 | 合肥铭佑高温技术有限公司 | 一种高温陶瓷加热板 |
CN110560680A (zh) * | 2019-09-24 | 2019-12-13 | 深圳睿蚁科技有限公司 | 一种高导热发热丝的制备工艺 |
CN110560680B (zh) * | 2019-09-24 | 2021-10-15 | 深圳睿蚁科技有限公司 | 一种高导热发热丝的制备工艺 |
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