CN1739927A - 大直径SiC单晶的切割方法 - Google Patents
大直径SiC单晶的切割方法 Download PDFInfo
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- CN1739927A CN1739927A CN 200510044587 CN200510044587A CN1739927A CN 1739927 A CN1739927 A CN 1739927A CN 200510044587 CN200510044587 CN 200510044587 CN 200510044587 A CN200510044587 A CN 200510044587A CN 1739927 A CN1739927 A CN 1739927A
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- Prior art keywords
- cutting
- cut
- sic monocrystal
- sic
- diamond
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- 238000005520 cutting process Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 25
- 239000010432 diamond Substances 0.000 claims abstract description 23
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 23
- 239000013078 crystal Substances 0.000 claims abstract description 13
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 238000013461 design Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000012545 processing Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 39
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 37
- 235000012431 wafers Nutrition 0.000 description 17
- 238000000059 patterning Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 1
- 229910001573 adamantine Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2005100445877A CN100348391C (zh) | 2005-09-13 | 2005-09-13 | 大直径SiC单晶的切割方法 |
Applications Claiming Priority (1)
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CNB2005100445877A CN100348391C (zh) | 2005-09-13 | 2005-09-13 | 大直径SiC单晶的切割方法 |
Publications (2)
Publication Number | Publication Date |
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CN1739927A true CN1739927A (zh) | 2006-03-01 |
CN100348391C CN100348391C (zh) | 2007-11-14 |
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ID=36092532
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CNB2005100445877A Active CN100348391C (zh) | 2005-09-13 | 2005-09-13 | 大直径SiC单晶的切割方法 |
Country Status (1)
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CN (1) | CN100348391C (zh) |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101879757A (zh) * | 2010-04-01 | 2010-11-10 | 浙江硅宏电子科技有限公司 | 一种晶棒在多线切割机中的安装方法 |
CN101913210A (zh) * | 2010-08-19 | 2010-12-15 | 英利能源(中国)有限公司 | 多晶硅破锭方法 |
CN101927533A (zh) * | 2010-08-19 | 2010-12-29 | 英利能源(中国)有限公司 | 单晶棒破方方法 |
CN102198701A (zh) * | 2011-05-11 | 2011-09-28 | 山东大学 | 一种刻面碳化硅宝石成品的加工方法 |
CN103847032A (zh) * | 2014-03-20 | 2014-06-11 | 德清晶辉光电科技有限公司 | 一种大直径超薄石英晶片的生产工艺 |
US9028948B2 (en) | 2009-08-14 | 2015-05-12 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body, and methods of forming thereof |
US9067268B2 (en) | 2009-08-14 | 2015-06-30 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body |
US9186816B2 (en) | 2010-12-30 | 2015-11-17 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9211634B2 (en) | 2011-09-29 | 2015-12-15 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated substrate body having a barrier layer, and methods of forming thereof |
US9254552B2 (en) | 2012-06-29 | 2016-02-09 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9278429B2 (en) | 2012-06-29 | 2016-03-08 | Saint-Gobain Abrasives, Inc. | Abrasive article for abrading and sawing through workpieces and method of forming |
US9375826B2 (en) | 2011-09-16 | 2016-06-28 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
CN105818284A (zh) * | 2016-04-08 | 2016-08-03 | 山东大学 | 一种利用金刚石线和金刚石砂浆同时切割6 英寸及以上尺寸SiC 单晶的方法 |
US9409243B2 (en) | 2013-04-19 | 2016-08-09 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9533397B2 (en) | 2012-06-29 | 2017-01-03 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
CN107052452A (zh) * | 2014-04-30 | 2017-08-18 | 硅电子股份公司 | 由工件同时切割出许多特别是均匀厚度的切片的方法 |
US9878382B2 (en) | 2015-06-29 | 2018-01-30 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9902044B2 (en) | 2012-06-29 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
CN108588675A (zh) * | 2018-04-24 | 2018-09-28 | 苏州宏久航空防热材料科技有限公司 | 一种金刚石切割线及其制备方法 |
CN109950131A (zh) * | 2019-02-28 | 2019-06-28 | 天津大学 | 以非极性晶面SiC为衬底的单层石墨烯及可控生长方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003080466A (ja) * | 2001-09-10 | 2003-03-18 | Akimichi Koide | ワイヤソー切断装置に用いるワイヤー工具とワイヤー工具の作製方法、および、ワイヤソーによる切断方法 |
CN1152422C (zh) * | 2002-04-25 | 2004-06-02 | 张彩根 | 制造晶片用的碳化硅舟的切割制造方法 |
CN2678862Y (zh) * | 2004-03-15 | 2005-02-16 | 占志斌 | 一种用于切割硬脆材料的金刚石线锯 |
CN1586855A (zh) * | 2004-08-20 | 2005-03-02 | 张革 | 台式大尺寸精密金刚石线切割机 |
-
2005
- 2005-09-13 CN CNB2005100445877A patent/CN100348391C/zh active Active
Cited By (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9862041B2 (en) | 2009-08-14 | 2018-01-09 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body |
US9028948B2 (en) | 2009-08-14 | 2015-05-12 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body, and methods of forming thereof |
US9067268B2 (en) | 2009-08-14 | 2015-06-30 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body |
CN101879757A (zh) * | 2010-04-01 | 2010-11-10 | 浙江硅宏电子科技有限公司 | 一种晶棒在多线切割机中的安装方法 |
CN101913210A (zh) * | 2010-08-19 | 2010-12-15 | 英利能源(中国)有限公司 | 多晶硅破锭方法 |
CN101927533A (zh) * | 2010-08-19 | 2010-12-29 | 英利能源(中国)有限公司 | 单晶棒破方方法 |
CN101927533B (zh) * | 2010-08-19 | 2012-07-04 | 英利能源(中国)有限公司 | 单晶棒破方方法 |
CN101913210B (zh) * | 2010-08-19 | 2012-08-08 | 英利能源(中国)有限公司 | 多晶硅破锭方法 |
US9248583B2 (en) | 2010-12-30 | 2016-02-02 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9186816B2 (en) | 2010-12-30 | 2015-11-17 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
CN102198701A (zh) * | 2011-05-11 | 2011-09-28 | 山东大学 | 一种刻面碳化硅宝石成品的加工方法 |
CN102198701B (zh) * | 2011-05-11 | 2014-05-14 | 山东大学 | 一种刻面碳化硅宝石成品的加工方法 |
US9375826B2 (en) | 2011-09-16 | 2016-06-28 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9211634B2 (en) | 2011-09-29 | 2015-12-15 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated substrate body having a barrier layer, and methods of forming thereof |
US9533397B2 (en) | 2012-06-29 | 2017-01-03 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9687962B2 (en) | 2012-06-29 | 2017-06-27 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9254552B2 (en) | 2012-06-29 | 2016-02-09 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US10596681B2 (en) | 2012-06-29 | 2020-03-24 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9278429B2 (en) | 2012-06-29 | 2016-03-08 | Saint-Gobain Abrasives, Inc. | Abrasive article for abrading and sawing through workpieces and method of forming |
US9902044B2 (en) | 2012-06-29 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US9409243B2 (en) | 2013-04-19 | 2016-08-09 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
CN103847032A (zh) * | 2014-03-20 | 2014-06-11 | 德清晶辉光电科技有限公司 | 一种大直径超薄石英晶片的生产工艺 |
CN103847032B (zh) * | 2014-03-20 | 2016-01-06 | 德清晶辉光电科技有限公司 | 一种大直径超薄石英晶片的生产工艺 |
CN107052452A (zh) * | 2014-04-30 | 2017-08-18 | 硅电子股份公司 | 由工件同时切割出许多特别是均匀厚度的切片的方法 |
CN107052452B (zh) * | 2014-04-30 | 2019-10-15 | 硅电子股份公司 | 由工件同时切割出许多特别是均匀厚度的切片的方法 |
US9878382B2 (en) | 2015-06-29 | 2018-01-30 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US10137514B2 (en) | 2015-06-29 | 2018-11-27 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
US10583506B2 (en) | 2015-06-29 | 2020-03-10 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
CN105818284A (zh) * | 2016-04-08 | 2016-08-03 | 山东大学 | 一种利用金刚石线和金刚石砂浆同时切割6 英寸及以上尺寸SiC 单晶的方法 |
CN108588675A (zh) * | 2018-04-24 | 2018-09-28 | 苏州宏久航空防热材料科技有限公司 | 一种金刚石切割线及其制备方法 |
CN109950131A (zh) * | 2019-02-28 | 2019-06-28 | 天津大学 | 以非极性晶面SiC为衬底的单层石墨烯及可控生长方法 |
CN109950131B (zh) * | 2019-02-28 | 2021-09-14 | 天津大学 | 以非极性晶面SiC为衬底的单层石墨烯及可控生长方法 |
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Publication number | Publication date |
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CN100348391C (zh) | 2007-11-14 |
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Owner name: SHANDONG TIANYUE ADVANCED MATERIALS TECHNOLOGY CO. Free format text: FORMER OWNER: SHANDONG UNIVERSITY Effective date: 20120131 |
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Effective date of registration: 20120131 Address after: Xinluo Avenue high tech Zone of Ji'nan City, Shandong province 250101 silver bearing No. 2008 building 3 storey block C room 304 Patentee after: Shandong Tianyue Advanced Material Technology Co., Ltd. Address before: Licheng Alexander Road in Ji'nan City, Shandong province 250100 No. 27 Patentee before: Shandong University |
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Denomination of invention: Great diameter SiC monocrystal cutting method Effective date of registration: 20130319 Granted publication date: 20071114 Pledgee: Qilu bank Limited by Share Ltd Ji'nan section shop branch Pledgor: Shandong Tianyue Advanced Material Technology Co., Ltd. Registration number: 2013990000158 |
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Date of cancellation: 20140331 Granted publication date: 20071114 Pledgee: Qilu bank Limited by Share Ltd Ji'nan section shop branch Pledgor: Shandong Tianyue Advanced Material Technology Co., Ltd. Registration number: 2013990000158 |
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Denomination of invention: Great diameter SiC monocrystal cutting method Effective date of registration: 20140331 Granted publication date: 20071114 Pledgee: Qilu bank Limited by Share Ltd Ji'nan section shop branch Pledgor: Shandong Tianyue Advanced Material Technology Co., Ltd. Registration number: 2014990000215 |
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Date of cancellation: 20150519 Granted publication date: 20071114 Pledgee: Qilu bank Limited by Share Ltd Ji'nan section shop branch Pledgor: Shandong Tianyue Advanced Material Technology Co., Ltd. Registration number: 2014990000215 |
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Denomination of invention: Great diameter SiC monocrystal cutting method Effective date of registration: 20150623 Granted publication date: 20071114 Pledgee: Weihai commercial bank Limited by Share Ltd Ji'nan branch Pledgor: Shandong Tianyue Advanced Material Technology Co., Ltd. Registration number: 2015990000495 |
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Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province Patentee after: Shandong Tianyue advanced technology Co., Ltd Address before: Room 304, 3 / F, block C, Yinhe building, 2008 Xinluo street, hi tech Zone, Jinan City, Shandong Province Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd. |