DE60220170D1 - Energieschonender absperrschieber - Google Patents

Energieschonender absperrschieber

Info

Publication number
DE60220170D1
DE60220170D1 DE60220170T DE60220170T DE60220170D1 DE 60220170 D1 DE60220170 D1 DE 60220170D1 DE 60220170 T DE60220170 T DE 60220170T DE 60220170 T DE60220170 T DE 60220170T DE 60220170 D1 DE60220170 D1 DE 60220170D1
Authority
DE
Germany
Prior art keywords
energy saving
breaker
saving breaker
energy
saving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60220170T
Other languages
English (en)
Other versions
DE60220170T2 (de
Inventor
Stephen R Matte
William G Foley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Application granted granted Critical
Publication of DE60220170D1 publication Critical patent/DE60220170D1/de
Publication of DE60220170T2 publication Critical patent/DE60220170T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0263—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor using particular material or covering means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/7036—Jacketed
DE2002620170 2001-07-13 2002-07-09 Energieschonender absperrschieber Expired - Lifetime DE60220170T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US30505101P 2001-07-13 2001-07-13
US305051P 2001-07-13
PCT/US2002/021586 WO2003006854A2 (en) 2001-07-13 2002-07-09 Energy conserving gate valve

Publications (2)

Publication Number Publication Date
DE60220170D1 true DE60220170D1 (de) 2007-06-28
DE60220170T2 DE60220170T2 (de) 2008-02-07

Family

ID=23179095

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002620170 Expired - Lifetime DE60220170T2 (de) 2001-07-13 2002-07-09 Energieschonender absperrschieber

Country Status (9)

Country Link
US (1) US6571821B2 (de)
EP (1) EP1425525B1 (de)
JP (1) JP4021843B2 (de)
KR (1) KR20040016439A (de)
CN (1) CN1299034C (de)
DE (1) DE60220170T2 (de)
HK (1) HK1066850A1 (de)
TW (1) TW530138B (de)
WO (1) WO2003006854A2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6746566B1 (en) 2001-12-11 2004-06-08 Kla-Tencor Technologies Corporation Transverse magnetic field voltage isolator
US7037083B2 (en) 2003-01-08 2006-05-02 Brooks Automation, Inc. Radiation shielding coating
US20050000428A1 (en) * 2003-05-16 2005-01-06 Shero Eric J. Method and apparatus for vaporizing and delivering reactant
US7394339B1 (en) 2004-06-30 2008-07-01 Kla-Tencor Technologies Corporation Transverse magnetic field voltage isolator
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
US20100127201A1 (en) * 2008-11-21 2010-05-27 Applied Materials, Inc. Interlocking valve chamber and lid
JP2010184858A (ja) * 2009-01-15 2010-08-26 Nippon Electric Glass Co Ltd ガラス繊維製造装置及びガラス繊維の製造方法
US8877001B2 (en) * 2009-05-07 2014-11-04 Applied Materials, Inc. Shuttered gate valve
US9117773B2 (en) * 2009-08-26 2015-08-25 Asm America, Inc. High concentration water pulses for atomic layer deposition
CN103206552A (zh) * 2012-01-16 2013-07-17 中国科学院微电子研究所 真空隔离阀装置
DE102015106061A1 (de) * 2015-04-21 2016-10-27 Von Ardenne Gmbh Ventilanordnung
WO2019039643A1 (ko) * 2017-08-23 2019-02-28 동아대학교 산학협력단 유량조절밸브
US11384883B2 (en) * 2020-01-31 2022-07-12 General Electric Company Cryogenic transfer line coupling assembly

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3773068A (en) * 1971-09-10 1973-11-20 Koppers Co Inc Gate valve
DE2726066A1 (de) 1977-06-08 1978-12-21 Herion Werke Kg Magnetventil
US4722365A (en) * 1985-12-23 1988-02-02 United Technologies Corporation Fluidic device
US5497727A (en) * 1993-09-07 1996-03-12 Lsi Logic Corporation Cooling element for a semiconductor fabrication chamber
JPH08178084A (ja) * 1994-12-21 1996-07-12 Kubota Corp 高温用バタフライ弁
JPH09222057A (ja) * 1996-02-15 1997-08-26 Zexel Corp 電磁式燃料噴射弁のカーボンデポジット防止装置
US5901558A (en) 1997-08-20 1999-05-11 Helix Technology Corporation Water pump with integral gate valve
US6007634A (en) * 1997-09-02 1999-12-28 Inco Limited Vapor deposition apparatus

Also Published As

Publication number Publication date
DE60220170T2 (de) 2008-02-07
KR20040016439A (ko) 2004-02-21
EP1425525B1 (de) 2007-05-16
US20030010383A1 (en) 2003-01-16
US6571821B2 (en) 2003-06-03
CN1299034C (zh) 2007-02-07
WO2003006854A2 (en) 2003-01-23
JP4021843B2 (ja) 2007-12-12
HK1066850A1 (en) 2005-04-01
EP1425525A2 (de) 2004-06-09
JP2004522114A (ja) 2004-07-22
TW530138B (en) 2003-05-01
WO2003006854A3 (en) 2003-05-08
CN1527914A (zh) 2004-09-08

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