CN1607266B - 处理工件的设备 - Google Patents

处理工件的设备 Download PDF

Info

Publication number
CN1607266B
CN1607266B CN200410098150.7A CN200410098150A CN1607266B CN 1607266 B CN1607266 B CN 1607266B CN 200410098150 A CN200410098150 A CN 200410098150A CN 1607266 B CN1607266 B CN 1607266B
Authority
CN
China
Prior art keywords
fluid
pivot
rotor
channel
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN200410098150.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN1607266A (zh
Inventor
格雷戈尔·阿诺尔德
安德烈亚斯·吕特林豪斯-亨克尔
于尔根·克莱因
斯特凡·贝勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott Glaswerke AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Glaswerke AG filed Critical Schott Glaswerke AG
Publication of CN1607266A publication Critical patent/CN1607266A/zh
Application granted granted Critical
Publication of CN1607266B publication Critical patent/CN1607266B/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00—Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
    • F16L39/04—Joints or fittings for double-walled or multi-channel pipes or pipe assemblies allowing adjustment or movement
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Threshing Machine Elements (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
CN200410098150.7A 2003-07-15 2004-07-15 处理工件的设备 Expired - Lifetime CN1607266B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10331946.8 2003-07-15
DE10331946A DE10331946B4 (de) 2003-07-15 2003-07-15 Vorrichtung zur Behandlung von Werkstücken

Publications (2)

Publication Number Publication Date
CN1607266A CN1607266A (zh) 2005-04-20
CN1607266B true CN1607266B (zh) 2010-05-12

Family

ID=33461928

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200410098150.7A Expired - Lifetime CN1607266B (zh) 2003-07-15 2004-07-15 处理工件的设备

Country Status (6)

Country Link
US (2) US7074275B2 (https=)
EP (1) EP1498654B1 (https=)
JP (1) JP4485868B2 (https=)
CN (1) CN1607266B (https=)
AT (1) ATE408782T1 (https=)
DE (2) DE10331946B4 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007043026A1 (de) * 2007-09-11 2009-03-12 GAT Gesellschaft für Antriebstechnik mbH Radiale Drehdurchführung
DE102007045141A1 (de) * 2007-09-20 2009-04-02 Krones Ag Plasmabehandlungsanlage
WO2012015744A1 (en) * 2010-07-28 2012-02-02 Synos Technology, Inc. Rotating reactor assembly for depositing film on substrate
US20140145429A1 (en) * 2011-07-19 2014-05-29 Volvo Construction Equipment Ab Swivel joint for construction machinery
DE102016008398A1 (de) * 2016-07-09 2018-01-11 Eisele Pneumatics Gmbh & Co. Kg Kupplungsvorrichtung
US12135102B2 (en) * 2023-02-23 2024-11-05 Axis Forestry Inc. Swivel connector

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374314A (en) * 1992-06-26 1994-12-20 Polar Materials, Inc. Methods and apparatus for externally treating a container with application of internal bias gas
CN1345402A (zh) * 1999-03-30 2002-04-17 赛德尔公司 具有改善的压力分配回路的加工空心体的转盘机
CN1349567A (zh) * 1999-04-29 2002-05-15 西德尔阿克蒂斯服务公司 微波等离子体容器处理装置

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB512744A (en) * 1938-01-10 1939-09-25 John Elov Englesson Means for transferring a pressure fluid from a stationary conduit to a rotary conduit, or vice versa
US3175849A (en) * 1959-11-18 1965-03-30 White Sales Corp Graham Rotary fluid coupling
US3321043A (en) * 1964-03-24 1967-05-23 Ingersoll Rand Co Oil bath lubrication for mechanism
US3950017A (en) * 1974-04-29 1976-04-13 United Technologies Corporation Leakproof connection for polyethylene tubing
DE7527890U (de) 1975-09-03 1976-01-02 Siemens Ag, 1000 Berlin Und 8000 Muenchen Drehdurchfuehrung fuer vakuumrezipienten
US3999766A (en) * 1975-11-28 1976-12-28 General Electric Company Dynamoelectric machine shaft seal
NL168770C (nl) * 1976-04-13 1982-05-17 Ihc Holland Nv Draaibare koppeling voor twee of meer leidingen voor een overslagboei.
DE7722908U1 (de) * 1977-07-22 1977-11-24 Castolin Gmbh, 6000 Frankfurt Vorrichtung zur automatischen Auftragsschweißung
NL8303278A (nl) * 1983-09-23 1985-04-16 Single Buoy Moorings Draaibare leidingkoppeling voor meerdere ingaande en meerdere uitgaande leidingen.
US4662657A (en) * 1985-08-30 1987-05-05 Foster-Miller, Inc. Flow system
US4912296A (en) * 1988-11-14 1990-03-27 Schlienger Max P Rotatable plasma torch
CH685348A5 (de) * 1992-05-08 1995-06-15 Balzers Hochvakuum Vakuumbeschichtungsanlage mit drehgetriebenem Substratträger.
DE4240991A1 (de) * 1992-12-05 1994-06-09 Plasma Technik Ag Plasmaspritzgerät
NO177780C (no) * 1993-07-06 1995-11-22 Statoil As Svivelinnretning for fluidumoverföring
DE4329948A1 (de) * 1993-09-04 1995-03-09 Basf Lacke & Farben Vorrichtung zum Einbringen von Dichtungsmasse in Nockendrehverschlüsse, Verfahren zum Einbringen von Dichtungsmasse in Nockendrehverschlüsse sowie die Verwendung der Vorrichtung zum Einspritzen von Dichtungsmasse in Nockendrehverschlüsse
US5362939A (en) * 1993-12-01 1994-11-08 Fluidyne Engineering Corporation Convertible plasma arc torch and method of use
US5750822A (en) * 1995-11-13 1998-05-12 Institute Of Chemical Technology (Plastech) Processing of solid mixed waste containing radioactive and hazardous materials
EP0981000B1 (en) * 1998-02-18 2004-07-28 Nippon Pillar Packing Co., Ltd. Rotary joint
US6215090B1 (en) * 1998-03-06 2001-04-10 The Esab Group, Inc. Plasma arc torch
NO306416B1 (no) * 1998-03-26 1999-11-01 Norske Stats Oljeselskap Roterende koplingsanordning med kompenseringsenhet
JP2975923B1 (ja) * 1998-05-22 1999-11-10 日本ピラー工業株式会社 回転継手装置
DE19934032A1 (de) * 1999-07-21 2001-02-01 Promatec Gmbh Berlin Verbindungsvorrichtung
US6286546B1 (en) * 1999-10-26 2001-09-11 Lucent Technologies, Inc. Disposable seal system with integral buffer
DE10017184A1 (de) * 2000-04-07 2001-10-11 Georg Springmann Ind Und Bergb Zweiteilige Drehdurchführung
JP3555936B2 (ja) * 2000-07-03 2004-08-18 日本ピラー工業株式会社 多流路形ロータリジョイント
CA2484023A1 (en) 2002-05-24 2003-12-04 Schott Ag Device and method for treating workpieces
DE10253513B4 (de) * 2002-11-16 2005-12-15 Schott Ag Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
DE10329191A1 (de) * 2003-06-28 2005-01-13 Ina-Schaeffler Kg Drehdurchführung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374314A (en) * 1992-06-26 1994-12-20 Polar Materials, Inc. Methods and apparatus for externally treating a container with application of internal bias gas
CN1345402A (zh) * 1999-03-30 2002-04-17 赛德尔公司 具有改善的压力分配回路的加工空心体的转盘机
CN1349567A (zh) * 1999-04-29 2002-05-15 西德尔阿克蒂斯服务公司 微波等离子体容器处理装置

Also Published As

Publication number Publication date
ATE408782T1 (de) 2008-10-15
US20050051088A1 (en) 2005-03-10
US20090071399A2 (en) 2009-03-19
JP2005036317A (ja) 2005-02-10
US20060201420A1 (en) 2006-09-14
US7074275B2 (en) 2006-07-11
EP1498654A1 (de) 2005-01-19
DE10331946A1 (de) 2005-02-17
DE10331946B4 (de) 2008-06-26
EP1498654B1 (de) 2008-09-17
CN1607266A (zh) 2005-04-20
DE502004008076D1 (de) 2008-10-30
JP4485868B2 (ja) 2010-06-23

Similar Documents

Publication Publication Date Title
CN100434566C (zh) 用于进行cvd涂层的回转式机器
CN101376488B (zh) 介质分配设备及其密封装置
KR100474179B1 (ko) 개선된 압력분배회로를 갖는 중공체 처리용 턴테이블장치
CN102537417B (zh) 流体转动分配器
CN1607266B (zh) 处理工件的设备
ZA200409486B (en) Rotary machine for cvd coatings.
US6918417B2 (en) Beverage bottling plant for filling bottles with a liquid beverage filling material, and an easily cleaned lifting device in a beverage bottling plant
CN101945716A (zh) 用于制造金属容器的设备和方法
US11597550B2 (en) Device and method for degassing and gassing containers
CN107684985B (zh) 旋转接头、喷涂方法和包括旋转接头的喷涂机器
CN107848784B (zh) 用于用填充产品填充容器的设备
EP2803629B1 (en) Manifold for conveying a sterilizing fluid inside empty articles
CN106006515A (zh) 双通道旋转式灌装装置
WO2002002975A2 (en) Aseptic product discharge valve and method
CN208281680U (zh) 一种多位旋转接头
JP3931846B2 (ja) ロータリー式リンサ
CN217108332U (zh) 流体物料处理设备
JP2005036317A5 (https=)
JP4454254B2 (ja) 回転式成膜装置、回転式成膜装置用の真空装置
US11643316B2 (en) Distribution machine for distributing flowable media
JP3903331B2 (ja) ロータリ式洗びん機のロータリバルブ押圧装置
CN218863365U (zh) 一种流体物料处理分配装置
CN108500519A (zh) 新型焊接转盘
WO2023169752A1 (en) Hydraulic manifold for a rotary distributor of a rotary filling machine
JP2004098020A (ja) ロータリー式リンサ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20100512

CX01 Expiry of patent term