CN1716564A - 集成电路器件形成隔离物后修复等离子体损伤的方法 - Google Patents
集成电路器件形成隔离物后修复等离子体损伤的方法 Download PDFInfo
- Publication number
- CN1716564A CN1716564A CN200410025739.4A CN200410025739A CN1716564A CN 1716564 A CN1716564 A CN 1716564A CN 200410025739 A CN200410025739 A CN 200410025739A CN 1716564 A CN1716564 A CN 1716564A
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- 238000000034 method Methods 0.000 title claims abstract description 73
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 238000005530 etching Methods 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 29
- 230000008569 process Effects 0.000 claims abstract description 21
- 230000003746 surface roughness Effects 0.000 claims abstract description 6
- 238000003860 storage Methods 0.000 claims abstract description 3
- 125000006850 spacer group Chemical group 0.000 claims description 37
- 239000004065 semiconductor Substances 0.000 claims description 21
- 238000012545 processing Methods 0.000 claims description 14
- 229910044991 metal oxide Inorganic materials 0.000 claims description 9
- 150000004706 metal oxides Chemical class 0.000 claims description 9
- 238000009499 grossing Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims description 3
- 150000002926 oxygen Chemical class 0.000 claims description 3
- 238000010790 dilution Methods 0.000 claims description 2
- 239000012895 dilution Substances 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 claims 1
- 239000002019 doping agent Substances 0.000 claims 1
- 238000009616 inductively coupled plasma Methods 0.000 claims 1
- 238000012423 maintenance Methods 0.000 claims 1
- 230000000717 retained effect Effects 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000002955 isolation Methods 0.000 abstract 2
- 238000012986 modification Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 8
- 238000012360 testing method Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000002950 deficient Effects 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008439 repair process Effects 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- PICXIOQBANWBIZ-UHFFFAOYSA-N zinc;1-oxidopyridine-2-thione Chemical class [Zn+2].[O-]N1C=CC=CC1=S.[O-]N1C=CC=CC1=S PICXIOQBANWBIZ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
Claims (17)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2004100257394A CN1320629C (zh) | 2004-06-28 | 2004-06-28 | 集成电路器件形成隔离物后修复等离子体损伤的方法 |
US10/928,716 US7132368B2 (en) | 2004-06-28 | 2004-08-26 | Method for repairing plasma damage after spacer formation for integrated circuit devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2004100257394A CN1320629C (zh) | 2004-06-28 | 2004-06-28 | 集成电路器件形成隔离物后修复等离子体损伤的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1716564A true CN1716564A (zh) | 2006-01-04 |
CN1320629C CN1320629C (zh) | 2007-06-06 |
Family
ID=35506463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100257394A Active CN1320629C (zh) | 2004-06-28 | 2004-06-28 | 集成电路器件形成隔离物后修复等离子体损伤的方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7132368B2 (zh) |
CN (1) | CN1320629C (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101459066B (zh) * | 2007-12-13 | 2010-08-11 | 中芯国际集成电路制造(上海)有限公司 | 栅极、浅沟槽隔离区形成方法及硅基材刻蚀表面的平坦化方法 |
CN102222639A (zh) * | 2010-04-14 | 2011-10-19 | 中芯国际集成电路制造(上海)有限公司 | 一种双镶嵌结构的形成方法 |
CN101740376B (zh) * | 2008-11-25 | 2012-06-13 | 中芯国际集成电路制造(北京)有限公司 | 调整间隙壁宽度的方法以及构造间隙壁的蚀刻方法 |
CN109997211A (zh) * | 2016-09-20 | 2019-07-09 | 东京毅力科创株式会社 | 用于自对准多重图案化技术的间隙壁形成 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080286884A1 (en) * | 2007-05-18 | 2008-11-20 | Macronix International Co., Ltd. | Method for in-situ repairing plasma damage and method for fabricating transistor device |
KR101576958B1 (ko) * | 2009-09-04 | 2015-12-11 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0141950B1 (ko) * | 1994-12-22 | 1998-06-01 | 문정환 | 반도체소자의 제조방법 |
US6632718B1 (en) * | 1998-07-15 | 2003-10-14 | Texas Instruments Incorporated | Disposable spacer technology for reduced cost CMOS processing |
TW420838B (en) * | 1999-06-25 | 2001-02-01 | Macronix Int Co Ltd | Method for manufacturing MOS device having gate spacer |
SG90747A1 (en) * | 1999-09-02 | 2002-08-20 | Applied Materials Inc | Method of pre-cleaning dielectric layers of substrates |
TW432600B (en) * | 1999-12-16 | 2001-05-01 | United Microelectronics Corp | Process for shallow trench isolation structure |
JP3730829B2 (ja) * | 2000-02-17 | 2006-01-05 | 東京エレクトロン株式会社 | 現像処理方法及び現像処理装置 |
CN1205654C (zh) * | 2001-09-20 | 2005-06-08 | 联华电子股份有限公司 | 一种修复低介电常数材料层的方法 |
US6503848B1 (en) * | 2001-11-20 | 2003-01-07 | Taiwan Semiconductor Manufacturing Company | Method of forming a smooth polysilicon surface using a soft etch to enlarge the photo lithography window |
US6506642B1 (en) * | 2001-12-19 | 2003-01-14 | Advanced Micro Devices, Inc. | Removable spacer technique |
US6727155B1 (en) * | 2002-12-18 | 2004-04-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for spin etching sidewall spacers by acid vapor |
US7105430B2 (en) * | 2004-03-26 | 2006-09-12 | Freescale Semiconductor, Inc. | Method for forming a semiconductor device having a notched control electrode and structure thereof |
-
2004
- 2004-06-28 CN CNB2004100257394A patent/CN1320629C/zh active Active
- 2004-08-26 US US10/928,716 patent/US7132368B2/en active Active
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101459066B (zh) * | 2007-12-13 | 2010-08-11 | 中芯国际集成电路制造(上海)有限公司 | 栅极、浅沟槽隔离区形成方法及硅基材刻蚀表面的平坦化方法 |
US8039402B2 (en) | 2007-12-13 | 2011-10-18 | Semiconductor Manufacturing International (Shanghai) Corporation | Methods for forming a gate and a shallow trench isolation region and for planarizating an etched surface of silicon substrate |
US8367554B2 (en) | 2007-12-13 | 2013-02-05 | Semiconductor Manufacturing International (Shanghai) Corporation | Methods for forming a gate and a shallow trench isolation region and for planarizing an etched surface of silicon substrate |
US8377827B2 (en) | 2007-12-13 | 2013-02-19 | Semiconductor Manufacturing International (Shanghai) Corporation | Methods for forming a gate and a shallow trench isolation region and for planarizing an etched surface of silicon substrate |
CN101740376B (zh) * | 2008-11-25 | 2012-06-13 | 中芯国际集成电路制造(北京)有限公司 | 调整间隙壁宽度的方法以及构造间隙壁的蚀刻方法 |
CN102222639A (zh) * | 2010-04-14 | 2011-10-19 | 中芯国际集成电路制造(上海)有限公司 | 一种双镶嵌结构的形成方法 |
CN102222639B (zh) * | 2010-04-14 | 2015-03-11 | 中芯国际集成电路制造(上海)有限公司 | 一种双镶嵌结构的形成方法 |
CN109997211A (zh) * | 2016-09-20 | 2019-07-09 | 东京毅力科创株式会社 | 用于自对准多重图案化技术的间隙壁形成 |
CN109997211B (zh) * | 2016-09-20 | 2020-10-02 | 东京毅力科创株式会社 | 用于自对准多重图案化技术的间隙壁形成 |
Also Published As
Publication number | Publication date |
---|---|
CN1320629C (zh) | 2007-06-06 |
US20050287812A1 (en) | 2005-12-29 |
US7132368B2 (en) | 2006-11-07 |
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C14 | Grant of patent or utility model | ||
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20111205 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20111205 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |