CN1600658A - Substrate delivery in-out device, method and substrate delivery appts. and method - Google Patents
Substrate delivery in-out device, method and substrate delivery appts. and method Download PDFInfo
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- CN1600658A CN1600658A CNA2004100905202A CN200410090520A CN1600658A CN 1600658 A CN1600658 A CN 1600658A CN A2004100905202 A CNA2004100905202 A CN A2004100905202A CN 200410090520 A CN200410090520 A CN 200410090520A CN 1600658 A CN1600658 A CN 1600658A
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- mounting table
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
- H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Specific Conveyance Elements (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
An installation/removal device (1) for putting or removing a substrate (A) into or from a storage container (10) in which substrates are stored, the installation/removal device comprising a mounting table (31) on which the substrate (A) is mounted, a holder (32) for holding the substrate (A) provided on the mounting table (31) so as to be movable in the direction of installation/removal of the substrate (A), and rollers (37) provided on the mounting table which support the substrate (A), being held by the holder (32), such that it is movable in the direction of installation/removal.
Description
Technical field
The present invention relates to a kind of be used for that the substrate that storing containers was taken out of or moved into to tabular substrate such as Semiconductor substrate, liquid crystal substrate from storing containers moved into that conveyance device and substrate are moved into the method for taking out of and from storing containers above-mentioned substrate conveyance to substrate conveyance device and the substrate conveyance method of handling device etc.
The application is the preceence of requirement Japan's patent application 2003-296453 number of August 20 in 2003 filing an application and Japan's patent application 2003-296454 number, quotes its content here.
Background technology
Now, in the Fabrication procedure of substrates such as quartz conductor, this substrate of multi-disc is stored in the storing containers, moves into conveyance device with substrate and takes out of and deliver to the substrate conveyance device from this storing containers, carries out predetermined processing by this substrate conveyance device conveyance to lining processor.In addition, the substrate after predetermined processing finishes is delivered to substrate from lining processor with the substrate conveyance device and is moved into conveyance device, moves into conveyance device with this substrate and moves into storing containers once again.Make each device of such substrate, existing multi-form device is arranged in the clean room usually, makes substrate not be subjected to the influence of dust etc.
Move into conveyance device with regard to above-mentioned substrate, though multi-form device is provided, utilize head roll to move into to take out of substrate and be well-known as one kind of from storing containers.
For example, as shown in figure 28, substrate is moved into conveyance device 100 and is had substrate support platform 101 and mounting table 102, this substrate support platform 101 is after the storing containers 110 that makes horizontal storage multi-disc substrate A descends, the peristome 106 that forms from storing containers 110 bottoms inserts storing containers 110, lift and break away from the substrate A of institute's mounting in the substrate support portion 105 of storing containers 110 from substrate support portion 105, this mounting table 102 is taken out of mouthful in abutting connection with configuration moving into of the outside of storing containers 110 and storing containers 110.
In addition, on the top of substrate support platform 101 and mounting table 102, the cylinder 103,104 of taking out of the direction rotation along moving into is set.In addition, this two cylinder 103,104 is driven by not shown drive sources such as motor mutually, so that hand of rotation and rotative speed are synchronous.
Take out of from storing containers 110 under the situation of substrate A moving into conveyance device 100 with this substrate, at first storing containers 110 is descended to substrate support platform 101 with not shown lifting mechanism.After storing containers 110 descended, substrate support platform 101 inserted in the storing containers 110 from peristome 106, and the orlop substrate A of the cylinder 103 on top and storing containers 110 contacts.Then, along with storing containers 110 further descends, cylinder 103 lifts substrate A from substrate support portion 105 and makes it to break away from.
When substrate broke away from, two cylinders 103,104 began to rotate.When two cylinders 103,104 rotated, the friction drag of cylinder 103,104 worked to substrate A, and substrate A moves to the hand of rotation of cylinder 103,104 then.That is, substrate A takes out of mouth and moves mounting table 102 to by moving in the storing containers 110.Therefore, can take out of substrate A from storing containers 110.In addition, by carrying out above-mentioned opposite action, also may move into substrate A in the storing containers 110.
In addition, substrate is moved into conveyance device 100, by cylinder is rotated, take out of from storing containers and to move into substrate, yet for example also have keep substrate from storing containers take out or fill in take out of the substrate of moving into move into conveyance device also be well-known (for example, open flat 8-37220 communique (segment number sign indicating number 0006-009,1-3 schemes) and No. 2575717 patent gazette (from last 33 sections of second page of right section-from last 22 sections of the 4th page of right section, 1-3 schemes) with reference to the spy).
With regard to above-mentioned substrate conveyance device, for example, for conveyance substrate effectively between a plurality of storing containers and lining processor, the substrate conveyance device that moves on the track that is provided with between storing containers and the lining processor is well-known.
In addition, as carrying device as above-mentioned conveyance substrate devices, having as everyone knows can be to move into handle and to take out of handle and to the substrate shifting apparatus of taking out of the position (for example transfer substrate from moving into the position, Te Kaiping 11-227943 communique is (with reference to segment number sign indicating number 0013-0030,1-4 figure), with the clean room of effectively correctly being located and being placed on assigned position by the substrate of conveyance with shifting apparatus (reference example as, the spy opens flat 7-10267 communique (segment number sign indicating number 0010-0030,1-6 figure)) etc.
Move in the conveyance device 50 at above-mentioned substrate, owing to utilize cylinder 53,54 and the friction force of substrate move into and take out of substrate, so make cylinder 53, when 54 speed reduced rapidly, the rotating speed of cylinder 53,54 and friction equilibrium of forces were destroyed, the problem that substrate slides on cylinder 53,54 takes place sometimes.For this reason, can only move into certain speed and take out of substrate, the moving into to take out of of substrate needs the time.
In addition, the cylinder 53,54 of rotation must be set substrate support platform 51 and 5 both sides of mounting portion, need to make the synchronization of two cylinders 53,54 in addition, thereby make substrate move into the structure complicated of conveyance device 50.
In above-mentioned substrate conveyance device, during the substrate deposited in the conveyance storing containers, because and storing containers in move into the substrate of taking out of substrate and move between the conveyance device and must carry out the handing-over of this substrate, so the space that is provided with that substrate is moved into conveyance device need be set between storing containers and substrate conveyance device.Therefore, the problem that has clean room's maximization of accommodating each device.Particularly in the substrate conveyance device that on moving track, moves, a plurality of storing containers configuration substrates are moved into conveyance device, thus substrate move into that conveyance device takies that the space is set is a lot, maximizations such as clean room are tangible.
The present invention considers such situation, and its purpose is to provide a kind of and constitutes that the space simply is set is little and can move into promptly that the substrate of taking out of substrate is moved into conveyance device and substrate is moved into the method for taking out of and substrate conveyance device and substrate conveyance method.
Summary of the invention
Substrate provided by the invention is moved into conveyance device and is moved into or take out of above-mentioned substrate at the storing containers of depositing substrate.It has in abutting connection with described storing containers and disposes and the mounting table of the described substrate of mounting; Be arranged on this mounting table that to take out of direction moving into of described substrate removable and keep the maintaining part of described substrate; On described mounting table, take out of the substrate support mechanism that direction supports the described substrate of this maintaining part maintenance movably described moving into.
If adopt the present invention, the maintaining part that is provided with on the mounting table is moved to storing containers, keep the substrate of depositing in the storing containers.By moving the maintaining part that keeps substrate, substrate is moved on the mounting table from storing containers to the direction of taking out of of leaving storage part.When carrying out, substrate is moved in the storing containers from mounting table with above-mentioned opposite action.
On the top of mounting table substrate support mechanism is set, is moving into when taking out of substrate, the supporting entire substrate, thereby the substrate that maintained portion keeps can be stablized successfully mobile.In addition, under the state that keeps substrate by maintaining part, move it, thereby move into reliably and take out of substrate, can change according to the moving velocity of maintaining part simultaneously and move into the speed of taking out of, can move into rapidly and take out of substrate.And then, when carrying out the moving into out of substrate, do not need power to substrate support mechanism, move necessary power as long as supply with to maintaining part, institute is so that designs simplification.
In the present invention, it is desirable that above-mentioned maintaining part possesses the handle sturcture of controlling above-mentioned substrate.Thus, maintaining part is carried out moving into of this substrate and is taken out of under the state of having controlled the substrate end with handle sturcture.So, can move into more reliable and stable state from storing containers and take out of.
In the present invention, the adsorbing mechanism that above-mentioned maintaining part possesses the above-mentioned substrate of absorption is desirable.Thus, maintaining part is carried out moving into of this substrate and is taken out of under the state that holds the substrate end with adsorbing mechanism.So, can not injure substrate, can move into reliably and take out of.
In the present invention, above-mentioned substrate support mechanism be around with above-mentioned move into take out of the vertical S. A. rotation of direction freely the cylinder of supporting be desirable.Thus, substrate is moved into maintaining part and is used idler during taking out of mounting table, so often stable status is moved into and taken out of substrate.In addition, because substrate contacts with cylinder point, so reduced friction force, can successfully move into and take out of, thereby can more promptly move into and take out of substrate.In addition, because area of contact is very little, so be difficult to cause damage to substrate.
In the present invention, above-mentioned supporting device is that to make this substrate be desirable from the mechanism of floating that above-mentioned mounting table is floated by ejection air below above-mentioned substrate.Thus, substrate with maintaining part move into take out of mounting table during, substrate floats by means of floating mechanism.Like this, move at the state that substrate is floated and to take out of, can prevent to contact etc., can reduce the loads such as impact that cause to substrate with mounting table top.In addition, can prevent that dust etc. is attached on the substrate.
The invention provides the substrate of moving into or take out of above-mentioned substrate at the storing containers of depositing substrate and move into the method for taking out of, it possesses with maintaining part and keeps the maintenance operation of above-mentioned substrate end and make keeping the above-mentioned maintaining part of above-mentioned substrate to take out of the mobile process that direction moves moving into of above-mentioned substrate.
If adopt the present invention, after keeping operation to keep substrate, maintaining part is moved at mobile process with maintaining part, substrate is taken out of outside the storing containers.In addition, carry out above-mentioned opposite action, outside storing containers, substrate is moved in the storing containers.Like this, maintaining part is moved easily to carry out moving into of substrate and take out of, do not need to be provided for moving into the other device of taking out of.So, can realize constituting easily.
In addition, because can make moving into of substrate take out of velocity variations, take out of so can promptly carry out moving into of substrate by the maintaining part moving velocity is changed.
In the present invention, when above-mentioned mobile process, take out of direction to support above-mentioned substrate movably be desirable above-mentioned moving into.Thus, promptly use maintaining part only to keep the substrate end to make it mobile, also can stablize in addition successfully moving into and take out of direction and move substrate.
If adopt the substrate relate to this invention to move into conveyance device and substrate is moved into the method for taking out of, only, just can move into and take out of substrate by the moving of the maintaining part that is provided with in mounting table.At this moment, under the state that has kept substrate, move it, take out of substrate, can make moving into of substrate take out of velocity variations by the maintaining part moving velocity is changed simultaneously, can promptly carry out moving into of substrate and take out of so can move into reliably.In addition, needn't be provided for moving into the other mechanism that takes out of, as long as provide the power that moves necessity, so can realize being configured easily to maintaining part.
In addition, move into when taking out of, substrate support mechanism is set, thereby under the state of supporting entire substrate, can move into and take out of on the top of mounting table at substrate.So, when keeping substrate to make it mobile, can it successfully be moved stable substrate with maintaining part.
The invention provides the substrate conveyance device, it is at the storing containers of depositing substrate and handle the above-mentioned substrate of conveyance between the lining processor of above-mentioned substrate, and it possesses: above-mentioned storing containers is moved into the transfer mechanism of taking out of above-mentioned substrate; Carry this transfer mechanism, be positioned in the mounting table that above-mentioned storing containers is moved into the above-mentioned substrate of taking out of; The connecting mechanism of the above-mentioned substrate of handing-over between this mounting table and above-mentioned lining processor; The moving track that between above-mentioned storing containers and above-mentioned lining processor, is provided with; Carry above-mentioned mounting table and above-mentioned connecting mechanism and mobile station movably on above-mentioned moving track.
If adopt the present invention, available transfer mechanism is taken out of from carrying out moving into of substrate to mounting table in the storing containers.The substrate of mounting on the mounting table by mobile station on moving track mobile conveyance to lining processor.Then, deliver to lining processor with connecting mechanism from mounting table and carry out predetermined processing.When carrying out above-mentioned opposite action, substrate just from lining processor to the storing containers conveyance, and move into storing containers.
On mobile station, carry from storing containers and move into the mounting table of taking out of substrate and substrate is delivered to the connecting mechanism of lining processor, thereby can multi-functional use, do not need to be provided with in addition existing substrate and move into special use such as conveyance device and move into the device of taking out of.So, do not need more the space to be set and effectively utilize little space and just can carry out moving into of substrate and take out of and conveyance.
In the present invention, above-mentioned transfer mechanism is taken out of vertical being rotated of direction axle is rotated and head roll that rotation drives is desirable with above-mentioned moving into.Thus, from storing containers substrate is moved into when taking out of mounting table, when making the head roll rotation, substrate is taken out of direction and is moved towards moving on head roll.That is, the friction force effect is moved substrate below substrate and between the surface of cylinder.So, can reliably more successfully carry out moving into of substrate in addition and take out of.
In the present invention, above-mentioned transfer mechanism is to move into above-mentioned that to take out of the driving belt conveyor with endless belt that direction rotation drives be desirable.Thus, from storing containers substrate is moved into when taking out of mounting table, during the rotation of endless belt, substrate is taken out of direction and is moved to moving under the state of mounting on the endless belt.At this moment, substrate is because be positioned on the endless belt comprehensively, so can carry out moving into out of substrate at reliable stabilized conditions in addition.
In the present invention, above-mentioned transfer mechanism possesses the maintaining part that keeps above-mentioned substrate and moves into above-mentioned that to take out of the substrate support mechanism that direction supports the above-mentioned substrate that is kept by this maintaining part movably be desirable.Thus, substrate is moved into when taking out of mounting table, by under the state that keeps substrate with maintaining part, taking out of direction and move and carry out moving into of substrate and take out of moving into from storing containers.Like this, only mobile maintaining part just can easily be carried out moving into of substrate and taken out of, but implementation structure is simple.In addition, can adjust the speed of taking out of of moving into of substrate according to the moving velocity of maintaining part, thereby promptly carry out moving into of substrate and take out of.And then, the moving into when taking out of of substrate, substrate is supporting movably with substrate support mechanism, thereby can realize moving into take out of stable, smoothly.
In the present invention, it is desirable from the mechanism of floating that above-mentioned mounting table is floated that substrate support mechanism makes this substrate by ejection air below above-mentioned substrate.Thus, move into when taking out of substrate to mounting table, substrate is floated, keep substrate to make it take out of direction and move, carry out moving into of substrate and take out of to moving into maintaining part by means of floating mechanism from storing containers.Like this, because substrate is moved,, can reduce the loads such as impact that cause to substrate so can prevent and the contacting of the top grade of mounting table at float state.In addition, can dust protection etc. attached on the substrate.
The invention provides substrate conveyance method, it is by being by at the storing containers of depositing substrate with handle between the lining processor of above-mentioned substrate, via being positioned in that above-mentioned storing containers is moved into the mounting table of the above-mentioned substrate of taking out of and the above-mentioned substrate of connecting mechanism conveyance of the above-mentioned substrate of handing-over between this mounting table and above-mentioned lining processor.It has to move between above-mentioned storing containers and preceding note mounting table takes out of moving into of above-mentioned substrate and takes out of operation; Between above-mentioned mounting table and above-mentioned connecting mechanism, shift the transfering process of above-mentioned substrate; Between preceding note mounting table and above-mentioned lining processor, move the mobile process of above-mentioned connecting mechanism; The handing-over operation of the above-mentioned substrate of handing-over between above-mentioned connecting mechanism and above-mentioned lining processor.
If adopt the present invention, take out of operation and move substrate to mounting table from storing containers moving into.The substrate of moving to after the mounting table is transferred to connecting mechanism at transfering process, is transplanted on lining processor at mobile process.Then, deliver to lining processor in the handing-over operation from connecting mechanism.When implementing the order opposite with above-mentioned each operation, substrate just from the lining processor conveyance to storing containers, be stored in the storing containers.
Like this, just can carry out moving at storing containers multi-functionally and take out of substrate, to the handing-over of connecting mechanism, mobile substrate between storing containers and lining processor is to lining processor handing-over substrate.So, can effectively utilize little space, carry out moving into of substrate efficiently and take out of and conveyance.
In the present invention, above-mentioned transfering process and above-mentioned mobile process are desirable simultaneously.Thus, owing to during the handing-over of carrying out substrate between mounting table and the substrate connecting mechanism, carry out moving between storing containers and the lining processor,, can shorten the conveyance time so more efficiently finish conveyance.
In the present invention, above-mentioned moving into moves into simultaneously when taking out of operation that to take out of a plurality of above-mentioned substrates be desirable.Thus, the conveyance substrate can be realized shortening the time more efficiently.
If adopt about substrate conveyance device of the present invention and substrate conveyance method, on mobile station, carry and move into mounting table of taking out of substrate and the connecting mechanism of this substrate being delivered to lining processor from storing containers, thereby can move into to the multipotency function and take out of operation, transfering process, mobile process and handing-over operation.So, do not need to be provided with in addition special use and carry out existing substrate and move into conveyance device etc. and move into the device of taking out of, do not need more to be provided with the space, effectively utilize little space and just can carry out moving into of substrate and take out of and conveyance.
Description of drawings
Fig. 1 is that expression utilizes the substrate of the present invention the 1st embodiment to move into the device single-piece block diagram that conveyance device is made substrate;
Fig. 2 is that expression substrate of the present invention is moved into conveyance device embodiment block diagram;
Fig. 3 is a line cage front elevation shown in Figure 2;
Fig. 4 is a line cage lateral plan shown in Figure 2;
Fig. 5 schemes above the line cage shown in Figure 2;
Fig. 6 is after expression descends the line cage, the block diagram of the state after the substrate support platform inserts from line cage lower openings;
Fig. 7 is the lateral plan of the state of presentation graphs 6;
Fig. 8 is that expression descends by making the line cage, and the substrate support platform lifts the substrate that is in the bottom position in the line cage makes it break away from the lateral plan of the state after substrate support portion;
Fig. 9 is illustrated under the state of Fig. 8, and the holding member of mobile mounting table is located at the lateral plan of the state behind the bottom of substrate end;
Figure 10 is that holding member is moved in expression with the adsorption orifice of holding member absorption maintenance substrate the time, takes out of state lateral plan behind the substrate from the line cage;
Figure 11 is that expression utilizes the substrate conveyance device of second embodiment of the invention to make the device single-piece block diagram of substrate;
Figure 12 is the block diagram of substrate conveyance device shown in Figure 11;
Figure 13 is the front elevation of line cage shown in Figure 12;
Figure 14 is the lateral plan of line cage shown in Figure 12;
Figure 15 is the top figure of line cage shown in Figure 12;
Figure 16 is the top figure that substrate conveyance device shown in Figure 12 constitutes the substrate mounting table of product;
Figure 17 is the subsequent figures that substrate conveyance device shown in Figure 12 constitutes the substrate mounting table of product;
Figure 18 is used for explanation to carry substrate and be handed off to mounting substrate on lining processor, the expression substrate support platform to the substrate mounting table from the substrate support platform, and adjacent this substrate support platform disposes the lateral plan of the state of substrate mounting table;
Figure 19 be expression from the state of Figure 18, make the top mounting table move to the top of second bar-like member, simultaneously this substrate is moved to the lateral plan of the state after the mounting table of top;
Figure 20 be expression from the state of Figure 19, the top mounting table is descended make substrate to change to the lateral plan of the state behind second bar-like member;
Figure 21 be expression from the state of Figure 20, the substrate mounting table is risen overally, make the height of substrate support platform and the height of top mounting table become sustained height, simultaneously substrate is moved to the lateral plan of the state after this top mounting table;
Figure 22 be expression from the state of Figure 21, the top mounting table is descended make the state lateral plan after substrate is changed to first bar-like member;
Figure 23 is the state of expression from Figure 22, and the substrate mounting table is moved after lining processor, forwards releases second bar-like member, makes the state lateral plan after substrate is handed off to the substrate disposal plant;
Figure 24 is the state of expression from Figure 23, forwards releases the lateral plan that first bar-like member is handed off to substrate the state of substrate disposal plant;
Figure 25 is that expression utilizes the substrate conveyance device of third embodiment of the invention to make all block diagrams of device of substrate;
Figure 26 is illustrated in the block diagram that receives the state of substrate in the substrate conveyance device shown in Figure 25 with connecting mechanism from the substrate support platform;
Figure 27 is another routine lateral plan of expression transfer mechanism;
Figure 28 is that the existing substrate of expression is moved into the lateral plan of an example of conveyance device.
The specific embodiment
Below, illustrate that referring to figs. 1 through Figure 10 substrate of the present invention moves into first embodiment of conveyance device.
As shown in Figure 1, the substrate of present embodiment is moved into line cage (storing containers) the 10 access substrate A that conveyance device 1 is being deposited a plurality of substrate A.Line cage 10 possesses: vacate at above-below direction and be provided with at interval and a plurality of substrate support portion 2 of the lamellar substrate A of horizontal respectively mounting, be located at sidepiece and along continuous straight runs and move into and take out of moving into of substrate A and take out of mouthfuls 3 and the lower openings 4 of being located at the bottom.
In addition, between the vertical frame 5a of subtend, the substrate support portion 2 of on even keel support substrate A is set.Substrate support portion 2 for example is the thin ropies such as metal filament of diameter, can deposit substrate A thick and fast in short transverse.
As shown in Figure 2, line cage 10 is kept by jacking system 20 and makes it liftable.The below of online cage 10 is provided with substrate support platform 25, when it descends line cage 10 with jacking system 20, inserts the substrate A that upwards pushes away in the line cage 10 bottom from lower openings 4, makes the substrate A in the online cage 10 break away from substrate support portion 2.
Jacking system 20, by with the chimeric retention wire cage 10 of the not shown fitting portion of line cage 10.In addition, by not shown control part control advance decline line cage 10.
In addition, on the top of substrate support platform 25, be provided with along moving into of substrate A and take out of a plurality of cylinders 27 that direction supports this substrate A with moving freely.Cylinder 27 winds along to take out of the S. A. B supporting that the vertical direction of direction extends free to rotate with moving into of substrate A.
Substrate is moved into conveyance device 1 and is possessed substrate maintaining body 30.Substrate maintaining body 30 possesses: the outer abutment of online cage 10 moves into mounting tables 31 of taking out of mouthfuls 3 configurations, be arranged on this mounting table 31 that to take out of direction moving into of substrate A removable and keep online cage 10 in maintaining part 32 with the substrate A end of above-mentioned substrate support portion 2 maintenances of support substrate A.
Configuration is taken out of three shifting chutes 35 that direction is extended along moving into of substrate A on mounting table 31, and it is being taken out of the vertical direction of direction and vacate predetermined distance with moving into.In three shifting chutes 35, install along each shifting chute 35 maintaining part 32 movably.Each maintaining part 32 is by not shown control part control moving velocity, same respectively simultaneously moved further.
In maintaining part 32, to shown in Figure 10, the adsorption orifice (adsorbing mechanism) 36 that holds substrate A from below is set as Fig. 8.Adsorption orifice 36 is connected with not shown vacuum pump etc., keeps substrate A by this vacuum pump action can be held.
As shown in Figure 2, on the top of mounting table 31, this substrate of maintenance A is set takes out of the cylinder (substrate support mechanism) 37 that direction moves freely along moving into of substrate A.Cylinder 37 winds along to take out of the S. A. B supporting that the vertical direction of direction extends free to rotate with moving into of substrate A, and to take out of the direction configuration a plurality of along moving into 35 of each shifting chutes., to shown in Figure 10, adjust cylinder 37 so that the top of cylinder 37 is identical with cylinder 27 upper height of maintaining part 32 as Fig. 8.
And then, as shown in Figure 1, set moving track 45 in abutting connection with substrate maintaining body 30, substrate conveyance device 51 is installed on moving track 45 movably, its conveyance is positioned in substrate A on the mounting table 31 to the lining processor 7 of this substrate of predetermined processing A.
Describe move into the situation that conveyance device 1 takes out of substrate A from line cage 10 by the substrate of such formation below.
At first, as shown in Figure 2, with jacking system 20 retention wire cages 10.Online cage 10 inherent short transverses are vacated the interval on even keel and are deposited a plurality of substrate A.In the substrate support portion 2 in the online cage 10 of substrate A mounting.Kept after the line cage 10, made jacking system 20 actions, line cage 10 is descended towards substrate support platform 25 by control part.Because substrate support platform 25 is configured to the frame 5b that installs with the bottom surface of line cage 10, does not interfere between 5c, so as shown in Figure 6, substrate support platform 25 inserts in line cages 10 from each lower openings 4 of line cage 10.
When substrate support platform 25 inserted in the line cage 10, as shown in Figure 7, each cylinder 27 that is configured in above the substrate support platform 25 just relatively rose.Then, and then when line cage 10 is descended, as shown in Figure 8, the contact of cylinder 27 tops is positioned at lifts substrate A below the line cage 10 undermost substrate A and leaves substrate support portion 2.After substrate A broke away from, control part is just controlled jacking system 20 stopped decline for the time being.At this moment, 37 one-tenth on the cylinder of the cylinder 27 of substrate support platform 25 and mounting table 31 equal height.
When substrate A broke away from substrate support portion 2, as shown in Figure 9, control part just made maintaining part 32 move to the approaching direction (promptly moving into direction) of taking out of mouth 3 of moving into along shifting chute 35, is located at below the substrate A end.Under this state, start vacuum pump and make substrate A be adsorbed on adsorption orifice 36.Thus, make substrate A end remain on maintaining part 32.
After having kept substrate A by above-mentioned maintenance operation, as shown in figure 10, make maintaining part 32 take out of mouthfuls 3 direction (promptly taking out of direction) and move to leaving to move into.
By this mobile process, substrate A takes out of mouthfuls 3 and moves on the mounting table 31 by moving in the line cage 10.In addition, when taking out of, substrate A is supported by on 27,37 whole on the cylinder, thereby promptly uses 32 of maintaining parts to hold the end and move, and also can stablize in addition and successfully take out of.In addition, owing to the moving velocity that changes maintaining part 32 by control part, so can promptly take out of substrate A.Especially, because cylinder 27,37 and substrate A contact, reduced the friction drag of cylinder 27,37 and substrate A, so can promptly take out of substrate A.
From line cage 10 take out of substrate A and mounting on the mounting table 31 after, make mounting table 31 Rotate 180 degree with rotating part illustrated in figures 1 and 2 34.Then, substrate conveyance device 51 shown in Figure 1 is moved and in abutting connection with mounting table 31.Under this state, shake multi-joint arm 52 is rotated, allow bar-like member 53 insert the groove of the notch of mounting tables 31, lift substrate A and be positioned on the bar-like member 53 from bottom.At this moment, vacuum pump stops action, discharges the substrate A that is attracted maintenance by maintaining body 32.
Behind the mounting substrate A, substrate conveyance device 51 moves up to lining processor 7 along moving track 45, and substrate A is delivered in this lining processor 7.Then, be stored in the not shown storing containers of depositing the substrate A after predetermined processing finishes by 51 conveyances of substrate conveyance device again with the substrate A after lining processor 7 predetermined processing.
And give mounting table 31 on the substrate conveyance device 51 substrate A, and relend and help rotating part 34 and rotate back to original position, take out of mouthful 3 configurations in abutting connection with moving into.Then, start jacking system 20 line cage 10 is descended, repeat above-mentioned action and take out of next substrate A.
And in the present embodiment, substrate is moved into conveyance device 1 and is taken out of substrate A from line cage 10, yet also can use line cage 10 as depositing, receive the substrate A that comes by 41 conveyances of substrate conveyance device and move in the line cage 10 with the container of the substrate A after lining processor 7 predetermined processing.This occasion is taken out of opposite action, moves into substrate A.
As mentioned above, if this substrate of employing moves into conveyance device 1 and substrate is moved into the method for taking out of, hold the maintenance operation that keeps substrate A end with maintaining part 32 after, carry out mobile process and make this maintaining part 32 take out of mouthfuls 3 move into and take out of direction and move along leaving to move into, can take out of substrate A from line cage 10.
At this moment, owing to cylinder 27,37 is set,, can make substrate A stable successfully mobile in addition so can take out of at the state of supporting entire substrate A on the top of substrate support platform 25 and mounting table 31.In addition, owing under the state that is holding the maintenance substrate with maintaining part 32, move, thereby can take out of substrate A reliably, and can change according to the moving velocity of maintaining part 32 simultaneously and take out of speed, can promptly take out of substrate A.Especially on substrate support platform 25 sides, do not need power, as long as provide mobile power, so simplification that can implementation structure to maintaining part 32.
In addition, maintaining part 32 is taken out of this substrate A under the state that holds substrate A end with adsorption orifice 36, can not move into reliably and take out of so can not injure substrate A.
And then, substrate A and cylinder the 27, the 37th, a contact, so friction force reduces, therefore can more promptly take out of substrate A.In addition, because area of contact is little, so be difficult for substrate A is caused damage.
In addition, adopt by ejection air below substrate A and make the mechanism of floating that this substrate A floats, just can prevent that substrate A from contacting with the top of substrate support platform 25 and mounting table 31, can reduce the loads such as impact that give substrate A, the while can prevent to adhere to dust etc.
In addition, though maintaining part holds and keeps substrate at adsorption orifice by vacuum pump action, be not limited thereto, so long as can keep the structure of substrate end just passable.In addition, also can be provided with and clamp the handle sturcture of controlling substrate from above-below direction and maintain substrate.In this occasion owing to can keep substrate more reliably, even thereby move into and take out of velocity variations, also can stablize to move into and take out of substrate.
Secondly, relate to substrate conveyance device second embodiment of the present invention with reference to Figure 11 to Figure 24 explanation.In addition, the inscape of having said among above-mentioned the 1st embodiment is adopted same label and omits explanation.
The substrate conveyance device 11 of present embodiment possesses mounting table 41, connecting mechanism 44 and mobile station 46.Mounting table 41 possesses with the online cage 10 of state of adjacency substrate support platform 25 configurations moves into the head roll (transfer mechanism) 40 of taking out of substrate A and adjusts head roll 40 and the lifting unit (lifting mechanism) 49 of moving into the relative position of taking out of mouth 3.Connecting mechanism 44 possesses mounting substrate the A movably the first arm 42 and second arm 43, just joins substrate A with two arms 42,43 between mounting table 41 and lining processor 7.Mobile station 46 is tabular, and mounting connecting mechanism 44 and mounting table 41 move on a pair of moving track 45 that is provided with between substrate support platform 25 and the lining processor 20 with motor 47.
On mobile station 46, basic platform 48 is set.On the top of basic platform 48, the lifting unit 49 that setting can basic relatively platform 48 liftings.On the top of lifting unit 49, the rotating part 50 of three-sixth turn is revolved in setting vertical axis relatively, and mounting table 41 and connecting mechanism 44 are installed on rotating part 50.Mounting table 41 and connecting mechanism 44 usefulness lifting units 49 make both sides' one lifting, revolve three-sixth turn with rotating part 50 simultaneously.
Mounting table 41, as Figure 12, Figure 16 and shown in Figure 17 has bottom mounting table 55 and top mounting table 56.Bottom mounting table 55 forms the tabular of the top ends 55a that has two distolateral angles of excision one, is installed on the rotating part 50.In addition, mounting table 56 also will form and have top ends 56a and become and bottom mounting table 55 same profiles.Be connected with bottom mounting table 55 by the slide block up and down 57 that is installed on four angles.Therefore, top mounting table 56 relative bottom mounting table 55 liftables.And then, in the central authorities of top mounting table 56, from top ends 56a to forming rectangular peristome 58 with the opposed side of this top ends 56a.
On the bottom mounting table 55 of the central authorities of peristome 58, set central mounting table 56b by not shown lifting mechanism.Central mounting table 56b is made as the height identical with top mounting table 56, just can and top mounting table 56 synchronization liftings.
On top mounting table 56 and central mounting table 56b, vacate predetermined distance along the length direction of peristome 58 head roll 40 is set.Wind along taking out of the S. A. B rotatably support that the vertical direction of direction (length direction of peristome 58) extends and head roll 40 with moving into, and rotate with not shown motor-driven.
On bottom mounting table 55, clip central mounting table 56b, the end as the first arm 42 of multi-joint arm is installed with rotating freely.At the other end of the first arm 42, the width that connects length ratio open portion 58 will be lacked first link 60 of some, on first link, an end of first bar-like member 61 is installed.The length of first bar-like member 61 and peristome 58 vertically approximately identical is installed on first link 60 vacating predetermined distance with the vertical vertical direction of peristome 58.First link 60 and first bar-like member 61 can be at the length directions of this peristome 58 in peristome 58 by means of the first arm 42, promptly move into to take out of direction and move.
In bottom mounting table 55, the end as second arm 43 of multi-joint arm is installed, it is rotated freely.The other end and above-mentioned same installation second link 62 and second bar-like member 63 at second arm 43.Second bar-like member 63 is in directly over first bar-like member 61.
During by the up and down mobile along the vertical direction top of slide block 57 mounting table 56 and central mounting table 56b, have the top mounting table 56 of head roll 40 and top relative first bar- like member 61 and 63 liftings of second bar-like member of central mounting table 56b.In addition, first bar-like member 61 and second bar-like member 63 can move taking out of direction with the first arm 42 and second arm 43.
The first arm 42, first link 60, first bar-like member 61, second arm 43, second link 62 and second bar-like member 63 constitute connecting mechanism 44.
In addition, in the present embodiment, cylinder 27 winds along to take out of the S. A. B supporting that the vertical direction of direction extends free to rotate with moving into of substrate A, by not shown motor-driven.
In addition, in the present embodiment, as shown in figure 18,, set and be clipped in top, location mounting table 56 between first bar-like member 61 and second bar-like member 63 as initial setting.In addition, when first bar-like member 61 and second bar-like member 63 moved, win bar-like member 61 and second bar-like member 63 of central mounting table 56b lifting do not interfered.
The following describes the situation of substrate conveyance device 11 that constitutes with like this from line cage 10 conveyance substrate A to lining processor 7.
At first, as shown in figure 12, with lifting mechanism 30 retention wire cages 10.Vacate a plurality of substrate A of horizontal storage at interval along short transverse in the online cage 10.In the substrate support portion 2 in the online cage 10 of substrate A mounting.Behind the retention wire cage 10, make lifting mechanism 30 actions, line cage 10 is descended towards substrate support platform 25 by control part.Because substrate support platform 25 is configured to the framework 5b that line cage 10 bottom surfaces cooperate, do not interfere between 5c, so substrate support platform 25 inserts in the line cage 10 from each lower openings 4 of line cage 10.
In addition, during substrate A breaks away from like this, as shown in figure 11, with motor 47 mobile station 46 is moved and make it, rely on rotating part 50 location simultaneously, so that top ends 55a, 56a and moving into takes out of mouth 3 is opposed in abutting connection with substrate support platform 25.
Then, after substrate A breaks away from, as shown in figure 19, by means of slide block 57 up and down top mounting table 56 and central mounting table 56b are risen, the top of head roll 40 is positioned at from the top of second bar-like member 63 outstanding.Then, the cylinder 27 of mounting table 35 and the head roll 40 of top mounting table 56 and central mounting table 56b are rotated in line cage 10 to exterior direction (move into and take out of direction).At this moment, two cylinders 27,40 are with same direction and the rotation of same speed.Therefore, two cylinders, 27,40 friction drags work to substrate A, and substrate A moves at the hand of rotation of two cylinders 27,40.Substrate A takes out of mouthfuls 3 and takes out of direction and move to moving into by moving in the line cage 10, is loaded on the head roll 40 of top mounting table 56 and central mounting table 56b.
Take out of operation according to above-mentioned moving into, when substrate A was positioned in top mounting table 56 and central mounting table 56b and goes up, top mounting table 56 and central mounting table 56b dropped to original position by slide block 57 up and down.Because top mounting table 56 and central mounting table 56b are if descend, relatively second bar-like member 63 is risen from peristome 58, so just shown in Figure 20 as 56b, substrate A transfer to second bar-like member 63 above.Control part continues to make lifting mechanism 30 actions that line cage 10 is descended once more.Thus, with next substrate A mounting to substrate support platform 25.
On second bar-like member 63 during mounting substrate A, lifting unit 49 rises and makes that second bar-like member 63, first bar-like member 61 and top mounting table 56 etc. are all to rise.Then, as shown in figure 21, on the cylinder 27 of substrate support platform 25, when height becomes sustained height above the head roll 40 of top mounting table 56 and central mounting table 56b, make to rise by lifting unit 49 to stop, make 27,40 rotations of two cylinders, take out of next substrate A then.That is, be loaded on top mounting table 56 and the central mounting table 56b.
Like this, moving into when taking out of operation, taking out of mouthful 3 lifting mounting tables 41, can take out of a plurality of substrate A by moving into relatively with lifting unit 49.
In addition, if next substrate A is loaded into top mounting table 56 and central mounting table 56b when going up, top mounting table 56 and central mounting table 56b descend from initial position by means of slide block 57 up and down again.Because top mounting table 56 and central mounting table 56b are if descend, then relatively first bar-like member 61 is risen from peristome 58, so as shown in figure 22, just substrate A move on to first bar-like member 61 above.
According to above-mentioned transfering process, behind mounting substrate A on first bar-like member 61 and second bar-like member 63, start motor 47 and mobile station 46 is moved up to lining processor 7 along moving track 45.Behind this mobile process, make rotating part 50 Rotate 180 degree join operation to top ends 55a, 56a towards lining processor 7.Shake as Figure 12, Figure 16 and second arm 43 shown in Figure 17 of the vertical release of second link 62 along peristome 53.Therefore, as shown in figure 23, because release second bar-like member 63 forwardly, so the substrate A of mounting on second bar-like member 63 enters in the lining processor 7.The substrate A that enters is by for example lifting bar 64 receives and predetermined processing in addition in the lining processor 7.
In addition, second bar-like member 63 returns after the original position, makes all risings by lifting unit 49, releases first link 60 with the first arm 42 simultaneously, and as shown in figure 24, the substrate A that is loaded on first link 60 also can enter lining processor 7.
And then, opposite action according to above-mentioned handing-over the time, substrate A after mounting on first bar-like member 61 and second bar-like member 63 is carried out predetermined processing with lining processor 7, on top mounting table 56 and central mounting table 56b, change in proper order simultaneously and carry, and be stored in the not shown storing containers of depositing the substrate A after predetermined processing finishes.
In addition, in the present embodiment, substrate conveyance device 11 is to take out of substrate A from line cage 10.Also can use line cage 10 as depositing the container that carries out the substrate A after the predetermined processing by lining processor 7, the substrate A after predetermined processing is finished moves in the line cage 10.In this case, the opposite action of taking out of also can be moved into substrate A.
In addition, during to lining processor 20, take out of two substrate A, on first bar-like member 61 and second bar-like member 63, change simultaneously and carry and deliver to lining processor 20 from line cage 10 substrate A conveyance.Yet be not only limited to this.For example, also can use first bar-like member 61, also can be used as and use that to finish the reception of back substrate A special-purpose and use second bar-like member 63 in receiving predetermined processing from lining processor 20 as the handing-over special use that is used for substrate A is given lining processor 20.Like this, connecting mechanism 44 also can satisfy in good time purpose and uses first bar-like member 61 and second bar-like member 63.
As mentioned above, according to this substrate conveyance device 11 and substrate conveyance method,, just can take out of substrate A to top mounting table 56 from line cage 10 by means of the cylinder 27 of substrate support platform 25 and the head roll 40 of top mounting table 56 and central mounting table 56b.In addition, above-mentioned move into take out of operation after, by first bar-like member 61 of connection the first arm 42 and the transfering process of second bar-like member 63 that is connected second arm 43, on mounting to two bar- like member 61,63, pass through the mobile process conveyance simultaneously up to lining processor 7, then, deliver to lining processor 7 by the handing-over operation.
Like this, lift-launch is taken out of the mounting table 41 of substrate A and substrate A is passed the connecting mechanism 44 of lining processor 7 to mobile station 46, thereby can multi-functionally use, do not carry out the device of taking out of of moving into that existing substrate is moved into conveyance device etc. specially and do not need to be provided with in addition.So, can not need the unnecessary space that is provided with, effectively utilize little space, carry out moving into of substrate A and take out of and conveyance.
In addition, take out of mouthful 3 liftings, take out of a plurality of substrate A, so can raise the efficiency the shortening time because available lifting unit 49 is moved into mounting table 41 relatively.
In addition, when line cage 10 is taken out of mounting table 41 to substrate A, utilize head roll 40, thereby can reliably successfully carry out taking out of of substrate A in addition.And then, according to the substrate conveyance device 11 of present embodiment, in line cage 10, can successfully take out of each sheet substrate A, so, also can take out of reliably even closely deposit in the lamellar online cage 10 of substrate A by head roll 40.
In addition, as mentioned above, in the present embodiment, the situation of taking out of substrate A from line cage 10 has been described, yet above-mentioned effect also is same when moving into substrate A.
Below, the 3rd embodiment of relevant substrate conveyance device of the present invention is described with reference to Figure 25 and Figure 26.In addition, in the following description, the same inscape that illustrated is in a second embodiment added same numeral, omits its explanation.
Difference for the 3rd embodiment and second embodiment is, in a second embodiment, connecting mechanism 44 being set and the structure that becomes one on mounting table 41, then is in abutting connection with setting mounting table 71 and connecting mechanism 72 on mobile station 46 at the substrate conveyance device 70 of the 3rd embodiment.
Mounting table 71 as shown in figure 25, makes the structure of removing connecting mechanism 44 from the mounting table 41 of second embodiment.In addition, on mobile station 46, in abutting connection with basic platform 48 setting and the basic platform 48 basic platforms 73 of a size of mounting table 71.In addition, top and mounting table 71 at basic platform 73 are same, the lifting unit (lifting mechanism) 74 of basic relatively platform 73 energy liftings is set, is provided with on the top of lifting unit 74 to rotate and revolves the rotating part 75 of three-sixth turn, connecting mechanism 72 is installed on the top of rotating part 75 around vertical axis.That is, an end of the first arm 42 and second arm 43 is rotatably installed.Therefore, two arms 42,43 are common with lifting unit 74 liftings, can rotate by means of rotating part 75 simultaneously.
The situation of lining processor 20 is arrived substrate A conveyance according to the substrate conveyance device 70 of such formation in explanation.By line cage 10 is descended, behind mounting substrate A on the cylinder 27 of substrate support platform 25, make the rotation of two head rolls with equidirectional, same-speed, in line cage 10, substrate A is moved on the head roll 40 of top mounting table 56 and central mounting table 56b.After this is moved into and takes out of operation, as shown in figure 26, mobile station 46 is moved,, make the top of the top ends 56a of top mounting table 56 and first bar-like member 61 and second bar-like member 63 opposed simultaneously by two rotating parts 74 and 50 each spinning, 90 degree with motor 47.After the rotation, make second bar-like member 63 outstanding forward, insert peristome 58 then by means of second arm 43.After the insertion, lifting unit 74 is risen lift substrate A from bottom, mounting is transferred on second bar-like member 63.Behind this transfering process, mobile station 46 is moved to lining processor 7, then,, substrate A is delivered in the lining processor 7 by comprehensively being rotated the handing-over operation of portion 75, lifting unit 74, second arm 43 by mobile process.
In addition, be not limited to above-mentioned substrate A handing-over, for example also can be positioned in substrate A on first bar-like member 61, deliver to lining processor 7 then from top mounting table 56.Which in addition, during from lining processor 20 reception substrate A, also can with reception of first bar-like member 61, second bar-like member 63.
Two head rolls by substrate support platform and mounting table are taken out of substrate, yet so long as move into the transfer mechanism of taking out of substrate, which type of structure all can.For example, also can utilize towards moving into and take out of direction and have the driving of revolvable endless belt to transmit to bring to move into to take out of substrate.At this moment, the entire substrate plane contact is positioned in to move under the state on the endless belt and takes out of, thereby can be reliably and stably carry out moving into of substrate and take out of.
As second embodiment, also can adopt to have and take out of the movably transfer mechanism of maintaining part 32 of direction along moving into simultaneously along moving into the end of taking out of the cylinder 27 that direction support substrate A moves freely and controlling substrate A.At this moment, can be only carry out moving into of substrate A and take out of, can make designs simplification by maintaining part 32 mobile.In addition, can adjust the speed of taking out of of moving into of substrate A according to the moving velocity of maintaining part 32, thereby can promptly carry out moving into of substrate A and take out of.In addition, substrate A is by cylinder 27 supportings and removable, thereby can realize moving into take out of smoothly stable.
As shown in figure 27, replace cylinder 27, that can adopt also that below substrate A ejection air makes that substrate A floats floats mechanism 80.At this moment, move into by maintaining part 32 at the state that substrate A is floated and to take out of, thereby can prevent to contact, can reduce the loads such as impact of giving substrate A with the top etc. of mounting table 31.In addition, can prevent to adhere to dust etc. on the substrate A.So, can further improve the quality of substrate A.
In addition, among above-mentioned second, third embodiment, behind transfering process, carry out mobile process, yet be not limited thereto, also can carry out transfering process and mobile process simultaneously.At this moment, more effectively conveyance substrate A shortens the conveyance time.
The gratifying embodiment of the present invention more than has been described, yet the present invention is not limited to these embodiment.Without departing from the spirit and scope of the present invention, may carry out interpolation, omission, displacement and the change thereof of structure.The present invention can't help above-mentioned explanation and limits, but only limits according to claims scope.
Claims (15)
1. a substrate is moved into conveyance device (1), and it moves into or take out of described substrate (A) to the storing containers (10) of depositing substrate (A), it is characterized in that possessing:
In abutting connection with described storing containers (10) and the configuration and the mounting table (31) of the described substrate of mounting (A);
Take out of direction moving into of the described substrate in this mounting table (31) upper edge (A) and be provided with movably, keep the maintaining part (32) of described substrate (A);
Go up described moving in described mounting table (31) and to take out of the substrate support mechanism that direction supports the described substrate (A) that this maintaining part (32) kept movably.
2. substrate as claimed in claim 1 is moved into conveyance device (1), it is characterized in that, described maintaining part (32) possesses the handle sturcture of controlling described substrate (A).
3. substrate as claimed in claim 1 is moved into conveyance device (1), it is characterized in that, described maintaining part (32) possesses the adsorbing mechanism (36) of the described substrate of absorption (A).
4. substrate as claimed in claim 1 is moved into conveyance device (1), it is characterized in that, described substrate support mechanism is around taking out of the cylinder (37) that the vertical S. A. of direction is supported freely to rotate with described moving into.
5 substrates as claimed in claim 1 are moved into and taken out of is device (1), it is characterized in that, described supporting device is to make this substrate (A) float mechanism from what described mounting table (31) was floated by ejection air below described substrate (A).
6. a substrate is moved into the method for taking out of, and it moves into or take out of described substrate (A) to the storing containers (10) of depositing substrate (A), it is characterized in that possessing:
The maintenance operation that keeps the end of described substrate (A) with maintaining part (32); Make and keep the described maintaining part (32) of described substrate (A) to take out of the mobile process that direction moves moving into of described substrate (A).
7. substrate as claimed in claim 6 is moved into the method for taking out of, and it is characterized in that, in described mobile process, takes out of direction and supports described substrate (A) movably described moving into.
8. a substrate conveyance device (11), it is at the storing containers of depositing substrate (A) (10) and handle the described substrate of conveyance (A) between the lining processor (7) of described substrate (A), it is characterized in that possessing:
Described storing containers (10) is moved into the transfer mechanism of taking out of described substrate (A);
Carry this transfer mechanism, mounting is moved into the mounting table (41) of the described substrate (A) of taking out of to described storing containers (10);
The connecting mechanism (44) of the described substrate of handing-over (A) between this mounting table (41) and described lining processor (7);
Be located at the moving track (45) between described storing containers (10) and the described lining processor (7);
Carry described mounting table (41) and described connecting mechanism (44), mobile station (46) movably on described moving track (45).
9. substrate conveyance device as claimed in claim 8 (11) is characterized in that, described transfer mechanism is around taking out of the head roll (40) that the vertical S. A. rotation of direction drives with described moving into.
10. substrate conveyance device as claimed in claim 8 (11) is characterized in that, described transfer mechanism is to take out of the driving belt conveyor with endless belt that the direction rotation drives described moving into.
11. substrate conveyance device as claimed in claim 8 (11) is characterized in that,
Described transfer mechanism possesses: keep the maintaining part (32) of described substrate (A), in the described substrate support mechanism that takes out of the described substrate (A) that direction supports this maintaining part movably and kept that moves into.
12. substrate conveyance device as claimed in claim 11 (11) is characterized in that,
Substrate support mechanism makes this substrate (A) float mechanism (80) from what described mounting table (41) was floated by ejection air below described substrate (A).
13. substrate conveyance method, it is between the lining processor of the storing containers of depositing substrate (A) (10) and the described substrate of processing (A), via mounting described storing containers (10) is moved into the mounting table (41) of the described substrate (A) of taking out of and between this mounting table (41) and described lining processor (7) handing-over described substrate (A) the described substrate of connecting mechanism (44) conveyance (A), it is characterized in that possessing:
Between described storing containers (10) and described mounting table (41), move into and take out of moving into of described substrate (A) and take out of operation;
Between described mounting table (41) and described connecting mechanism (44), shift the transfering process of described substrate (A);
Between described mounting table (41) and described lining processor (7), move the mobile process of described connecting mechanism (44);
The handing-over operation of the described substrate of handing-over (A) between described connecting mechanism (44) and described lining processor (7).
14. substrate conveyance method as claimed in claim 13 is characterized in that, carries out described transfering process and described mobile process simultaneously.
15. substrate conveyance method as claimed in claim 14 is characterized in that, described moving into taken out of in the operation, a plurality of described substrates (A) moved into taken out of simultaneously.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003296453A JP2005064431A (en) | 2003-08-20 | 2003-08-20 | Apparatus and method for substrate transfer |
| JP2003296454A JP3909597B2 (en) | 2003-08-20 | 2003-08-20 | Board loading / unloading device |
| JP296454/2003 | 2003-08-20 | ||
| JP296454/03 | 2003-08-20 | ||
| JP296453/03 | 2003-08-20 | ||
| JP296453/2003 | 2003-08-20 |
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| Publication Number | Publication Date |
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| CN1600658A true CN1600658A (en) | 2005-03-30 |
| CN1600658B CN1600658B (en) | 2012-05-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004100905202A Expired - Fee Related CN1600658B (en) | 2003-08-20 | 2004-08-18 | Substrate delivery in-out device, method and substrate delivery apparatus and method |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100633848B1 (en) |
| CN (1) | CN1600658B (en) |
| TW (1) | TWI265905B (en) |
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| CN102464210A (en) * | 2010-11-11 | 2012-05-23 | 株式会社Siti | Substrate carrying device |
| CN102602695A (en) * | 2011-01-25 | 2012-07-25 | 佶新科技股份有限公司 | Substrate conveying and sorting device |
| CN104495357A (en) * | 2014-12-12 | 2015-04-08 | 南通富士通微电子股份有限公司 | Photo-etching plate carrying device |
| CN106558517A (en) * | 2015-09-29 | 2017-04-05 | 株式会社日立国际电气 | The manufacture method of lining processor and semiconductor device |
| CN107210200A (en) * | 2015-03-25 | 2017-09-26 | 住友化学株式会社 | Lining processor and Method of processing a substrate |
| CN107601043A (en) * | 2017-08-23 | 2018-01-19 | 武汉华星光电半导体显示技术有限公司 | Base plate transfer device |
| CN108735642A (en) * | 2018-07-27 | 2018-11-02 | 盐城阿特斯协鑫阳光电力科技有限公司 | A kind of chip transmission device, silicon chip transmission system and chip transmission method |
| WO2020077902A1 (en) * | 2018-10-18 | 2020-04-23 | 深圳市华星光电半导体显示技术有限公司 | Substrate transporting apparatus |
| CN111668133A (en) * | 2019-03-05 | 2020-09-15 | 东芝存储器株式会社 | Substrate bonding apparatus, substrate mating apparatus, and method of manufacturing semiconductor device |
| CN114408572A (en) * | 2021-12-20 | 2022-04-29 | 江苏长欣车辆装备有限公司 | Transfer device that glass workshop used |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5445863B2 (en) * | 2010-08-04 | 2014-03-19 | 株式会社ダイフク | Plate-shaped body transfer device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003197728A (en) * | 2001-12-27 | 2003-07-11 | Aitec:Kk | Cassette for storing substrate |
-
2004
- 2004-08-17 TW TW093124682A patent/TWI265905B/en not_active IP Right Cessation
- 2004-08-18 KR KR1020040065082A patent/KR100633848B1/en not_active IP Right Cessation
- 2004-08-18 CN CN2004100905202A patent/CN1600658B/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102464210A (en) * | 2010-11-11 | 2012-05-23 | 株式会社Siti | Substrate carrying device |
| CN102602695A (en) * | 2011-01-25 | 2012-07-25 | 佶新科技股份有限公司 | Substrate conveying and sorting device |
| CN104495357A (en) * | 2014-12-12 | 2015-04-08 | 南通富士通微电子股份有限公司 | Photo-etching plate carrying device |
| CN107210200A (en) * | 2015-03-25 | 2017-09-26 | 住友化学株式会社 | Lining processor and Method of processing a substrate |
| CN106558517B (en) * | 2015-09-29 | 2019-07-12 | 株式会社国际电气 | The manufacturing method of substrate processing device and semiconductor devices |
| CN106558517A (en) * | 2015-09-29 | 2017-04-05 | 株式会社日立国际电气 | The manufacture method of lining processor and semiconductor device |
| CN107601043A (en) * | 2017-08-23 | 2018-01-19 | 武汉华星光电半导体显示技术有限公司 | Base plate transfer device |
| CN108735642A (en) * | 2018-07-27 | 2018-11-02 | 盐城阿特斯协鑫阳光电力科技有限公司 | A kind of chip transmission device, silicon chip transmission system and chip transmission method |
| WO2020077902A1 (en) * | 2018-10-18 | 2020-04-23 | 深圳市华星光电半导体显示技术有限公司 | Substrate transporting apparatus |
| CN111668133A (en) * | 2019-03-05 | 2020-09-15 | 东芝存储器株式会社 | Substrate bonding apparatus, substrate mating apparatus, and method of manufacturing semiconductor device |
| CN111668133B (en) * | 2019-03-05 | 2023-10-10 | 铠侠股份有限公司 | Substrate bonding apparatus, substrate pairing apparatus, and method for manufacturing semiconductor device |
| CN114408572A (en) * | 2021-12-20 | 2022-04-29 | 江苏长欣车辆装备有限公司 | Transfer device that glass workshop used |
| CN114408572B (en) * | 2021-12-20 | 2024-04-26 | 江苏长欣车辆装备有限公司 | Transfer device that glass production workshop used |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20050020662A (en) | 2005-03-04 |
| TW200512144A (en) | 2005-04-01 |
| CN1600658B (en) | 2012-05-09 |
| KR100633848B1 (en) | 2006-10-13 |
| TWI265905B (en) | 2006-11-11 |
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