CN1639034A - 强化的化学机械平整加工带 - Google Patents

强化的化学机械平整加工带 Download PDF

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Publication number
CN1639034A
CN1639034A CNA038056542A CN03805654A CN1639034A CN 1639034 A CN1639034 A CN 1639034A CN A038056542 A CNA038056542 A CN A038056542A CN 03805654 A CN03805654 A CN 03805654A CN 1639034 A CN1639034 A CN 1639034A
Authority
CN
China
Prior art keywords
polymeric material
band
processing belt
cmp processing
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA038056542A
Other languages
English (en)
Chinese (zh)
Inventor
林际兵
D·J·海姆斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/097,337 external-priority patent/US6666326B2/en
Priority claimed from US10/112,447 external-priority patent/US20030186630A1/en
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of CN1639034A publication Critical patent/CN1639034A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B65G15/32—Belts or like endless load-carriers made of rubber or plastics
    • B65G15/34—Belts or like endless load-carriers made of rubber or plastics with reinforcing layers, e.g. of fabric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/02—Backings, e.g. foils, webs, mesh fabrics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D29/00—Producing belts or bands
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2305/00—Condition, form or state of the layers or laminate
    • B32B2305/08—Reinforcements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2413/00—Belts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Belt Conveyors (AREA)
CNA038056542A 2002-03-12 2003-03-10 强化的化学机械平整加工带 Pending CN1639034A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/097,337 2002-03-12
US10/097,337 US6666326B2 (en) 2002-03-12 2002-03-12 Reinforced chemical mechanical planarization belt
US10/112,447 2002-03-29
US10/112,447 US20030186630A1 (en) 2002-03-29 2002-03-29 Reinforced chemical mechanical planarization belt

Publications (1)

Publication Number Publication Date
CN1639034A true CN1639034A (zh) 2005-07-13

Family

ID=28044136

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA038056542A Pending CN1639034A (zh) 2002-03-12 2003-03-10 强化的化学机械平整加工带

Country Status (7)

Country Link
EP (1) EP1483182A4 (de)
JP (1) JP2005520335A (de)
KR (1) KR20040105766A (de)
CN (1) CN1639034A (de)
AU (1) AU2003213823A1 (de)
TW (1) TW586158B (de)
WO (1) WO2003078859A2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107398828A (zh) * 2016-05-20 2017-11-28 智胜科技股份有限公司 基底层、具有基底层的研磨垫及研磨方法
CN111168503A (zh) * 2020-01-17 2020-05-19 三峡大学 一种刚度可调的打磨装置及使用方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8491360B2 (en) * 2007-10-26 2013-07-23 Innopad, Inc. Three-dimensional network in CMP pad
WO2021016647A1 (de) * 2019-08-01 2021-02-04 Berndorf Innovations Und Technologie Gmbh Verfahren zur herstellung eines endlosbandes

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5234551A (en) * 1981-09-24 1993-08-10 Dutt William H Extended nip press belt having an interwoven base fabric and an impervious impregnant
RU2014990C1 (ru) * 1991-11-06 1994-06-30 Иван Николаевич Щербина Бесконечная полировальная лента
US5906269A (en) * 1994-08-12 1999-05-25 Habasit Globe, Inc. Conveyor belting and method of manufacture
ES2177978T3 (es) * 1996-07-02 2002-12-16 Yokohama Rubber Co Ltd Correa transportadora.
JPH10120137A (ja) * 1996-10-21 1998-05-12 Mitsuboshi Belting Ltd 搬送用ベルトおよび同ベルトの製造方法
AT404741B (de) * 1997-03-11 1999-02-25 Huyck Austria Textiler gurt
US6736714B2 (en) * 1997-07-30 2004-05-18 Praxair S.T. Technology, Inc. Polishing silicon wafers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107398828A (zh) * 2016-05-20 2017-11-28 智胜科技股份有限公司 基底层、具有基底层的研磨垫及研磨方法
CN107398828B (zh) * 2016-05-20 2020-05-05 智胜科技股份有限公司 基底层、具有基底层的研磨垫及研磨方法
CN111168503A (zh) * 2020-01-17 2020-05-19 三峡大学 一种刚度可调的打磨装置及使用方法

Also Published As

Publication number Publication date
AU2003213823A1 (en) 2003-09-29
KR20040105766A (ko) 2004-12-16
WO2003078859A3 (en) 2004-03-25
JP2005520335A (ja) 2005-07-07
TW200304180A (en) 2003-09-16
AU2003213823A8 (en) 2003-09-29
EP1483182A4 (de) 2007-04-25
TW586158B (en) 2004-05-01
WO2003078859A2 (en) 2003-09-25
EP1483182A2 (de) 2004-12-08

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