CN1543681A - 制造太阳能电池的方法 - Google Patents
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Abstract
本发明公开了一种把背面场施加到硅太阳能电池中的方法,该方法包括如下步骤:a)在电池的背面沉积铝层;b)在700~1000℃的温度下使铝层烧结;c)使电池暴露于V族元素化合物的气氛中,并在950~1000℃的温度下进行扩散,以使裸露的p型硅表面中掺入V族元素,优选掺入磷。
Description
本发明涉及p-n结太阳能电池,更具体地说涉及制造p-n结太阳能电池的方法。
陆地上应用的用硅片制造的光电池通常包括p型硅片。硅片的一个表面被掺杂(通常在900~1000℃的温度下用磷掺杂),以使其变成n型,并产生基本的p-n结,即太阳能电池的活性元件(activecomponent)。然后将金属接点引入前后表面(n和p表面),使光产生的电流从电池中传导出。对于前接点,金属通常布置为自由栅图案(opengrid pattern),使光被裸露的硅表面吸收。前栅可布置在嵌入的槽中,从而减少栅格遮蔽光的损耗。这种类型的太阳能电池通常被称为埋藏接点太阳能电池(也称作激光刻槽埋栅(Laser Grooved Buried Grid)-LGBG太阳能电池)。这种基本电池在EP 156366A中披露了。
制造这种电池的方法通常包括下面起始步骤:
1)对于晶体取向[100]的单晶硅片,用苛性碱溶液蚀刻硅表面,形成不规则的锥体;
2)把V族元素,通常是磷掺入p-型硅片的上表面,形成n+层;
3)施加氮化硅上表面涂层,其充当抗反射层,也作为介电(不导电)层,以防止金属镀在上表面不需要的区域;
4)在硅片表面将要镀金属的地方刻槽。除可化学蚀刻、等离子蚀刻或用金刚石锯机械刻槽外,通常采用激光刻槽。
5)使槽中裸露的p-型硅表面掺杂含有V族元素的n-型,通常是掺杂含有磷的n-型;
6)通过把电子“接受体”,例如铝或硼掺入背面,来对电池进行处理,得到背面场(BSF);
7)将金属接点置入槽中,得到导电前接点,同时将金属接点置入背面,得到导电背接点。
按照上述步骤,必需使硅片边缘绝缘。本发明不涉及这一步骤。
晶体硅太阳能电池上的背面场(步骤6)用来提高电池的效率:背面场将光产生的少数电荷载流子(p-型硅中的电子)驱离背面,否则的话,在使它们在外电路做有用功之前,它们在背面将与大多数的载流子(p-型硅中的空穴)重新结合。高效实验室电池,经常采用如下方法形成的BSF,即通过物理蒸汽沉积来沉积铝膜,并将铝膜加热至高于1050℃(通常超过1100℃)的温度。然而,这些电池通常是因为应用特殊环境,所以才形成BSF,而这种特殊环境不适于低成本商品电池制造:
·所用的铝厚度通常等于或大于2μm,已报道这是形成有效的BSF所必需的最小厚度。
·所用的硅片采用悬浮区域(FZ)熔炼法制造,含低浓度的氧。这些硅片可加热至高温,持续长时间,而不破坏它们的电子性能。然而,因为经济的缘故,所以商品电池必须由含溶解氧杂质的Czochralski(CZ)硅片制造,当Czochralski(CZ)硅片加热至1000℃以上并持续长时间,其性能下降。
在商品太阳能电池中,BSF通常采用下面方法形成,即在硅片背面印刷一层铝厚膜(~20μm),或旋涂一层含硼化合物膜,然后使铝膜加热至800~900℃的温度(使硼膜加热至1000~1100℃的温度),以便加入约100ppm浓度的金属。因此这些电池使用了相当大量的铝。在包括BSF的电池中,所述的BSF采用(~2μm)铝层薄膜,硅片的背面通常施加氧化硅或氮化硅薄介电层。除了使背面钝化外,所述介电层起作防止磷原子掺入背面(在电池前连接形成或槽掺杂期间)和防止磷原子阻碍形成良好BSF的阻挡层。铝原子穿过介电层的掺杂通过高温扩散(在氧化硅阻挡层的情况下)完成,或者通过在介电层中形成孔隙来产生定位化的BSF而完成。但是这样增加了电池制作的额外费用和复杂性。
因此,需要一种把BSF施加到硅太阳能电池中的方法,该方法比商品电池采用的方法更有效,也可提高电池的效率。
本发明提供一种把背面场(back surface field)施加到硅太阳能电池中的方法,该方法包括如下步骤:
a)在电池的背面沉积铝层;
b)在700~1000℃的温度下使铝层烧结;
c)使电池暴露于V族元素化合物的气氛中,并在950~1000℃的温度下进行扩散,以使裸露的p型硅表面中掺入V族元素。
在铝层沉积之后使电池进行V族元素掺杂,可取得许多显著的优点。在铝层沉积之前不进行V族元素掺杂,这意味着在背面掺杂V族元素补偿不了铝掺杂。另外,不要求背面上的氧化硅或氮化硅涂层去阻止上述掺杂,从而使工艺更经济。任选,烧结步骤和后续掺杂步骤(上述步骤(b)和(c))可结合,从而使工艺更经济。还有,该方法考虑了要使用低成本的CZ硅片,而原先这种CZ硅片用于另一种使用了高于1000℃的烧结温度的方法时,其性能则下降。
铝沉积通过蒸发沉积或喷镀(sputtering)来完成。任选,在铝沉积之后而在烧结之前,可洗涤硅片的前表面,通常采用去离子水进行洗涤,从而除去前表面不需要的所有铝灰。沉积铝的烧结温度优选850~1000℃,特别优选900~960℃。烧结时间一般不多于30分钟,优选不多于10分钟。
V族元素优选磷或砷;更优选磷。通常采用的化合物是POCl3,POCl3在硅片表面上氧化为P2O5。掺杂优选在960~1000℃的温度下进行。通常裸露的p-型硅表面位于嵌入电池表面的槽中。
硅电池可以是单晶的或多晶的。
现在,参照附图描述本发明具体的实施方案,附图示意性说明了典型的埋藏接点太阳能电池(Buried Contact solar cell)的结构。
图1说明了硅片1。
如上所述,制造方法的第一阶段是:用磷掺杂硅片的上表面2,形成n型层(在图中示为n+)。操作如下:在石英管式炉中,在约800~900℃的温度下,仅使上表面暴露于POCl3和O2中,在硅表面上得到薄P2O5层,在以后更高温度的步骤中,薄P2O5层的磷掺杂硅中。
然后将氮化硅涂层3施加到上表面上,得到抗反射层;这层也起作介电(不导电)层,以防止后来的金属镀在上表面上,以及在槽掺杂步骤中用作磷进一步掺杂表面的阻挡层。在石英管式炉中,在800~900℃的温度下,采用低压化学蒸汽沉积法,通常使用二氯甲硅烷和氨气,来沉积氮化硅。
然后,用激光在硅的上表面刻出平行槽4。这些槽通常宽20μm,深约40μm,间距约1.5mm。然后将硅片浸入苛性腐蚀剂中,以溶解激光刻槽的硅碎片,以及蚀刻槽壁。
因为这些槽切穿经过n型掺杂的硅表面层到下面的p-型硅,因此必需使槽中裸露的p型表面再次掺杂磷。但是根据本发明,在进行这一步骤之前,在硅片的背面沉积铝层。
在铝沉积之前,可清洁硅片的背面,以及采用等离子蚀刻和/或将硅片浸没在酸或碱浴中,来蚀刻硅片的背面。然后通过蒸发沉积,沉积一层0.2~2.0μm厚的铝层5,接着在水中漂洗硅片,除去上表面的所有铝灰。而后在石英管式炉中,在950℃的温度对硅片进行烧结。
在铝层烧结之后,将硅片浸没在稀(0.5~4.0%)氢氟酸溶液中,以除去在槽中生成的所有的氧化硅。然后在去离子水中漂洗硅片,再干燥。
除去槽中的氧化物之后,在石英管式炉中,在980℃的温度下,用POCl3和O2处理硅片。这样在槽表面得到新n型层6(在图中示为n++)。
在另一种实施方案中,由于掺杂步骤中的高温也用来烧结铝,所以铝烧结和在槽中沉积新n型层6两步合在一起。
然后将非电解镍(electroless nickel)基极层淀积在槽中和硅片的背面。在烧结之后,在槽中和硅片背面进一步淀积镍、铜和银,得到槽中导电铜接点7和背面导电层8。然后,采用本领域技术人员熟知的方法进行边缘绝缘(激光划切边缘),完成电池制作。
试验表明,本发明方法得到比现有技术电池的效率高出约6%的太阳能电池,因此电池的总效率从约16%上升至约17%。
实施例1-3
采用下面一般方法,在不同条件下,制造面积为147cm2的太阳能电池。
原材料
采用常规CZ硅片,该硅片掺杂了含硼的p-型,使电阻率为1.2欧姆.厘米,长有平行于硅片表面的[100]晶面。硅片尺寸为127mm正方形,带有直径为150mm的圆角。硅片厚300μm。这种硅片可从市场上购到,例如从Bayer Solar GmbH、PV Silicon GmbH和Pillar购买到。
硅片表面处理
在氢氧化钠和丙醇的溶液中,在90℃的温度下,对硅片进行各向异性织构化蚀刻,然后将硅片浸没在氢氟酸和盐酸中进行清洁,其间及最后用去离子水漂洗,再进行干燥。
磷掺杂和氮化硅沉积
将硅片成对地(互相接触)放置在石英片承载器的槽沟中,在800℃的温度下,在POCl3蒸气和O2的气氛中进行处理,从而在硅片的外表面沉积10nm厚的磷玻璃(phosphorus glass)膜。接着,(放置于石英承载器中的)硅片在氮化硅和氨气的气氛中,在40Pa的压力和780~860℃的温度下进行处理,以在外面的硅上沉积110nm厚的氮化硅。
等离子蚀刻
这一步不是本发明方法的必要部分,但为获得良好的电池效果则是必需的。由于上述步骤,环绕硅片背面的周边(到10~20mm的距离)通常沉积一些不需要的氮化硅。采用由氟利昂和氧气形成的气体等离子体进行蚀刻来除去这些膜。通过将硅片前表面互相接触放置,并使其背面暴露于气体等离子体中,而完成这一步骤。
激光刻槽
在前表面(有氮化硅膜的表面)刻入许多槽,这些槽以后将形成导电栅,通过导电栅来传输电流。每个槽的大小通常为宽20μm,深40μm,采用Nd:YAG激光Q,以50kHz的频率转换,以500mm/s的速度穿过硅片表面,激光烧蚀表面材料,形成槽。槽的图案包括分布于整个表面的间距1.5mm第一组平行线和与第一组垂直的第二组槽,槽图案组成彼此间相距约6cm的两束。每束包括在1.5mm宽度内的平行槽。
槽清洁
激光刻槽的操作通常在硅片表面产生硅碎片,以及包含不希望有的晶体不完整性的槽侧壁。因此,使硅片在氢氧化钠的溶液中,在50℃的温度下进行蚀刻,以溶解硅碎片,并使槽壁蚀刻至几微米的深度。然后将硅片浸没在氢氟酸和盐酸中进行清洁,其间及最后用去离子水漂洗,再进行干燥。
铝沉积
采用热蒸发(也可使用喷镀)在硅片背面沉积500nm厚的铝膜。然后用去离子水漂洗硅片,除去所有的铝灰,再进行干燥。
铝烧结
将硅片放置于插入石英管中的石英片承载器中,在氧气气氛中加热至所需要的温度(参见下面表1中的温度),持续15分钟。在烧结步骤之后,将硅片浸没在氢氟酸和盐酸中进行清洁,其间及最后用去离子水漂洗,再进行干燥。
槽掺杂
将硅片成对(不接触)、铝表面彼此面对面地放置在石英片承载器中。然后将承载器插入石英管中,在960~1000℃的温度下,在POCl3蒸气和O2的气氛中处理20分钟,以使磷掺入裸露的硅表面,至薄片电阻率为8欧姆/方(ohm/square)。
镀镍
将硅片浸入4%的氢氟酸溶液中90秒,再用去离子水进行漂洗。然后将硅片浸入碱性非电解镍电镀液(Enplate Al-100)中100s,沉积0.1μm Ni膜,接着用去离子水漂洗,然后干燥。
镍烧结
在氮气气氛中,将镀镍的硅片加热至400℃并持续6分钟,使镍烧结到硅表面上。
镀铜
采用下面步骤对硅片进行处理,从而在槽中和硅片背面镀上5微米厚的铜膜。将硅片浸没在30%的硝酸中2分钟,接着在水中漂洗10分钟,再将硅片浸没在1%的氢氟酸中30秒,在水中漂洗10分钟,然后在90℃的温度下将硅片浸入酸性非电解镀镍溶液(Enplate Ni-416)中60秒,在水中漂洗30秒,再在50℃的温度下将硅片浸入非电解镀铜溶液(Enplate Cu-703)中120分钟,在水中漂洗10分钟,在室温下再将硅片浸入氰化银钾溶液中6分钟,在水中漂洗10分钟,而后进行干燥。
边缘绝缘
通过在硅片背面并与硅片边缘相距1mm的周边的硅表面上切出深100~150μm的槽沟,来除去边缘上不需要的镍和铜的导电沉积物。切开并弃去边缘处1mm硅,除去边缘材料。现在电池制作完成,并可准备测试。
下面表1说明本发明有关步骤中采用的不同条件和进行的次序,以及说明所得到电池的效果的测量。
实施例1根据现有技术的方法进行,在该方法中,上述“槽掺杂”步骤在“铝沉积”和“铝烧结”步骤之前进行。在实施例2和3中,根据本发明,磷掺杂在铝层沉积和烧结之后进行。可以看出950℃的烧结温度得到的结果好于995℃的烧结温度得到的结果。
表1
实施例 | 工艺条件 | Isc/A | Voc/V | 效率 |
1(比较) | 在960~1000℃下进行POCl3掺杂+0.5μm蒸发的铝+在700℃下烧结 | 5.29 | 603 | 16.8% |
2 | 0.5μm蒸发的铝+在950℃下,在O2中烧结10分钟+在960~1000℃下进行POCl3掺杂 | 5.48 | 611 | 17.9% |
3 | 0.5μm蒸发的铝+在995℃下,在O2中烧结30分钟+在960~1000℃下进行POCl3掺杂 | 5.37 | 610 | 17.5% |
Isc=采用AM1.5G光谱,在1000W/m2照度下,电池的短路电流;
Voc=采用AM1.5G光谱,在1000W/m2照度下,电池的开路电压;
效率=电能输出量与光能输入量之比
实施例4~11
采用各种烧结温度和时间,重复实施例2和3的方法。为了比较用,根据如上述实施例1的现有技术方法使用BSF的电池,也进行试验。结果示于表2。可看出,通常较低的烧结温度和较短的烧结时间取得更高的效率。
表2
实施例 | Al烧结温度和时间 | 电池数目 | Isc/A | Voc/V | FF(%) | 效率(%) |
4 | 现有技术方法 | 26 | 5.18 | 604 | 77.1 | 16.4 |
5 | 995℃下持续30min | 9 | 5.26 | 609 | 78.1 | 17.0 |
6 | 950℃下持续50min | 9 | 5.22 | 607 | 78.5 | 16.9 |
7 | 950℃下持续25min | 10 | 5.37 | 613 | 78.6 | 17.6 |
8 | 950℃下持续10min | 10 | 5.42 | 615 | 78.7 | 17.8 |
9 | 900℃下持续50min | 10 | 5.40 | 615 | 78.5 | 17.7 |
10 | 900℃下持续25min | 10 | 5.41 | 616 | 78.4 | 17.7 |
11 | 900℃下持续10min | 11 | 5.41 | 616 | 78.6 | 17.8 |
FF=填充因子(Fill Factor),功率输出/(Isc*Voc)(power out/(Isc*Voc))的量度。
电池数目是用于实验以得到表中给出的平均值的电池数。
Claims (9)
1.把背面场施加到硅太阳能电池中的方法,该方法包括如下步骤:
a)在电池的背面沉积铝层;
b)在700~1000℃的温度下使铝层烧结;
c)使电池暴露于V族元素化合物的气氛中,并在950~1000℃的温度下进行扩散,以使裸露的p型硅表面中掺入V族元素。
2.根据权利要求1所述的方法,其中所述步骤(b)中的烧结温度为850~1000℃,优选900~960℃。
3.根据权利要求1或2所述的方法,其中所述步骤(b)中的烧结时间不超过30分钟,优选不超过10分钟。
4.根据上述任意项权利要求所述的方法,其中所述步骤(b)和(c)合并。
5.根据上述任意项权利要求所述的方法,其中所述V族元素是磷或砷。
6.根据权利要求5所述的方法,其中所述V族元素的化合物是POCl3。
7.根据上述任意项权利要求所述的方法,其中所述步骤(c)的掺杂在960~1000℃的温度下进行。
8.根据上述任意项权利要求所述的方法,其中所述的裸露的p-型硅表面位于嵌入电池表面的槽中。
9.根据上述任意项权利要求所述的方法,其中所述的硅是单晶硅。
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Cited By (5)
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---|---|---|---|---|
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Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG139508A1 (en) * | 2001-09-10 | 2008-02-29 | Micron Technology Inc | Wafer dicing device and method |
SG102639A1 (en) * | 2001-10-08 | 2004-03-26 | Micron Technology Inc | Apparatus and method for packing circuits |
SG142115A1 (en) | 2002-06-14 | 2008-05-28 | Micron Technology Inc | Wafer level packaging |
US7402448B2 (en) * | 2003-01-31 | 2008-07-22 | Bp Corporation North America Inc. | Photovoltaic cell and production thereof |
SG119185A1 (en) | 2003-05-06 | 2006-02-28 | Micron Technology Inc | Method for packaging circuits and packaged circuits |
US7893347B2 (en) | 2003-10-09 | 2011-02-22 | Helmholtz-Zentrum Berlin Fuer Materialien Und Energie Gmbh | Photovoltaic solar cell |
US20050189013A1 (en) * | 2003-12-23 | 2005-09-01 | Oliver Hartley | Process for manufacturing photovoltaic cells |
US7514353B2 (en) * | 2005-03-18 | 2009-04-07 | Applied Materials, Inc. | Contact metallization scheme using a barrier layer over a silicide layer |
US20060246217A1 (en) * | 2005-03-18 | 2006-11-02 | Weidman Timothy W | Electroless deposition process on a silicide contact |
US7718092B2 (en) | 2005-10-11 | 2010-05-18 | E.I. Du Pont De Nemours And Company | Aluminum thick film composition(s), electrode(s), semiconductor device(s) and methods of making thereof |
US20070099806A1 (en) * | 2005-10-28 | 2007-05-03 | Stewart Michael P | Composition and method for selectively removing native oxide from silicon-containing surfaces |
US7655542B2 (en) * | 2006-06-23 | 2010-02-02 | Applied Materials, Inc. | Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device |
EP1892767A1 (en) * | 2006-08-22 | 2008-02-27 | BP Solar Espana, S.A. Unipersonal | Photovoltaic cell and production thereof |
US20080121276A1 (en) * | 2006-11-29 | 2008-05-29 | Applied Materials, Inc. | Selective electroless deposition for solar cells |
NO333757B1 (no) | 2006-12-04 | 2013-09-09 | Elkem Solar As | Solceller |
EP1936698A1 (en) | 2006-12-18 | 2008-06-25 | BP Solar Espana, S.A. Unipersonal | Process for manufacturing photovoltaic cells |
US20080173350A1 (en) * | 2007-01-18 | 2008-07-24 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US20080223440A1 (en) * | 2007-01-18 | 2008-09-18 | Shuran Sheng | Multi-junction solar cells and methods and apparatuses for forming the same |
US7582515B2 (en) * | 2007-01-18 | 2009-09-01 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US8203071B2 (en) * | 2007-01-18 | 2012-06-19 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US20080245414A1 (en) * | 2007-04-09 | 2008-10-09 | Shuran Sheng | Methods for forming a photovoltaic device with low contact resistance |
SG182989A1 (en) | 2007-07-03 | 2012-08-30 | Microlink Devices Inc | Methods for fabricating thin film iii-v compound solar cell |
US7875486B2 (en) * | 2007-07-10 | 2011-01-25 | Applied Materials, Inc. | Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning |
US7763535B2 (en) * | 2007-08-30 | 2010-07-27 | Applied Materials, Inc. | Method for producing a metal backside contact of a semiconductor component, in particular, a solar cell |
EP2031659A1 (de) * | 2007-08-30 | 2009-03-04 | Applied Materials, Inc. | Verfahren zur Erzeugung eines metallischen Rückkontaktes eines Halbleiterbauelements, insbesondere einer Solarzelle |
AU2008291617A1 (en) * | 2007-08-31 | 2009-03-05 | Csg Solar Ag | Abrasion-etch texturing of glass |
US20090104733A1 (en) * | 2007-10-22 | 2009-04-23 | Yong Kee Chae | Microcrystalline silicon deposition for thin film solar applications |
WO2009059240A1 (en) * | 2007-11-02 | 2009-05-07 | Applied Materials, Inc. | Intrinsic amorphous silicon layer |
KR20100095426A (ko) * | 2007-11-02 | 2010-08-30 | 어플라이드 머티어리얼스, 인코포레이티드 | 증착 공정들 간의 플라즈마 처리 |
US20100285631A1 (en) * | 2008-01-02 | 2010-11-11 | Blue Himmel Solar Pty Ltd | Method of selectively doping a semiconductor material for fabricating a solar cell |
US20090233007A1 (en) * | 2008-03-17 | 2009-09-17 | Nanopv Technologies Inc. | Chemical vapor deposition reactor and method |
US7993752B2 (en) * | 2008-03-17 | 2011-08-09 | Nano PV Technologies, Inc. | Transparent conductive layer and method |
US20090229663A1 (en) * | 2008-03-17 | 2009-09-17 | Nanopv Technologies Inc. | Nanocrystalline photovoltaic device |
US20090229664A1 (en) * | 2008-03-17 | 2009-09-17 | Nanopv Technologies Inc. | Method of manufacturing nanocrystalline photovoltaic devices |
EP2266146B1 (en) * | 2008-04-10 | 2011-09-14 | Cardinal IG Company | Glazing assemblies that incorporate photovoltaic elements and related methods of manufacture |
WO2009126186A1 (en) | 2008-04-10 | 2009-10-15 | Cardinal Ig Company | Manufacturing of photovoltaic subassemblies |
WO2009137241A2 (en) | 2008-04-14 | 2009-11-12 | Bandgap Engineering, Inc. | Process for fabricating nanowire arrays |
CN102057503A (zh) * | 2008-05-13 | 2011-05-11 | 应用材料股份有限公司 | 用于太阳能电池制造的晶体生长装置 |
US8895842B2 (en) * | 2008-08-29 | 2014-11-25 | Applied Materials, Inc. | High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells |
US20100059110A1 (en) * | 2008-09-11 | 2010-03-11 | Applied Materials, Inc. | Microcrystalline silicon alloys for thin film and wafer based solar applications |
DE102009008786A1 (de) * | 2008-10-31 | 2010-06-10 | Bosch Solar Energy Ag | Verfahren zur Herstellung einer Solarzelle und Solarzelle |
JP5612591B2 (ja) * | 2008-11-14 | 2014-10-22 | バンドギャップ エンジニアリング, インコーポレイテッド | ナノ構造デバイス |
US20100163406A1 (en) * | 2008-12-30 | 2010-07-01 | Applied Materials, Inc. | Substrate support in a reactive sputter chamber |
WO2011011301A2 (en) * | 2009-07-23 | 2011-01-27 | Applied Materials, Inc. | A mixed silicon phase film for high efficiency thin film silicon solar cells |
WO2011046664A2 (en) * | 2009-10-15 | 2011-04-21 | Applied Materials, Inc. | A barrier layer disposed between a substrate and a transparent conductive oxide layer for thin film silicon solar cells |
WO2011053344A1 (en) * | 2009-10-26 | 2011-05-05 | Narayanan Srinivasamohan | Crystalline silicon solar cell and manufacturing process |
US9634165B2 (en) * | 2009-11-02 | 2017-04-25 | International Business Machines Corporation | Regeneration method for restoring photovoltaic cell efficiency |
DE102009053818A1 (de) | 2009-11-18 | 2011-05-19 | Evonik Degussa Gmbh | Dotierung von Siliciumschichten aus flüssigen Silanen für Elektronik- und Solar-Anwendungen |
US20110126875A1 (en) * | 2009-12-01 | 2011-06-02 | Hien-Minh Huu Le | Conductive contact layer formed on a transparent conductive layer by a reactive sputter deposition |
US20110192316A1 (en) * | 2010-02-05 | 2011-08-11 | E-Chem Enterprise Corp. | Electroless plating solution for providing solar cell electrode |
US8865502B2 (en) * | 2010-06-10 | 2014-10-21 | International Business Machines Corporation | Solar cells with plated back side surface field and back side electrical contact and method of fabricating same |
DE102010025281A1 (de) * | 2010-06-28 | 2011-12-29 | Centrotherm Photovoltaics Ag | Verfahren zur lokalen Entfernung einer Oberflächenschicht sowie Solarzelle |
DE102010034551A1 (de) * | 2010-08-17 | 2012-02-23 | Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh | Verfahren zur Herstellung eines Aluminium-Rückseitenreflektors für eine Si-Solarzelle und Si-Solarzelle mit einem solchen Reflektor |
CN102468363B (zh) * | 2010-11-09 | 2013-07-10 | 浚鑫科技股份有限公司 | 低效太阳能电池处理方法 |
TWI467783B (zh) * | 2011-11-10 | 2015-01-01 | Nat Univ Tsing Hua | A solar cell manufacturing method and solar cell with curved embedded electrode wire |
KR101921738B1 (ko) * | 2012-06-26 | 2018-11-23 | 엘지전자 주식회사 | 태양 전지 |
CN103107237B (zh) * | 2012-12-06 | 2016-03-23 | 杭州赛昂电力有限公司 | 单晶硅太阳能电池及其制作方法 |
US20150179834A1 (en) * | 2013-12-20 | 2015-06-25 | Mukul Agrawal | Barrier-less metal seed stack and contact |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6174378A (ja) * | 1984-09-20 | 1986-04-16 | Hamamatsu Photonics Kk | 赤外線照射により浅い接合とbsfを同時に形成する光センサの製造方法 |
JP2951061B2 (ja) * | 1991-09-18 | 1999-09-20 | 三洋電機株式会社 | 太陽電池の製造方法 |
JP3032422B2 (ja) * | 1994-04-28 | 2000-04-17 | シャープ株式会社 | 太陽電池セルとその製造方法 |
US5510271A (en) * | 1994-09-09 | 1996-04-23 | Georgia Tech Research Corporation | Processes for producing low cost, high efficiency silicon solar cells |
DE19508712C2 (de) * | 1995-03-10 | 1997-08-07 | Siemens Solar Gmbh | Solarzelle mit Back-Surface-Field und Verfahren zur Herstellung |
JPH09191118A (ja) * | 1996-01-11 | 1997-07-22 | Shin Etsu Chem Co Ltd | 太陽電池の製造方法 |
US6552414B1 (en) * | 1996-12-24 | 2003-04-22 | Imec Vzw | Semiconductor device with selectively diffused regions |
EP0851511A1 (en) * | 1996-12-24 | 1998-07-01 | IMEC vzw | Semiconductor device with two selectively diffused regions |
-
2001
- 2001-06-19 GB GBGB0114896.4A patent/GB0114896D0/en not_active Ceased
-
2002
- 2002-06-17 AU AU2002257979A patent/AU2002257979B2/en not_active Ceased
- 2002-06-17 CN CNB028160789A patent/CN100383984C/zh not_active Expired - Fee Related
- 2002-06-17 WO PCT/GB2002/002673 patent/WO2002103810A1/en active Application Filing
- 2002-06-17 US US10/481,268 patent/US7071018B2/en not_active Expired - Fee Related
- 2002-06-17 JP JP2003506017A patent/JP4335668B2/ja not_active Expired - Fee Related
- 2002-06-17 EP EP02727782A patent/EP1397839A1/en not_active Withdrawn
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101630702B (zh) * | 2009-07-30 | 2012-02-01 | 东莞南玻太阳能玻璃有限公司 | 一种太阳能电池组件镀膜盖板玻璃的制造方法 |
CN102097534A (zh) * | 2010-11-18 | 2011-06-15 | 中国科学院宁波材料技术与工程研究所 | 同时形成晶体硅太阳能电池pn结和氮化硅减反射膜的方法 |
CN102082199A (zh) * | 2010-11-19 | 2011-06-01 | 山东力诺太阳能电力股份有限公司 | 一种用于晶体硅太阳能电池刻槽埋栅的方法 |
CN104393095A (zh) * | 2014-09-25 | 2015-03-04 | 魏一 | n型硅太阳电池、其制备方法及铝蒸发扩散装置 |
CN104393095B (zh) * | 2014-09-25 | 2016-09-07 | 锦州华昌光伏科技有限公司 | n型硅太阳电池、其制备方法及铝蒸发扩散装置 |
CN109216479A (zh) * | 2018-09-07 | 2019-01-15 | 泰州隆基乐叶光伏科技有限公司 | 一种太阳能电池及其生产工艺 |
Also Published As
Publication number | Publication date |
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US20050074917A1 (en) | 2005-04-07 |
WO2002103810A1 (en) | 2002-12-27 |
GB0114896D0 (en) | 2001-08-08 |
CN100383984C (zh) | 2008-04-23 |
AU2002257979B2 (en) | 2007-10-04 |
JP2004531074A (ja) | 2004-10-07 |
EP1397839A1 (en) | 2004-03-17 |
US7071018B2 (en) | 2006-07-04 |
JP4335668B2 (ja) | 2009-09-30 |
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