CN1462834A - Micro pump with one-way valve not containing movable part - Google Patents
Micro pump with one-way valve not containing movable part Download PDFInfo
- Publication number
- CN1462834A CN1462834A CN 03137756 CN03137756A CN1462834A CN 1462834 A CN1462834 A CN 1462834A CN 03137756 CN03137756 CN 03137756 CN 03137756 A CN03137756 A CN 03137756A CN 1462834 A CN1462834 A CN 1462834A
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- pump
- micropump
- way valve
- chamber
- diaphragm
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- 239000012530 fluid Substances 0.000 abstract description 14
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- 230000032258 transport Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005370 electroosmosis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 230000000306 recurrent effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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Abstract
A micropump having a one-way valve without moving part for delivring micro fluid in pulse mode features its special pipeline design, that is, a dual-ring structure with different pressure losses for forward current and backward current is respectively arranged between pump cavity and pump inlet (outlet), resulting in the pressure difference between forward current and backward current for delivering fluid in one direction. Its advantages are simple structure, easy control and long service life.
Description
Technical field
The present invention relates to a kind of one-way valve micropump, relate in particular to the one-way valve micropump that adopts bubble shrinkage expansion or the suction of diaphragm vibration realizing and squeeze liquid, belong to microfluidic control, transmission, microactrator technical field.
Background technique
Micropump is a kind of crucial microactrator, can accurately control and drive the microchannel inner fluid and flow and flow.Can be widely used in every field, such as the medicine trace transport, the cooling of cell separation, electronic product (as CPU), fuel trace are sprayed, microanalysis, microchannel in the chemistry flows, and control or the like is twisted in transfer.Can see that in these fields in the used microactrator, Micropump is a most important parts wherein.Succeeding in developing of Micropump can promote the high speed development of Biological Chip.Micropump can have following several according to driving type at present: Electromagnetically actuated micropump, thermal actuation micropump, electrostatically actuated micropump, piezoelectric actuated micropump, photic actuating miniature pump, electric liquid activates, polymeric gel activates micropump, and electro-osmosis is miniature, and ultrasound activates micropump or the like.The import and the outlet of existing a lot of Micropump system all have movable member (such as valve block), and this cause difficulty can on the one hand the processing of Micropump, and in use the pump terminal valve very easily damages simultaneously, and working life is short; Be in operation on the other hand and wild effect can occur.
Summary of the invention
The Micropump that the purpose of this invention is to provide a kind of one-way valve with no moving member to reduce the processing technology difficulty of Micropump, prolongs the working life of Micropump, improves the working stability of Micropump.
Technological scheme of the present invention is as follows: a kind of Micropump with no moving member one-way valve, comprise pump chambers, the drive unit that links to each other with this chamber, pump inlet and pump discharge, it is characterized in that: between pump chambers and pump inlet and pump discharge, be respectively equipped with one-way valve, described one-way valve adopts the different twin nuclei of positive and negative flowing pressure loss, and the outlet of the twin nuclei of arranging in a side of pump inlet links to each other with pump chambers, and the import of the twin nuclei of arranging in pump discharge one side links to each other with pump chambers.
Drive unit of the present invention adopts bubble shrinkage expansion driven structure, and this structure mainly comprises actuator chamber and is arranged on the indoor resistance wire of actuator chamber.Perhaps adopt diaphragm vibratory drive structure, this structure mainly comprises actuator chamber, covers the device of diaphragm on the actuator chamber and driven diaphragm vibration.
Technical characteristics of the present invention is also that described actuator chamber is arranged on a side of pump chambers or is up and down spatial group with pump chambers and closes.
Band provided by the present invention does not have the Micropump of moving member one-way valve, different these characteristics of positive and negative flowing pressure difference that in pipeline, produce according to fluid mobility matter, adopt twin nuclei to play the unidirectional effect that transports fluid, avoided general one-way valve to have movable member, cause the shortcoming of movable member fatigue damage easily, prolong the working life of Micropump, improved the stability of Micropump work; This Micropump has simple in structurely simultaneously, and easily the advantage of controlling is convenient in processing in the use.
Description of drawings
Fig. 1 shrinks the structural principle schematic representation of the Micropump of driving mode for adopting air bubble expansion.
Fig. 2 is the structural principle schematic representation of diaphragm vibratory drive mode Micropump.
Fig. 3 is actuator chamber, pump chambers and the membrane combination pump structure principle schematic that declines.
Fig. 4 is the A-A sectional drawing of Fig. 3.
Embodiment
Further specify working principle of the present invention and specific embodiment below in conjunction with accompanying drawing.
Micropump provided by the invention adopts the special shape piping design, and promptly adopting has the different twin nuclei of positive and negative flowing pressure loss, and different these characteristics of positive and negative flowing pressure difference according to fluid mobility matter produces in pipeline play the unidirectional effect that transports fluid.The driving force of fluid can adopt bubble to drive and diaphragm drives.Be described respectively below.
The band that Fig. 1 drives for employing bubble provided by the invention does not have the structural principle schematic representation of Micropump of the one-way valve of moving member.This Micropump comprises pump chambers 3, pump inlet 1, pump discharge 5 and the drive unit that links to each other with pump chambers 3.Drive unit is drawn the external electrode 8 of resistance wire and is formed by driving chamber 6, being arranged on the resistance wire 7 in the actuator chamber 6.Between pump chambers 3 and pump inlet 1, be provided with the different twin nuclei 2 of positive and negative flowing pressure loss, the outlet of twin nuclei links to each other with pump chambers 3, also be provided with the different twin nuclei 4 of positive and negative flowing pressure loss between pump chambers 3 and pump discharge 5, the import of this twin nuclei links to each other with pump chambers 3.Twin nuclei described in the present invention is to be used in nineteen twenty disclosed a kind of different particular tube line structure of flow characteristic with positive reverse direction flow in U. S. Patent (patent No. 1,329,559).The shape of pump chambers 3 can be square, circular, oval or other shapes.Working procedure is as follows: external electrode 8 connects the recurrent pulses power supply; After the energising, voltage pulse is a high voltage in the preceding halftime, resistance wire 7 heatings, make vaporizing liquid in the actuator chamber 6, produce bubble, bubble volume expands, promote flow direction chamber 3 in the actuator chamber 6, the liquid in the chamber 3 then is compressed the circulating line 2,4 that flows to chamber 3 both sides.Through circulating line 2, the pressure loss in the process of flow direction inlet 1 is Δ P to liquid from chamber 3
1Through circulating line 4, the pressure loss that flows to outlet 5 is Δ P to liquid from chamber 3
2When fluid under certain inertial force, Δ P
1Obviously greater than Δ P
2, so when inlet 1 has uniform pressure with outlet 5 places (being generally 1 standard atmospheric pressure), will be from the flow that pump discharge 5 flows out greater than the flow of pump intake 1 outflow.Voltage pulse enters the later half cycle, is low voltage, and the bubble shrinkage that produces in driving chamber 6 is buried in oblivion rapidly, and chamber 3 pressure are reduced, and suction function is sucked the fluid of chamber 3 both sides and flows to chamber 3.Because the drag characteristic difference of left and right side loop, from the fluid flow of pump intake 1 end suction more than flow from the suction of pump discharge 5 ends.In one-period, realized that liquid flows to pump discharge 5 from pump intake 1, reaches the effect of driving fluid like this.Along with the periodicity input of voltage, liquid can be transported to outlet 5 constantly from entering the mouth 1.Size of regulating twin nuclei width, the degree of depth and driving chamber 6 or the like can realize the control of different flow scope.In addition, after the pump machine shaping, the incoming frequency of regulating voltage, effective value can be controlled bubble shrinkage expansion amplitude and frequency, and then the flow of control Micropump.
Fig. 2, Fig. 3 are the structural principle schematic representation of the Micropump of the no moving member that drives of employing diaphragm provided by the invention.Diaphragm 9 covers and drives on the chamber 6, also can be as shown in Figure 4, and spatial group synthesized a chamber about actuator chamber 6 and pump chambers 3 were.10 is encapsulated layer, and 11 is silicon layer or PDMS layer.On the top of 11 middle chambers 3 are vibratile diaphragm structures 9, and the device 12 of driven diaphragm vibration is arranged in the above.Diaphragm drives can take multiple mode.Utilize the liquid in the diaphragm vibration pressing cavity.When diaphragm 9 vibration downwards, liquid in the pressing cavity 3 flows to the left and right sides of chamber.When diaphragm 9 upwards vibrated, pressure reduced in the chamber 3, the liquid of suction function suction chamber both sides.It is similar with bubble compression-expansion driving fluid that it transports principle, because the drag characteristic difference of left and right side loop in a vibrational period of diaphragm, can realize that liquid flows to pump discharge 5 from pump intake 1, reaches the effect of driving fluid.Along with diaphragm periodicity up-down vibration, liquid can be transported to outlet 5 constantly from entering the mouth 1.Regulate twin nuclei width, the degree of depth, regulate driving the control that chamber size or the like can realize the different flow scope.In addition, after the pump machine shaping, control diaphragm amplitude and vibration frequency can be controlled the flow of Micropump.
Claims (4)
1. Micropump with no moving member one-way valve, comprise pump chambers (3), the drive unit that links to each other with this chamber, pump inlet (1) and pump discharge (5), it is characterized in that: between pump chambers and pump inlet and pump discharge, be respectively equipped with one-way valve, described one-way valve adopts the different twin nuclei of positive and negative flowing pressure loss, the outlet of the twin nuclei of arranging in a side of pump inlet (1) (2) links to each other with pump chambers, and the import of the twin nuclei of arranging in pump discharge one side (4) links to each other with pump chambers.
2. according to the Micropump of the described one-way valve of claim 1, it is characterized in that: described drive unit adopts bubble shrinkage expansion driven structure, and this structure mainly comprises actuator chamber (6) and is arranged on the indoor resistance wire of actuator chamber (7).
3. according to the Micropump of the described one-way valve of claim 1, it is characterized in that: described drive unit adopts diaphragm vibratory drive structure, and this structure mainly comprises actuator chamber (6), covers the device (12) that diaphragm (9) on the actuator chamber and driven diaphragm are vibrated.
4. according to the Micropump of the described one-way valve of claim 3, it is characterized in that: described actuator chamber is arranged on a side of pump chambers or is up and down spatial group with pump chambers and closes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03137756 CN1462834A (en) | 2003-06-24 | 2003-06-24 | Micro pump with one-way valve not containing movable part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03137756 CN1462834A (en) | 2003-06-24 | 2003-06-24 | Micro pump with one-way valve not containing movable part |
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| Publication Number | Publication Date |
|---|---|
| CN1462834A true CN1462834A (en) | 2003-12-24 |
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|---|---|---|---|
| CN 03137756 Pending CN1462834A (en) | 2003-06-24 | 2003-06-24 | Micro pump with one-way valve not containing movable part |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102885671A (en) * | 2011-07-22 | 2013-01-23 | 研能科技股份有限公司 | Ear canal cleaning device |
| CN106438339A (en) * | 2016-12-20 | 2017-02-22 | 海南大学 | No-valve reciprocating micro pump |
| CN112460002A (en) * | 2020-12-10 | 2021-03-09 | 无锡费曼科技有限公司 | Thermally-driven resonant micro pump |
| CN113175423A (en) * | 2021-03-29 | 2021-07-27 | 北京工业大学 | Induction heating heat bubble driving heat insulation type micropump and preparation method thereof |
| CN114728281A (en) * | 2019-10-18 | 2022-07-08 | 瞬知（广州）健康科技有限公司 | System and method for infusing fluid |
-
2003
- 2003-06-24 CN CN 03137756 patent/CN1462834A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102885671A (en) * | 2011-07-22 | 2013-01-23 | 研能科技股份有限公司 | Ear canal cleaning device |
| CN102885671B (en) * | 2011-07-22 | 2015-05-13 | 研能科技股份有限公司 | Ear canal cleaning device |
| CN106438339A (en) * | 2016-12-20 | 2017-02-22 | 海南大学 | No-valve reciprocating micro pump |
| CN106438339B (en) * | 2016-12-20 | 2018-09-11 | 海南大学 | A kind of reciprocating Micropump of valveless type |
| CN114728281A (en) * | 2019-10-18 | 2022-07-08 | 瞬知（广州）健康科技有限公司 | System and method for infusing fluid |
| CN114728281B (en) * | 2019-10-18 | 2023-11-03 | 瞬知（广州）健康科技有限公司 | System and method for infusing fluid |
| US11976646B2 (en) | 2019-10-18 | 2024-05-07 | Healtell (Guangzhou) Medical Technology Co., Ltd | Microfluidic chip pumps and methods thereof |
| CN112460002A (en) * | 2020-12-10 | 2021-03-09 | 无锡费曼科技有限公司 | Thermally-driven resonant micro pump |
| CN113175423A (en) * | 2021-03-29 | 2021-07-27 | 北京工业大学 | Induction heating heat bubble driving heat insulation type micropump and preparation method thereof |
| CN113175423B (en) * | 2021-03-29 | 2022-06-07 | 北京工业大学 | Induction heating thermal bubble driving heat insulation type micropump and preparation method thereof |
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