CN1823412A - 纳米级mosfet晶体管阵列及其制造方法 - Google Patents
纳米级mosfet晶体管阵列及其制造方法 Download PDFInfo
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- CN1823412A CN1823412A CNA2004800201062A CN200480020106A CN1823412A CN 1823412 A CN1823412 A CN 1823412A CN A2004800201062 A CNA2004800201062 A CN A2004800201062A CN 200480020106 A CN200480020106 A CN 200480020106A CN 1823412 A CN1823412 A CN 1823412A
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- 238000000034 method Methods 0.000 title claims abstract description 52
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 239000004065 semiconductor Substances 0.000 claims abstract description 27
- 238000000059 patterning Methods 0.000 claims abstract description 11
- 239000002019 doping agent Substances 0.000 claims abstract description 8
- 238000001459 lithography Methods 0.000 claims abstract description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims 4
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 claims 2
- 230000000717 retained effect Effects 0.000 claims 1
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- 238000010586 diagram Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
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- 238000001127 nanoimprint lithography Methods 0.000 description 4
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- 239000004926 polymethyl methacrylate Substances 0.000 description 4
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823437—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/620,858 US7005335B2 (en) | 2003-07-15 | 2003-07-15 | Array of nanoscopic mosfet transistors and fabrication methods |
US10/620,858 | 2003-07-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1823412A true CN1823412A (zh) | 2006-08-23 |
CN100401500C CN100401500C (zh) | 2008-07-09 |
Family
ID=34062862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004800201062A Active CN100401500C (zh) | 2003-07-15 | 2004-06-25 | 制造纳米级mosfet晶体管及纳米级晶体管阵列的方法 |
Country Status (5)
Country | Link |
---|---|
US (3) | US7005335B2 (zh) |
EP (1) | EP1649511A2 (zh) |
CN (1) | CN100401500C (zh) |
TW (1) | TWI320971B (zh) |
WO (1) | WO2005010981A2 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102437064A (zh) * | 2011-11-30 | 2012-05-02 | 上海华力微电子有限公司 | 硅纳米线的制造方法 |
WO2012139382A1 (zh) * | 2011-04-11 | 2012-10-18 | 北京大学 | 硅纳米线晶体管器件可编程阵列及其制备方法 |
CN103086607A (zh) * | 2011-10-28 | 2013-05-08 | 清华大学 | 光栅的制备方法 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7005335B2 (en) * | 2003-07-15 | 2006-02-28 | Hewlett-Packard Development, L.P. | Array of nanoscopic mosfet transistors and fabrication methods |
US7727820B2 (en) * | 2004-04-30 | 2010-06-01 | Hewlett-Packard Development Company, L.P. | Misalignment-tolerant methods for fabricating multiplexing/demultiplexing architectures |
US7557008B2 (en) * | 2007-01-23 | 2009-07-07 | Freescale Semiconductor, Inc. | Method of making a non-volatile memory device |
US7759201B2 (en) * | 2007-12-17 | 2010-07-20 | Sandisk 3D Llc | Method for fabricating pitch-doubling pillar structures |
US7981592B2 (en) * | 2008-04-11 | 2011-07-19 | Sandisk 3D Llc | Double patterning method |
US7713818B2 (en) * | 2008-04-11 | 2010-05-11 | Sandisk 3D, Llc | Double patterning method |
US7786015B2 (en) * | 2008-04-28 | 2010-08-31 | Sandisk 3D Llc | Method for fabricating self-aligned complementary pillar structures and wiring |
US8026178B2 (en) | 2010-01-12 | 2011-09-27 | Sandisk 3D Llc | Patterning method for high density pillar structures |
US8557647B2 (en) * | 2011-09-09 | 2013-10-15 | International Business Machines Corporation | Method for fabricating field effect transistor devices with high-aspect ratio mask |
CN103091747B (zh) * | 2011-10-28 | 2015-11-25 | 清华大学 | 一种光栅的制备方法 |
CN105408740A (zh) | 2012-07-25 | 2016-03-16 | 加州理工学院 | 具有功能化栅电极和基电极的纳米柱场效应和结型晶体管 |
WO2014074180A1 (en) * | 2012-11-09 | 2014-05-15 | California Institute Of Technology | Nanopillar field-effect and junction transistors |
US9698015B2 (en) * | 2013-10-21 | 2017-07-04 | Applied Materials, Inc. | Method for patterning a semiconductor substrate |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4833514A (en) | 1985-05-01 | 1989-05-23 | Texas Instruments Incorporated | Planar FAMOS transistor with sealed floating gate and DCS+N2 O oxide |
US5238855A (en) | 1988-11-10 | 1993-08-24 | Texas Instruments Incorporated | Cross-point contact-free array with a high-density floating-gate structure |
JP3431198B2 (ja) | 1993-02-26 | 2003-07-28 | 株式会社東芝 | 半導体記憶装置およびその製造方法 |
US6518189B1 (en) | 1995-11-15 | 2003-02-11 | Regents Of The University Of Minnesota | Method and apparatus for high density nanostructures |
US5772905A (en) | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
US6069380A (en) | 1997-07-25 | 2000-05-30 | Regents Of The University Of Minnesota | Single-electron floating-gate MOS memory |
EP0902465B1 (en) | 1997-08-27 | 2008-10-15 | STMicroelectronics S.r.l. | Process for manufacturing electronic virtual-ground memory devices |
US6128214A (en) | 1999-03-29 | 2000-10-03 | Hewlett-Packard | Molecular wire crossbar memory |
US6314019B1 (en) | 1999-03-29 | 2001-11-06 | Hewlett-Packard Company | Molecular-wire crossbar interconnect (MWCI) for signal routing and communications |
US6518156B1 (en) | 1999-03-29 | 2003-02-11 | Hewlett-Packard Company | Configurable nanoscale crossbar electronic circuits made by electrochemical reaction |
US6256767B1 (en) | 1999-03-29 | 2001-07-03 | Hewlett-Packard Company | Demultiplexer for a molecular wire crossbar network (MWCN DEMUX) |
US6459095B1 (en) | 1999-03-29 | 2002-10-01 | Hewlett-Packard Company | Chemically synthesized and assembled electronics devices |
JP2003504857A (ja) | 1999-07-02 | 2003-02-04 | プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ | ナノスコピックワイヤを用いる装置、アレイおよびその製造方法 |
US6517995B1 (en) | 1999-09-14 | 2003-02-11 | Massachusetts Institute Of Technology | Fabrication of finely featured devices by liquid embossing |
KR100323140B1 (ko) * | 2000-01-17 | 2002-02-06 | 윤종용 | 낸드형 플래쉬 메모리소자 및 그 제조방법 |
US6294450B1 (en) | 2000-03-01 | 2001-09-25 | Hewlett-Packard Company | Nanoscale patterning for the formation of extensive wires |
SE516194C2 (sv) * | 2000-04-18 | 2001-12-03 | Obducat Ab | Substrat för samt process vid tillverkning av strukturer |
JP4923321B2 (ja) * | 2000-09-12 | 2012-04-25 | ソニー株式会社 | 不揮発性半導体記憶装置の動作方法 |
US6432740B1 (en) | 2001-06-28 | 2002-08-13 | Hewlett-Packard Company | Fabrication of molecular electronic circuit by imprinting |
US6458621B1 (en) | 2001-08-01 | 2002-10-01 | Hewlett-Packard Company | Batch fabricated molecular electronic devices with cost-effective lithographic electrodes |
JP4198903B2 (ja) | 2001-08-31 | 2008-12-17 | 株式会社東芝 | 半導体記憶装置 |
US7005335B2 (en) * | 2003-07-15 | 2006-02-28 | Hewlett-Packard Development, L.P. | Array of nanoscopic mosfet transistors and fabrication methods |
-
2003
- 2003-07-15 US US10/620,858 patent/US7005335B2/en not_active Expired - Lifetime
-
2004
- 2004-02-03 TW TW093102411A patent/TWI320971B/zh not_active IP Right Cessation
- 2004-06-25 WO PCT/US2004/020675 patent/WO2005010981A2/en active Search and Examination
- 2004-06-25 CN CNB2004800201062A patent/CN100401500C/zh active Active
- 2004-06-25 EP EP04777187A patent/EP1649511A2/en not_active Withdrawn
-
2005
- 2005-05-10 US US11/126,710 patent/US7902015B2/en active Active
-
2011
- 2011-03-04 US US13/040,401 patent/US8329527B2/en not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012139382A1 (zh) * | 2011-04-11 | 2012-10-18 | 北京大学 | 硅纳米线晶体管器件可编程阵列及其制备方法 |
US9099500B2 (en) | 2011-04-11 | 2015-08-04 | Peking University | Programmable array of silicon nanowire field effect transistor and method for fabricating the same |
CN103086607A (zh) * | 2011-10-28 | 2013-05-08 | 清华大学 | 光栅的制备方法 |
CN103086607B (zh) * | 2011-10-28 | 2015-08-26 | 清华大学 | 光栅的制备方法 |
CN102437064A (zh) * | 2011-11-30 | 2012-05-02 | 上海华力微电子有限公司 | 硅纳米线的制造方法 |
CN102437064B (zh) * | 2011-11-30 | 2014-03-19 | 上海华力微电子有限公司 | 硅纳米线的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20050014385A1 (en) | 2005-01-20 |
WO2005010981A2 (en) | 2005-02-03 |
EP1649511A2 (en) | 2006-04-26 |
TWI320971B (en) | 2010-02-21 |
TW200503265A (en) | 2005-01-16 |
CN100401500C (zh) | 2008-07-09 |
WO2005010981A3 (en) | 2005-04-14 |
US7005335B2 (en) | 2006-02-28 |
US20110159648A1 (en) | 2011-06-30 |
US7902015B2 (en) | 2011-03-08 |
US8329527B2 (en) | 2012-12-11 |
US20050219936A1 (en) | 2005-10-06 |
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Owner name: SAMSUNG ELECTRONICS CO., LTD. Free format text: FORMER OWNER: HEWLETT PACKARD CO. Effective date: 20110222 |
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