201115752 六、發明說明： 【發明所屬之技術領域】 本發明係關於製造黃銅礦化合物系積體型薄膜太陽電池 時之溝槽加工工具。 此處，所謂黃銅礦化合物除CIGS(Cu(In，Ga)Se2)外，還 包含 CIGSS(Cu(In，Ga)(Se，S)2)、CIS(CuInS2)等。 【先前技4紆】 在將黃銅礦化合物半導體作為光吸收層使用之薄膜太陽 電池中’-般係為在基板上_聯連接複數個單元電池而成 之積體型構造。 就先前之黃銅礦化合物系積體型薄膜太陽電池之製造方 法進行說明。圖7係顯示CIGS薄膜太陽電池之製造步驟之 模式圖。首先，如圖7⑷所示，藉由濺鍵法，於包含鈉的 玻璃（SLG)等之絕緣基板丨上，形成成為正極側之下部電極 電極層2後，#由劃刻加工而對於光吸收層形成前之 薄膜太陽電池基板形成下部電極分離用之溝槽s。 其後’如圖7(b)所示，藉由蒸鍍法、濺鍍法等，於心電 極層2上形成包含化合物半導體（CIGS)薄膜之光吸收層3， 且藉由CBD法（化學浴沉積法）形成包含用於異質接八之 W薄膜等之緩衝層4’且於其上形成包含Zn〇薄膜之絕緣 層5。而後，對於透明電極層形成前之薄膜太陽電池，在 從下部電極分離用之溝槽s於橫向離開特定距離之位置， 藉由劃刻加工而形成達於M。電極層2之電極間接觸用 槽Ml。 146243.doc 201115752 其次，如圖7(c)所示，從絕緣層5上形成作為包含211〇 : A1薄膜之上部電極之透明電極層6 ’作為具備利用光電轉 換之發電上所必要之各機能層之太陽電池基板，並藉由劃 刻加工形成達於下部之Mo電極層2之電極分離用溝槽M2。 在上述之製造積體型薄膜太陽電池之步驟中，作為藉由 劃刻加工而將電極分離用之溝槽Ml及M2予以溝槽加工之 技術，迄今使用的是雷射劃刻法與機械劃刻法。 例如如專利文獻1中所揭示，雷射劃刻法係藉由電弧燈 等之連續放電燈，照射激發Nd : YAG結晶所發送之雷射 光，而形成電極分離用之溝槽。該方法對於光吸收層形成 後之薄膜太陽電池基板形成溝槽之際，劃刻時因雷射光之 熱而有光吸收層3之光電轉換特性劣化之虞。 例如如專利文獻2及3中所揭示，機械劃刻法係將前端呈 朝前漸細狀之金屬針（針具）等之溝槽加工工具之刀，,、，一 面施與特定之壓力壓抵於基板，一面使其移動，藉此加工 電極分離用之溝槽之技術。目前該機械劃刻 夕被·使用。 [專利文獻1]日本特開平11-3128 15號公報 [專利文獻2]日本特開2002-94089號公報 [專利文獻3]曰本特開20〇4-115356號公報 【發明内容】 [發明所欲解決之問題] 在先前之機械劃刻法中所使用之溝槽加工 ^ 具包含專利 文獻2及專利文獻3中揭示者，且以於主體之哉 之則^部設置有 一個刀尖之形狀構成。將如此形狀之溝槽加 日加工工具安裝固 146243.doc 201115752 定於劃刻裝置之保持具 膜太陽電池，-面沿著劃刻=…具，抵於薄 行溝槽加工。 W預-線相對性移動，藉此可進 :耗以Γ之刀尖所形成之溝槽加工工具，因使用而 予=、:缺損之情況時，有必要每次都從保持具 拆卸研磨'或更換新品，裝卸實為麻煩。 槽力=，本發明之首要目的在於提供一種太陽電池用之溝 i本身工具’其在刀尖磨耗時，可在無須更換溝槽加工工 具本身T，簡單地置換成新的刀尖。 使羞辨Λ專利文獻2及專利文獻3所揭示之機械劃刻法，係 ^工工具之刀尖之形狀為前端漸細之針狀，嚴謹而 壓接於薄膜太陽電池之部分擴大接觸面積，乃將 ^ ^平截斷成平坦的形態。即’如圖8所示，前端部 刀’、成為具有漸細前端之錐形面的截頭圓錐形。 ^磨耗時，可將溝槽加工工具從保持 1再度利用’雖為經濟，但若前端部分為截頭圓錐形 二:=致使刀尖之直徑發生變化。在太陽電池基板 I將劃刻線之線寬維持於一定，對於作為製品實現設計 預期之品質（光電轉換效率等）及提高品質之均一性（再 現性）而言至為重要，因此必須固定_之剝離程度。 本發明之第二目的在於提供—種薄膜太陽電池用 加工工具’其對已經磨耗之刀尖，亦可藉由研磨使 劃刻線之線寬維持於一定而再度利用。 [解決問題之技術手段] 146243.doc 201115752 為解決上述問題而完成之本發明之積體型薄膜太陽電池 用之溝槽加工工具之構成為，在圓盤狀主體之外周部，於 周向隔以相等之間隔’複數設置有刀尖朝向切線方向之複 數個刀刃，可以任一刀刃進行溝槽加工。 [發明效果] 本發明之積體型薄臈太陽電池之溝槽加工工具在使用中 之刀刃磨耗或刀刀缺損時’只要使圓盤狀之主體旋轉特定 角度以使下個新的刀刃位於溝槽加工部位即可，藉此 可在無須更換溝槽加工工具本身下，簡單地設置成新的刀 刃，從而可消除更換作業之繁雜。 (用於解決其他之問題之手段及效果） 上述刀刃較佳為，在主體之外周面設置具有沿著放射方 向之刀面之缺口 ’冑由主體外周面與刀面所形成之角部成 為刀尖的方式形成。 藉此，溝槽加工時刀尖可以點接觸接觸於基板1 順利地剝離薄膜，從而可报士古站^ 攸向Γ形成直線狀且漂亮之劃刻線。 又’溝槽加工工1之77 rr 乂， θ 八之刀刃之則端部份之左右侧面較佳ό 疋形成為相互平行之一對面。 藉此，於刀尖磨耗時，由於即使研磨刀刃之頂面，即： 卜周面刀刃之左右寬度之尺寸亦不會產生變化，^ 即使是研磨後，亦可將所劃刻之溝槽寬度維持於與研以 相同’藉此，所有之刀尖磨耘拄 穴厲耗時，皆可研磨修補後再度3 用0 又 溝槽加工工具之構成較佳 為以超硬合金或金剛石 146243.doc 201115752 (燒結金剛石（PCD)等）形成。 藉此，由於工具之壽命長，且少有變形’故可長期間精 度良好地進行劃刻加工。 【實施方式】 以下，基於顯示本發明之實施形態之圖式，詳細地說明 本發明之細節。首先，就安裝本發明之溝槽加工工具之劃 刻裝置之整體構成進行說明。 圖1係顯示使用本發明之溝槽加工工具之積體型薄膜太 陽電池用劃刻裝置之實施形態的立體圖。劃刻裝置具備有 平台18，其可於水平方向（γ方向）移動，且在水平面内可 旋轉90度及角度Θ，平台18實質上形成太陽電池基板R 保持機構。 橋狀件19係以夾著平台18而設置之兩側之支撐柱汕、 2〇、與於X方向延伸之導桿21構成，纟以橫跨平⑽上的 方式設置。保持具支樓體23係'沿著形成於導桿21之導執η 可移動地安裝’且藉由馬達24之旋轉可於χ方向移動。 於保持具支撐體23上設置有劃刻頭7，於劃% ’於劃刻頭7之下部201115752 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a groove processing tool for manufacturing a chalcopyrite compound-based thin film solar cell. Here, the chalcopyrite compound includes, in addition to CIGS (Cu(In, Ga)Se2), CIGSS (Cu(In, Ga)(Se, S) 2), CIS (CuInS2), and the like. [Previous technique] In a thin film solar cell in which a chalcopyrite compound semiconductor is used as a light absorbing layer, an integrated structure in which a plurality of unit cells are connected to each other on a substrate is generally used. A description will be given of a method of manufacturing a prior chalcopyrite compound-based thin film solar cell. Fig. 7 is a schematic view showing the manufacturing steps of a CIGS thin film solar cell. First, as shown in Fig. 7 (4), after the electrode layer 2 on the lower surface of the positive electrode side is formed on the insulating substrate of a glass containing sodium (SLG) or the like by a sputtering method, the light is absorbed by the scribe process. The thin film solar cell substrate before the layer formation forms a trench s for separating the lower electrode. Thereafter, as shown in FIG. 7(b), a light absorbing layer 3 containing a compound semiconductor (CIGS) film is formed on the core electrode layer 2 by a vapor deposition method, a sputtering method, or the like, and by the CBD method (chemistry) The bath deposition method) forms an insulating layer 5 including a buffer layer 4' for a heterojunction W film or the like and on which a Zn〇 film is formed. Then, for the thin film solar cell before the formation of the transparent electrode layer, the groove s for separating from the lower electrode is formed at a position laterally apart from the specific distance by scribing to form M. The electrode between the electrodes 2 is in contact with the groove M1. 146243.doc 201115752 Next, as shown in FIG. 7(c), a transparent electrode layer 6' including an upper electrode of a film of 211::1 is formed from the insulating layer 5 as a function necessary for power generation by photoelectric conversion. The solar cell substrate of the layer is formed by etching to form the electrode separation trench M2 of the Mo electrode layer 2 at the lower portion. In the above-described step of manufacturing an integrated type thin film solar cell, as a technique for groove-treating the trenches M1 and M2 for electrode separation by scribe processing, laser scribing and mechanical scribing have hitherto been used. law. For example, as disclosed in Patent Document 1, the laser scribing method is to irradiate the laser light emitted by the excitation of the Nd:YAG crystal by a continuous discharge lamp such as an arc lamp to form a trench for electrode separation. In this method, when a groove is formed in the thin film solar cell substrate after the formation of the light absorbing layer, the photoelectric conversion characteristics of the light absorbing layer 3 are deteriorated due to the heat of the laser light at the time of scribing. For example, as disclosed in Patent Documents 2 and 3, the mechanical scribing method is a knife for a groove processing tool such as a metal needle (needle) having a tapered front end, and a specific pressure is applied to one side. A technique of processing a groove for electrode separation by moving it against a substrate. At present, the mechanical scribing is used. [Patent Document 1] JP-A-2002-94089 (Patent Document 3) JP-A-2002-94089 (Patent Document 3) [Invention] [Invention] Problems to be Solved] The groove processing tool used in the conventional mechanical scribing method includes those disclosed in Patent Document 2 and Patent Document 3, and is provided with a blade shape in the case of the main body. Composition. The grooved and daily processing tool of such a shape is mounted and fixed. 146243.doc 201115752 The film solar cell is fixed to the scribe device, and the surface is cut along the stencil=...for thin groove processing. W pre-line relative movement, which can be used: the groove processing tool formed by the tip of the boring tool, due to the use of =,: in the case of defect, it is necessary to remove the grinding from the holder every time Or replace the new product, loading and unloading is really troublesome. Groove force =, the primary object of the present invention is to provide a groove for a solar cell i which can be easily replaced with a new tool tip when the tool tip is worn, without having to replace the groove processing tool itself T. According to the mechanical scribe method disclosed in Patent Document 2 and Patent Document 3, the shape of the blade tip of the tool is a needle shape having a tapered front end, and is rigorously crimped to a part of the expanded contact area of the thin film solar cell. It is to cut off ^ ^ into a flat shape. That is, as shown in Fig. 8, the tip end blade ' is a frustoconical shape having a tapered surface of the tapered front end. ^When the wear is made, the groove processing tool can be reused from the hold 1 although it is economical, but if the front end portion is frustoconical 2: = the diameter of the tool tip is changed. In the solar cell substrate I, the line width of the scribe line is maintained constant, which is important for achieving the desired quality (photoelectric conversion efficiency, etc.) of the product and improving the uniformity (reproducibility) of the quality, and therefore must be fixed _ The degree of peeling. A second object of the present invention is to provide a processing tool for a thin film solar cell which can be reused by maintaining the line width of the scribed line by grinding. [Technical means for solving the problem] 146243.doc 201115752 The groove processing tool for an integrated type thin film solar cell of the present invention which is completed to solve the above problem is constituted by being circumferentially spaced apart from the outer periphery of the disk-shaped body. The equal interval 'multiple sets are provided with a plurality of cutting edges with the cutting edge facing the tangential direction, and the groove can be processed by any one of the cutting edges. [Effect of the Invention] The groove processing tool of the integrated thin solar battery of the present invention, when the blade wear or the blade defect is in use, 'just rotate the disk-shaped body by a specific angle so that the next new blade is located in the groove. The processing position is sufficient, so that a new cutting edge can be simply set without changing the groove processing tool itself, thereby eliminating the cumbersome replacement work. (Means and Effects for Solving Other Problems) The blade is preferably provided with a notch of a blade surface along the radial direction on the outer peripheral surface of the main body, and a corner formed by the outer peripheral surface and the blade surface of the main body becomes a knife A sharp way to form. Thereby, the blade tip can be smoothly contacted and peeled off by the contact with the substrate 1 during the groove processing, so that the line can be formed in a straight line and a beautiful scribe line. Further, the grooved processing worker 1 is 77 rr 乂, and the left and right sides of the end portion of the θ eight blade are preferably formed to be opposite to each other. Therefore, when the blade edge is worn, even if the top surface of the blade is polished, that is, the size of the left and right widths of the blade surface does not change, ^ even after grinding, the groove width can be scribed. Maintained in the same way as the research. Therefore, all the sharp points of the sharpening point can be grinded and repaired, and then the grooved processing tool is preferably made of super hard alloy or diamond 146243.doc. 201115752 (sintered diamond (PCD), etc.) is formed. As a result, since the life of the tool is long and there is little deformation, the scribing process can be performed with good precision for a long period of time. [Embodiment] Hereinafter, details of the present invention will be described in detail based on the drawings showing embodiments of the present invention. First, the overall configuration of the scriber for installing the groove processing tool of the present invention will be described. Fig. 1 is a perspective view showing an embodiment of a sculpt device for an integrated type solar cell using the groove processing tool of the present invention. The scribing device is provided with a platform 18 which is movable in the horizontal direction (γ direction) and is rotatable by 90 degrees and an angle 在 in the horizontal plane, and the platform 18 substantially forms the solar cell substrate R holding mechanism. The bridge member 19 is constituted by support columns 汕, 2〇 provided on both sides of the platform 18, and a guide rod 21 extending in the X direction, and is disposed so as to straddle the flat (10). The holder base body 23 is movably mounted along the guide η formed on the guide bar 21 and is movable in the x direction by the rotation of the motor 24. A scribe head 7 is disposed on the holder support 23, and is scribed on the lower portion of the scribe head 7
·/再摺加工工具8可每次旋轉一 可採用棘輪機構，使安裝之刀 ’且於相反方向則在每個一定 &置有保持具9，該保持具9係用以保持將載置 之太陽電池基板W的薄肢类；2 ^ . 定角度（例如90度）。例如，可 刃之旋轉方向固定於一方向， 146243.doc 201115752 角度之位置’以棘爪使旋轉停止。 又’在可於X方向及Y方向移動之台座12、13上，分別 設置有攝像機1〇、11。台座12、13係在支撐台13上沿著 延设於X方向之導軌15移動。攝像機1〇、u可以手動操作 上下移動’從而可調整攝像之焦點。以攝像機丨〇、丨丨拍攝 之圖像係顯示於監視器1 6、1 7。 在載置於平台18上之太陽電池基板w上，存在有藉由各 步驟，在前步驟中形成，且可從表面觀察之劃刻線等。因 此，在各步驟中，將太陽電池基板w進行劃刻時可將在 前步驟中所形成之劃刻線等作為用於特定劃刻位置之標記 I用例如，在經劃刻之下部電極層（Mo電極層）2上形成 有光吸收層3、緩衝層4及絕緣層5之太陽電池基板w上， 形成上下電極接觸用之溝槽時，係將形成於下部電極層2 之劃刻線作為用於特定溝槽形成位置之標記使用。即，藉 由攝像機1〇、"拍攝形成於下部電極層2之劃刻線，藉二 調整太陽電池基板W之位置。具體而言，將形成於可從支 樓於平台18之太陽電池基板w表面觀察之下部電極層㈣ 劃刻線，藉由攝像機10、㈣攝而特定出形成於下部電極 層2之劃刻線之位置。基於特定之形成於下部電極層之劃 刻線之位置’推斷出應形成上下電極接觸用之溝槽之位置 (剎刻位置）’而调整太陽電池基板w之位置，藉此調整割 刻位置。 且’在每次於Y方向以特定之間距移動平台㈣，令割 刻頭7下降，而將溝槽加工工具8之刀失在壓抵於太陽電池 146243.doc 201115752 土板w之表面之狀態下於χ方向移動將太陽電池基板賀 之表面沿著X方向進行劃刻加工。將太陽電池基板W之表 面/α著Y方向進行劃刻加工時，係使平台18旋轉90度，進 行與上述相同之動作。 其夂’就本發明之溝槽加工工具進行說明。 圖2〜圖4係顯示本發明之一例之溝槽加工工具8。圖2係 立體圖，圖3係正視圖，圖4係側視圖。該溝槽加工工具8 係在以超硬合金或金剛石等之硬質材料所製造的圓盤狀之 :體81之外周#，於周向隔以相同之間隔複數地設置有本 實施例中為4個之刀刀區域82。 刀刀區域82係以將形成沿著主體81之放射方向之刀面83 之缺口 84 5又置於主體81之外周’使由主體外周面與刀面83 所形成之角部成為刀尖85的方式形成。又，於圓盤狀之主 體1之中“ °又置有用於安裝於劃刻裝置之保持具9之安 裝孔86，經由δ亥安裝孔86，以可旋轉且可固定之方式安裝 於保持具9。 工具8安裝於保持具9時，如圖*所示， 將上述溝槽加工 刀尖85係相對於太陽電池基板w朝行進方向側配置，並以 任一個刀尖進行溝槽加工。 刀刃區域82之頂部之左右寬度L1較佳為5G〜6G _，但對 應於所要求之劃刻之溝槽寬度可設為25〜8〇 _…圓盤 狀主體81之直徑設為例如㈣_，厚度L2設為— mm ’刀面83之高度η設為5〇 _〜5 _左右。 在上述構成中，將溝槽加工工具8安裝於保持具9進行溝 146243.doc 201115752 ，刀尖85可相對於基板W以線接觸 則後方向）作接觸，而順利地剝離薄 槽加工時，如圖4所示 (線接觸於圖4之紙面之 膜，從而可形成直線狀且漂亮之劃刻線…在安裝溝槽 加工工具8時’如圖5所示’以使刀刀區域82之刀面83相對 於基板W略朝行進方向側傾斜之姿勢安裝，藉此可使刀尖 85相對於基板W確實地以線㈣作接觸，並倒落地剝離薄 膜。 又，使用中之刀尖85磨耗或刀刀缺損時，使圓盤狀之主 體旋轉並予固定，以使下一個新的刀尖位於溝槽加工部 位。本實施例之情況，由於以等間隔所形成之刀刃區域82 之數量為4個，故位置替換成新的刀尖時之旋轉角度為％ 度。藉此可在無須更換溝槽加工工具下，簡單地設置成新 的刀尖，從而可解決更換作業之繁雜。 圖6係顯示本發明之溝槽加工1具之其他實施例，其係 將刀刀區域82之包含刀尖85的前端部份之左右側面82a、 82b以成為相互平行之一對面的方式形成。 藉此，刀尖85磨耗時，由於即使研磨刀刃區域82之頂 面’即主體81之外周面’刀刀區域82之左右寬度之尺寸亦 不會產生變化，故即使研磨後亦可將所劃刻之溝槽寬度維 持於與研磨前相同，藉此，於刀尖磨耗時可予研磨修補後 再度利用。 在上述之實施例中’係使劃刻頭7於χ方向移動，藉此實 行劃刻加工’但由於只要劃刻頭7與太陽電池基板W可相 對移動即可，故也可在固定太陽電池基板W之狀態下，使 146243.doc 201115752 劃刻頭7於X方向及γ方向移動，亦可不移動劃刻頭7，而 僅使太陽電池基板w於X方向及γ方向移動。 以上，已說明本發明之代表性之實施例，但本發明並非 僅限於上述之貫施例構造。例如溝槽加工工具8之朝保持 具9之安裝機構只要可使溝槽加工工具8依序每次旋轉特定 角度’且可在設定位置確實固定者，任何機構皆可採用。 此外’本發明在可達成其㈣，且不脫離巾請專利範圍之 範圍内，可進行適當之修正、變更。 [產業上之可利用性] 本舍明係可適用於製造使用黃銅礦化合物系半導體膜之 積體型薄膜太陽電池時所使用之溝槽加工工具。、 【圖式簡單說明】 圖1係顯示使用本發明夕，巷上 个赞明之溝槽加工工具之積體型薄犋太 陽電池用劃刻裝詈之 农置之—貫施形態的立體圖。 圖2係本發明之谨^描^ /3疋屏糟加工工具之立體圖。 圖3係上述溝槽加工工具之正視圖。 圖4係上述溝槽加工工具之側視圖。 圖5係顯示上述潘描 k薄糟加工工具之使用形態之例之側 圖。 优 圖6係顯示本發明 <溝槽加工工具之其他實施例的立體 圖。 圖7(a)-(c)係顯示—般之aGs系之薄膜太陽電池之製造 步驟的模式圖。 圖8係顯示先前之、、善4杜1 J之4槽加工工具之一例之立體圖。 146243.doc 201115752 【主要元件符號說明】 8 溝槽加工工具 9 保持具 81 主體 82 刀刃區域 83 刀面 84 缺口 85 刀尖 W 太陽電池基板 146243.doc - 12 -/ / Re-spinning tool 8 can be rotated one at a time, using a ratchet mechanism, so that the installed knife 'and in the opposite direction, at each certain & is provided with a holder 9 for holding the holder The thin limbs of the solar cell substrate W; 2 ^ . fixed angle (for example, 90 degrees). For example, the direction of rotation of the blade can be fixed in one direction, and the position of the angle of 146243.doc 201115752 is stopped by the pawl. Further, cameras 1 and 11 are provided on the pedestals 12 and 13 which are movable in the X direction and the Y direction, respectively. The pedestals 12, 13 are moved on the support table 13 along the guide rails 15 extending in the X direction. The camera 1〇, u can be manually operated up and down to adjust the focus of the camera. The images taken with the camera 丨〇 and 丨丨 are displayed on the monitors 16 and 17. On the solar cell substrate w placed on the stage 18, there are scribe lines and the like which are formed in the previous step by the respective steps and which are viewable from the surface. Therefore, in each step, when the solar cell substrate w is scribed, the scribe line or the like formed in the previous step can be used as the mark I for the specific scribe position, for example, in the etched lower electrode layer. (Mo electrode layer) 2 on the solar cell substrate w on which the light absorbing layer 3, the buffer layer 4, and the insulating layer 5 are formed, and when the trench for contact between the upper and lower electrodes is formed, the scribe line formed on the lower electrode layer 2 is formed. Used as a mark for a specific groove forming position. That is, the position of the solar cell substrate W is adjusted by taking the scribe line formed on the lower electrode layer 2 by the camera 1 〇 and ". Specifically, the lower electrode layer (4) is formed by observing the lower electrode layer (4) from the surface of the solar cell substrate w of the platform 18, and the scribing line formed on the lower electrode layer 2 is specified by the camera 10 and (4). The location. The position of the solar cell substrate w is adjusted based on the position of the scribe line formed at the lower electrode layer, and the position (the position at which the groove for contact of the upper and lower electrodes is to be formed) is estimated, thereby adjusting the cutting position. And 'moving the platform (4) at a specific distance in the Y direction, the cutting head 7 is lowered, and the blade processing tool 8 is lost in the state of pressing against the surface of the solar cell 146243.doc 201115752. Moving in the direction of the χ, the surface of the solar cell substrate is scribed in the X direction. When the surface/α of the solar cell substrate W is scribed in the Y direction, the stage 18 is rotated by 90 degrees, and the same operation as described above is performed. The following is a description of the groove processing tool of the present invention. 2 to 4 show a groove processing tool 8 which is an example of the present invention. Fig. 2 is a perspective view, Fig. 3 is a front view, and Fig. 4 is a side view. The groove processing tool 8 is formed in a disk shape made of a hard material such as cemented carbide or diamond, and the outer circumference # of the body 81 is provided in the circumferential direction at a plurality of intervals in the present embodiment. Knife area 82. The blade region 82 is formed such that the notch 84 5 forming the blade surface 83 along the radial direction of the main body 81 is placed on the outer periphery of the main body 81 so that the corner formed by the outer peripheral surface of the main body and the blade face 83 becomes the blade edge 85. The way is formed. Further, in the disc-shaped main body 1, "the mounting hole 86 for the holder 9 attached to the scribing device is placed, and the holder is attached to the holder in a rotatable and fixable manner via the ? 9. When the tool 8 is attached to the holder 9, as shown in Fig. 6, the groove machining edge 85 is disposed on the side of the traveling direction with respect to the solar cell substrate w, and groove processing is performed by any one of the cutting edges. The left and right width L1 of the top of the region 82 is preferably 5G to 6G _, but the groove width corresponding to the desired scribe may be set to 25 to 8 〇 _... The diameter of the disk-shaped body 81 is set to, for example, (4) _, thickness L2 is set to - mm 'the height η of the blade face 83 is set to about 5 〇 to 5 _. In the above configuration, the groove processing tool 8 is attached to the holder 9 to perform the groove 146243.doc 201115752, and the blade edge 85 is relatively When the substrate W is in contact with the line W in the rear direction, and the thin groove processing is smoothly peeled off, as shown in FIG. 4 (the line is in contact with the film of the paper surface of FIG. 4, a linear and beautiful scribe line can be formed... When the groove machining tool 8 is installed, 'as shown in FIG. 5' to make the blade face 83 of the blade region 82 Mounting is performed in a posture in which the substrate W is slightly inclined toward the traveling direction side, whereby the blade edge 85 can be surely brought into contact with the substrate W by a line (four), and the film can be peeled off by peeling off. Further, the blade tip 85 is worn or knife in use. In the case of a defect, the disk-shaped body is rotated and fixed so that the next new blade edge is located at the groove processing portion. In the case of the present embodiment, since the number of blade regions 82 formed at equal intervals is four, Therefore, when the position is replaced with a new tool tip, the rotation angle is %. This makes it possible to easily set a new tool tip without replacing the groove machining tool, thereby solving the cumbersome replacement work. Another embodiment of the groove processing of the present invention is such that the left and right side faces 82a, 82b of the blade portion 82 including the tip end portion of the blade edge 85 are formed to be opposite to each other in parallel with each other. At the time of abrasion of 85, even if the size of the left and right widths of the top surface of the grinding blade region 82, that is, the outer surface of the main body 81, the knife blade region 82 does not change, the groove width can be scribed even after grinding. Maintained with It is the same before the polishing, and can be used again after the blade tip is worn and repaired. In the above embodiment, 'the scribe head 7 is moved in the χ direction, thereby performing the scribe process', but since only the scribe is performed The head 7 and the solar cell substrate W can be relatively moved. Therefore, the 146243.doc 201115752 scribe head 7 can be moved in the X direction and the γ direction while the solar cell substrate W is fixed, or the scribe head 7 can be moved without moving. However, only the solar cell substrate w is moved in the X direction and the γ direction. Although the representative embodiments of the present invention have been described above, the present invention is not limited to the above-described configuration. For example, the groove processing tool 8 The mounting mechanism of the holder 9 can be used as long as the groove processing tool 8 can be rotated by a specific angle each time and can be fixed at the set position. Further, the present invention can be appropriately modified or changed within the scope of the invention as long as it can be achieved (4). [Industrial Applicability] The present invention is applicable to a groove processing tool used in the production of an integrated thin film solar cell using a chalcopyrite compound-based semiconductor film. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a form of a sculpt of a sculpt-type sculpt of a slab-shaped slab of a slab-shaped slab of a smear-shaped stencil. Fig. 2 is a perspective view of the screen processing tool of the present invention. Figure 3 is a front elevational view of the above described groove processing tool. Figure 4 is a side view of the above groove processing tool. Fig. 5 is a side view showing an example of the use form of the above-described tool. Fig. 6 is a perspective view showing another embodiment of the <groove processing tool of the present invention. Fig. 7 (a) - (c) are schematic views showing the manufacturing steps of the aGs-based thin film solar cell. Fig. 8 is a perspective view showing an example of a prior art, good 4 Du 1 J 4-slot processing tool. 146243.doc 201115752 [Description of main component symbols] 8 Groove machining tool 9 Holder 81 Main body 82 Blade area 83 Face 84 Notch 85 Tip W Solar cell substrate 146243.doc - 12 -