CN1682145A - Apparatus for producing binding-substrates - Google Patents
Apparatus for producing binding-substrates Download PDFInfo
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- CN1682145A CN1682145A CN03821912.3A CN03821912A CN1682145A CN 1682145 A CN1682145 A CN 1682145A CN 03821912 A CN03821912 A CN 03821912A CN 1682145 A CN1682145 A CN 1682145A
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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Abstract
An apparatus is used to manufacture binding substrates. It is cheap, easy for maintenance and woks precisely. It consists of a vacuum chamber, a pressing mechanism and a driving mechanism. Two holding plates are respectively connected with the pressing mechanism and driving mechanism via two posts in a style of away from the vacuum chamber, which is connected with the driving mechanism via a post also. It makes a holding plate and the vacuum chamber moving and rotating horizontally.
Description
Technical field
The present invention relates to the manufacturing installation of adhesive substrates (panel), in more detail, relate to the interval of regulation and fit two substrates and make liquid crystal indicator (Liquid Crystal Display; LCD) device of etc. adhesive substrates (panel).
Background technology
In recent years, the two-d display panel of LCD etc., along with the progress of maximization, lightweight (slimming), the requirement that reduces manufacturing cost further improves.Therefore, make in the adhesive substrates manufacturing device of two-d display panel, also maximized corresponding to panel size fitting two substrates, but the manufacturing installation that need boost productivity with cheapness.
Display panels is, for example, by making a plurality of thin film transistor (TFT)s (TFT) form rectangular array base palte, with the colour filtering chip basic board that forms color filter (red, green, blue) or photomask etc., with extremely narrow interval (about a few μ m) subtend, and between these two substrates, enclose liquid crystal and make.
In the manufacture process of the display panels of prior art, employing is put into vacuum tank with the substrate of fitting, and after immersing inlet in the liquid crystal, this vacuum tank is turned back in the atmosphere, liquid crystal is injected between the substrate, with the vacuum impregnation of inlet sealing.In recent years, for example, mostly adopt the frame that forms encapsulant along the surrounding edge portion of array base palte, the liquid crystal of the ormal weight that in sealing material frame, drips, the drip (with reference to patent documentation 1) that array base palte and colour filtering chip basic board are fitted in a vacuum.
Figure 10 is the existing adhesive substrates manufacturing device 11 that expression utilizes the drip adhesive substrates.
In the vacuum processing chamber (chamber/ chamber) 12 of adhesive substrates manufacturing device 11, configuration first and second maintenance flat board 13,14 in subtend ground remains on substrate W1, W2 each respectively and keeps on dull and stereotyped 13,14 mutually.Vacuum processing chamber 12 is made of the upper container 12a that can cut apart up and down and lower container 12b.Above vacuum processing chamber 12, be provided with pressing mechanism 15, below vacuum processing chamber 12, be provided with driving mechanism 16.First keeps dull and stereotyped 13 to be connected with pressing mechanism 15 via first pillar 17, and the second maintenance flat board 14 is connected with driving mechanism 16 via second pillar 18.Pressing mechanism 15 affacts on substrate W1, the W2 plus-pressure when carrying out the applying of substrate W1, W2.By the action of driving mechanism 16, carry out the location of substrate W1, W2.Upside corrugated tube 20 is provided with in the mode of surrounding first pillar 17 that support plate 19 is connected with vacuum processing chamber 12.In addition, the mode of second pillar 18 that is connected with vacuum processing chamber 12 with the support plate 21 that surrounds driving mechanism 16 of downside corrugated tube 22 is provided with.
Yet, because the action of driving mechanism 16 applies load on the side corrugated tube 22 downwards.In order fully to absorb this load, need long downside corrugated tube 22.Long downside corrugated tube 22 makes the interval of driving mechanism 16 and vacuum processing chamber 12 become big, and hinders the miniaturization of adhesive substrates manufacturing device 11.In addition, because the inner space of downside corrugated tube 22 increases the volume of vacuum processing chamber 12, so, prolonged 23 pairs of vacuum processing chambers 12 of vacuum pump and reduced pressure the required time. Corrugated tube 20,22 need be changed termly according to life expectancy, but on upside corrugated tube 20, apply the load when utilizing pressing mechanism 15 pressurizations, relative therewith, the load when on downside corrugated tube 22, applying the load when utilizing pressing mechanism 15 pressurizations and utilizing driving mechanism 16 location.Therefore, the life expectancy of downside corrugated tube 22 is shorter.When changing downside corrugated tube 22, compare the operation that to disintegrate significantly to apparatus for manufacturing substrate 11 when replacing with side corrugated tube 20.Therefore, the replacing operation of downside corrugated tube 22 is miscellaneous, must reduce the throughput rate of adhesive substrates through for a long time apparatus for manufacturing substrate 11 being stopped.
Relative therewith, a kind of manufacturing installation has been proposed in patent documentation 2, this manufacturing installation will keep flat board to be fixed in the vacuum processing chamber (chamber/ chamber), by utilizing driving mechanism to make vacuum processing chamber (chamber/ chamber) and keeping flat board to move together, carry out the aligning (location) of substrate.In this structure, owing to can eliminate the downside corrugated tube 22 and second pillar 18 of Figure 10, thus reduce the number of parts, and improve maintainability.
Yet in the manufacturing installation of patent documentation 2, when baseplate-laminating, when reducing pressure to application of vacuum is indoor, because the internal pressure of this vacuum processing chamber and atmosphere outside pressure is poor, vacuum processing chamber can produce a little distortion.Keep flat board directly to be subjected to the influence of the distortion of vacuum processing chamber, and have deflection or two problems that keep the offset of flat board that keep planar surface that produce.In the display panels of making at two substrates of the mutual subtend of fitting, enclose behind the liquid crystal substrate at interval (cell gap/cell gap) for example be about 5 μ m, very narrow.For two substrates are fitted with the cell gap of regulation, be necessary two substrates are maintained the high-caliber depth of parallelism.Keep the deflection of planar surface to make the depth of parallelism of two substrates descend inaccessible regulation cell gap.Thereby, the deflection that is necessary to suppress to keep planar surface, the variation that promptly keeps the flatness of flat board.
Patent documentation 1
The Jap.P. spy opens the 2002-040389 communique
Patent documentation 2
The Jap.P. spy opens 2002-229044 communique (paragraph of instructions [0233]～[0236], Figure 31)
Summary of the invention
The objective of the invention is, provide a kind of cheapness, maintainability excellence and with the adhesive substrates manufacturing device of two substrates of fitting accurately.
In first mode of the present invention, a kind of adhesive substrates manufacturing device is provided, this manufacturing installation is in the process chamber that can reduce pressure, and one side is utilized two substrates of the dull and stereotyped maintenance of first and second maintenance of mutual subtend configuration, and one side is with aforementioned two baseplate-laminatings.Pressing mechanism is arranged on the outside of process chamber, and the plus-pressure of applying usefulness is affacted on two substrates.Utilize first supporting member to connect aforementioned pressing mechanism and first and keep dull and stereotyped, make when fitting two substrates, the first maintenance flat board leaves the inside surface of process chamber and disposes.Utilize second supporting member to keep slab supporting medium on the position of the inside surface that leaves the aforementioned processing chamber with second.In order to make two substrate orientation, driving mechanism makes process chamber and second keep flat board to move horizontally and horizontally rotate.Driving mechanism is arranged on the outside of process chamber, and is connected with process chamber.
In second mode of the present invention, a kind of adhesive substrates manufacturing device is provided, this manufacturing installation is in the process chamber that can reduce pressure, and one side is utilized two substrates of the dull and stereotyped maintenance of first and second maintenance of mutual subtend configuration, and one side is with aforementioned two baseplate-laminatings.Be arranged on the pressing mechanism of the outside of process chamber, the plus-pressure of applying usefulness is affacted on two substrates.First supporting member connection pressing mechanism and aforementioned first keeps dull and stereotyped, makes when fitting two substrates, and the first maintenance flat board leaves the inside surface of aforementioned processing chamber and disposes.Driving mechanism is arranged on the inside of process chamber, in order to make two substrate orientation, makes second to keep flat board to move horizontally and horizontally rotate.Driving mechanism supporting second keeps dull and stereotyped, makes when making two substrate orientation, and the second maintenance flat board leaves the inside surface of process chamber and disposes.
Description of drawings
Fig. 1 is the mode chart of the adhesive substrates manufacturing device of first embodiment of the present invention.
Fig. 2 is the block diagram of the control gear of adhesive substrates manufacturing device.
Fig. 3 is the mode chart of the adhesive substrates manufacturing device of second embodiment of the present invention.
Fig. 4 is the mode chart of the adhesive substrates manufacturing device of the 3rd embodiment of the present invention.
Fig. 5 is the mode chart of the adhesive substrates manufacturing device of another way of the present invention.
Fig. 6 is the mode chart of the adhesive substrates manufacturing device of another way of the present invention.
Fig. 7 is the mode chart of the adhesive substrates manufacturing device of another way of the present invention.
Fig. 8 is the mode chart of the adhesive substrates manufacturing device of another way of the present invention.
Fig. 9 is the mode chart of the adhesive substrates manufacturing device of another way of the present invention.
Figure 10 is the mode chart of existing adhesive substrates manufacturing device.
Embodiment
Below, the adhesive substrates manufacturing device of first embodiment of the present invention is described with reference to the accompanying drawings.
Fig. 1 represents the adhesive substrates manufacturing device 31 of first embodiment.Adhesive substrates manufacturing device 31 comprises base plate 32 and is fixed on door shape supporting frame 33 on the base plate 32.Base plate 32 and supporting frame 33 are formed by the material with fully high rigidity.On the substantial middle part of supporting frame 33 inboards, the vacuum processing chamber (chamber/ chamber) 34 of the applying processing of carrying out substrate W1, W2 is set.Affact pressing mechanism 35 on substrate W1, the W2 being provided with plus-pressure with applying usefulness above the vacuum processing chamber 34.Below vacuum processing chamber 34, be provided with the driving mechanism 36 of the location of carrying out substrate W1, W2.
At first, pressing mechanism 35 is described.Pressing mechanism 35 comprises: guide rail 38a, 38b; Line slideway 39a, 39b; First～the 3rd support plate 41～43; And motor 44. Guide rail 38a, 38b are installed in the both sides of the column sections medial surface of supporting frame 33, utilize this guide rail 38a, 38b, can support line slideway 39a, 39b with moving up and down.Between line slideway 39a, the 39b of both sides, set up first and second support plate 41,42, the first support plates 41 and utilize the 3rd support plate 43 and be draped, the 3rd support plate 43 moves up and down by the motor 44 on the top that is installed in supporting frame 33.The 3rd support plate 43 is by the web joint formation of the upper plate that nut 46 is set, the lower plate that a plurality of (in the present embodiment being 4) force cell 48 is installed and connection upper plate and lower plate.The lower surface of first support plate 41 contacts with the top of force cell 48.Ball-screw 45 can whole be attached on the output shaft of motor 44 rotatably, and nut 46 threaded engagement of the 3rd support plate 43 are to ball-screw 45.Thereby, by motor 44 just/despining drives ball-screw 45, the three support plates 43 and moves up and down.
Vacuum processing chamber 34 is formed by the upper container 34a that can cut apart up and down and lower container 34b.Be used for vacuum pump 50 that vacuum processing chamber 34 is reduced pressure, be connected with vacuum processing chamber 34 via vacuum pipe arrangement 49.First and second is set to subtend in vacuum processing chamber 34 mutually keeps flat board 51,52, this first and second maintenance dull and stereotyped 51,52 has the sucking disc mechanism that absorption keeps substrate W1, W2 to use respectively.In addition, utilize sucking disc mechanism that the absorption of substrate W1, W2 is kept, utilize at least a the carrying out in vacuum cup (attracting absorption) and the electrostatic chuck (Electrostatic Absorption).
First keeps dull and stereotyped 51 to be arranged in the upper container 34a.First keep dull and stereotyped 51 via 4 first pillars 53 by second support plate, 42 hanger bearings.Set the length of first pillar 53 by following mode, promptly when baseplate-laminating, first keeps dull and stereotyped 51 to leave the upper inside surface of vacuum processing chamber 34 and dispose, and promptly first keeps dull and stereotyped 51 not contact with the upper inside surface of vacuum processing chamber 34.In addition, between second support plate 42 and upper container 34a, be provided with elastic body (corrugated tube) 54 in the mode of surrounding each pillar 53.Upper container 34a, via corrugated tube 54 hanger bearings on second support plate 42.Be formed with the flange part that possesses O ring (diagram is omitted) at the two ends of corrugated tube 54.By the sealing of O ring, keep the impermeability in the vacuum processing chamber 34 between second support plate 42 and the upper container 34a.
Second keeps dull and stereotyped 52 to be arranged in the lower container 34b.Second keeps dull and stereotyped 52 to be connected with support plate 57 via 4 second pillars 56.Lower container 34b is connected with support plate 57 via 4 the 3rd pillars 58.Support plate 57 is by a plurality of drive unit 59 supportings.Drive unit 59 is fixed on the base plate 32.On by the assigned position on the support plate 57 of drive unit 59 supportings, erect second pillar 56 and the 3rd pillar 58 are set.Simultaneously, utilize 56 supportings second of second pillar to keep flat board 52, utilize the 3rd pillar 58 supporting lower container 34b.Second pillar, 56 to the three pillars 58 are long.The length of second pillar 56 is set by following mode, and promptly second keeps flat board 52 to leave the lower inner surface of vacuum processing chamber 34, and promptly second keeps dull and stereotyped 52 not contact with the lower inner surface of vacuum processing chamber 34.
The through hole of accepting each second pillar 56 is formed on the lower container 34b.Be embedded in O ring 60 at each through hole.By with in O ring 60 gaps that are tucked between second pillar 56 and the lower container 34b, keep the impermeability of vacuum processing chamber 34.
Secondly, utilize Fig. 2 that the control device of adhesive substrates manufacturing device 31 is described.In addition, in Fig. 2, give identical label for the component part identical with structure illustrated in fig. 1.
Adhesive substrates manufacturing device 31 comprises control device 61, and it is used to control the location (driving mechanism 36) of pressure (vacuum pump 50), applying plus-pressure (pressurization motor 44) and the substrate of vacuum processing chamber 34.Control device 61 generally for example is PLC (Programmable Logic Controllers: programmable logic controller (PLC)).Force cell 48, image processing apparatus 62, pressure transducer 63, pressurization are connected on the control device 61 with drive motor 64, the vacuum pump 50 of motor 44, driving mechanism 36.
In addition, control device 61 motor drive signal that will generate according to the output signal from image processing apparatus 63 offers drive motor 64.In more detail, adhesive substrates manufacturing device 31 has the ccd video camera (diagram is omitted) of when baseplate-laminating the telltale mark of two substrate W1, W2 location usefulness being made a video recording.This ccd video camera is made a video recording to the telltale mark that is formed on substrate W1, the W2 when fitting, and its view data is offered image processing apparatus 62.Control device 61 generates motor drive signal corresponding to the operation result of this image processing apparatus 62 (position offset calculate data), and this motor drive signal is offered drive motor 64.Drive motor 64 makes drive unit 59 actions according to the motor drive signal rotation.By the action of drive unit 59, support plate 57, second keeps flat board 52 and lower container 34b to move, and carries out the location of two substrates W1, W2.
Secondly, the action to adhesive substrates manufacturing device 31 describes.
In adhesive substrates manufacturing device 31, when the 3rd support plate 43 moves up and down with the driving of motor 44 owing to pressurization, line slideway 39a, 39b be via force cell 48 and first support plate 41 and move up and down along guide rail 38a, 38b, and upper container 34a is via second support plate 42 and corrugated tube 54 and move up and down.Drop to lower container 34b by upper container 34a and to contact, vacuum processing chamber 34 is by inaccessible.
Afterwards, when vacuum pump 50 was driven, vacuum processing chamber 34 was depressurized.In this state, when being further rotated pressurization with motor 44, make that upper container 34a no longer descended when line slideway 39a, 39b descended, second support plate 42, first pillar 53 and first keep dull and stereotyped 51 to descend, and corrugated tube 54 is compressed.
Second keeps dull and stereotyped 52 to be bearing on the support plate 57 via second pillar 56, and lower container 34b (inaccessible vacuum processing chamber 34) is bearing on the support plate 57 via the 3rd pillar 58.In this state, when driving mechanism 36 actions, second keeps flat board 52 and vacuum processing chamber 34 to become an integral body, and moves horizontally along directions X and Y direction, horizontally rotates (θ direction) simultaneously, carries out the location of substrate W1, W2.When this is located, be accompanied by the load that moves and horizontally rotate of directions X and Y direction, absorbed by corrugated tube 54.In addition, because second keeps flat board 52 and vacuum processing chamber 34 to be connected to rigidly on the support plate 47 of driving mechanism 36, so that it is mobile integrally, so when the location of substrate W1, W2, load can not be applied on the O ring 60 that is arranged between the lower container 34b and second pillar 56.
Simultaneously, adhesive substrates manufacturing device 31, remain on first keep dull and stereotyped 51 and second keep the location of substrate W1, W2 on dull and stereotyped 52 after, utilize pressing mechanism 35 between each substrate W1, W2, to apply plus-pressure and fit.
Secondly, the feature of the adhesive substrates manufacturing device 31 in first embodiment of the present invention is as described below.
(1) when substrate W1, W2 locate, vacuum processing chamber 34 and second keeps dull and stereotyped 52 to move integrally, on the contact portion (O ring 60) of second pillar 56 and vacuum processing chamber 34, applies load hardly.Therefore,, replace downside corrugated tube 22 shown in Figure 10, can use cheap O ring 60, can make every effort to reduce the manufacturing cost of manufacturing installation 31 as airtight material.In addition, as shown in figure 10, owing to there is no need to be provided with downside corrugated tube 22, so can shorten evacuation time when vacuum chamber 34 reduced pressure.And then, can shorten second pillar 56 that connects second maintenance dull and stereotyped 52 and driving mechanism 36, can realize the miniaturization of manufacturing installation 31.
(2) first keep dull and stereotyped 51, are bearing on first pillar 53 as first supporting member in the mode of leaving vacuum processing chamber 34, and second keeps dull and stereotyped 52, are bearing on second pillar 56 as second supporting member in the mode of leaving vacuum processing chamber 34.By this structure, even under the situation that vacuum processing chamber 34 deforms under the decompression when baseplate-laminating, can prevent that also this masterpiece from using first and second and keeping on dull and stereotyped 51,52,, also can the relative position or the depth of parallelism of substrate W1, W2 do not exerted an influence even therefore under this decompression.Thereby, can correctly carry out the location of substrate W1, W2, can carry out the applying of substrate W1, W2 accurately.
Below, second embodiment of the present invention is described.
In second embodiment, for the part identical, give identical label, and simplify its explanation with the structure of first embodiment.Below, be that the center describes with difference with first embodiment.
As shown in Figure 3, in the adhesive substrates manufacturing device 31a of second embodiment, the drive unit 59 of driving mechanism 36 is arranged on the inside of vacuum processing chamber 34, and second keeps dull and stereotyped 52 to be directly connected on this drive unit 59.
In more detail, a plurality of drive units 59 are fixed on the base plate 32, utilize each drive unit 59 supportings second to keep dull and stereotyped 52.This drive unit 59 and first embodiment similarly move, and when making second to keep dull and stereotyped 52 to move horizontally (directions X and Y direction), make it to horizontally rotate (θ direction).
The side of rigid body tube 71 is provided with the exhausr port 71a that regards to drive unit 59.Exhausr port 71a is connected with vacuum pump 73 via pipe arrangement 72.This vacuum pump 73 separates setting separately with the aforementioned vacuum pump 50 that vacuum state that vacuum processing chamber 34 is reduced pressure is used.
As the control gear of the adhesive substrates manufacturing device 31a in the present embodiment, shown in dashed lines among Fig. 2, vacuum pump 73 and pressure transducer 74 have been added.In this adhesive substrates manufacturing device 31a, in vacuum processing chamber 34, first pressure transducer 63 be configured in keep dull and stereotyped 51,52 near, second pressure transducer 74 be configured in drive unit 59 near.That is, first pressure transducer 63 detects near the pressure substrate W1, the W2, and second pressure transducer 74 detects near the pressure the drive unit 59.
In adhesive substrates manufacturing device 31a, with the adhesive substrates manufacturing device 31 of first embodiment similarly, by driving the motor 44 of pressing mechanism 35, upper container 34a descends, and seals this upper container 34a and lower container 34b, vacuum processing chamber 34 is by inaccessible.Then, under this state, further make motor 44 when descent direction rotates, corrugated tube 54 is pressed, and has only first to keep dull and stereotyped 51 to descend via second support plate 42, first pillar 53.
At this moment, the drive unit 59 of driving mechanism 36 moves, and carries out the location of substrate W1, W2.Specifically,, when this second above drive unit 59 keeps dull and stereotyped 52 to move horizontally along directions X and Y direction, horizontally rotate (θ direction), suitably carry out the location of substrate W1, W2 by drive unit 59 action.
When this is located,, produce particle from this drive unit 59 sometimes owing to be accompanied by the wearing and tearing that the action of driving mechanism 50 causes.As its countermeasure, in the present embodiment, the structure that adopts near drive unit 59 gases to discharge from vacuum pump 73 via exhausr port 71a and pipe arrangement 72.Therefore, even produce particle, can prevent that also particle is floating to substrate W1, W2 from drive unit 59.Particularly, utilize first vacuum pump 50 with vacuum processing chamber 34 exhausts before, utilize second vacuum pump 73 to carry out exhaust, can prevent dispersing of particle reliably thus, improve the cleanliness of vacuum processing chamber 34.
Secondly, the feature of the adhesive substrates manufacturing device 31a of second embodiment of the present invention, as described below.
(1) in adhesive substrates manufacturing device 31a, owing to be that drive unit 59 is arranged in the vacuum processing chamber 34, when substrate W1, W2 locate, only make second to keep dull and stereotyped 52 structures that move, so, on the corrugated tube 54 that surrounds first pillar 53, can not apply the load that moves that is accompanied by drive unit 59.Thereby prolong the serviceable life of corrugated tube 54.
(2) owing to being directly connected to second, drive unit 59 keeps on dull and stereotyped 52, so, needn't as first embodiment, supporting second be set keep second pillar 56 of flat board 52 and the 3rd pillar 58 of supporting lower container 34b.Therefore, can reduce the manufacturing cost of manufacturing installation 31a, or make every effort to make manufacturing installation 31a miniaturization,
(3) the exhausr port 71a that regards to drive unit 59 is set on the side of rigid body tube 71,, can removes the particle that produces by drive unit 59 by the exhaust of carrying out from this exhausr port 71a.Whereby, can keep clean conditions in the vacuum processing chamber 34.
(4) first vacuum pump 50 of using with vacuum state that vacuum processing chamber 34 is reduced pressure separates to be provided with individually from exhausr port 71a and removes second vacuum pump 73 that degranulation is used.In this case, owing to can carry out exhaust, can improve the cleanliness in the vacuum processing chamber 34 in the best time of removing degranulation.
(5) in drive motor 64 that constitutes driving mechanism 36 and drive unit 59 etc., only drive unit 59 is configured in the vacuum processing chamber 34.In this case, can suppress the increase of the volume of vacuum processing chamber 34, aspect practical, become desirable more.
Below, the 3rd embodiment of the present invention is described.
Fig. 4 represents the adhesive substrates manufacturing device 31b of the 3rd embodiment.Wherein, in Fig. 4, give identical label, simplify its explanation simultaneously for the part identical with the structure of above-mentioned embodiment 1.In addition, the structure of supporting frame 33 and pressing mechanism 35, identical with first embodiment, in Fig. 4, omit its diagram.
In more detail, on vacuum processing chamber 34 (lower container 34b), be fixed with a plurality of (being 4 in the present embodiment) support block 75, the second and keep dull and stereotyped 52 to be fixed on the upper surface of this support block 75.Support block 75 is separately positioned on second and keeps on four jiaos of dull and stereotyped 52 lower surface.Like this, by make support block 75 between second keep dull and stereotyped 52 and vacuum processing chamber 34 between, can make second to keep dull and stereotyped 52 modes to dispose with the inside surface that leaves vacuum processing chamber 34.
In addition, the lower container 34b of vacuum processing chamber 34, the pillar 76 via supporting entire process chamber 34 is bearing on the support plate 57 of driving mechanism 36.This pillar 76 is the rigid bodies that form the quadrangular pyramid platform, and the upper surface of pillar 76 contacts with vacuum processing chamber 34, and the lower surface of pillar 76 contacts with support plate 57.The area of the upper surface of pillar 76 is bigger than the area of lower surface.Preferably, the area of the upper surface of pillar 76 equates with the area of the lower surface of vacuum processing chamber 34.
In apparatus for manufacturing substrate 31b, with first embodiment similarly, when driving mechanism 36 action, vacuum processing chamber 34 and second keeps dull and stereotyped 52 to move horizontally along directions X and Y direction integrally, horizontally rotate (θ direction) simultaneously, carry out the location of substrate W1, W2.
Secondly, the feature of the adhesive substrates manufacturing device 31b of the 3rd embodiment of the present invention is as described below.
(1) adhesive substrates manufacturing device 31b, owing to eliminated downside corrugated tube 22 (Figure 10) between vacuum processing chamber 34 and driving mechanism 36, so, can make every effort to reduce the manufacturing cost of apparatus for manufacturing substrate 31a.In addition, the evacuation time in the time of can shortening vacuum processing chamber 34 decompressions, and then, can make every effort to make the apparatus for manufacturing substrate miniaturization.
(2) since whole vacuum processing chamber 34 supported by pillar 76, so, can prevent to be accompanied by the distortion of the vacuum processing chamber 34 of decompression.And then, keep on dull and stereotyped 52 support blocks 75 that are fixed on as second supporting member by second, second maintenance dull and stereotyped 52 and vacuum processing chamber 34 are provided with dividually, can suppress to be out of shape the substrate W1 that causes, the offset of W2 owing to be accompanied by the vacuum processing chamber 34 of decompression.
(3) support whole vacuum processing chamber 34, the distortion of the vacuum processing chamber 34 in the time of can suppressing to reduce pressure reliably by pillar 76 with quadrangular pyramid platform shape.In addition, because that pillar 76 is compared during with the pillar that utilizes quadrangular prism shape is in light weight, so, can obtain lightweight adhesive substrates manufacturing device 31b.
Each embodiment also can carry out following change.
In adhesive substrates manufacturing device 31, the 4 first～the 3rd pillar 53,56,58 is set, but need not be confined to this, the pillar outside 4 also can be set.Self-evident, first～the 3rd pillar 53,56,58 also can be provided with different numbers respectively.For example, also 1 second pillar 56 can only be set.
In apparatus for manufacturing substrate 31, can as Fig. 5～shown in Figure 7, change second and keep dull and stereotyped 52 and the structure of the coupling part of driving mechanism 36.
In structure shown in Figure 5, in the inside of vacuum processing chamber 34, on the bottom surface that becomes this vacuum processing chamber 34 and second position that keeps between dull and stereotyped 52, be equipped with O ring 60, utilize this O ring 60 to keep the impermeability of vacuum processing chamber 34.In more detail, keep between dull and stereotyped 52 the lower surface and second pillar 56 discoid support block 78 being set, dispose O in the mode that contact with the peripheral portion of the lower surface of this support block 78 and encircle 60 second.That is, this O ring 60 is positioned at the upper end (being positioned at the end of process chamber 34) of second pillar 56 with encirclement the mode of periphery is provided with, and seals between support blocks 78 and the vacuum processing chamber 34 by utilizing this O ring 60, keeps the impermeability of this vacuum processing chamber 34.In addition, in this structure, the distortion of vacuum processing chamber 34 when considering decompression, selection can absorb the bubble-tight O ring 60 that this distortion fully keeps vacuum processing chamber 34.In this structure, have the feature same with embodiment 1.
In structure shown in Figure 6, in the inside of vacuum processing chamber 34, on the bottom surface that becomes this process chamber 34 and second position that keeps between dull and stereotyped 52, be equipped with corrugated tube 79, utilize this corrugated tube 79 to keep the impermeability of vacuum processing chamber 34.In more detail, corrugated tube 79 has O ring (diagram is omitted) at the flange part of two ends up and down, is provided with in the mode of the periphery of the upper end (being in the end in the process chamber 34) that surrounds second pillar 56.Corrugated tube 79, the flange part of upper end is connected to second and keeps on the lower surface of flat board 52, the flange part of downside is connected to the inboard of lower container 34b, keeps sealing between flat board 52 and the vacuum processing chamber 34 by the O ring that utilizes each flange part with second, keeps the impermeability of this vacuum processing chamber 34.In this structure, owing on corrugated tube 79, do not apply the load that moves of the driving mechanism 36 when being accompanied by the location of carrying out substrate W1, W2, so, keep sealing function that impermeability uses as long as corrugated tube 79 has, there is no need to have as prior art and absorb the spring function of loading.Thereby, can utilize the short corrugated tube 79 of length, have the feature same with first embodiment.
In structure shown in Figure 7, second keeps dull and stereotyped 52 to be bearing on the support plate 57 of driving mechanism 36 via second pillar 56, and lower container 34b is via 81 supportings of rigid body tube.Rigid body tube 81 disposes in the mode of surrounding second pillar 56, has the function of the impermeability retaining member of using as the impermeability that keeps vacuum processing chamber 34.That is, rigid body tube 81, the flange part at two ends have O ring (diagram is omitted), by utilizing this O ring with sealing between lower container 34b and the support plate 57, keep the impermeability of vacuum processing chamber 34.In this structure, also have the feature identical with first embodiment.
In the adhesive substrates manufacturing device 31b of the 3rd embodiment, can eliminate the following pillar 76 that supports entire process chamber 34.In this case, preferably, eliminate the support plate 57 of driving mechanism 36, with supporting second keep the support block 75 of dull and stereotyped 52 usefulness be configured in drive unit 59 directly over the position on.Connecting portion place at lower container 34b and drive unit 59, distortion in order to suppress to reduce pressure, by configuration support block 75 directly over this position (drive unit 59), can prevent the substrate W1 that the distortion by vacuum processing chamber 34 causes, the offset of W2.
In each embodiment, adopt vacuum processing chamber 34 is divided into structure up and down, still, be not limited thereto, for example, also can adopt the structure of vacuum processing chamber shown in Figure 9 83.In addition, in the structure of Fig. 9, as with the first embodiment difference, be provided with corrugated tube 84 and magnetic seal spare 85 in the mode of surrounding first pillar 53.
In more detail, vacuum processing chamber 83 has the gate valve 86 that opens and closes these process chamber 83 usefulness.In vacuum processing chamber 83, first and second is set to subtend keeps dull and stereotyped 51,52, first keep dull and stereotyped 51 via first pillar, 53 hanger bearings on second support plate 42, second keeps dull and stereotyped 52 to be bearing on the support plate 57 of driving mechanism 36 via second pillar 56.The upper surface of vacuum processing chamber 83 can hermetic be connected with second support plate 42 via corrugated tube 84 that is provided with in the mode of surrounding first pillar 53 and magnetic seal spare 85.This corrugated tube 84 and magnetic seal spare 85 link mutually, have the function of the airtight retaining member of using as the impermeability that keeps vacuum processing chamber 83.In addition, the lower surface of vacuum processing chamber 83 is bearing on the support plate 57 via the 3rd pillar 58.And then vacuum processing chamber 83 by will sealing with the contact portion of second pillar 56 with the O ring, keeps impermeability.In addition, pressing mechanism 35 is the same with first embodiment.
Have in the adhesive substrates manufacturing device of Fig. 9 of vacuum processing chamber 83 of said structure in utilization, also have the feature same with first embodiment.In addition, by utilizing the airtight retaining member that constitutes by corrugated tube 84 and magnetic line of force seal 85, can absorb the load that moves generation by driving mechanism 36 reliably.Promptly, carrying out substrate W1, W2 when location, at vacuum processing chamber 34 by driving mechanism 36 along X, when Y direction straight line moves, corrugated tube 84 absorbs the load that these straight lines move, when horizontally rotating (θ direction) at vacuum processing chamber 34, magnetic seal spare 85 absorbs this rotary load.
Claims (12)
1. adhesive substrates manufacturing device, its in the process chamber that can reduce pressure, one side utilize mutual subtend configuration first and second keep dull and stereotyped two substrates that keep, one side is characterized in that aforementioned two baseplate-laminatings to comprise:
Pressing mechanism, it is arranged on the outside of aforementioned processing chamber, and the plus-pressure of applying usefulness is affacted on aforementioned two substrates;
First supporting member, it connects aforementioned pressing mechanism and aforementioned first and keeps dull and stereotyped, makes when fitting aforementioned two substrates, and aforementioned first keeps dull and stereotyped leaves the inside surface of aforementioned processing chamber and disposes;
Second supporting member, its position at the inside surface that leaves the aforementioned processing chamber support aforementioned second and keep dull and stereotyped;
Driving mechanism, it is configured in the outside of aforementioned processing chamber, and, be connected with the aforementioned processing chamber, in order to make aforementioned two substrate orientation, make aforementioned processing chamber and aforementioned second keep flat board to move horizontally and horizontally rotate.
2. adhesive substrates manufacturing device as claimed in claim 1 is characterized in that, aforementioned second supporting member comprises the pillar that connects aforementioned second maintenance flat board and aforementioned driving mechanism.
3. adhesive substrates manufacturing device as claimed in claim 1 is characterized in that, further comprises the pillar that connects aforementioned processing chamber and aforementioned driving mechanism rigidly.
4. adhesive substrates manufacturing device as claimed in claim 1, it is characterized in that, aforementioned second supporting member comprises the pedestal that is fixed on the aforementioned processing chamber, further comprises the pillar of supporting whole aforementioned processing chamber and connection aforementioned processing chamber and aforementioned driving mechanism.
5. adhesive substrates manufacturing device as claimed in claim 4, it is characterized in that, aforementioned pillar forms quadrangular pyramid platform shape, and this quadrangular pyramid platform shape has upper surface that contacts with the aforementioned processing chamber and the lower surface that contacts with aforementioned driving mechanism, and the area of aforementioned lower surface is littler than the area of aforementioned upper surface.
6. adhesive substrates manufacturing device as claimed in claim 1, it is characterized in that, aforementioned driving mechanism is connected with the outside surface of aforementioned processing chamber, aforementioned second supporting member be included in be fixed in the inside surface of aforementioned processing chamber the connecting portion that becomes aforementioned processing chamber and aforementioned driving mechanism directly over the pedestal of position.
7. adhesive substrates manufacturing device, its in the process chamber that can reduce pressure, one side utilize mutual subtend configuration first and second keep dull and stereotyped two substrates that keep, one side is characterized in that aforementioned two baseplate-laminatings to comprise:
Pressing mechanism, it is arranged on the outside of aforementioned processing chamber, and the plus-pressure of applying usefulness is affacted on aforementioned two substrates;
First supporting member, it connects aforementioned pressing mechanism and aforementioned first and keeps dull and stereotyped, makes when fitting aforementioned two substrates, and aforementioned first keeps dull and stereotyped leaves the inside surface of aforementioned processing chamber and disposes;
Driving mechanism, it is arranged on the inside of aforementioned processing chamber, and can move horizontally and can horizontally rotate the twelve Earthly Branches brought forward and state the second maintenance flat board,
Wherein, with when making aforementioned two substrate orientation, aforementioned second keeps the dull and stereotyped mode of leaving the inside surface of aforementioned processing chamber and disposing, and aforementioned driving mechanism and aforementioned second keeps flat board to be connected.
8. adhesive substrates manufacturing device as claimed in claim 7 is characterized in that, aforementioned driving mechanism comprises drive motor and the drive unit that moves by the driving force of this drive motor, and aforementioned drive unit is configured in the inside of aforementioned processing chamber.
9. adhesive substrates manufacturing device as claimed in claim 8 is characterized in that, carries out the exhausr port of the exhaust of aforementioned processing chamber with the mode setting that regards to aforementioned drive unit.
10. adhesive substrates manufacturing device as claimed in claim 9 is characterized in that, comprises that further at least one pump is connected on the aforementioned exhausr port to a plurality of pumps of aforementioned processing chamber decompression usefulness.
11. an adhesive substrates manufacturing device, its two substrates of fitting is characterized in that comprising:
Can reduce pressure and on limits process chamber;
Keep dull and stereotyped at first and second of aforementioned two substrates of maintenance of the indoor mutual subtend configuration of aforementioned processing;
Pressing mechanism, the outside that it is arranged on the aforementioned processing chamber makes aforementioned first to keep dull and stereotyped decline, and the plus-pressure of applying usefulness is affacted on aforementioned two substrates;
First supporting member, it connects aforementioned pressing mechanism and aforementioned first rigidly and keeps dull and stereotyped, makes to avoid aforementioned first to keep contacting of dull and stereotyped and aforementioned processing chamber;
Driving mechanism, the outside that it is arranged on the aforementioned processing chamber makes aforementioned second to keep flat board and aforementioned processing chamber to move integrally in surface level;
Second supporting member, it connects aforementioned second rigidly and keeps dull and stereotyped and aforementioned driving mechanism, makes to avoid aforementioned second to keep contacting of flat board and aforementioned processing chamber;
Pillar, it connects aforementioned processing chamber and aforementioned driving mechanism rigidly.
12. an adhesive substrates manufacturing device, its two substrates of fitting is characterized in that comprising:
Can reduce pressure and on limits process chamber;
Keep dull and stereotyped at first and second of aforementioned two substrates of maintenance of the indoor mutual subtend configuration of aforementioned processing;
Pressing mechanism, the outside that it is arranged on the aforementioned processing chamber makes aforementioned first to keep dull and stereotyped decline, and the plus-pressure of applying usefulness is affacted on aforementioned two substrates;
First supporting member, it connects aforementioned pressing mechanism and aforementioned first rigidly and keeps dull and stereotyped, makes to avoid aforementioned first to keep contacting of dull and stereotyped and aforementioned processing chamber;
Driving mechanism, it is arranged in the inner space of aforementioned processing chamber, keeps the dull and stereotyped mode that contacts with the aforementioned processing chamber to avoid aforementioned second, supports aforementioned second movably and keep dull and stereotyped in level.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2003/005359 WO2004097509A1 (en) | 2003-04-25 | 2003-04-25 | System for producing pasted substrate |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101096209A Division CN100480805C (en) | 2003-04-25 | 2003-04-25 | Adhesive substrates manufacturing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1682145A true CN1682145A (en) | 2005-10-12 |
| CN100424546C CN100424546C (en) | 2008-10-08 |
Family
ID=33398114
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB038219123A Expired - Fee Related CN100424546C (en) | 2003-04-25 | 2003-04-25 | Apparatus for producing binding-substrates |
| CNB2007101096209A Expired - Fee Related CN100480805C (en) | 2003-04-25 | 2003-04-25 | Adhesive substrates manufacturing device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101096209A Expired - Fee Related CN100480805C (en) | 2003-04-25 | 2003-04-25 | Adhesive substrates manufacturing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4087385B2 (en) |
| CN (2) | CN100424546C (en) |
| TW (1) | TWI222671B (en) |
| WO (1) | WO2004097509A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100495149C (en) * | 2006-08-17 | 2009-06-03 | 株式会社爱发科 | Joint method and manufacturing device for joint substrate |
| CN102209621A (en) * | 2008-11-06 | 2011-10-05 | 芝浦机械电子装置股份有限公司 | Bonding apparatus and bonding method |
| CN104471630A (en) * | 2012-07-30 | 2015-03-25 | 芝浦机械电子装置株式会社 | Substrate bonding apparatus and substrate bonding method |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4679890B2 (en) * | 2004-11-29 | 2011-05-11 | 東京応化工業株式会社 | Support plate pasting device |
| TWI363212B (en) | 2006-05-26 | 2012-05-01 | Advanced Display Proc Eng Co | Adhesive chuck, and apparatus and method for assembling substrates using the same |
| JP4954968B2 (en) * | 2008-12-01 | 2012-06-20 | アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド | Adhesive chuck and substrate bonding apparatus having the same |
| KR101116322B1 (en) * | 2009-08-17 | 2012-03-09 | 에이피시스템 주식회사 | Method of aligning substrate |
| WO2021084582A1 (en) * | 2019-10-28 | 2021-05-06 | パナソニックＩｐマネジメント株式会社 | Vacuum pasting apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3707990B2 (en) * | 2000-03-30 | 2005-10-19 | 株式会社 日立インダストリイズ | Board assembly equipment |
| JP4689797B2 (en) * | 2000-07-19 | 2011-05-25 | Ｎｅｃ液晶テクノロジー株式会社 | Liquid crystal display device manufacturing apparatus and manufacturing method thereof |
| JP3742000B2 (en) * | 2000-11-30 | 2006-02-01 | 富士通株式会社 | Press machine |
| JP3577545B2 (en) * | 2001-02-06 | 2004-10-13 | 株式会社 日立インダストリイズ | Substrate bonding equipment |
-
2003
- 2003-04-25 CN CNB038219123A patent/CN100424546C/en not_active Expired - Fee Related
- 2003-04-25 CN CNB2007101096209A patent/CN100480805C/en not_active Expired - Fee Related
- 2003-04-25 JP JP2004571288A patent/JP4087385B2/en not_active Expired - Fee Related
- 2003-04-25 TW TW092109783A patent/TWI222671B/en not_active IP Right Cessation
- 2003-04-25 WO PCT/JP2003/005359 patent/WO2004097509A1/en active Application Filing
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100495149C (en) * | 2006-08-17 | 2009-06-03 | 株式会社爱发科 | Joint method and manufacturing device for joint substrate |
| CN102209621A (en) * | 2008-11-06 | 2011-10-05 | 芝浦机械电子装置股份有限公司 | Bonding apparatus and bonding method |
| CN102209621B (en) * | 2008-11-06 | 2014-09-03 | 芝浦机械电子装置股份有限公司 | Bonding apparatus and bonding method |
| CN104471630A (en) * | 2012-07-30 | 2015-03-25 | 芝浦机械电子装置株式会社 | Substrate bonding apparatus and substrate bonding method |
| CN104471630B (en) * | 2012-07-30 | 2017-07-28 | 芝浦机械电子装置株式会社 | Base Plate Lamination Device and method for bonding substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200423229A (en) | 2004-11-01 |
| CN100480805C (en) | 2009-04-22 |
| TWI222671B (en) | 2004-10-21 |
| WO2004097509A1 (en) | 2004-11-11 |
| CN101063764A (en) | 2007-10-31 |
| JP4087385B2 (en) | 2008-05-21 |
| JPWO2004097509A1 (en) | 2006-07-13 |
| CN100424546C (en) | 2008-10-08 |
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