CN1811183A - Ribbed miniature no-valve pump - Google Patents
Ribbed miniature no-valve pump Download PDFInfo
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- CN1811183A CN1811183A CNA2006100382726A CN200610038272A CN1811183A CN 1811183 A CN1811183 A CN 1811183A CN A2006100382726 A CNA2006100382726 A CN A2006100382726A CN 200610038272 A CN200610038272 A CN 200610038272A CN 1811183 A CN1811183 A CN 1811183A
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- 230000002441 reversible effect Effects 0.000 claims abstract description 28
- 230000007704 transition Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 11
- 238000005516 engineering process Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000005520 cutting process Methods 0.000 claims description 7
- 238000010892 electric spark Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000009760 electrical discharge machining Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 239000008151 electrolyte solution Substances 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 239000000693 micelle Substances 0.000 claims description 2
- 230000001052 transient effect Effects 0.000 claims description 2
- 238000002309 gasification Methods 0.000 claims 1
- 230000008901 benefit Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000012528 membrane Substances 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 9
- 230000008859 change Effects 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000009975 flexible effect Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
The ribbed miniature no-valve pump has the structure comprising arc transitioned convergent nozzles, reversely guide ribs, pump cavity and piezoelectric vibration membrane. Two nozzles are located on two ends of the micro pump, the reversely guide ribs are on the right side of the nozzles, and the piezoelectric vibration membrane is adhered to the upper surface of the pump cavity. The ribbed miniature no-valve pump can obtain relatively great forward and reverse flow rate difference of the nozzles and has the advantages of obviously raised micro pump efficiency, easy manufacture, low cost, wide application range, high reliability and long service life. The present invention provides micro flow system with power source unit possessing high comprehensive performance.
Description
Technical field
The present invention is a ribbed miniature no-valve pump, is a kind of conveying equipment for fluid substances that is used for pump gas, belongs to the power source of micro-flow system.
Background technique
On the obtained in recent years develop rapidly basis of microelectromechanical systems (MEMS), power source as micro-flow system, Micropump not only is successfully applied to the aspects such as propelling of micro-drug delivery, intergrated circuit cooling, micromechanism, can also be applied to the Active Flow Control of all kinds of military, civilian aircrafts and automobile, boats and ships etc., be to have the microactrator that important technology is worth.
The Micropump of current domestic and international development is by having or not Movable valve to be divided into to have two kinds of valve pump and valveless pumps.The working principle that the valve pump arranged is simple, manufacturing process is ripe, but for size narrow down to centimetre or the microsystem of millimeter magnitude for, it is the technical problems of two very difficult solutions that valve block is made with assembling, the frequent folding of valve block simultaneously causes having valve pump reliability and working life to be reduced, and also has the danger of valve blockage when conveying contains granule fluid; And that valveless pump has is simple in structure, be easy to process, low in energy consumption, the advantage that can work under high frequency, is convenient to microminiaturization, but that its maximum problem is an efficient is too low.For addressing this problem, Chinese scholars mainly using new material and new driving mode, increase pump chamber delivery volume to study with ratio, the optimization diffusing opening/aspects such as nozzle parameter of invalid volume, does not propose to change the new design proposal of valveless pump working principle basically at present.
Summary of the invention
Order of the present invention is the problem at the prior art existence, proposes a kind of ribbed miniature no-valve pump of conveying gas, be intended to increase forward and reverse difference in flow by a kind of new fluid mechanics principle, thus the efficient of significantly improving; Simultaneously keep the advantage that valveless pump is easy to manufacture, cost is low again, and can satisfy the usage requirement of high frequency occasion.
Technical solution of the present invention: its structure is to be made of nozzle, reverse air guide rib, pump chamber and piezoelectricity vibrating diaphragm.Wherein nozzle is positioned at the two ends, the left and right sides of Micropump, and reverse air guide rib is located at the right side of two nozzles, and the piezoelectricity vibrating diaphragm is pasted on the upper surface of pump chamber.Ribbed miniature no-valve pump relies on ribbing nozzle and other matching Design can obtain the forward and reverse difference in flow of bigger nozzle, thereby significantly improves Micropump efficient.
(1) adopts arc transition convergence type nozzle to substitute traditional wedge angle type nozzle, and change the downstream wall of nozzle into inclined wall by the vertical wall of routine, the pressure loss when reducing the air-flow forward flow, thereby the flow during the increase forward flow;
(2) the configured scheme of the reverse air guide rib of proposition, the gas flow when making reverse flow significantly reduces;
(3) vibration film and piezoelectric material are pasted to constitute the piezoelectricity vibrating diaphragm, by the piezoelectric effect driving vibration film vibration back and forth in vertical direction of piezoelectric material.
Rely on design of rational rib and designs of nozzles, when diaphragm moved upward, pump chamber was air-breathing, the gas forward flow of left hole and right ports is a reverse flow, and the left side can obtain higher net inflow amount; When diaphragm moves downward, the pump chamber exhaust, the gas reverse flow of left hole and right ports is a forward flow, there is higher net flow output on the right side.So just on macroscopic view, realized air-flow by the one-way flow that the left side sucks, the right side sprays, and the efficient of Micropump is improved.
The making method of ribbed miniature no-valve pump is divided three process steps:
(1) wire cutting technology, adopt linear cutting machine, between the piece pole of the tool electrode that constitutes along the wire of guide rail movement and processed piece formation, apply pulsed voltage, make the electrolytic solution in the gap be ionized puncture and form pulse discharge, produce TRANSIENT HIGH TEMPERATURE and make processed piece local melting even change, process required electrode thereby make fine electric spark;
(2) fine electric spark processing technology, adopt spark erosion plant, between prepared electrode of step (1) and processed piece, apply voltage, cause the removal of material micelle and the formation in discharge hole by the electrical spark that produces, thereby make nozzle, rib and pump chamber structure;
(3) micromanipulator technology is vibrated film by mini positioning platform system, micromanipulator mechanism hand with piezoelectric constant and is aimed at the back with the pump chamber open surfaces and adopt Bond to be pasted together, to obtain final ribbed miniature no-valve pump.
Advantage of the present invention: proposed the configured scheme of reverse air guide rib, when the air-flow forward flow, relied on to reduce the pressure loss on the one hand by circular arc convergent designs of nozzles; On the other hand when the air-flow reverse flow, by changing the downstream wall of nozzle into inclined wall by the vertical wall of routine, and be equipped with suitable air guide rib, make a certain proportion of air-flow under the guiding of both sides air guide rib, change flow direction, back draught in the impulse nozzle then, three strands of air-flows are " Y " shape and compile and strong bump takes place, can significantly reduce the back draught amount, thereby significantly improve the net flow of gases of Micropump output in the vibrational period, also just improved the efficient of micro valveless pump.The micro valveless pump of the present invention's design is made easily, and cost is low, and applicable situation is wide, has not significantly improved reliability and life-span because there being the Movable valve structure; The electrode that wire cutting technology makes is reusable, and can carry out miniature casting to produce in batches; Nozzle, rib and the moulding of pump chamber avaivable electrode time processing; Adopt the alternating-current pulse power technology in the course of working, guarantee lower processing roughness; Adopt the micromanipulator assembly platform, guarantee the technical requirements of assembling.
Description of drawings
Accompanying drawing 1 is the ribbed miniature no-valve pump structural representation.
Accompanying drawing 2 is nozzle, rib partial enlarged drawing.
Accompanying drawing 3,4 is respectively gas forward and reverse mobile schematic representation in ribbing nozzle.
Accompanying drawing 5 is schematic representation that fine electric spark is processed required electrode.
1 is nozzle, the 2nd among the figure, reverse air guide rib, the 3rd, and pump chamber, the 4th, piezoelectric material, vibration film are pasted on the upper surface of pump chamber with enclosed cavity, and piezoelectric material is pasted on the vibration film; B be nozzle width, D be pump chamber width, α be nozzle convergence angle, β be tilt angle (being the angle of nozzle and horizontal wall surface), the R1 of nozzle downstream inclined wall be nozzle transition circle segmental arc radius, L1 be nozzle and reverse rib flow to spacing, R2 is that reverse air guide rib transition circle segmental arc radius, L2 are air guide rib diagonal lengths, the central angle of each section transition arc is all got β; The 5th, fine electric spark is processed required electrode.
Embodiment
Contrast Fig. 1, its structure is made of nozzle, reverse air guide rib, pump chamber and piezoelectricity vibrating diaphragm.Wherein nozzle is positioned at the two ends, the left and right sides of Micropump, and reverse air guide rib is located at the right side of two nozzles, and the upper surface that the vibration vibrating diaphragm is pasted on pump chamber is to seal empty pump, and piezoelectric material is pasted on the vibration film.
Nozzle is an arc transition convergence type, adopt plane structure, nozzle width B gets 0.1～5mm, the nozzle width B of pump chamber width D 〉=6 times, pump chamber height are (0.5～5) nozzle width B doubly, and convergence angle α gets 90～150 degree, nozzle downstream wall is an inclined wall, the convergence angle α of angle of inclination beta 〉=0.5 times, transition circle segmental arc radius R 1 get (1～2) nozzle width B doubly, and the central angle value is identical with nozzle angle β;
Reverse air guide rib inclination angle is identical with nozzle angle β, its diagonal length L2 gets (1～2) nozzle width B doubly, transition circle segmental arc radius R 2 is (1～2) nozzle width B doubly, the central angle value is identical with nozzle angle β, the spacing that flows to of reverse air guide rib and nozzle is (0.3～0.6) nozzle width B doubly, and the aperture width between the two reverse air guide ribs is about nozzle width B;
The piezoelectricity vibrating diaphragm is pasted by vibration film and piezoelectric material and is constituted, and size can be selected according to the size of required driving force; Micropump length and width can be selected according to the size of piezoelectricity vibrating diaphragm, and thickness can be selected according to different applying flexibles.
Embodiment
The employing stainless steel is a structural material, vibration film uses polyimide, piezoelectric material is selected PZT-4 for use, the each several part size is as follows according to the regulation of the ratio in embodiment value: nozzle width is got 1mm, convergence angle α is 120 degree, the angle of inclination beta of nozzle downstream wall is 60 degree, and transition circle segmental arc radius R 1 is got 1mm (central angle is 60 degree); The pump chamber width D is got 10mm, and the pump chamber height is got 1.5mm; Reverse air guide rib inclination angle 60 degree, its diagonal length L2 gets 2mm, and transition circle segmental arc radius R 2 is got 1mm (central angle is 60 degree), and the spacing L1 that flows to of rib and nozzle gets 0.5mm; Piezoelectric film diameter 6mm, thick 50 μ m; The long 16mm of polyimide covering film (comprising diaphragm), wide 12mm, thick 100 μ m; The long 16mm of Micropump, wide 12mm, thick 3mm.
The making method of ribbed miniature no-valve pump
(1) line cutting process: use the ordinary lines cutting machine, make as shown in Figure 5 electrode with the workpiece of accomplishing fluently through hole in advance.
(2) fine electric spark processing: use common spark erosion plant, utilize the prepared electrode once-through of above-mentioned steps (1), process nozzle, reverse air guide rib and pump chamber.
(3) micromanipulator technology: by mini positioning platform system, micromanipulator mechanism hand the piezoelectricity vibrating diaphragm is aimed at the back with the pump chamber open surfaces and adopt mighty bond to be pasted together, to obtain final micro valveless pump.The effect of ribbed miniature no-valve pump
Micro valveless pump efficient (it is defined as: the pure qi (oxygen) flow in operation cycle and the ratio of pump chamber gross exhaust gas) generally can be estimated by following formula:
ξ
Instead, ξ
JustIt is respectively the flow losses coefficient under the two states in the nozzle.
Adopt the micro valveless pump of plain nozzle, its ξ
Instead/ ξ
JustValue is about 1.5, and efficient is 5%～10%, and the ribbed miniature no-valve pump among the present invention can be with ξ
Instead/ ξ
JustValue is increased to about 5.0, and efficient can be increased to about 30%.Like this, under the certain situation of volume and weight, will enlarge markedly gas flow that micro valveless pump carries and be the energy of air-flow interpolation.
Claims (4)
1, ribbed miniature no-valve pump, it is characterized in that constituting by arc transition convergence type nozzle, reverse air guide rib, pump chamber and piezoelectricity vibrating diaphragm, wherein nozzle is positioned at the two ends, the left and right sides of Micropump, and reverse air guide rib is located at the right side of two nozzles, and the piezoelectricity vibrating diaphragm is pasted on the upper surface of pump chamber.
2, ribbed miniature no-valve pump according to claim 1, it is characterized in that arc transition convergence type nozzle, adopt plane structure, nozzle width B gets 0.1～5mm, the nozzle width B of pump chamber width D 〉=6 times, the pump chamber height is (0.5～5) nozzle width B doubly, convergence angle α gets 90～150 degree, and nozzle downstream wall is an inclined wall, angle of inclination beta 〉=convergence angle α/2, transition circle segmental arc radius R 1 is got (1～2) nozzle width B doubly, and the central angle value is identical with nozzle angle β.
3, ribbed miniature no-valve pump according to claim 1, it is characterized in that reverse air guide rib inclination angle is identical with nozzle angle β, its diagonal length L2 gets (1～2) nozzle width B doubly, transition circle segmental arc radius R 2 is (1～2) nozzle width B doubly, the central angle value is identical with nozzle angle β, the spacing that flows to of reverse air guide rib and nozzle is (0.3～0.6) nozzle width B doubly, and the aperture width between the two reverse air guide ribs is about nozzle width B.
4, the making method of micro valveless pump is characterized in that branch
(1) wire cutting technology, adopt linear cutting machine, between the piece pole of the tool electrode that constitutes along the wire of guide rail movement and processed piece formation, apply pulsed voltage, make the electrolytic solution in the gap be ionized puncture and form pulse discharge, produce TRANSIENT HIGH TEMPERATURE and make processed piece local melting even gasification, process required electrode thereby make fine electric spark;
(2) fine electric spark processing technology, adopt spark erosion plant, between prepared electrode of step (1) and processed piece, apply voltage, cause the removal of material micelle and the formation in discharge hole by the electrical spark that produces, thereby make nozzle, reverse air guide rib and pump chamber structure;
(3) micromanipulator technology is aimed at the back by mini positioning platform system, micromanipulator mechanism hand with the piezoelectricity vibrating diaphragm and is adopted Bond to be pasted together, to obtain final micro valveless pump with the pump chamber open surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100382726A CN100356061C (en) | 2006-02-14 | 2006-02-14 | Ribbed miniature no-valve pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100382726A CN100356061C (en) | 2006-02-14 | 2006-02-14 | Ribbed miniature no-valve pump |
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| Publication Number | Publication Date |
|---|---|
| CN1811183A true CN1811183A (en) | 2006-08-02 |
| CN100356061C CN100356061C (en) | 2007-12-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100382726A Expired - Fee Related CN100356061C (en) | 2006-02-14 | 2006-02-14 | Ribbed miniature no-valve pump |
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| Country | Link |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106246516A (en) * | 2016-10-10 | 2016-12-21 | 青岛农业大学 | Infundibulate Valveless piezoelectric pump |
| CN106370484A (en) * | 2016-10-13 | 2017-02-01 | 苏州阿洛斯环境发生器有限公司 | Synthetic jet device, portable miniature particulate matter sampling apparatus and trapping method |
| CN109322817A (en) * | 2018-12-11 | 2019-02-12 | 上海交通大学 | A kind of Micropump manipulating microfluid |
| CN112555556A (en) * | 2020-10-27 | 2021-03-26 | 中国原子能科学研究院 | Inverted tooth type throttling element |
| RU2768968C2 (en) * | 2018-01-24 | 2022-03-25 | Горюнов Сергей Владимирович | Wave kinetic compression compressor |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE508435C2 (en) * | 1993-02-23 | 1998-10-05 | Erik Stemme | Diaphragm pump type pump |
| CN1170156C (en) * | 2003-02-22 | 2004-10-06 | 浙江大学 | Integrated mini capillary electrophoresis chip in non-valve pump type |
| CN1232728C (en) * | 2003-04-11 | 2005-12-21 | 华中科技大学 | Valve less thin film driving micro pump |
| CN100335904C (en) * | 2005-05-23 | 2007-09-05 | 南京航空航天大学 | Miniature total pressure probe and its manufacturing method |
| CN100338361C (en) * | 2005-08-12 | 2007-09-19 | 北京工业大学 | Valveless piezoelectric pump |
-
2006
- 2006-02-14 CN CNB2006100382726A patent/CN100356061C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106246516A (en) * | 2016-10-10 | 2016-12-21 | 青岛农业大学 | Infundibulate Valveless piezoelectric pump |
| CN106246516B (en) * | 2016-10-10 | 2018-07-10 | 青岛农业大学 | Infundibulate Valveless piezoelectric pump |
| CN106370484A (en) * | 2016-10-13 | 2017-02-01 | 苏州阿洛斯环境发生器有限公司 | Synthetic jet device, portable miniature particulate matter sampling apparatus and trapping method |
| RU2768968C2 (en) * | 2018-01-24 | 2022-03-25 | Горюнов Сергей Владимирович | Wave kinetic compression compressor |
| CN109322817A (en) * | 2018-12-11 | 2019-02-12 | 上海交通大学 | A kind of Micropump manipulating microfluid |
| CN109322817B (en) * | 2018-12-11 | 2019-07-26 | 上海交通大学 | A kind of Micropump manipulating microfluid |
| CN112555556A (en) * | 2020-10-27 | 2021-03-26 | 中国原子能科学研究院 | Inverted tooth type throttling element |
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| Publication number | Publication date |
|---|---|
| CN100356061C (en) | 2007-12-19 |
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