AU2003213823A1 - Reinforced chemical mechanical planarization belt - Google Patents

Reinforced chemical mechanical planarization belt

Info

Publication number
AU2003213823A1
AU2003213823A1 AU2003213823A AU2003213823A AU2003213823A1 AU 2003213823 A1 AU2003213823 A1 AU 2003213823A1 AU 2003213823 A AU2003213823 A AU 2003213823A AU 2003213823 A AU2003213823 A AU 2003213823A AU 2003213823 A1 AU2003213823 A1 AU 2003213823A1
Authority
AU
Australia
Prior art keywords
chemical mechanical
mechanical planarization
reinforced chemical
belt
planarization belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003213823A
Other versions
AU2003213823A8 (en
Inventor
Diane J. Hymes
Jibing Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/097,337 external-priority patent/US6666326B2/en
Priority claimed from US10/112,447 external-priority patent/US20030186630A1/en
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of AU2003213823A8 publication Critical patent/AU2003213823A8/en
Publication of AU2003213823A1 publication Critical patent/AU2003213823A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B65G15/32—Belts or like endless load-carriers made of rubber or plastics
    • B65G15/34—Belts or like endless load-carriers made of rubber or plastics with reinforcing layers, e.g. of fabric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/02—Backings, e.g. foils, webs, mesh fabrics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D29/00—Producing belts or bands
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2305/00—Condition, form or state of the layers or laminate
    • B32B2305/08—Reinforcements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2413/00—Belts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Belt Conveyors (AREA)
AU2003213823A 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt Abandoned AU2003213823A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/097,337 US6666326B2 (en) 2002-03-12 2002-03-12 Reinforced chemical mechanical planarization belt
US10/097,337 2002-03-12
US10/112,447 US20030186630A1 (en) 2002-03-29 2002-03-29 Reinforced chemical mechanical planarization belt
US10/112,447 2002-03-29
PCT/US2003/007389 WO2003078859A2 (en) 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt

Publications (2)

Publication Number Publication Date
AU2003213823A8 AU2003213823A8 (en) 2003-09-29
AU2003213823A1 true AU2003213823A1 (en) 2003-09-29

Family

ID=28044136

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003213823A Abandoned AU2003213823A1 (en) 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt

Country Status (7)

Country Link
EP (1) EP1483182A4 (en)
JP (1) JP2005520335A (en)
KR (1) KR20040105766A (en)
CN (1) CN1639034A (en)
AU (1) AU2003213823A1 (en)
TW (1) TW586158B (en)
WO (1) WO2003078859A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8491360B2 (en) * 2007-10-26 2013-07-23 Innopad, Inc. Three-dimensional network in CMP pad
TWI713526B (en) * 2016-05-20 2020-12-21 智勝科技股份有限公司 Base layer, polishing pad with base layer and polishing method
JP2022542661A (en) * 2019-08-01 2022-10-06 ベルンドルフ イノベーションズ ウント テクノロジー ゲゼルシャフト ミット ベシュレンクテル ハフツング Endless belt manufacturing method
CN111168503B (en) * 2020-01-17 2021-02-19 三峡大学 Polishing device with adjustable rigidity and using method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5234551A (en) * 1981-09-24 1993-08-10 Dutt William H Extended nip press belt having an interwoven base fabric and an impervious impregnant
RU2014990C1 (en) * 1991-11-06 1994-06-30 Иван Николаевич Щербина Abrasive endless belt
US5906269A (en) * 1994-08-12 1999-05-25 Habasit Globe, Inc. Conveyor belting and method of manufacture
DE69715215T2 (en) * 1996-07-02 2003-05-15 Yokohama Rubber Co Ltd FÖRDERBAND
JPH10120137A (en) * 1996-10-21 1998-05-12 Mitsuboshi Belting Ltd Conveyer belt and manufacture of same
AT404741B (en) * 1997-03-11 1999-02-25 Huyck Austria TEXTILE BELT
US6736714B2 (en) * 1997-07-30 2004-05-18 Praxair S.T. Technology, Inc. Polishing silicon wafers

Also Published As

Publication number Publication date
AU2003213823A8 (en) 2003-09-29
JP2005520335A (en) 2005-07-07
WO2003078859A2 (en) 2003-09-25
EP1483182A2 (en) 2004-12-08
EP1483182A4 (en) 2007-04-25
CN1639034A (en) 2005-07-13
KR20040105766A (en) 2004-12-16
WO2003078859A3 (en) 2004-03-25
TW586158B (en) 2004-05-01
TW200304180A (en) 2003-09-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase