CN1702825A - 管理衬底加工设备的设备信息的衬底加工系统 - Google Patents

管理衬底加工设备的设备信息的衬底加工系统 Download PDF

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Publication number
CN1702825A
CN1702825A CNA2005100712030A CN200510071203A CN1702825A CN 1702825 A CN1702825 A CN 1702825A CN A2005100712030 A CNA2005100712030 A CN A2005100712030A CN 200510071203 A CN200510071203 A CN 200510071203A CN 1702825 A CN1702825 A CN 1702825A
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CN
China
Prior art keywords
substrate processing
processing apparatus
consume
information
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005100712030A
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English (en)
Chinese (zh)
Inventor
北本彻
龟井谦治
井上秀和
滨田哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of CN1702825A publication Critical patent/CN1702825A/zh
Pending legal-status Critical Current

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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • General Factory Administration (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CNA2005100712030A 2001-09-06 2002-09-06 管理衬底加工设备的设备信息的衬底加工系统 Pending CN1702825A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2001270584A JP4191399B2 (ja) 2001-09-06 2001-09-06 基板処理装置管理システム
JP270699/01 2001-09-06
JP270584/01 2001-09-06
JP271369/01 2001-09-07
JP271599/01 2001-09-07

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB021425795A Division CN100385609C (zh) 2001-09-06 2002-09-06 管理衬底加工设备的设备信息的衬底加工系统

Publications (1)

Publication Number Publication Date
CN1702825A true CN1702825A (zh) 2005-11-30

Family

ID=19096221

Family Applications (2)

Application Number Title Priority Date Filing Date
CNA2005100712030A Pending CN1702825A (zh) 2001-09-06 2002-09-06 管理衬底加工设备的设备信息的衬底加工系统
CNB2005100712045A Expired - Fee Related CN100445985C (zh) 2001-09-06 2002-09-06 衬底加工设备，衬底加工设备管理系统和衬底加工设备管理方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNB2005100712045A Expired - Fee Related CN100445985C (zh) 2001-09-06 2002-09-06 衬底加工设备，衬底加工设备管理系统和衬底加工设备管理方法

Country Status (2)

Country Link
JP (1) JP4191399B2 (ja)
CN (2) CN1702825A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100720691B1 (ko) * 2006-11-20 2007-05-21 이기태 컨넥터 블록 완구
JP5385639B2 (ja) * 2009-03-06 2014-01-08 キヤノン株式会社 情報処理システム、情報処理方法およびプログラム
WO2020245983A1 (ja) * 2019-06-06 2020-12-10 株式会社Ｆｕｊｉ 対基板作業機の管理装置および管理システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3892493B2 (ja) * 1995-11-29 2007-03-14 大日本スクリーン製造株式会社 基板処理システム
JP3892553B2 (ja) * 1997-10-29 2007-03-14 大日本スクリーン製造株式会社 基板処理装置
JP3945933B2 (ja) * 1999-03-12 2007-07-18 大日本スクリーン製造株式会社 基板処理装置および通信制御プログラムを記録した記録媒体
JP2001052977A (ja) * 1999-08-11 2001-02-23 Matsushita Electric Ind Co Ltd 基板製造装置およびその制御方法

Also Published As

Publication number Publication date
CN100445985C (zh) 2008-12-24
CN1773485A (zh) 2006-05-17
JP4191399B2 (ja) 2008-12-03
JP2003077822A (ja) 2003-03-14

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