CN1675556A - 静电电容型加速度传感器及其制造方法 - Google Patents

静电电容型加速度传感器及其制造方法 Download PDF

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Publication number
CN1675556A
CN1675556A CN 03819626 CN03819626A CN1675556A CN 1675556 A CN1675556 A CN 1675556A CN 03819626 CN03819626 CN 03819626 CN 03819626 A CN03819626 A CN 03819626A CN 1675556 A CN1675556 A CN 1675556A
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CN
China
Prior art keywords
mentioned
barrier film
weight
axial region
base board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 03819626
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English (en)
Chinese (zh)
Inventor
铃木和词
藤浪直宏
深田直孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Star Micronics Co Ltd
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Star Micronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Star Micronics Co Ltd filed Critical Star Micronics Co Ltd
Publication of CN1675556A publication Critical patent/CN1675556A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
CN 03819626 2002-08-22 2003-07-03 静电电容型加速度传感器及其制造方法 Pending CN1675556A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002242243A JP2004085203A (ja) 2002-08-22 2002-08-22 静電容量型加速度センサおよびその製造方法
JP242243/2002 2002-08-22

Publications (1)

Publication Number Publication Date
CN1675556A true CN1675556A (zh) 2005-09-28

Family

ID=31944013

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 03819626 Pending CN1675556A (zh) 2002-08-22 2003-07-03 静电电容型加速度传感器及其制造方法

Country Status (4)

Country Link
JP (1) JP2004085203A (ja)
CN (1) CN1675556A (ja)
AU (1) AU2003246267A1 (ja)
WO (1) WO2004019049A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101529257B (zh) * 2006-11-14 2011-06-15 松下电器产业株式会社 传感器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4073382B2 (ja) * 2003-09-02 2008-04-09 ホシデン株式会社 振動センサ
JP2005331281A (ja) * 2004-05-18 2005-12-02 Hosiden Corp 振動センサ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3766190B2 (ja) * 1997-10-24 2006-04-12 内外ゴム株式会社 静電容量形３軸加速度センサ
JPH11248736A (ja) * 1998-02-26 1999-09-17 Yazaki Corp 静電容量型加速度センサ及びその製造方法
JP2000249609A (ja) * 1999-03-01 2000-09-14 Wakoo:Kk 静電容量式センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101529257B (zh) * 2006-11-14 2011-06-15 松下电器产业株式会社 传感器

Also Published As

Publication number Publication date
WO2004019049A1 (ja) 2004-03-04
JP2004085203A (ja) 2004-03-18
AU2003246267A1 (en) 2004-03-11

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication