CN1681977A - 针状硅结晶及其制造方法 - Google Patents
针状硅结晶及其制造方法 Download PDFInfo
- Publication number
- CN1681977A CN1681977A CNA038224623A CN03822462A CN1681977A CN 1681977 A CN1681977 A CN 1681977A CN A038224623 A CNA038224623 A CN A038224623A CN 03822462 A CN03822462 A CN 03822462A CN 1681977 A CN1681977 A CN 1681977A
- Authority
- CN
- China
- Prior art keywords
- acicular
- silicon
- crystal
- silicon crystal
- acicular silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/62—Whiskers or needles
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/005—Growth of whiskers or needles
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/903—Dendrite or web or cage technique
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Catalysts (AREA)
- Chemical Vapour Deposition (AREA)
- Cold Cathode And The Manufacture (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002272473 | 2002-09-19 | ||
JP272473/2002 | 2002-09-19 | ||
JP2002345192 | 2002-11-28 | ||
JP345192/2002 | 2002-11-28 | ||
JP2003007772A JP4140765B2 (ja) | 2002-09-19 | 2003-01-16 | 針状シリコン結晶およびその製造方法 |
JP007772/2003 | 2003-01-16 | ||
PCT/JP2003/011317 WO2004027127A1 (ja) | 2002-09-19 | 2003-09-04 | 針状シリコン結晶およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1681977A true CN1681977A (zh) | 2005-10-12 |
CN1330800C CN1330800C (zh) | 2007-08-08 |
Family
ID=32034070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038224623A Expired - Fee Related CN1330800C (zh) | 2002-09-19 | 2003-09-04 | 针状硅结晶及其制造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7396409B2 (zh) |
JP (1) | JP4140765B2 (zh) |
KR (1) | KR100749507B1 (zh) |
CN (1) | CN1330800C (zh) |
AU (1) | AU2003261940A1 (zh) |
DE (1) | DE10393222T5 (zh) |
WO (1) | WO2004027127A1 (zh) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1935035A2 (de) * | 2005-10-10 | 2008-06-25 | X-FAB Semiconductor Foundries AG | Herstellung von selbstorganisierten nadelartigen nano-strukturen und ihre recht umfangreichen anwendungen |
DE102005048366A1 (de) * | 2005-10-10 | 2007-04-19 | X-Fab Semiconductor Foundries Ag | Verfahren zur Herstellung von defektarmen selbstorganisierten nadelartigen Strukturen mit Nano-Dimensionen im Bereich unterhalb der üblichen Lichtwellenlängen mit großem Aspektverhältnis |
WO2011136028A1 (en) | 2010-04-28 | 2011-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Power storage device and method for manufacturing the same |
KR101838627B1 (ko) | 2010-05-28 | 2018-03-14 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 축전 장치 및 그 제작 방법 |
US8852294B2 (en) | 2010-05-28 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Power storage device and method for manufacturing the same |
JP5859746B2 (ja) | 2010-05-28 | 2016-02-16 | 株式会社半導体エネルギー研究所 | 蓄電装置およびその作製方法 |
WO2011152190A1 (en) | 2010-06-02 | 2011-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Power storage device and method for manufacturing the same |
WO2011155397A1 (en) | 2010-06-11 | 2011-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Power storage device |
US9076909B2 (en) | 2010-06-18 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and method for manufacturing the same |
US8569098B2 (en) | 2010-06-18 | 2013-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing photoelectric conversion device |
WO2011158722A1 (en) | 2010-06-18 | 2011-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method thereof |
JP5792523B2 (ja) | 2010-06-18 | 2015-10-14 | 株式会社半導体エネルギー研究所 | 光電変換装置の作製方法 |
US9112224B2 (en) | 2010-06-30 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Energy storage device and method for manufacturing the same |
WO2012002136A1 (en) | 2010-06-30 | 2012-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of power storage device |
US8846530B2 (en) | 2010-06-30 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming semiconductor region and method for manufacturing power storage device |
JP5841752B2 (ja) | 2010-07-02 | 2016-01-13 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US9012080B2 (en) * | 2010-09-21 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Needle-like microstructure and device having needle-like microstructure |
KR101899374B1 (ko) | 2010-11-26 | 2018-09-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체막, 반도체막의 형성 방법 및 축전 장치 |
KR101884040B1 (ko) | 2010-12-07 | 2018-07-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 축전 장치 |
KR101912674B1 (ko) | 2011-01-21 | 2018-10-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 수소 발생체, 수소 발생 장치, 발전 장치 및 구동 장치 |
JP6035054B2 (ja) | 2011-06-24 | 2016-11-30 | 株式会社半導体エネルギー研究所 | 蓄電装置の電極の作製方法 |
KR20130024769A (ko) | 2011-08-30 | 2013-03-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 축전 장치 |
JP6034621B2 (ja) | 2011-09-02 | 2016-11-30 | 株式会社半導体エネルギー研究所 | 蓄電装置の電極および蓄電装置 |
US9401247B2 (en) | 2011-09-21 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Negative electrode for power storage device and power storage device |
JP6050106B2 (ja) | 2011-12-21 | 2016-12-21 | 株式会社半導体エネルギー研究所 | 非水二次電池用シリコン負極の製造方法 |
DE102012207505A1 (de) * | 2012-05-07 | 2013-11-07 | Wacker Chemie Ag | Polykristallines Siliciumgranulat und seine Herstellung |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2658839B1 (fr) | 1990-02-23 | 1997-06-20 | Thomson Csf | Procede de croissance controlee de cristaux aciculaires et application a la realisation de microcathodes a pointes. |
JPH0595121A (ja) | 1991-10-01 | 1993-04-16 | Nippon Telegr & Teleph Corp <Ntt> | 量子細線構造およびその作製方法 |
TW295703B (zh) * | 1993-06-25 | 1997-01-11 | Handotai Energy Kenkyusho Kk | |
US5383354A (en) * | 1993-12-27 | 1995-01-24 | Motorola, Inc. | Process for measuring surface topography using atomic force microscopy |
US5844251A (en) * | 1994-01-05 | 1998-12-01 | Cornell Research Foundation, Inc. | High aspect ratio probes with self-aligned control electrodes |
US5976957A (en) | 1996-10-28 | 1999-11-02 | Sony Corporation | Method of making silicon quantum wires on a substrate |
JP3889889B2 (ja) | 1998-10-05 | 2007-03-07 | 財団法人ファインセラミックスセンター | カーボンナノチューブ膜の製造方法 |
US6936484B2 (en) * | 1998-10-16 | 2005-08-30 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Method of manufacturing semiconductor device and semiconductor device |
JP2001068649A (ja) * | 1999-08-30 | 2001-03-16 | Toyota Central Res & Dev Lab Inc | 半導体記憶装置 |
US6221154B1 (en) * | 1999-02-18 | 2001-04-24 | City University Of Hong Kong | Method for growing beta-silicon carbide nanorods, and preparation of patterned field-emitters by chemical vapor depositon (CVD) |
JP2001048512A (ja) | 1999-08-04 | 2001-02-20 | Ulvac Japan Ltd | 垂直配向カーボンナノチューブの作製方法 |
EP1102298A1 (en) | 1999-11-05 | 2001-05-23 | Iljin Nanotech Co., Ltd. | Field emission display device using vertically-aligned carbon nanotubes and manufacturing method thereof |
JP2002220300A (ja) * | 2001-01-18 | 2002-08-09 | Vision Arts Kk | ナノファイバーおよびナノファイバーの作製方法 |
US7084507B2 (en) * | 2001-05-02 | 2006-08-01 | Fujitsu Limited | Integrated circuit device and method of producing the same |
JP2003246700A (ja) | 2002-02-22 | 2003-09-02 | Japan Science & Technology Corp | シリコンナノニードルの製法 |
US20030189202A1 (en) | 2002-04-05 | 2003-10-09 | Jun Li | Nanowire devices and methods of fabrication |
-
2003
- 2003-01-16 JP JP2003007772A patent/JP4140765B2/ja not_active Expired - Fee Related
- 2003-09-04 KR KR1020057004721A patent/KR100749507B1/ko not_active IP Right Cessation
- 2003-09-04 AU AU2003261940A patent/AU2003261940A1/en not_active Abandoned
- 2003-09-04 WO PCT/JP2003/011317 patent/WO2004027127A1/ja active Application Filing
- 2003-09-04 DE DE10393222T patent/DE10393222T5/de not_active Withdrawn
- 2003-09-04 CN CNB038224623A patent/CN1330800C/zh not_active Expired - Fee Related
- 2003-09-04 US US10/526,486 patent/US7396409B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7396409B2 (en) | 2008-07-08 |
US20050244324A1 (en) | 2005-11-03 |
JP4140765B2 (ja) | 2008-08-27 |
DE10393222T5 (de) | 2005-09-01 |
KR100749507B1 (ko) | 2007-08-17 |
AU2003261940A1 (en) | 2004-04-08 |
CN1330800C (zh) | 2007-08-08 |
WO2004027127A1 (ja) | 2004-04-01 |
KR20050057468A (ko) | 2005-06-16 |
JP2004224576A (ja) | 2004-08-12 |
AU2003261940A8 (en) | 2004-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: KEFALUN MATERIALS CO., LTD.; SCIENCE AND TECHNOLOG Free format text: FORMER NAME OR ADDRESS: TOSHIBA CERAMICS CO.; SCIENCE AND TECHNOLOGY NETWORK SHIKOKU CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan, Japan Co-patentee after: Techno Network Shikoku Co.,Ltd Patentee after: Covalent Materials Corp. Address before: Tokyo, Japan, Japan Co-patentee before: Techno Network Shikoku Co.,Ltd Patentee before: Toshiba Ceramic Co., Ltd. |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070808 Termination date: 20091009 |