CN1637595B - 形成图像的方法 - Google Patents
形成图像的方法 Download PDFInfo
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- CN1637595B CN1637595B CN2004101048061A CN200410104806A CN1637595B CN 1637595 B CN1637595 B CN 1637595B CN 2004101048061 A CN2004101048061 A CN 2004101048061A CN 200410104806 A CN200410104806 A CN 200410104806A CN 1637595 B CN1637595 B CN 1637595B
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- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
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- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
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- 229960001860 salicylate Drugs 0.000 description 1
- YGSDEFSMJLZEOE-UHFFFAOYSA-M salicylate Chemical compound OC1=CC=CC=C1C([O-])=O YGSDEFSMJLZEOE-UHFFFAOYSA-M 0.000 description 1
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- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
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- PZTAGFCBNDBBFZ-UHFFFAOYSA-N tert-butyl 2-(hydroxymethyl)piperidine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCCCC1CO PZTAGFCBNDBBFZ-UHFFFAOYSA-N 0.000 description 1
- 239000012749 thinning agent Substances 0.000 description 1
- LMYRWZFENFIFIT-UHFFFAOYSA-N toluene-4-sulfonamide Chemical compound CC1=CC=C(S(N)(=O)=O)C=C1 LMYRWZFENFIFIT-UHFFFAOYSA-N 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical compound [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000010023 transfer printing Methods 0.000 description 1
- WEAPVABOECTMGR-UHFFFAOYSA-N triethyl 2-acetyloxypropane-1,2,3-tricarboxylate Chemical compound CCOC(=O)CC(C(=O)OCC)(OC(C)=O)CC(=O)OCC WEAPVABOECTMGR-UHFFFAOYSA-N 0.000 description 1
- 239000001069 triethyl citrate Substances 0.000 description 1
- VMYFZRTXGLUXMZ-UHFFFAOYSA-N triethyl citrate Natural products CCOC(=O)C(O)(C(=O)OCC)C(=O)OCC VMYFZRTXGLUXMZ-UHFFFAOYSA-N 0.000 description 1
- 235000013769 triethyl citrate Nutrition 0.000 description 1
- XZZNDPSIHUTMOC-UHFFFAOYSA-N triphenyl phosphate Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
- G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
- G03F7/2018—Masking pattern obtained by selective application of an ink or a toner, e.g. ink jet printing
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/02—Printing inks
- C09D11/10—Printing inks based on artificial resins
- C09D11/101—Inks specially adapted for printing processes involving curing by wave energy or particle radiation, e.g. with UV-curing following the printing
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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Abstract
描述一种用于在基质上形成图像的掩模。可将该掩模选择性地涂于基质上的辐射能敏感材料之上。施加在该复合材料上的光化辐射使未被掩模覆盖的那部分辐射能敏感材料发生化学变化。用适当的碱水溶液显影剂除去该掩模和此部分辐射能敏感材料。该掩模由碱水溶液可溶解或可分散的聚合物和遮光剂组成。
Description
技术领域
本发明涉及一种用于遮光的组合物及使用该组合物的方法。本发明尤其涉及一种用于遮光的组合物,该组合物可分散或溶解于碱水溶液中,在涂布后保持其形状,且可用于在基质上成像。
背景技术
在基质上形成图案的方法包括诸如电子、绘画艺术和纺织工业的多种工业。形成图案或图像典型地涉及平版印刷术或照相平版印刷术。例如,印刷的织物标签可用多种技术制造,例如丝网印刷、平版胶印、染色、胶版印刷、生产中(in-plant)印刷、和转印等。此类标签适合于服装用于装饰、标识、广告、洗涤和护理说明、尺码、价格及其它目的。
丝网印刷(也称为丝网)利用安装在网屏上的多孔模板,其中非印刷区域被模板保护。掩模材料也可为干燥的基漆、紫胶或动物胶。在机械化的印刷机上通过在网屏下送入布料、将稠度类似油漆的油墨涂于网屏之上、用刮板展开并迫使其通过细网眼进行印刷。
在平版胶印法中,图像区和非图像区基本上在薄金属板表面的同一平面上,通过化学方法保持它们之间的清晰度。油墨被板上的疏水区吸收,但不被亲水区吸收。然后将图像转印至胶印橡胶辊之上,再由胶辊转印到织物片上。
胶版印刷是利用柔性橡胶板和快干流体墨的凸版轮转印刷机的一种形式。该橡胶板利用凸版法产生图像,其中图像区高于非图像区凸起。墨辊仅接触凸起区的顶面。周围的非印刷区较低,不接收油墨。着墨的图像直接转印到布上。上述任何印刷方法中都可用染料而非有色墨实现染色。但是,使用染料需要附加的后处理使染料固定在织物内。
电子工业中,通过照相平版印刷法在基质上形成图像以形成电路图。这涉及辐射能敏感材料例如感光材料的使用,该材料作为全区域涂层(旋转铸造、辊涂、喷涂和丝网印刷、以及浸渍)或全区域薄片(层压)涂布在表面上。该材料是在控光实验室内涂布的,以确保在涂布晶片或铜板前面引入所需图案的掩模之前所述感光材料不被预曝光。该掩模可以是接触掩模、邻近掩模或投影掩模。所有情况下,都作为独立的单元高精度地制造掩模,而且小心地保护以防止损坏或灰尘/颗粒聚集。将掩模放置在适当位置以后,就可用由与感光材料所用光引发剂相匹配的辐射材料制成的灯使未被掩模保护区域内的基质涂层曝光。取决于所用感光材料的类型,所得图案转印相对于掩模可为正性或负性的。曝光后,必须使感光材料暴露于化学显影剂,该化学试剂以这样的方式改变涂层的化学性质从而使未处理的材料可在水基浸渍浴或传送喷淋管/喷雾器中被洗去。
尽管获得表面凸纹图案的旋转铸造、浸渍、辊涂、喷涂和丝网印刷、或叠片照相平版印刷法都是成功的,但它们确实存在一些问题,例如浪费材料(因为全区域技术),形成选择性三维图案既困难又耗时间,感光材料所用化学试剂毒性等级很高,大量有毒化学显影剂的处理能力,而且形成简单图案是通过多步工艺,例如光涂层、掩模对准、辐射曝光、掩模去除、图案显影、洗去过量物质和基质干燥。
虽然可通过引入能在表面上提供组成图案的浮雕结构的其它工艺解决这些问题之一或多个,包括镂花涂装(丝网印刷)、微粒转移(冲压)和激光书写-蚀刻(包括烧蚀划线和直接书写照相平版印刷等效成像)。每种技术都有其受制于预定应用的细节如形成图案的速度、浮雕图案的厚度、控制蚀刻的能力、工艺成本以及使用过程的容易程度的优点和局限性。但是,任何一种方法都不能解决上述所有问题。
US6,093,239公开了一种热熔油墨,可用于在基质上形成标记,例如在印刷丝网制造方法中。该专利披露所述油墨为至少50%水自动分散性的。该油墨含有蜡或树脂、着色剂、稳定剂,且可通过喷墨装置施用。该专利披露所述油墨在室温下为固体,在高于室温的温度下 为液体。该专利还披露所述油墨可在成像完成之后易于用水从基质上除去。但是,该油墨的水自动分散性是一个缺点。这样的油墨不适用于例如很多工厂都可能存在的潮湿环境。这样的油墨可能容易因为吸湿而变得太易流动以致不能适当应用。
用于制造电子仪器的很多方法需要选择性地涂布感光材料,然后再用于操作整个制造过程的后续步骤。例如,印刷线路板内的通孔中排斥焊料掩模,但用于后续生产工艺的需要耐焊料的板的其它区域存在焊料掩模。
目前采用多种方法使焊料掩模或其它感光材料最终能选择性地存在。例如,使焊料掩模组成图案完全覆盖除想要曝光的那些部分以外的电子电路,例如用于焊接到另一元件上。焊料掩模通常由涂布在基质如印刷电路板之上的感光材料形成。使该感光材料受到通过原图或光学用具成像的光化辐射的作用。曝光后,使感光材料在溶剂中显影,洗去所述材料的已曝光或未曝光部分(取决于所述感光材料是正性还是负性的)。然后使留在基质上的那部分材料固化(例如通过加热或UV光)形成用来保护印刷电路的硬质永久焊料掩模。
电子工业的一个问题是正确校准或对准例如在制造多层印刷线路板中。对准是指一或多个印刷线路图或其部分相对于印刷线路板上的预定位置或板另一侧的另一图案的相对位置。制造多层印刷线路板中的挑战之一是获得适当的内层对准。内部特征必须精确地相互对准,而且必须精确地对准任何钻孔。孔与内层配准不良导致以下两个潜在的可靠性问题:孔与线的连接失败,以及孔与绝缘导体之间短路。内层的配准不良还使电阻增大并使电导率减小。严重的配准不良造成断路状态,完全失去连续性。
制造多层印刷线路板的最终步骤之一就是在外层上涂布焊料掩模。如上所述,用光学用具使所述焊料掩模选择性地曝光以致可洗去板的特定区域。此光学用具是基于电路线布置的“理想”尺寸制备的,典型地由重氮、卤化银或石英和铬组成。但由于制备板的过程中所采用的精确加工,实际板的电路线尺寸与“理想”尺寸的偏差是常见的。 “理想的”光学用具与动态变化的板组合使用常产生多层层压材料中板与板之间的对准问题。因为焊料掩模步骤是制造多层印刷线路板中的最终步骤之一,因配准不良产生的废板导致生产过程的成本高而且效率低。
另外,在常规实践中,工人通常准备多个固定的光学用具,且试图手动地找到光学用具和板之间的最佳配合以避免配准不良。这样的过程既不精确又耗时,导致多层印刷线路板的生产效率进一步降低。
因此,需要在基质上形成图像的改进方法。
发明内容
组合物包括一或多种碱水溶液可分散或碱水溶液可溶解的化合物、和一或多种遮光剂,除去溶剂或相变后所述组合物在25℃或更低温度下假粘度为至少10,000cp。
另一优选实施方案中,所述组合物包括一或多种碱水溶液可分散或碱水溶液可溶解的分子量为900道尔顿或更高的聚合物、和一或多种遮光剂,除去溶剂或相变后所述组合物在25℃或更低温度下假粘度为至少10,000cp。
另一实施方案中,所述组合物包括一或多种碱水溶液可分散或碱水溶液可溶解的聚合物、和一种或多种阻挡500nm以下光的遮光剂,除去溶剂或相变后所述组合物在25℃或更低温度下假粘度为至少10,000cp。
另一实施方案中,所述组合物包括一或多种碱水溶液可分散或碱水溶液可溶解的聚合物、和一种或多种遮光剂,所述一或多种聚合物的酸值为60或更大,除去溶剂或相变后所述组合物在25℃或更低温度下假粘度为至少10,000cp。
另一实施方案是一种成像方法,包括:提供基质:在基质上涂布辐射能敏感材料;选择性地在所述辐射能敏感材料上涂布一种组合物形成复合基质,所述组合物包括一或多种碱水溶液可分散或碱水溶液可溶解的化合物、和一或多种遮光剂,除去溶剂或相变后所述组合物在25℃或更低温度下假粘度为至少10,000cp;使所述复合基质暴露于 光化辐射;显影除去未暴露于光化辐射的组合物和辐射能敏感材料从而在基质上形成图像。已成像的基质可被进一步处理,例如在形成多层印刷线路板中或在由所述图像形成的空隙或通道中沉积金属从而在基质上形成电路。
所述组合物容易用碱水溶液除去。因此,采用该组合物的成像方法中可以避免有机显影剂,从而使工人不接触很多常规成像方法中使用的有毒和环境不友好的有机显影剂。另外,由于该组合物容易分散或溶解在碱水溶液、而不是中性或酸性溶液中,因此它们适合在潮湿环境中使用。这种潮湿环境是很多加工厂中常见的。
除去溶剂或相变后所述组合物在25℃或更低温度下假粘度为至少10,000cp使所述组合物涂布之后能在基质上保持所要图案。
另外,由使用所述遮光组合物的成像方法还可有效地解决用许多常规技术由常规光学用具难以纠正的对准问题。制造多层印刷线路板中通常存在此对准问题,其中使相邻板之间的通孔校准对于电子仪器中板的有效生产和操作至关重要。
具体实施方式
除非另有说明,本说明书中所用下述缩写有以下含义:℃=摄氏度;gm=克;L=升;mL=毫升;wt%=质量百分比;cp=厘泊;kV=千伏;psi=磅/平方英寸;mJ=毫焦耳;cm=厘米。
术语“印刷线路板”和“印刷电路板”在本说明书中可互换使用。“沉积”和“电镀”在本说明书中可互换使用,包括化学镀和电解电镀。“多层”意指两层或更多的层。“聚合物”和“共聚物”在本说明书中可互换使用。“辐射能”意指来自光或热的能量。“光化辐射”意指产生化学变化的来自光的辐射。“(烷基)丙烯酸酯”包括“丙烯酸酯”和“烷基丙烯酸酯”。“粘度”=流体内摩擦或流体的剪切应力与剪切速率之比。“假粘度”=触变物质在其最粘状态下的粘度。酸值=中和1gm游离酸所需的氢氧化钾的克数,是用来测量物质中存在的游离酸的。
除非另有说明,所有百分比均按重量计算,基于干重或不含溶剂的重量计。所有数值范围都包括端点且可以任意顺序组合,除非这些 数值范围受总计为100%限制是合乎逻辑的。
所述组合物包括一或多种碱水溶液可分散或碱水溶液可溶解的化合物、和一种或多种遮光剂,除去溶剂或相变后所述组合物在25℃和更低温度下假粘度为至少10,000cp。相变的例子是温熔体和热熔体的冷却。该遮光组合物可在基质上形成图像的方法中用作掩模。可将该遮光组合物选择性地涂于辐射能敏感材料之上。例如,可在基质上涂布感光材料,如制造印刷线路板中。可通过任何适合的方法如数字法将有遮光组合物组分的掩模组成图案地涂于感光材料之上。给包括基质、感光材料和组成图案的掩模的复合材料施加光化辐射。掩模中所含遮光剂阻挡足量的光化辐射达到被掩模覆盖的感光材料,从而防止感光材料发生化学变化。例如,组合物中的一或多种遮光剂可吸收或反射光。未被遮光组合物覆盖的感光材料发生化学变化。然后用碱水溶液除去掩模。适合的碱水溶液pH在7.5~14、或例如8~13,或例如9~12的范围内。
碱水溶液还可除去未受到光化辐射照射的感光材料,或者可除去已受到光化辐射照射的感光材料。典型地,除去未受到光化辐射照射的负性感光材料,和除去已受到光化辐射照射的正性感光材料。这些感光材料的例子包括抗蚀剂和油墨。抗蚀剂包括光致抗蚀剂如负性和正性光致抗蚀剂、镀敷抗蚀剂、蚀刻或内层抗蚀剂和焊料掩模。
遮光组合物可包括一或多种碱水溶液可分散或碱水溶液可溶解的化合物。所述组合物中包含足量的此类化合物以使所述组合物可用碱水溶液分散或溶解。此类化合物包括但不限于含有酸性官能团、酐官能团或其组合的化合物。此类化合物占组合物的0.1~99wt%,或例如1~90wt%,或例如15~80wt%,或例如25~60wt%。此类化合物的例子包括但不限于含有酸性官能团、酐官能团及其组合的聚合物,以及非聚合的有机酸、含有酸酐的化合物、及其混合物。聚合物和非聚合化合物可混合在一起以提供碱水溶液分散性或碱水溶液溶解性。
使用聚合物时,聚合物占遮光组合物的1~99wt%,或例如10~80wt%,或例如25~60wt%。所述组合物中可包含任何聚合物或聚合 物的混合物,只要遮光组合物是碱水溶液可溶解的或至少是碱水溶液可分散的。适合的聚合物的例子包括但不限于聚酰胺;聚乙烯基吡咯烷酮及其衍生物和共聚物:聚乙烯基吡咯烷酮/乙烯基吡咯烷酮/乙酸乙烯酯共聚物,烷基化聚乙烯基吡咯烷酮,乙烯基吡咯烷酮/甲基丙烯酸二甲基氨基乙酯共聚物,乙烯基吡咯烷酮/乙烯基己内酰胺/甲基丙烯酸二甲基氨基乙酯三元共聚物,乙烯基吡咯烷酮/苯乙烯共聚物,和乙烯基吡咯烷酮/丙烯酸共聚物;甲基乙烯基醚/马来酸酐共聚物;聚 唑啉如聚(2-乙基-2-唑啉)和(2-乙基-2-唑啉)/(2-苯基-2- 唑啉)共聚物;聚乙烯基甲基醚;聚丙烯酰胺;聚乙烯醇;聚烷氧基化物;聚亚烷基二醇;酸官能的丙烯酸类聚合物;苯乙烯/马来酸酐共聚物;和热塑性聚合蜡,包括含有羟基、酰胺、砜、磷酸酯(phosphase)、磺酰胺、氨基甲酸酯、羧酸、胺和羧酸酯官能团的极性蜡。也可使用前述聚合物和共聚物的合适衍生物。这些聚合物和共聚物多数可商购,或者容易用本领域和文献中已知的方法制备。此类聚合物典型地有900道尔顿或更高的分子量,或例如2,000~500,000道尔顿,或例如10,000~300,000道尔顿,或例如20,000~100,000。
为提供碱水溶液溶解性或分散性,所述遮光组合物典型地包括一或多种在其结构中有酸酐或酸官能团或其组合的聚合物。有酸酐或酸官能团及其组合的聚合物的例子包括但不限于乙烯基吡咯烷酮/丙烯酸共聚物,甲基乙烯基醚/马来酸酐共聚物,酸官能的丙烯酸类聚合物和共聚物,以及苯乙烯/马来酸酐共聚物,和有酸官能团的热塑性蜡。典型地,所述遮光组合物中包含一或多种上述有酸酐或酸官能团的聚合物和共聚物。此聚合物的酸值在至少60gm氢氧化钾、或例如70~350gm氢氧化钾、或例如80~250gm氢氧化钾、或例如90~150gm氢氧化钾的范围内。此类含酸和酸酐的聚合物典型地占遮光组合物的聚合物组分的10~100wt%,或例如20~80wt%,或例如40~60wt%。
适合的含酸或酸酐的非聚合化合物的实例包括但不限于辛酸、草酸、丙二酸、酒石酸、柠檬酸、苯甲酸、邻苯二甲酸、乙醇酸、苹果酸、乙二酸、丁二酸、戊二酸、乳酸、水杨酸、癸二酸、苯三酸、环 己烷羧酸,以及邻苯二甲酸酐。一或多种此类化合物的用量可为所述组合物的25wt%或更少、或例如组合物的20wt%或更少、或例如组合物的15~0.1wt%,或例如组合物的10~1wt%。
任何适合的遮光剂均可使用,只要该试剂阻挡足量的光以防止辐射能敏感材料发生光致化学变化。例如,某些遮光剂典型地与光引发剂体系的吸收光谱重叠,并吸收400nm或更高,或例如425~700nm,或例如450~500nm的光。此遮光剂的例子包括但不限于颜料如无机颜料和有机颜料,染料,光引发剂和吸收剂。包括合成和天然染料和颜料,以及颜色指数(C.I.;The Society of Dyers and Colorist Company出版)中分类入“颜料”的化合物。所述组合物中包含占遮光组合物的0.1~90wt%、或例如1~50wt%、或例如10~30wt%的一或多种此类遮光剂。所述组合物中包含一或多种遮光剂以阻挡波长小于500nm的光、或波长小于450nm的光、或450~500nm的光。
适合的无机颜料的例子包括但不限于氧化铁如三氧化二铁(III),氧化锌,氧化铬,氧化钴,镉红,硫酸钡,群青(硅铝酸盐),混合相钛酸盐如C.I.绿-黄色颜料PY-53、C.I.黄色颜料PY-53和C.I.红-黄色颜料PBr-24,混合相金属氧化物如C.I.黄色颜料PY-119、C.I.褐色颜料PBr-29和C.I.褐色颜料PBr-31,二氧化钛如金红石和锐钛矿,琥珀,以及铬酸铅。
适合的有机颜料的例子包括但不限于炭黑,靛青,酞菁,对位红,flavanoids如红、黄、蓝、橙和象牙色。
适合的有机染料的例子包括但不限于偶氮染料,蒽醌,苯并二呋喃酮,靛青(indigold),聚甲炔(polymethine)及相关染料,苯乙烯基、二和三芳基碳鎓离子染料及相关染料,奎诺酞酮,硫基染料,硝基和亚硝基染料,芪,甲朁(formazans),二嗪,苝,喹吖啶酮,吡咯并吡咯,异吲哚啉和异吲哚啉酮。
具有颜色指数(C.I.)值的颜料的例子包括C.I.黄色颜料12,C.I.黄色颜料13,C.I.黄色颜料14,C.I.黄色颜料17,C.I.黄色颜料20,C.I.黄色颜料24,C.I.黄色颜料31,C.I.黄色颜料55,C.I.黄色颜 料83,C.I.黄色颜料93,C.I.黄色颜料109,C.I.黄色颜料110,C.I.黄色颜料139,C.I.黄色颜料153,C.I.黄色颜料154,C.I.黄色颜料166,C.I.黄色颜料168,C.I.橙色颜料36,C.I.橙色颜料43,C.I.橙色颜料51,C.I.红色颜料9,C.I.红色颜料97,C.I.红色颜料122,C.I.红色颜料123,C.I.红色颜料149,C.I.红色颜料176,C.I.红色颜料177,C.I.红色颜料180,C.I.红色颜料215,C.I.紫色颜料19,C.I.紫色颜料23,C.I.紫色颜料29,C.I.蓝色颜料15,C.I.蓝色颜料15:3,C.I.蓝色颜料15:6,C.I.绿色颜料7,C.I.绿色颜料36,C.I.褐色颜料23,C.I.褐色颜料25,C.I.黑色颜料1,和C.I.黑色颜料7。
适合的吸收剂包括但不限于苯甲酮及其衍生物如羟基苯甲酮,苯并三唑及其衍生物如苯并三唑羧酸,三嗪如均三嗪,苯甲酸酯如对二甲氨基苯甲酸辛酯,肉桂酸酯如甲氧基肉桂酸辛酯,水杨酸酯如水杨酸辛酯,氰双苯丙烯酸酯如氰双苯丙烯酸辛酯,氰基丙烯酸酯如2-氰基-3,3-二苯基丙烯酸2-乙基己酯,丙二酸酯,草酰替苯胺,2-氰基丙烯酸酯和甲脒。
适合的光引发剂包括但不限于六芳基联咪唑化合物,α-氨基烷基苯酮,酰基氧化膦,鎓盐,和芳基锍盐。
除了上述聚合物和遮光剂外,所述遮光剂还可任选地包括其它组分。此可选组分包括但不限于抗氧化剂、增塑剂、增稠剂、表面活性剂、湿润剂、螯合剂、消泡剂、缓冲剂、杀生物剂、杀真菌剂、粘度改进剂、杀菌剂、溶剂如水和有机溶剂、疏水性聚合物和蜡如饱和及不饱和烃。可选组分如增塑剂、增稠剂、疏水性聚合物和蜡可用于调节遮光组合物的粘度和假性粘度、机械特性、粘附力和耐磨性。
增塑剂的含量为遮光组合物的0.5~20wt%、或例如1~15wt%、或例如5~10wt%。适合的增塑剂的例子包括乙烯乙酸乙烯酯,邻苯二甲酸酯如邻苯二甲酸二丁酯、邻苯二甲酸二庚酯、邻苯二甲酸二辛酯和邻苯二甲酸二烯丙酯,二醇如聚乙二醇、和聚丙二醇,二醇酯如三甘醇二乙酸酯、四甘醇二乙酸酯、和二丙二醇二苯甲酸酯,磷酸酯如磷酸三甲苯酯、磷酸三苯酯,酰胺如对甲苯磺酰胺、苯磺酰胺、和 N-N-丁基丙酮酰胺,脂族二元酸酯诸如己二酸二异丁酯、己二酸二辛酯、癸二酸二甲酯、壬二酸二辛酯和苹果酸二丁酯,柠檬酸酯如柠檬酸三乙酯、柠檬酸三丁酯、乙酰柠檬酸三乙酯,月桂酸丁酯,4,5-双环氧环己烷-1,2-二羧酸二辛酯,和甘油三乙酰酯。也可使用不同增塑剂的混合物。
可使用任何适合的增稠剂。很多常规的增稠剂为本领域公知。增稠剂的含量可为0.05~10wt%,或例如1~5wt%。适合的增稠剂的例子包括但不限于硼润土及其它硅酸盐类材料,脂肪酸如月桂酸或硬脂酸的铝、钙和锌盐,煅制氧化硅,或其混合物。
适合的表面活性剂包括非离子表面活性剂、离子型表面活性剂如阴离子和阳离子表面活性剂、和两性表面活性剂、或其混合物。表面活性剂的含量为遮光组合物的0.5~10wt%、或例如1~5wt%。
任何适合的溶剂或稀释剂都可使用,例如水或一种或多种有机溶剂、或其混合物。有机溶剂的例子包括低级烷基醇如甲醇、乙醇、丙醇,酮如丙酮和甲乙酮。可使用水和一种或多种有机溶剂的混合物。通常以提供所要固体配方的量使用溶剂。典型的固体配方在5~90wt%或例如10~80wt%或例如20~70wt%的范围内。
任何适当的热稳定剂都可使用。这样的热稳定剂以常规的用量使用,且对本领域技术人员是已知的。
其它的可选组分可以以常规用量被包括在内,或采用较少的实验针对特定配方进行定制。
遮光组合物可以用本领域已知的任何适当方法进行制备。一个方法是形成组分的悬浮液或乳液。组分可以在适当的混合或均质装置中以任何顺序进行结合。如果组分是不充分的流体,可以在组分中加入诸如水或有机溶剂等溶剂以使得它们充分混合。
在组分的混合中,混合物可以加热到25℃~150℃以避免混合物变得过于粘稠。组分均匀混合之后,可以冷却混合物,但不得至25℃或以下,因为遮光组合物在25℃或以下典型地变得过于粘稠以致不能使用。因此,遮光组合物储存在温暖的环境中,或在直接使用前进行 配制。
遮光组合物可以用任何适当的方法有选择地涂于辐射能敏感材料之上。适用涂敷方法的例子包括但不限于喷墨。辐射能敏感型材料的实例包括但不限于抗蚀剂和油墨。抗蚀剂包括诸如光致抗蚀剂等的感光材料,和镀敷抗蚀剂。
可用任何适合的喷墨设备将遮光组合物选择性地涂于辐射能敏感材料之上。喷墨装置可将要涂于辐射能敏感材料的选择性掩模设计信息以数字方式储存在其存储器内,从而可在无中间步骤的情况下将遮光组合物选择性地直接涂于辐射能敏感材料之上。适用计算机程序的例子是用于产生加工工具数据的标准CAD(计算机辅助设计)程序。操作人员可很容易地通过改变以数字方式储存在喷墨装置内的程序修改遮光组合物的选择性沉积。此外,还可很容易地解决对准问题。可给喷墨装置编程发觉基质之间可能的不正确对准,例如制造多层印刷线路板中。所述装置感觉到板间配准不良时,所述程序修改掩模图案的喷墨涂敷以避免或纠正相邻板之间的配准不良。重新设计板间掩模图案的能力使板间配准不良的可能性减小,免除了制备多个固定光学用具的高成本而且低效率的工作。因此,选择性沉积掩模和形成图案的效率比许多常规方法改善。
喷墨印刷有两种主要类型:“按需滴式(drop-on-demand)”喷墨和“连续”喷墨。采用按需滴式喷墨技术,遮光组合物储存在储罐内,并输送到打印机打印头内的喷嘴中。有一种方法迫使一滴遮光组合物脱离喷嘴而滴至辐射能敏感材料之上。典型地,这是室内隔膜的压电动作,它将液滴“泵”出喷头,或将所述流体局部加热使室内压力升高,从而使液滴喷出。对于连续喷墨而言,导电的遮光组合物在压力下供入油墨喷嘴并通过小孔(典型地直径为35~80μm)压出。通过喷嘴之前,加压遮光组合物流通过通有电流的陶瓷晶体。此电流产生与AC(交流电)电流频率相等的压电振动。此振动又由连续物流产生组合物液滴。所述组合物破裂成一系列连续的液滴,这些液滴是等间距而且等尺寸的。在液滴与充电电极内的液流分离处环绕所述喷射器, 在充电电极和滴流之间施加电压。液滴从液流中脱落时,每个液滴都携带有与其脱落的瞬间所施加的电压成比例的电荷。通过以与产生液滴相同的速率改变充电电极的电压,可使每个液滴充电至预定水平。液滴流继续其飞行并在两个保持恒定电位例如+/-0.1~+/-5kV、或例如+/-1~+/-3kV的偏转板之间通过。在此场存在下,使液滴以与所带电荷成比例的量向偏转板之一偏转。不带电荷的液滴不发生偏转而被收集到沟槽中以再循环回油墨喷嘴。带电因而偏转的液滴撞击与液滴偏转方向成直角行进的辐射能敏感材料。通过改变各液滴上的电荷,可施加所要图案。液滴尺寸可在30~100μm,或例如40~80μm,或例如50~70μm直径的范围内。
所述喷墨法可适应于计算机控制用于连续变化数据的高速应用。喷墨印刷法可分为三种类型:高压(10psi或更高)、低压(低于10psi)和真空技术。均为本领域已知或在文献中描述,可用于将遮光组合物涂于辐射能敏感材料之上。
遮光组合物可在高于25℃、或例如50~250℃、或例如100~150℃的温度下以5~25cp、或例如5~20cp、或例如10~15cp的粘度由喷墨装置涂敷。遮光组合物在25℃或更低、或例如15~23℃下的假粘度为10000cp或更高,或例如20,000~100,000cp,或例如30,000~70,000cp。此假粘度是在除去溶剂或相变之后的。典型地,相变是温熔体或热熔体形式的组合物被冷却形成牢固的键合时的形式。可用本领域已知的任何适当方法除去溶剂,例如风干或加热。也可用本领域已知的任何适当方法如用冷空气风干使温和热熔体经历相变。
上述的聚合物及聚合物的量也有助于形成所要求的粘度和假粘度。也可用上述可选组分获得所要求的粘度和假粘度。所述遮光组合物在喷墨装置的喷嘴处较稀(5~25cp),涂于基质后较稠(10,000cp或更高)。
可用任何适合的碱水溶液除去所述掩模。此碱水溶液包括但不限于碱水溶液如氢氧化锂、钠和钾或弱酸与碱反应的碱金属盐如锂、钠和钾的碳酸盐和碳酸氢盐的水溶液。此溶液包含0.001~10wt%或例如 0.5~3wt%的碱性试剂。
所述掩模与辐射能敏感材料的任何部分一起除去之后,所述基质上留下图案。该组成图案的基质可进一步处理或者所述组成图案的基质可以是成品。在焊料掩模的情况下,用UV光或UV热辐射使留在基质上的那部分材料固化。可采用常规方法。
电子制品中所用基质可通过在由图案形成的空隙和通道中沉积一或多层金属进行深加工。可通过化学镀法、电解法或浸渍沉积金属或金属合金。可采用任何适合的化学镀、电解、和浸渍浴和方法沉积金属或金属合金层。此浴许多可商购或者根据文献中的描述很容易制备。而且本领域和从文献中已知许多方法。可沉积的金属包括但不限于贵金属和非贵金属及其合金。适合的贵金属的例子包括金、银、铂、钯、及其合金。适合的非贵金属的例子包括铜、镍、钴、铅、铁、铋、锌、钌、铑、铷、铟及其合金。
可使包含金属或金属合金沉积物的基质连接在一起(例如通过层压)形成多层印刷电路板。许多层压方法为本领域已知或描述在文献中。如前面所述制造多层印刷线路板所涉及的一个问题是对准。对准是指一或多个印刷线路图或其部分相对于印刷线路板上的预定位置或板另一侧的另一图案的相对位置。制造多层印刷线路板中的挑战之一是获得适当的内层对准。内部特征必须精确地相互对准,而且必须精确地对准任何钻孔。孔与内层配准不良导致以下两个潜在的可靠性问题:孔与线的连接失败,以及孔与绝缘导体之间短路。内层的配准不良还使电阻增大并使电导率减小。严重的配准不良造成断路状态,完全失去连续性。
本发明方法解决了配准不良的问题。例如,通过喷墨法涂敷遮光组合物可使组合物在选择位置准确地沉积在基质上的辐射能敏感材料之上。对于多个基质可以可靠的准确度重复此选择沉积,因为可数字化地编程喷墨进行准确的重复涂敷。此外,此程序还可通过感觉未对准和重新设计掩模图案校正配准不良问题防止相邻基质之间的配准不良。
一典型实施方案中,在基质如印刷电路板上形成焊料掩模的过程中,可使遮光组合物选择性地沉积在光致抗蚀剂之上。焊料掩模是非导电性材料的硬质永久层,覆盖印刷电路板的表面,包住印刷电路的电路迹线。可将遮光组合物选择性地涂于印刷电路板的光致抗蚀剂之上以致掩模勾画出图案,从而由焊料掩模盖住成品上的电路迹线。遮光组合物的选择性涂敷可通过喷墨完成。
也可以液体和干膜形式使用正性和负性光致抗蚀剂。例如,如果遮光组合物作为掩模涂于负性光致抗蚀剂之上,则可在受到光化辐射之后用碱水溶液除去掩模和光致抗蚀剂。如果遮光组合物作为掩模涂于正性光致抗蚀剂之上,则用碱水溶液除去掩模和已曝光的光致抗蚀剂。可用常规方法使留在基质上的那部分光致抗蚀剂固化,可任选地按工业中已知的方法进一步处理所述基质。
所述遮光组合物及掩模的形成方法可在任何适合的辐射能敏感材料上实施。典型地,在形成掩模之前将此材料涂布或层压在基质上。适合基质的例子包括但不限于金属,和电介质例如陶瓷、玻璃、塑料、环氧/玻璃纤维材料(如FR4印刷线路板中的)。
上述用遮光组合物形成掩模的方法并非穷举。本发明包括用于将遮光组合物涂于辐射能敏感材料之上和制造制品的其它装置和方法。
实施例1
在负性光致抗蚀剂上形成掩模
用帘流涂布法将负性液体光致抗蚀剂以薄膜形式涂于印刷电路板之上。采用以下条件:使用25gm湿涂料/平方米以获得板上2mil厚而铜电路上0.1mil厚的薄膜。涂布速度为2米/分钟。使光致抗蚀剂在90℃干燥15分钟,然后冷却到室温。
如下配制遮光组合物:
所述加聚物按以下通用方法制备:
在3升烧瓶中装入960g去离子水,置于氮气氛下并加热到85℃。单独准备由275g丙烯酸2-乙基己酯(52份)、227g甲基丙烯酸甲酯(43份)、27g甲基丙烯酸(5份)、1.5gTREM LF-40溶液(36%,HenkelCorp.)、和177g去离子水组成的单体乳液。将该乳液加入反应釜之前,向釜中加入氨(4.8%~9.6%水溶液24g)、过硫酸铵(9.6%溶液11g)和54nm丙烯酸聚合物晶种(22.8%溶液22.5g)。然后在搅拌下用20分钟的时间将所述单体乳液以3.9g/min的速度加入釜中,同时以0.2g/min的速度加入24.6g过硫酸铵的2.24%水溶液,然后分别以6.4和0.20g/min的速度加料100分钟,并保持20分钟。使混合物冷却至60℃,加入2.6g的0.15%硫酸亚铁,再加入3.2g的4.4%叔丁基氢过氧化物和6.1g的1.6%甲醛合次硫酸氢钠,保持20分钟,然后加入第二个相同量的叔丁基氢过氧化物和甲醛合次硫酸氢钠。然后使混合物冷却,过滤,加入足量的29%氨水,将pH调节到8.0~9.0。
在水中使55gm的所述丙烯酸共聚物与1gml,3-二羟基二苯酮和14gm聚氧乙烯(40)单硬脂酸酯混合,放在一边备用。
使20gm二氧化钛和10gm炭黑溶于豆油至饱和。然后使溶于豆油的二氧化钛和炭黑与所述在水中的组分混合。用常规乳化装置使混合物乳化。向所述乳化组分中加入足量的水以提供60wt%固体的配方。
将所述遮光组合物置于按需滴式喷墨装置的储罐中。适合的装置是有压电按需滴式喷墨头的Spectra Apollo。给喷墨装置编程以选择性地涂敷遮光组合物在不覆盖印刷线路板的铜电路迹线的光致抗蚀剂部分上形成选择性掩模。用高压技术即50psi将遮光组合物从喷墨装置中喷出。
在50psi下将遮光组合物从储罐中通过有70μm直径孔的喷墨喷嘴压出。预计组合物液滴的粘度为5~20cp。通过吹入环境温度的空气使粘性遮光组合物的温度降至20℃。所述组合物粘附于光致抗蚀剂在不覆盖板上电路迹线的光致抗蚀剂上形成掩模。预计所述遮光组合物液滴的假粘度为10000cp或更大。
使所述板、光致抗蚀剂和掩模的复合材料受到UV能量曝光度为至少350mJ/cm2的光化辐射。掩模阻挡足量的UV能量以致可用碱水溶液除去被掩模覆盖的光致抗蚀剂。曝光时间使得受到光化辐射的光致抗蚀剂部分在施用碱水溶液的过程中保持完整。
用1wt%一水合碳酸钠的碱水溶液从复合材料上显影除去掩模及未曝光的光致抗蚀剂。覆盖铜电路迹线的焊料掩模留在板上。使该板与一或多个其它板层压在一起形成多层印刷线路板。
实施例2
在正性光致抗蚀剂上形成掩模
用帘流涂布法将正性液体光致抗蚀剂以湿膜形式涂于印刷电路板之上。采用以下涂布条件:使用20gm湿涂料/平方米以获得板上3mil厚而铜电路上0.1mil厚的薄膜。涂布速度为2米/分钟。使光致抗蚀剂在90℃干燥15分钟,然后冷却到室温。然后用如下所述遮光组合物选择性地涂布所述光致抗蚀剂。
在25~50℃下在甲乙酮中混合这些组分。
将所述遮光组合物置于按需滴式喷墨装置的储罐中。给喷墨装置编程以选择性地涂敷遮光组合物在覆盖印刷线路板的铜电路迹线的光致抗蚀剂部分上形成掩模。用高压技术即60psi将遮光组合物从喷墨装置中喷出。
在60psi下将遮光组合物从储罐中通过有80μm直径孔的喷墨喷嘴压出。预计液滴的粘度为5~20cp。粘性遮光组合物的温度为75℃,用常规干发器除去甲乙酮溶剂。所述组合物粘附于光致抗蚀剂在覆盖板上电路迹线的光致抗蚀剂上形成选择性掩模。板周围的环境温度为22℃。遮光组合物液滴接触光致抗蚀剂表面时,预计除去溶剂后所述组合物的假粘度为10000cp或更大。
使所述板、光致抗蚀剂和掩模的复合材料受到UV能量曝光度为300mJ/cm2的光化辐射作用。掩模阻挡足量的UV能量以致被掩模覆盖的正性光致抗蚀剂不发生化学变化从而不被碱水溶液除去。曝光时间使得受到光化辐射的光致抗蚀剂部分容易用碱水溶液从板上除去。
用1wt%碳酸钾的碱水溶液从复合材料上显影除去掩模及已曝光的正性光致抗蚀剂。覆盖铜电路迹线的焊料掩模留在板上。使该板与一或多个其它板层压在一起形成多层印刷线路板。
实施例3
在负性光致抗蚀剂上形成掩模
用丝网印刷法将负性液体光致抗蚀剂以湿膜形式涂于印刷电路板之上。网眼在61~120目聚酯的范围内改变。使筛过的光致抗蚀剂在80℃下干燥30分钟。将有下述配方的遮光组合物以选择性掩模形式涂于光致抗蚀剂之上。
制备有以下组分的遮光组合物:
在150℃下使上述组分混合在一起。
将所述遮光组合物置于按需滴式喷墨装置的储罐中。给喷墨装置编程以涂敷遮光组合物在不覆盖印刷线路板的铜电路迹线的光致抗蚀剂部分上形成掩模。用高压技术即70psi将遮光组合物从喷墨装置中喷出。
在70psi下将遮光组合物从储罐中通过有80μm直径孔的喷墨喷嘴压出。预计组合物液滴的粘度为5~20cp。粘性遮光组合物离开喷墨装置时温度为150℃。所述组合物粘附于板上的光致抗蚀剂在环境温度下的光致抗蚀剂上形成选择性掩模。印刷线路板周围的环境温度为23℃。预计所述遮光组合物的假粘度为10000cp或更大。
使所述板、光致抗蚀剂和掩模的复合材料受到UV能量曝光度为至少275mJ/cm2的光化辐射作用。掩模阻挡足量的UV能以致可用碱水溶液除去被掩模覆盖的光致抗蚀剂。曝光时间使得受到光化辐射的光致抗蚀剂在施用碱水溶液的过程中留在板上。
用1wt%一水合碳酸钠的碱水溶液从复合材料上显影除去掩模及未曝光的光致抗蚀剂。覆盖铜电路迹线的焊料掩模留在各板上。使该板与一或多个其它板层压在一起形成多层印刷线路板。
实施例4
掩模配方
如下形成遮光组合物:
加入足量的甲乙酮形成10%固体的组合物。使所述组合物的组分在45℃下掺混在一起形成混合物。然后与上面实施例1、2和3中一样以掩模形式选择性地涂敷所述遮光组合物形成覆盖印刷线路板上铜电路的焊料掩模。可将所述板与其它板层压在一起形成多层层压板。
实施例5
掩模配方
制备以下遮光组合物:
在150℃下使这些组分与足量的丙酮混合形成10%固体的组成。然后与上面实施例1、2和3中一样以掩模形式涂敷所述遮光组合物在印刷线路板上形成焊料掩模。然后可使带有焊料掩模的板与其它板层压在一起形成多层印刷线路板。
实施例6
温熔体
制备以下遮光组合物温熔体:
在60℃下使这些组分混合在一起。然后在70℃~90℃下通过喷墨法涂敷所述遮光组合物在印刷线路板上形成焊料掩模,基本上如实施例1、2和3中所述。然后可使带有焊料掩模的板与其它板层压在一起形成多层印刷线路板。
Claims (2)
1.一种形成图像的方法,包括:
a)在印刷线路板上涂布辐射能敏感材料;
b)选择性地在印刷线路板上所述辐射能敏感材料上涂布遮光组合物形成复合材料,所述遮光组合物包含1~90重量%一或多种碱水溶液可溶解的聚合物、和一或多种遮光剂,所述的聚合物含有酸官能团、酐官能团或其组合;
c)从所述组合物中除去溶剂,或产生相变;
d)使所述组合物受到光化辐射;和
e)除去可溶解在碱水溶液中的遮光组合物和辐射能敏感材料部分,从而在所述印刷线路板上形成图像。
2.权利要求1的方法,其中通过喷墨法将所述遮光组合物选择性涂于所述辐射能敏感材料之上。
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- 2004-03-29 JP JP2004097220A patent/JP4875834B2/ja not_active Expired - Fee Related
- 2004-12-13 EP EP04257737.9A patent/EP1553445B1/en not_active Not-in-force
- 2004-12-17 TW TW093139289A patent/TWI303015B/zh not_active IP Right Cessation
- 2004-12-21 KR KR1020040109106A patent/KR101203216B1/ko active IP Right Grant
- 2004-12-23 CN CN2004101048061A patent/CN1637595B/zh not_active Expired - Fee Related
- 2004-12-23 US US11/020,871 patent/US7632621B2/en not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
---|---|
TW200525294A (en) | 2005-08-01 |
US20050164121A1 (en) | 2005-07-28 |
TWI303015B (en) | 2008-11-11 |
CN1637595A (zh) | 2005-07-13 |
JP2005187792A (ja) | 2005-07-14 |
KR101203216B1 (ko) | 2012-11-20 |
EP1553445A3 (en) | 2006-12-13 |
US7632621B2 (en) | 2009-12-15 |
EP1553445A2 (en) | 2005-07-13 |
JP4875834B2 (ja) | 2012-02-15 |
KR20050065337A (ko) | 2005-06-29 |
EP1553445B1 (en) | 2018-11-14 |
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