CN1527914A - 节能型闸阀 - Google Patents
节能型闸阀 Download PDFInfo
- Publication number
- CN1527914A CN1527914A CNA028140982A CN02814098A CN1527914A CN 1527914 A CN1527914 A CN 1527914A CN A028140982 A CNA028140982 A CN A028140982A CN 02814098 A CN02814098 A CN 02814098A CN 1527914 A CN1527914 A CN 1527914A
- Authority
- CN
- China
- Prior art keywords
- valve
- radiation absorption
- absorption coating
- fluid passage
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0263—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor using particular material or covering means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/6851—With casing, support, protector or static constructional installations
- Y10T137/7036—Jacketed
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Details Of Valves (AREA)
- Sliding Valves (AREA)
- Valve Housings (AREA)
- Lift Valve (AREA)
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US30505101P | 2001-07-13 | 2001-07-13 | |
US60/305,051 | 2001-07-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1527914A true CN1527914A (zh) | 2004-09-08 |
CN1299034C CN1299034C (zh) | 2007-02-07 |
Family
ID=23179095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028140982A Expired - Fee Related CN1299034C (zh) | 2001-07-13 | 2002-07-09 | 节能型闸阀 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6571821B2 (zh) |
EP (1) | EP1425525B1 (zh) |
JP (1) | JP4021843B2 (zh) |
KR (1) | KR20040016439A (zh) |
CN (1) | CN1299034C (zh) |
DE (1) | DE60220170T2 (zh) |
HK (1) | HK1066850A1 (zh) |
TW (1) | TW530138B (zh) |
WO (1) | WO2003006854A2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103206552A (zh) * | 2012-01-16 | 2013-07-17 | 中国科学院微电子研究所 | 真空隔离阀装置 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6746566B1 (en) | 2001-12-11 | 2004-06-08 | Kla-Tencor Technologies Corporation | Transverse magnetic field voltage isolator |
US7037083B2 (en) | 2003-01-08 | 2006-05-02 | Brooks Automation, Inc. | Radiation shielding coating |
US20050000428A1 (en) * | 2003-05-16 | 2005-01-06 | Shero Eric J. | Method and apparatus for vaporizing and delivering reactant |
US7394339B1 (en) | 2004-06-30 | 2008-07-01 | Kla-Tencor Technologies Corporation | Transverse magnetic field voltage isolator |
US20100011784A1 (en) * | 2008-07-17 | 2010-01-21 | Sumitomo Heavy Industries, Ltd. | Cryopump louver extension |
US20100127201A1 (en) * | 2008-11-21 | 2010-05-27 | Applied Materials, Inc. | Interlocking valve chamber and lid |
JP2010184858A (ja) * | 2009-01-15 | 2010-08-26 | Nippon Electric Glass Co Ltd | ガラス繊維製造装置及びガラス繊維の製造方法 |
US8877001B2 (en) * | 2009-05-07 | 2014-11-04 | Applied Materials, Inc. | Shuttered gate valve |
US9117773B2 (en) * | 2009-08-26 | 2015-08-25 | Asm America, Inc. | High concentration water pulses for atomic layer deposition |
DE102015106061A1 (de) * | 2015-04-21 | 2016-10-27 | Von Ardenne Gmbh | Ventilanordnung |
WO2019039643A1 (ko) * | 2017-08-23 | 2019-02-28 | 동아대학교 산학협력단 | 유량조절밸브 |
US11384883B2 (en) * | 2020-01-31 | 2022-07-12 | General Electric Company | Cryogenic transfer line coupling assembly |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3773068A (en) * | 1971-09-10 | 1973-11-20 | Koppers Co Inc | Gate valve |
DE2726066A1 (de) | 1977-06-08 | 1978-12-21 | Herion Werke Kg | Magnetventil |
US4722365A (en) * | 1985-12-23 | 1988-02-02 | United Technologies Corporation | Fluidic device |
US5497727A (en) * | 1993-09-07 | 1996-03-12 | Lsi Logic Corporation | Cooling element for a semiconductor fabrication chamber |
JPH08178084A (ja) * | 1994-12-21 | 1996-07-12 | Kubota Corp | 高温用バタフライ弁 |
JPH09222057A (ja) * | 1996-02-15 | 1997-08-26 | Zexel Corp | 電磁式燃料噴射弁のカーボンデポジット防止装置 |
US5901558A (en) | 1997-08-20 | 1999-05-11 | Helix Technology Corporation | Water pump with integral gate valve |
US6007634A (en) * | 1997-09-02 | 1999-12-28 | Inco Limited | Vapor deposition apparatus |
-
2001
- 2001-07-18 US US09/908,435 patent/US6571821B2/en not_active Expired - Fee Related
-
2002
- 2002-07-02 TW TW91114564A patent/TW530138B/zh not_active IP Right Cessation
- 2002-07-09 CN CNB028140982A patent/CN1299034C/zh not_active Expired - Fee Related
- 2002-07-09 KR KR10-2003-7003621A patent/KR20040016439A/ko not_active Application Discontinuation
- 2002-07-09 JP JP2003512582A patent/JP4021843B2/ja not_active Expired - Fee Related
- 2002-07-09 WO PCT/US2002/021586 patent/WO2003006854A2/en active IP Right Grant
- 2002-07-09 EP EP02752217A patent/EP1425525B1/en not_active Expired - Fee Related
- 2002-07-09 DE DE2002620170 patent/DE60220170T2/de not_active Expired - Lifetime
-
2004
- 2004-12-10 HK HK04109792A patent/HK1066850A1/xx not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103206552A (zh) * | 2012-01-16 | 2013-07-17 | 中国科学院微电子研究所 | 真空隔离阀装置 |
Also Published As
Publication number | Publication date |
---|---|
JP4021843B2 (ja) | 2007-12-12 |
EP1425525A2 (en) | 2004-06-09 |
DE60220170T2 (de) | 2008-02-07 |
KR20040016439A (ko) | 2004-02-21 |
US20030010383A1 (en) | 2003-01-16 |
HK1066850A1 (en) | 2005-04-01 |
TW530138B (en) | 2003-05-01 |
CN1299034C (zh) | 2007-02-07 |
WO2003006854A2 (en) | 2003-01-23 |
EP1425525B1 (en) | 2007-05-16 |
US6571821B2 (en) | 2003-06-03 |
JP2004522114A (ja) | 2004-07-22 |
WO2003006854A3 (en) | 2003-05-08 |
DE60220170D1 (de) | 2007-06-28 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1066850 Country of ref document: HK |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
REG | Reference to a national code |
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|
ASS | Succession or assignment of patent right |
Owner name: AGILENT TECHNOLOGIES CO., LTD. Free format text: FORMER OWNER: VARIAN INC. Effective date: 20110616 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20110616 Address after: American California Patentee after: Varian Inc. Address before: American California Patentee before: Varian Inc. |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070207 Termination date: 20130709 |