CN109322817B - A kind of Micropump manipulating microfluid - Google Patents

Abstract

The invention discloses a kind of Micropumps for manipulating microfluid, comprising: the pump housing, the pump housing include bottom thin film, side wall and top；Vibration generating arrangement, the vibration generating arrangement are attached on the lower surface of the bottom thin film of the pump housing；The upper surface of the bottom thin film is arranged in blade, the blade, including open end and the rear end reversed with open end；And the front of the open end is arranged in check valve, the check valve.Vibration generating arrangement generates random vibration, and micro- blade in runner is driven to do periodic vibration, being capable of directed driven fluid under the booster action of check valve since the particularity of paddle blade structure can cause pressure differential water flowing in runner.This vibration generating arrangement does not intervene the non-active operation mechanism in microfluidic system, the problems such as power consumption for avoiding traditional displacement-type oscillating column pump is big, operating voltage is high, fever is serious, pump housing working efficiency will not be interfered, while can be directed to driving fluid under random vibration.Due to using 3D printing integral forming process, manufacturing cycle is not only greatly reduced, but also broken the limitation of complex three-dimensional paddle molding.

Description

A kind of Micropump manipulating microfluid

Technical field

Field of the present invention belongs to mechanical displacement type micro pump technology field, and in particular to one kind is based on using paddle under random vibration Leaf actively manipulates the Micropump of fluid.

Background technique

Micro-fluid pump is a kind of common device of MEMS, it is both driver and actuator, can be effective Manipulate microfluid.It is lost with low sample, extremely short analytical cycle, high flow capacity and the advantages that portability, in chemical-biological point The fields such as analysis, dynamic environment quality monitoring, chemical-biological sensing, drug delivery, molecule separation, chip cooling have extensive fortune With.

According to its working principle, Micropump can be divided into mechanical displacement type Micropump and two kinds of non-mechanical Micropump.Because of machine Tool declines pump with pressure and flux controllable advantage, has been a hot spot of research, current main commercialization micropump system Principle is also based on the working mechanism of mechanical displacement type Micropump.Partha Kumar Das et al. is in document Mechanical Micropumps And Their Applications:A Review,7th BSME International Conference Several machinery common at present are systematically summarised on Thermal Engineering, 978-0-7354-1525-6 to decline Pump, and the commercialization Micropump product based on piezoelectric effect has been highlighted in the application of glucose micro-injection and future prospect.

Micro-processing technology, such as photoetching, etching, nano impression and laser direct-writing patterning process are the main manufactures of Micropump Means, but often preparation process needs to undergo repeated multiple times graphical process, simultaneously because the limitation of technology itself and It is difficult to realize the production of complex three-dimensional structure, these limitations leverage the manufacture of complex micro structure.As micro-nano 3D is beaten The rapid development of print technology, the 3D printing technique with rapid shaping advantage are expected to solve the bottleneck problem of conventional machining process, Rapid prototype development and verifying can be not only carried out, but also can not theoretically be limited by complex three-dimensional structure. D.J.Thomas et al. is in document 3-D printed composite microfluidic pump for wearable It is described in biomedical applications, Additive Manufacturing 9 (2016) 30-38 a kind of based on 3D The composite piezoelectric oscillating column pump of printing.It can work by being simply bonded using the cavity and piezoelectric vibrator of 3D printing technique printing Make, greatly simplifie the R&D cycle, has widened the range of research.But it due to the working principle based on piezoelectricity, still faces The problems such as power consumption is high, and driving flow is low.

Currently, traditional mechanical displacement type Micropump depends on vibration film, in piezoelectric effect, electrostatic force, electromagnetic force Or generating period moves back and forth under the action of thermal stress, to oppress liquid chamber periodic compression and diastole to drive stream Body flows in and out.But this driving method needs high driving voltage and power consumption, commonly greater than the safe operating voltage of human body, Fuel factor caused by high power consumption can reduce the working efficiency of Micropump simultaneously, or even influence the performance of specialized fluids.

In order to get rid of the limitation of vibration film, also there is researcher to attempt to drive microfluid based on other principles.Yang Qu And Junjie Zhou et al. is in document Lumped parameter model and numerical model of vapor Bubble-driven valve-less micro-pump, Advances in Mechanical Engineering 9 (2007) a kind of valve free pump system driven using steam bubble is reported in 1-7, by the heater of heating chamber bottom, Cavity periodically generates steam bubble, and the generation of bubble drives fluid fortune with the variation that can cause chamber interior pressure is buried in oblivion in turn It is dynamic.Although the not intervention of vibration film, still there is the very high defect of power consumption due to needing to cause to heating installation power supply, simultaneously High temperature chamber leads to the fluid for being suitable only for high temperature invariance.

Summary of the invention

The invention patent is the deficiency for existing mechanical displacement type Micropump, proposes one kind under low-voltage and low-power consumption The Micropump of the new mechanism of work improves manipulation and driving capability to microfluid, overcomes tradition displacement and declines and pumps high power consumption With the limitation of high voltage.

According to one embodiment of present invention, a kind of Micropump manipulating microfluid is provided, comprising:

The pump housing, the pump housing include bottom thin film, side wall and top, and two side walls are fixed structure, and bottom is as vibration Film

Vibration generating arrangement, the vibration generating arrangement are attached on the lower surface of the bottom thin film of the pump housing；

The upper surface of the bottom thin film is arranged in blade, the blade, including open end and with open end it is reversed after End；And

The front of the open end is arranged in check valve, the check valve.

In one embodiment of the invention, the blade is V-arrangement, U-shaped or Y shape.Have using the particularity of paddle blade structure Effect driving microfluid.The shape of the blade can customize, for different traffic requirements, can design different shape, size, The blade of density.

In one embodiment of the invention, the blade includes the array that multiple blades are formed.The blade is in runner Interior distribution, thus it is possible to vary driving flow.

In one embodiment of the invention, the center of the bottom thin film is arranged in the blade, at a distance from two sides It is of substantially equal.

In one embodiment of the invention, the vibration generating arrangement is micro motor, for generating random vibration.It is described Micro motor has extremely low cut-in voltage, works at the same time voltage and power consumption is also very low.

In one embodiment of the invention, the vibration generating arrangement is fixed on the bottom of the pump housing by adhesive The lower surface of film, thus as random vibration source.

In one embodiment of the invention, the side wall of the pump housing is fixed, and the vibration generating arrangement generates and bottom The parallel random vibration of film front-rear direction.

In one embodiment of the invention, check valve includes elastic piece and baffle, when check valve in the closure state, Elastic piece and baffle partly overlap, and when positive direction has fluid to flow through, elastic piece positive deflection, check valve is opened.

In one embodiment of the invention, the pump housing, blade and check valve pass through micro-nano 3D printing technique one The material of molding, the pump housing uses 3D printing flexible glue material.

In one embodiment of the invention, the thickness of the pump housing bottom thin film is in the range of 100-500 microns；

The width of flow path of the pump housing is in the range of 5-10 millimeters；

The width of the blade is in the range of 500-1000 microns, highly in the range of 3-6 millimeters；

In the range of 200-500 microns, width highly exists the thickness of the check valve in the range of 5-10 millimeters In the range of 5.5-10.5 millimeters, the thickness of the check valve is adjustable, is preferably designed to have certain rigidity, such as thickeies, increases Deng, prevent repeatedly open after fatigue failure.

In the present invention, the spacing of the blade and side wall of flow channel be it is adjustable, when fluid flowing during, side wall conduct The path of fluid flowing, during blade extrusion fluid, relatively narrow spacing helps to improve the speed of fluid, it is meant that energy Enough improve fluid flow.But narrow runner, which will lead to fluid, smooth to be flowed through, or even can hinder the flowing of fluid.So When designing blade distribution, it should be taken into account that fluid flows through size and the direction in path.

It is described by above structure it is found that the invention proposes the blades driven based on random vibration to orient the micro- of manipulation fluid Pump this novel micropump system.As soon as can draw blade it is only necessary to the driving of random vibration and vibrate and then drive fluid Flowing.The fluid of upset can be directed towards the direction flowing of design by the particularity for the paddle blade structure that the present invention designs.Into And flow controlling capability is improved under the booster action of the check valve of design.

Compared with prior art, beneficial effects of the present invention are as follows:

The defect that the present invention is high to tradition machinery displacement-type Micropump power consumption, operating voltage is high is proposed based on low-voltage, low The micro motor driving method of power consumption.Its driving voltage is well below human safety voltage, and the course of work is without obviously fever etc. Problem.

Further, the present invention is by the way of programmable blade directed driven microfluid, by random conversion of motion For the controllable manipulation ability of a kind of pair of fluid.Simultaneously as micro motor is encapsulated in outside the pump housing, do not enter into inside microfluid, no The behavior of internal fluid can be interfered.And the problems such as driving source that present Micropump has is directly entered fluid, and some is because of fuel factor It will affect the movement of fluid, reduce driving capability.The present invention using this vibration by the way of, will not influence the attribute of fluid, So being applicable in all fluid drivings.

Meanwhile the introducing of emerging minute yardstick 3D printing technique, preparation process is greatly simplified, research and development week is shortened Phase.The advantage of the unrestricted complex three-dimensional structure of 3D printing technique itself, it might even be possible to the blade of complex-curved stereochemical structure is constructed, The use scope of micro fabrication is widened.

Detailed description of the invention

For the above and other advantages and features for each embodiment that the present invention is furture elucidated, will be presented with reference to attached drawing The more specific description of various embodiments of the present invention.It is appreciated that these attached drawings only describe exemplary embodiments of the invention, therefore It is not to be regarded as being restriction on its scope.In the accompanying drawings, in order to cheer and bright, identical or corresponding component will use identical or class As mark indicate.

Fig. 1 shows the stereoscopic schematic diagram of the Micropump of manipulation microfluid according to an embodiment of the invention.

Fig. 2 shows the cross sectional elevations of the Micropump of manipulation microfluid according to an embodiment of the invention.

Fig. 3 shows the sectional top view of the Micropump of manipulation microfluid according to an embodiment of the invention.

Fig. 4 shows voltage-power consumption profile figure of micro motor according to an embodiment of the invention.

Fig. 5 shows the flow chart of production Micropump according to an embodiment of the invention.

Specific embodiment

In the following description, with reference to each embodiment, present invention is described.However, those skilled in the art will recognize Know can in the case where none or multiple specific details or with other replacements and/or addition method, material or component Implement each embodiment together.In other situations, well known structure, material or operation are not shown or are not described in detail in order to avoid making this The aspects of each embodiment of invention is obscure.Similarly, for purposes of explanation, specific quantity, material and configuration are elaborated, with Comprehensive understanding to the embodiment of the present invention is just provided.However, the present invention can be implemented in the case where no specific detail.This Outside, it should be understood that each embodiment shown in the accompanying drawings is illustrative expression and is not drawn necessarily to scale.

In the present specification, the reference of " one embodiment " or " embodiment " is meaned to combine embodiment description A particular feature, structure, or characteristic is included at least one embodiment of the invention.Occur in everywhere in this specification short Language " in one embodiment " is not necessarily all referring to the same embodiment.

The defect that the present invention is high to tradition machinery displacement-type Micropump power consumption, operating voltage is high is proposed based on low-voltage, low The micro motor driving method of power consumption.The driving voltage of Micropump disclosed by the invention is well below human safety voltage, the course of work The problems such as obviously not generating heat.

Specifically, the present invention provides a kind of active Micropump based on blade driving microfluid, the Micropump is in the external world Horizontal direction random vibration driving under, the blade with special construction is transferred vibrations to by pump housing bottom thin film, Enable blade generating period of reciprocating vibration, when the blade being located in runner squeezes microfluid, can not only disturb fluid Flowing, and because the particularity of structure can generate pressure difference in the front and back of blade, force the fluid of upset towards the side of design To flowing.The check valve in front of blade can be opened valve when fluid flows out simultaneously, and valve is closed when fluid flows into.Unidirectional Under the auxiliary of micro-valve, fluid can be effectively manipulated, is flowed towards specified direction.

Fig. 1 shows the stereoscopic schematic diagram of the Micropump of manipulation microfluid according to an embodiment of the invention.Fig. 2 shows roots According to the cross sectional elevation of the Micropump of the manipulation microfluid of one embodiment of the present of invention.As illustrated in fig. 1 and 2, Micropump 100 includes pump Body 110, vibration generating arrangement 120, blade 130, check valve 140.The pump housing 110 includes bottom thin film 111, side wall 112, side wall 113 and top 114.During the work time, side wall 112, side wall 113 are fixed, and are equal to and are limited the transverse direction of bottom thin film 111 Movement.Vibration generating arrangement 120 is attached on the lower surface of bottom thin film 111 of the pump housing 110.In specific embodiments of the present invention In, vibration generating arrangement 120 can be fixed on the lower surface of bottom thin film 111 of the pump housing 110 by adhesive.Blade 130 The middle part in the upper surface of bottom thin film 111 can be set, that is, with it is essentially identical at a distance from side wall 112, side wall 113.Blade 130 can be U-shaped, have open end 131 and the rear end 132 reversed with open end.It in a specific embodiment of the present invention, can be with One or more blades 130 are arranged in the surface of vibration generating arrangement 120, the open end of each blade 130 is towards same One direction.The front of the open end 131 of blade 130 is arranged in check valve 140.Check valve 140 includes elastic piece 141 and baffle 142.In its natural state, check valve 140 is in closed state, and elastic piece 141 and baffle 142 partly overlap.When in positive direction When having fluid to flow through, 141 positive deflection of elastic piece, valve is opened.Under the action of check valve 140, stream can be effectively controlled The flow direction of body.

In a specific embodiment of the present invention, vibration generating arrangement 120 can be micro motor.For example, micro motor can be Flat vibration motor.When applying a lower direct-current working volts to micro motor, before micro motor generation and bottom thin film 111 The parallel random vibration of rear direction (that is, the direction for pumping intracorporal pipeline) drives bottom thin film 111 to be subjected to displacement, because of side wall 112 and side wall 113 be fixed, it is meant that 111 two sides of bottom thin film are fixed and front-rear direction is free, so vibration Energy is mainly used as being displaced in the front-back direction in bottom thin film 111, without rippling.As vibration medium, bottom Vibrational energy can effectively be passed to U-shaped blade 130 by film 111, cause each blade to do of reciprocating vibration.Miniflow inside runner Body can flow under blade cyclic reciprocating extrusion, and the collaborative work of multiple blades can manipulate fluid towards directed flow.Front end Check valve 140 can further manipulate fluid towards assigned direction flow, thus realize microfluid is effectively manipulated and is driven.

Fig. 3 shows the sectional top view of the Micropump of manipulation microfluid according to an embodiment of the invention.It is shown in Fig. 3 Embodiment in, for the width of the pump housing 110 in the range of 10~20 millimeters, length is in the range of 30~50 millimeters；The U-shaped The single U-shaped blade thickness of blade array 130 is in the range of 200~500 microns, range of the width at 500~1000 microns It is interior, highly in the range of 2~5 millimeters, vibrational energy can be efficiently converted to the driving force to microfluid.Bottom thin film 11 thickness is in the range of 100~500 microns.30 millimeters of the length of side wall, it is 2 millimeters wide.

In the embodiment shown in fig. 3, the length of the check valve 140 highly exists in the range of 5.5~10.5 millimeters In the range of 5~10 millimeters, thickness is in the range of 200~500 microns, to there is suitable toughness that can open and close in time It closes.Above-mentioned all structures of Micropump can be integrally formed by micro-nano 3D printing technique, to meet various complex three-dimensional structures Forming requirements, while flexible glue material used have good flexibility, can efficiently transfer vibrations in micro-structure.Respectively Selecting for kind size, can guarantee that energy can efficiently be used in the manipulation to fluid, while stability with higher, The Micropump is enhanced in the application of every field.

Fig. 4 shows voltage-power consumption profile figure of micro motor according to an embodiment of the invention.As shown in figure 4, micro- horse Up to as a random vibration source, there is low-down cut-in voltage, a button cell is enough continuously to power for its long-time； Lower power consumption does not have secondary hot interference problem simultaneously.

In some embodiments of the invention, size, shape, density, the distribution of blade are all adjustable parameters.Example Such as, the shape of blade can be V-arrangement, the shapes such as U-shaped or Y shape.The array of multiple blades, blade array can be set in the pump housing It may include the blade of one or more shape or size, to form the Micropump of different driving ability, realize flux controllable micro- Pumping system.

In some embodiments of the invention, the spacing of blade and side wall of flow channel is adjustable, in the process of fluid flowing In, the path that side wall is flowed as fluid, during blade extrusion fluid, relatively narrow spacing helps to improve the speed of fluid Degree, it is meant that can be improved fluid flow.But narrow runner, which will lead to fluid, smooth to be flowed through, or even can hinder fluid Flowing.So should be taken into account that fluid flows through size and the direction in path when designing blade distribution.

Micropump disclosed by the invention can be under a random vibration, by blade come efficient manipulation fluid.Low electricity The introducing of pressure, low-power consumption microdrive will not generate the hot interference problem of tradition machinery displacement-type Micropump.Because being beaten using 3D Print technology is integrally formed, and not only enormously simplifies technique, but also breach limitation of traditional micro manufacturing technique to micro-structure, can be with Construct complex three-dimensional micro-structure.The optimization design of blade, can be converted to random vibration can be to the efficient manipulation of fluid.

Fig. 5 shows the flow chart of production Micropump according to an embodiment of the invention.

Firstly, using minute yardstick 3D printing technique, the pump housing, blade, micro-valve are integrally formed in step 510.In the present invention Embodiment in, the pump housing of 3D printing is flexible glue material, has preferable flexible and elasticity.In the preparation process of 3D printing, beat Thickness selected by print process is 25-50 microns.100-500 microns of thickness of printing pump housing film are advisable.The blade of 3D printing will have Certain rigidity, cannot be too soft, otherwise can not drive microfluid because driving force is too small.

In step 520, micro motor is encapsulated on pump housing bottom thin film with epoxy resin, device formation.

The defect that the present invention is high to tradition machinery displacement-type Micropump power consumption, operating voltage is high is proposed based on low-voltage, low The micro motor driving method of power consumption.Its driving voltage is well below human safety voltage, and the course of work is without obviously fever etc. Problem.

Further, the present invention is by the way of programmable blade directed driven microfluid, by random conversion of motion For the controllable manipulation ability of a kind of pair of fluid.Simultaneously as micro motor is encapsulated in outside the pump housing, do not enter into inside microfluid, no The behavior of internal fluid can be interfered.And the problems such as driving source that present Micropump has is directly entered fluid, and some is because of fuel factor It will affect the movement of fluid, reduce driving capability.The present invention using this vibration by the way of, will not influence the attribute of fluid, So being applicable in all fluid drivings.

Meanwhile the introducing of emerging minute yardstick 3D printing technique, preparation process is greatly simplified, research and development week is shortened Phase.The advantage of the unrestricted complex three-dimensional structure of 3D printing technique itself, it might even be possible to the blade of complex-curved stereochemical structure is constructed, The use scope of micro fabrication is widened.

Although described above is various embodiments of the present invention, however, it is to be understood that they are intended only as example to present , and without limitation.For those skilled in the relevant art it is readily apparent that various combinations, modification can be made to it Without departing from the spirit and scope of the invention with change.Therefore, the width of the invention disclosed herein and range should not be upper It states disclosed exemplary embodiment to be limited, and should be defined according only to the appended claims and its equivalent replacement.

Claims (10)

1. a kind of Micropump for manipulating microfluid, comprising:

The pump housing, the pump housing include bottom thin film, side wall and top；

Vibration generating arrangement, the vibration generating arrangement are attached on the lower surface of the bottom thin film of the pump housing；

The upper surface of the bottom thin film is arranged in blade, the blade, including open end and the rear end reversed with open end；With And

The front of the open end is arranged in check valve, the check valve.

2. Micropump as described in claim 1, which is characterized in that the blade is V-arrangement, U-shaped or Y shape.

3. Micropump as described in claim 1, which is characterized in that the blade includes the array that multiple blades are formed.

4. Micropump as described in claim 1, which is characterized in that the center of the bottom thin film is arranged in the blade, with two The distance of side is of substantially equal.

5. Micropump as described in claim 1, which is characterized in that the vibration generating arrangement is micro motor.

6. Micropump as described in claim 1, which is characterized in that the vibration generating arrangement is fixed on the pump by adhesive The lower surface of the bottom thin film of body.

7. Micropump as described in claim 1, which is characterized in that the side wall of the pump housing is fixed, and bottom thin film two sides are to be consolidated Fixed and front-rear direction is free, therefore the vibration generating arrangement generates the random vibration parallel with bottom thin film front-rear direction It is dynamic.

8. Micropump as described in claim 1, which is characterized in that check valve includes elastic piece and baffle, is closed when check valve is in When conjunction state, elastic piece and baffle partly overlap, and when positive direction has fluid to flow through, elastic piece positive deflection, check valve is beaten It opens.

9. Micropump as described in claim 1, which is characterized in that the pump housing, blade and check valve pass through micro-nano 3D printing Technology is integrally formed, and the material of the pump housing uses 3D printing flexible glue material.

10. Micropump as described in claim 1, which is characterized in that

The thickness of the pump housing bottom thin film is in the range of 100-500 microns；

The width of flow path of the pump housing is in the range of 5-10 millimeters；

The width of the blade is in the range of 500-1000 microns, highly in the range of 3-6 millimeters；

For the thickness of the check valve in the range of 200-500 microns, width is in the range of 5-10 millimeters, highly in 5.5- 10.5 in the range of millimeter.