JP2015126205A - Grooving tool and scribe device with grooving tool attached thereto - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a grooving tool for solar cell substrate in which fine adjustment of the cutting edge position can be performed by simple operation, and to provide a scribe device using the same.SOLUTION: A part of the outer peripheral surface consists of a columnar body 2 having true circular cross section forming the fitting part to a holder 9, a tapered conical portion 3 formed at the tip of the body 2, and a cutting edge 4 formed at the tip of the conical portion 3. The cutting edge 4 is formed at a position eccentric from the shaft center X of the columnar body 2. The columnar body 2 is provided with a mark 5 indicating the eccentric direction of the cutting edge 4, and a rotary operation part 6 engaging with a rotary tool is provided on the upper end face or the outer peripheral surface of the columnar body 2.

Description

The present invention relates to a grooving tool used when manufacturing an integrated thin film solar cell such as a compound system using a chalcopyrite compound, cadmium telluride, or the like, and a scribing apparatus to which the grooving tool is attached.
Here, the chalcopyrite compound includes CIGS (Cu (In, Ga) (Se, S) ₂ ), CIS (CuInS ₂ ) and the like in addition to CIGS (Cu (In, Ga) Se ₂ ).

  In a thin film solar cell using a compound semiconductor as a light absorption layer, an integrated structure in which a plurality of unit cells are connected in series on a substrate is generally used.

  A method for producing a conventional chalcopyrite compound integrated thin film solar cell will be described. FIG. 4 is a schematic diagram showing a manufacturing process of a CIGS thin film solar cell. First, as shown in FIG. 4A, a Mo electrode layer 32 to be a plus-side lower electrode is formed on an insulating substrate 31 made of soda lime glass (SLG) or the like, and then the lower electrode is separated by scribe processing. The groove S is formed.

  Thereafter, as shown in FIG. 4B, a light absorption layer 33 made of a compound semiconductor (CIGS) thin film is laminated on the Mo electrode layer 32, and a ZnS thin film for heterojunction is formed thereon. A buffer layer 34 is formed, and an insulating layer 35 made of a ZnO thin film is formed thereon. Then, an interelectrode contact groove M1 reaching the Mo electrode layer 32 is formed by scribing at a position spaced apart from the lower electrode separation groove S by a predetermined distance in the lateral direction.

  Subsequently, as shown in FIG. 4C, a transparent electrode layer 36 as an upper electrode made of a ZnO: AI thin film is formed on the insulating layer 35, and reaches the lower Mo electrode layer 32 by scribing. A groove M2 for electrode separation is formed.

  In the process of manufacturing the integrated thin film solar cell described above, a laser scribing method and a mechanical scribing method have been used as a technique for performing groove processing of the electrode separation grooves M1 and M2 by scribing.

  In the laser scribing method, for example, as disclosed in Patent Document 1, a groove for electrode separation is formed by irradiating a laser beam emitted by exciting a Nd: YAG crystal with a continuous discharge lamp such as an arc lamp. However, the photoelectric conversion characteristics of the light absorption layer 23 may be deteriorated by the heat of the laser light during scribing.

  Further, the mechanical scribing method, for example, as disclosed in Patent Documents 2 and 3, by moving the cutting edge of the groove processing tool whose tip is tapered while pressing it against the substrate while applying a predetermined pressure, This is a technique for processing a groove for contact between electrodes and a groove for electrode separation. At present, this mechanical scribing method is often performed.

JP-A-11-31815 JP 2002-094089 A JP 2004-115356 A

  As a grooving tool used in the mechanical scribing method, a tool having a cylindrical body with a tapered tip and a blade tip as disclosed in Patent Documents 2 and 3 is generally used. ing. That is, as shown in FIG. 5, the tip of the cylindrical body of the grooving tool 11 has a tapered conical shape, and the tip is horizontally cut to form the cutting edge 12. In addition, the flat surface at the tip of the blade edge has a groove to be formed with a predetermined width to form a groove that functions reliably for interelectrode contact and electrode separation, and by surface contact with the groove bottom surface during groove processing. This is to prevent the Mo electrode layer being processed from being damaged.

  Moreover, this groove processing tool is attached to the scribe head of the scribing device, and processes the above-mentioned groove by moving it while pressing against the surface of the solar cell substrate placed on the table.

  FIG. 6 is a perspective view for explaining a general scribing apparatus. The scribing apparatus A includes a table 13 that can be moved in the Y direction by a feed mechanism (not shown) and that can rotate in a horizontal plane. The table 13 substantially forms a holding means for the solar cell substrate W. . A gate-shaped bridge 16 composed of support columns 14 and 14 on both sides of the table 13 and a guide bar 15 extending in the X direction is provided to straddle the table 13. A scribe head 17 for attaching the grooving tool 11 is movably attached along a guide 18 formed on the guide bar 15, and can be moved in the X direction by rotation of a motor 19.

  A holder 20 is provided below the scribe head 17, and the groove machining tool 11 is attached to the holder 20. The holder 20 is formed so that it can be moved up and down together with the grooving tool 11 by a fluid cylinder 21. Further, cameras 22 and 22 are arranged above the table 13, and images taken by the cameras 22 and 22 are displayed on the monitors 23 and 23.

  When scribing the solar cell substrate W placed on the table 13 with the grooving tool 11, the cutting edge of the grooving tool 11 must be accurately placed on the planned scribe line of the solar cell substrate W. Therefore, an alignment mark for specifying the position is provided on the surface of the solar cell substrate W, and the position of the solar cell substrate W is confirmed and adjusted by imaging the alignment mark with the cameras 22 and 22. ing. Specifically, based on the position of the alignment mark specified by the imaging of the cameras 22, 22, a position shift at the time of mounting the surface of the solar cell substrate W is detected, and the table 13 is moved or rotated to shift the position shift. I am trying to fix it.

However, in this conventional method, even if the solar cell substrate is slightly displaced, the table driving mechanism must be operated to move or rotate to adjust this, and the adjustment operation is very difficult. It was bothersome and time consuming. Further, fine adjustment performed in units of microns has been very difficult.
Therefore, the present invention provides a grooving tool capable of finely adjusting the relative positional deviation between the scribe line of the solar cell substrate and the cutting edge of the grooving tool by a simple operation, and a scribe device to which the grooving tool is attached. The purpose is to provide.

A groove processing tool for an integrated thin film solar cell according to the present invention, which has been made to solve the above-described problems, includes a cylindrical body having a perfectly circular cross section in which a part of the outer peripheral surface forms a mounting portion to a holder, Consists of a tapered cone portion formed at the tip portion and a blade edge formed at the tip of the cone portion, and the blade tip is formed at a position eccentric with respect to the axis of the cylindrical body. .
In the grooving tool of the present invention, a mark indicating the eccentric direction of the cutting edge is displayed on the cylindrical body, and the grooving tool is placed around the axis of the cylindrical body on the upper end surface or the outer peripheral surface of the cylindrical body. It can be set as the structure by which the rotation operation part with which the tool for rotating is engaged is provided.
The grooving tool is used by being attached to a holder of a scribe head incorporated in a scribe device so as to be rotatable around the axis of the cylindrical body.

  According to the present invention, since the cutting edge provided at the tip of the cylindrical body is formed at a position eccentric with respect to the axis of the cylindrical body, the driving mechanism of the table on which the solar cell substrate is placed is operated. The position of the cutting edge can be finely adjusted easily by a simple operation of simply rotating the grooving tool without performing a complicated operation of moving or rotating the tool. In addition, since the direction decentered with respect to the shaft center can be grasped by the mark, even if the eccentricity is about several μm, which is difficult to confirm visually, it can be attached while confirming the eccentric direction.

The perspective view of the groove processing tool which concerns on this invention. The perspective view which shows the state which attached the groove processing tool of FIG. 1 to the holder. Explanatory drawing which shows the blade tip eccentric position of a grooving tool, and the position of the mark corresponding to this. The schematic diagram which shows the manufacturing process of a general CIGS type thin film solar cell. The perspective view which shows an example of the conventional groove processing tool. The perspective view which shows an example of a general scribing apparatus. The perspective view which shows another Example of the groove processing tool of this invention.

Hereinafter, details of the present invention will be described in detail with reference to the drawings illustrating embodiments thereof.
FIG. 1 is a perspective view showing a grooving tool 1 according to the present invention, and FIG. 2 is a perspective view showing a state in which the grooving tool is attached to a holder of a scribe head. The grooving tool 1 is made of a material having excellent tool characteristics such as steel and cemented carbide.

The grooving tool 1 includes a cylindrical body 2 having a true circular cross section, a tapered cone portion 3 formed at the tip of the body 2, and a cutting edge 4 formed at the top of the cone portion 3. The The cutting edge 4 is formed at a position eccentric with respect to the axis X of the cylindrical body 2. The amount L of eccentricity is in the range of 10 to 100 μm, and particularly preferably 20 to 50 μm. The diameter of the cylindrical body 2 is preferably 1.0 to 5.0 mm.
The cutting edge 4 may be formed with the tip of the conical portion 3 pointed, but as shown in FIG. 1 (b), the tip is cut to form a flat surface. preferable. Further, the width of the flat surface of the blade tip is preferably 15 to 50 μm.

  The peripheral surface of the intermediate portion of the cylindrical body 2 forms a substantial attachment portion 2a for attachment to a holder 9 described later. Further, on the upper end surface of the columnar body 2, a mark 5 indicating the eccentric direction of the blade edge 4 with respect to the axis X of the columnar body 2 and a rotation operation unit 6 such as a groove engaged with a rotation tool such as a driver. Is provided. The rotation operation unit 6 can be formed in a plus groove in which a plus driver is engaged in addition to the minus groove in which the minus driver is engaged as shown in FIG. It is also possible to cut a part of the peripheral surface of the cylindrical body 2 so that it can be rotated with a wrench or the like.

Further, as shown in FIG. 2, the grooving tool 1 is attached to a holder 9 that is assembled to a scribe head 7 of a scribing device so as to be movable up and down by a lifting mechanism 8 such as a fluid cylinder. The holder 9 includes an attachment hole 9a for vertically passing through the cylindrical body 2 of the groove processing tool 1, and the groove processing tool 1 is rotatably inserted into the attachment hole 9a and fixed by a set screw 10. Yes. As a result, by loosening the set screw 10, the groove machining tool 1 can be adjusted to rotate around its axis X (see FIG. 1).
The configuration of the scribing apparatus is the same as that of the scribing apparatus A shown in FIG.

  FIG. 3 shows the eccentric position of the cutting edge 4 shown in FIG. 1 and the position of the mark 5 corresponding thereto symmetrically. In the lower part of the figure, the eccentric position of the cutting edge 4 in the plane is shown, and in the upper part, The position of the mark 5 corresponding to each eccentric position of the blade edge 4 is shown. Thereby, it is possible to easily determine the position of the blade edge by viewing the mark from above.

  When scribing is performed using the groove processing tool 1 described above, first, positioning is performed such that the planned scribing line of the solar cell substrate W is directly below the groove processing tool 1. Specifically, as described above with reference to FIG. 6, the current position of the solar cell substrate W is first confirmed by imaging the alignment mark provided on the surface of the solar cell substrate W with the camera 22. At this time, when the degree of positional deviation is slight and within a range that can be corrected by the rotation of the grooving tool 1, the grooving tool 1 can be manually rotated and adjusted. Thereby, fine adjustment can be performed by a simple operation of rotating the groove processing tool without performing a complicated operation of operating and moving / rotating the driving mechanism of the table 13 on which the solar cell substrate W is placed. Is possible.

  In the present invention, as shown in FIG. 7, a plurality of, for example, two groove processing tools 1, 1 are attached to one scribe head 7 'in accordance with the groove interval to be processed, and a plurality of grooves are processed simultaneously. In addition, fine adjustment of the cutting edge interval of each grooving tool 1, 1 can be easily performed. For example, fine adjustment of the position of the cutting edge when the grooving tool 1 is replaced can be easily performed.

  As mentioned above, although the typical Example of this invention was described, this invention is not necessarily specified only by said Example structure, In the range which achieves the objective of this invention and does not deviate from a claim. It is possible to modify and change as appropriate.

  The present invention can be applied to a grooving tool used for manufacturing an integrated thin film solar cell using a compound semiconductor film such as a chalcopyrite compound or cadmium telluride, and a scribe device equipped with the grooving tool.

A scribe device W solar cell substrate X axis of cylindrical body 1 groove processing tool 2 cylindrical body 2a mounting portion 3 conical portion 4 cutting edge 5 mark 6 rotating operation portion 7 scribe head 9 holder

Claims (5)

A groove processing tool for forming a groove by peeling a thin film of a thin film solar cell substrate,
A cylindrical body having a perfectly circular cross section in which a part of the outer peripheral surface forms an attachment to the holder, a tapered cone formed at the tip of the body, and a cutting edge formed at the tip of the cone Consists of
A grooving tool in which the cutting edge is formed at a position eccentric with respect to an axis of a cylindrical body.   The grooving tool according to claim 1, wherein an amount of eccentricity of the blade edge with respect to the axis of the cylindrical body is 10 to 100 μm.   The grooving tool according to claim 1, wherein the cylindrical body is provided with a mark indicating an eccentric direction of a cutting edge.   2. The groove according to claim 1, wherein a rotation operation portion that engages with a tool for rotating the groove processing tool around the axis of the cylindrical body is provided on an upper end surface or an outer peripheral surface of the cylindrical body. Processing tool.   A scribe head that holds the groove processing tool according to claim 1 through a holder and a table on which the thin film solar cell substrate is placed, and the scribe head is relative to the thin film solar cell substrate. A scribing device for processing a groove on the surface of the thin-film solar cell substrate with a cutting edge of the groove processing tool by moving the groove processing tool to the holder of the scribe head. A scribing device attached so that it can be rotated around its axis.

Images