CN1800436A - 用于对准托盘和托盘固定器的装置 - Google Patents
用于对准托盘和托盘固定器的装置 Download PDFInfo
- Publication number
- CN1800436A CN1800436A CNA2006100004313A CN200610000431A CN1800436A CN 1800436 A CN1800436 A CN 1800436A CN A2006100004313 A CNA2006100004313 A CN A2006100004313A CN 200610000431 A CN200610000431 A CN 200610000431A CN 1800436 A CN1800436 A CN 1800436A
- Authority
- CN
- China
- Prior art keywords
- pallet
- fixer
- aim
- substrate
- guidance axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (27)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050000953 | 2005-01-05 | ||
KR1020050000952 | 2005-01-05 | ||
KR1020050000948 | 2005-01-05 | ||
KR1020050000948A KR100639003B1 (ko) | 2005-01-05 | 2005-01-05 | 기판트레이홀더용 정렬장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1800436A true CN1800436A (zh) | 2006-07-12 |
CN100554499C CN100554499C (zh) | 2009-10-28 |
Family
ID=36810637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100004313A Active CN100554499C (zh) | 2005-01-05 | 2006-01-05 | 用于对准托盘和托盘固定器的装置 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100639003B1 (zh) |
CN (1) | CN100554499C (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102362005A (zh) * | 2009-03-25 | 2012-02-22 | 芝浦机械电子株式会社 | 溅射成膜装置 |
CN107002224A (zh) * | 2014-11-17 | 2017-08-01 | 夏普株式会社 | 蒸镀装置、蒸镀方法及有机电致发光元件的制造方法 |
CN109023234A (zh) * | 2018-08-09 | 2018-12-18 | 深圳市华星光电半导体显示技术有限公司 | 一种掩膜板更换装置及更换方法 |
CN110066981A (zh) * | 2019-06-17 | 2019-07-30 | 浙江晶驰光电科技有限公司 | 正装基片定位装置及基片装载方法 |
CN110557954A (zh) * | 2018-04-03 | 2019-12-10 | 应用材料公司 | 用于将载体夹持到装置的布置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019192679A1 (en) * | 2018-04-03 | 2019-10-10 | Applied Materials, Inc. | Apparatus and vacuum system for carrier alignment in a vacuum chamber, and method of aligning a carrier |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6589382B2 (en) | 2001-11-26 | 2003-07-08 | Eastman Kodak Company | Aligning mask segments to provide a stitched mask for producing OLED devices |
-
2005
- 2005-01-05 KR KR1020050000948A patent/KR100639003B1/ko not_active IP Right Cessation
-
2006
- 2006-01-05 CN CNB2006100004313A patent/CN100554499C/zh active Active
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102362005A (zh) * | 2009-03-25 | 2012-02-22 | 芝浦机械电子株式会社 | 溅射成膜装置 |
CN102362005B (zh) * | 2009-03-25 | 2014-06-18 | 芝浦机械电子株式会社 | 溅射成膜装置 |
CN107002224A (zh) * | 2014-11-17 | 2017-08-01 | 夏普株式会社 | 蒸镀装置、蒸镀方法及有机电致发光元件的制造方法 |
CN107002224B (zh) * | 2014-11-17 | 2019-07-02 | 夏普株式会社 | 蒸镀装置、蒸镀方法及有机电致发光元件的制造方法 |
CN110557954A (zh) * | 2018-04-03 | 2019-12-10 | 应用材料公司 | 用于将载体夹持到装置的布置 |
CN109023234A (zh) * | 2018-08-09 | 2018-12-18 | 深圳市华星光电半导体显示技术有限公司 | 一种掩膜板更换装置及更换方法 |
CN109023234B (zh) * | 2018-08-09 | 2020-08-28 | 深圳市华星光电半导体显示技术有限公司 | 一种掩膜板更换装置及更换方法 |
CN110066981A (zh) * | 2019-06-17 | 2019-07-30 | 浙江晶驰光电科技有限公司 | 正装基片定位装置及基片装载方法 |
CN110066981B (zh) * | 2019-06-17 | 2023-11-28 | 浙江晶驰光电科技有限公司 | 正装基片定位装置及基片装载方法 |
Also Published As
Publication number | Publication date |
---|---|
CN100554499C (zh) | 2009-10-28 |
KR20060080468A (ko) | 2006-07-10 |
KR100639003B1 (ko) | 2006-10-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20090109 Address after: Gyeonggi Do, South Korea Applicant after: Samsung Mobile Display Co., Ltd. Address before: Gyeonggi Do, South Korea Applicant before: Samsung SDI Co., Ltd. |
|
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG MOBILE DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG SDI CO., LTD. Effective date: 20090109 |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG MOBILE DISPLAY CO., LTD. Effective date: 20121018 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121018 Address after: Gyeonggi Do, South Korea Patentee after: Samsung Display Co., Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Mobile Display Co., Ltd. |