AU2003246267A1 - Capacitance-type acceleration sensor and method of manufacturing the same - Google Patents

Capacitance-type acceleration sensor and method of manufacturing the same

Info

Publication number
AU2003246267A1
AU2003246267A1 AU2003246267A AU2003246267A AU2003246267A1 AU 2003246267 A1 AU2003246267 A1 AU 2003246267A1 AU 2003246267 A AU2003246267 A AU 2003246267A AU 2003246267 A AU2003246267 A AU 2003246267A AU 2003246267 A1 AU2003246267 A1 AU 2003246267A1
Authority
AU
Australia
Prior art keywords
capacitance
manufacturing
same
acceleration sensor
type acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003246267A
Inventor
Naohiro Fujinami
Naotaka Fukada
Kazushi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Star Micronics Co Ltd
Original Assignee
Star Micronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Star Micronics Co Ltd filed Critical Star Micronics Co Ltd
Publication of AU2003246267A1 publication Critical patent/AU2003246267A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
AU2003246267A 2002-08-22 2003-07-03 Capacitance-type acceleration sensor and method of manufacturing the same Abandoned AU2003246267A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002242243A JP2004085203A (en) 2002-08-22 2002-08-22 Capacitance-type acceleration sensor and its manufacturing method
JP2002-242243 2002-08-22
PCT/JP2003/008507 WO2004019049A1 (en) 2002-08-22 2003-07-03 Capacitance-type acceleration sensor and method of manufacturing the same

Publications (1)

Publication Number Publication Date
AU2003246267A1 true AU2003246267A1 (en) 2004-03-11

Family

ID=31944013

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003246267A Abandoned AU2003246267A1 (en) 2002-08-22 2003-07-03 Capacitance-type acceleration sensor and method of manufacturing the same

Country Status (4)

Country Link
JP (1) JP2004085203A (en)
CN (1) CN1675556A (en)
AU (1) AU2003246267A1 (en)
WO (1) WO2004019049A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4073382B2 (en) * 2003-09-02 2008-04-09 ホシデン株式会社 Vibration sensor
JP2005331281A (en) * 2004-05-18 2005-12-02 Hosiden Corp Vibration sensor
WO2008059757A1 (en) * 2006-11-14 2008-05-22 Panasonic Corporation Sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3766190B2 (en) * 1997-10-24 2006-04-12 内外ゴム株式会社 Capacitance type 3-axis acceleration sensor
JPH11248736A (en) * 1998-02-26 1999-09-17 Yazaki Corp Capacitance-type acceleration sensor and its manufacture
JP2000249609A (en) * 1999-03-01 2000-09-14 Wakoo:Kk Capacitance-type sensor

Also Published As

Publication number Publication date
JP2004085203A (en) 2004-03-18
WO2004019049A1 (en) 2004-03-04
CN1675556A (en) 2005-09-28

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase