CN1495023A - 在喷射液体的微型喷射器中用气泡作为一个实际上的阀的装置和方法 - Google Patents

在喷射液体的微型喷射器中用气泡作为一个实际上的阀的装置和方法 Download PDF

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CN1495023A
CN1495023A CNA021555397A CN02155539A CN1495023A CN 1495023 A CN1495023 A CN 1495023A CN A021555397 A CNA021555397 A CN A021555397A CN 02155539 A CN02155539 A CN 02155539A CN 1495023 A CN1495023 A CN 1495023A
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金长劲
邓凡刚
胡志明
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Qisda Corp
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Abstract

一种装置和方法，它在微型喷射器的微型通道中形成一个气泡，在腔和集流管间起一个阀门机构的作用，在喷嘴喷射液体时对通过集流管流出腔的液体产生高的阻力，而在液体喷射完成和气泡破裂后对液体向腔的再填充形成低的阻力。它有效地减少相邻腔间的串扰现象并提高微型喷射器的喷射频率。在腔内形成的第二气泡与之前在腔和集流管间形成的第一气泡结合，迅速终止液体喷出，从而消除衍生液滴。

Description

在喷射液体的微型喷射器中 用气泡作为一个实际上的阀的装置和方法
本发明是申请号为99802287.X，申请日为1999年1月22日，发明名称为“在喷射液体的微型喷射器中用气泡作为一个实际上的阀的装置和方法”的分案申请
技术领域
本发明涉及液体喷射器，特别涉及从微型设备中喷射液体的装置和方法。
背景技术
在喷墨打印机的打印中广泛使用液滴喷射器。液滴喷射器也用在很多其它可能的应用中，如燃料喷射系统、细胞分类(cell sorting)、供药系统、直接印刷光刻(lithography)和微型喷射推进系统等。在所有这些应用方面有一个共同点，就是特别希望有一种可靠且成本低的液滴喷射器能够以高频率和高的空间分辨率提供高质量的液滴。
仅有少数设备具有单个地并以一致的液滴大小喷射液滴的能力。在目前已知并使用的液滴喷射系统中，有一种利用加热产生的气泡推动喷射的系统由于其简单且成本较低已经应用得很成功。
热生气泡系统也称为气泡喷射系统，具有产生串扰效应和衍生液滴的缺点。气泡喷射系统用一种电流脉冲加热电极使腔中的液体沸腾。当液体沸腾时，气泡在液体中形成并膨胀，其功能象一个泵，通过喷嘴从该腔喷射出液柱，这个液柱变成液滴。在电流脉冲终止时，气泡破裂，由于毛细力作用液体再填充所述腔。这样一个系统的性能可用喷射速度和方向、液滴大小、最大喷射频率、在相邻腔间的串扰现象、过喷射和在液体再填充时的弯月液面波动以及衍生液滴的出现来衡量。衍生液滴在打印时降低图象的清晰度，并且在精确的液体控制中，它们降低流量测定的准确度。当气泡喷射器排列布置得间距紧密时发生串扰现象，液滴从相邻喷嘴喷射出。
大多数喷射系统在所述腔的底部设置一个加热器，它把很大热量传给衬底。另外，一般用粘接(bonding)方法将喷嘴板固定到它的加热器板上，由于存在装配公差限制了喷嘴的空间分辨率。而且，粘接工艺可能与集成电路的工艺(IC precess)不兼容，如果希望把微型喷射排列组与控制电路集成，以减少布线和确保结构紧凑，这是很重要的问题。
为了解决串扰和过喷射的问题，一般的作法是增加通道的长度或附加腔颈以增大腔和储缶间的液体阻力。但这些作法使液体再填充腔变得缓慢，并显著降低设备的最高喷射频率。
现有喷墨系统最麻烦的问题是衍生液滴，因为它造成图象模糊。当打印头和纸相对运动时，尾随主液滴的衍生液滴在与主液滴稍不同的位置上打到纸面上。目前尚无容易采用且经济有效的装置或方法解决衍生液滴问题。
因此，需要一种液滴喷射系统，在不使液体再填充速度变慢的情况下，它使串扰现象减到最低，从而保持高频率的响应并消除衍生液滴，所有这些又不增加设计和制造的复杂性。本发明满足了这些要求以及其它要求，并基本克服了现有技术的缺陷。
发明内容
本发明涉及一种装置和方法，它在微型喷射器的一个腔中形成一个气泡，在腔和集流管间起一个阀门机构的作用，从而在喷嘴喷射液体时对从腔流到集流管的液体产生高的阻力，而在液体喷射完成和气泡破裂后对液体向腔的再填充形成低的阻力。
总的来说，本发明的装置包括：一个微型喷射器，它具有一个腔和一个与之连通的集流管；一个喷嘴，与腔连通；至少一个在腔和集流管间形成气泡的装置；以及一个腔增压装置。
在腔的入口处形成气泡时，从腔到集流管的液体流动受到限制。增压装置在气泡形成后在腔内形成压力，腔内的压力增大，将液体推出喷嘴。在液体通过喷嘴喷出后，气泡破裂，使液体能快速再填充到腔中。
在腔内高压时，由于气泡阻塞了腔与集流管和相邻腔之间的连通，也使串扰减到最小。
在本发明的优选实施例中，形成气泡的装置包括靠近腔的第一加热器。增压装置包括可在腔内形成第二气泡的第二加热器。加热器邻近喷嘴，并装有一个串接的电极，所述电极由于宽度不同具有不同的电阻。第一加热器的电极比第二加热器的窄，因而，即使施加一个相同的电信号，第一气泡也在第二气泡之前形成。
当第一和第二气泡膨胀时，它们彼此接近，并最终合并，从而彻底地切断通过喷嘴的液流，使衍生液滴消除或显著减少。
本发明的一个目的是提供一种消除衍生液滴的微型喷射器装置。
本发明的另一目的是提供一种使串扰现象最小的微型喷射器装置。
本发明的再一目的是提供一种微型喷射器装置，在喷射液体后，液体可快速再填充到腔。
本发明的再一目的是提供一种从微型喷射器腔喷射液体的方法，它使衍生液滴最少。
本发明的再一目的是提供一种从微型喷射器腔喷射液体的方法，它使串扰现象最小。
本发明的再一目的是提供一种从微型喷射器腔喷射液体的方法，在喷射液体后，液体可快速再填充。
本发明进一步的目的和优点将在下面的详细说明中体现，其中的细节描述仅是为了揭示本发明的优选实施例，而不是限定本发明。
附图说明
参照后面的附图可以更加全面彻底地理解本发明。附图仅具有解释的作用。
图1是符合本发明的微型喷射器排列组的剖面的透视图；
图2A是图1所示微型喷射器排列组的一个腔和集流管的剖面图；
图2B是图2A所示一个腔和集流管的剖面图，示出第一气泡和随后的第二气泡的形成使液体向喷嘴外喷射；
图2C是图2A所示一个腔和集流管的剖面图，示出第一和第二气泡结合使液体终止从喷嘴喷射；
图2D是图2A所示一个腔和集流管的剖面图，示出第一气泡和随后的第二气泡的破裂使液体能再填充到腔；
图3是用于制造符合本发明的微型喷射器排列组的硅片的顶视平面图；
图4是沿线4-4取的图3的硅片的剖面图；
图5是图3所示的硅片的顶视平面图，示出背面腐蚀形成一个集流管；
图6是沿线6-6取的图5中所示的硅片剖面图；
图7是图5中所示的硅片顶视平面图，示出腐蚀增大腔的深度；
图8是沿线8-8取的图7中所示的硅片剖面图；
图9是图7中所示的硅片顶视平面图，上面装有成型的电极；
图10是沿线10-10取的图9中所示的硅片剖面图；
图11是形成喷嘴的图9所示的硅片的顶视平面图；
图12是沿线12-12取的图11中的硅片剖面图。
具体实施方式
具体参见附图，为了具体说明，以在图1-12中示出的装置为本发明的实施例。但应理解，在不偏离本发明公开的基本思想的前提下，本装置可在结构上和部件细节上进行改变。
首先参看图1，图中示出微型喷射器装置12的排列组10。排列组10包括彼此相邻的多个微型喷射器12。每个微型喷射器包括：一个腔14；一个集流管16；一个喷嘴18；第一加热器20；和第二加热器22。第一加热器20和第二加热器22一般是与共用电极24串联的电极。
再参看图2A，腔14可注满液体26。根据用途不同，液体26可包括：墨水、汽油、油、化学制品、生物药剂溶液、水等类似物，但不仅限于此。液体26的弯月形液面28一般稳定在喷嘴18上。集流管16与腔14相邻并连通。储缶(未示出)中的液体经过集流管16进入腔14。第一加热器20和第二加热器22的位置邻近喷嘴18并在腔14上方，以防热量流失到衬底上。第一加热器20邻近集流管16，而第二加热器22邻近腔14。从图2A可见，第一加热器20的横截面比第二加热器22的窄。
再参看图2B，因为第一加热器20和第二加热器22串联，可以用一个共用的电脉冲同时触发第一加热器20和第二加热器22。由于第一加热器20具有较窄的横截面，消耗的电流脉冲功率较高，从而使得在共同的电流脉冲作用下第一加热器20比具有较宽横截面的第二加热器22加热快。这样就不需要增加一个装置来顺序触发第一加热器20和第二加热器22，使设计简化。触发第一加热器使集流管16和腔14间形成一个第一气泡30。当第一气泡30沿箭头P的方向膨胀时，第一气泡30开始阻止液体向集流管的流动，从而形成一个实际上的阀，隔离腔14，使相邻的腔不出现串扰现象。在第一气泡30形成后在第二加热器22下形成一个第二气泡32，当第二气泡32沿箭头P的方向膨胀时，腔14的压力增加，使液体26通过喷嘴18喷出，形成F方向的液柱36。
再参看图2C，当第一气泡30和第二气泡32继续膨胀时，第一气泡30和第二气泡32彼此接近并终止液体通过喷嘴18的喷射。当第一气泡30和第二气泡32开始结合在一起时，液柱36的尾34被迅速切断，从而避免产生衍生液滴。
再参看图2D，电脉冲的终止使第一气泡30开始在P所示的方向破裂。第一气泡30几乎是瞬间的破裂使液体26能快速沿R的方向再填充到腔14，因为在集流管16和腔14之间没有了对液体的阻隔。
由此可见，根据本发明从微型喷射器装置12喷射液体26的方法大致有以下步骤：
(a)在微型喷射器装置12的充满液体的腔14中产生第一气泡30；
(b)增加腔14的压力，从腔14喷射液体26，其中增压步骤包括在腔14中产生第二气泡32；
(c)在腔14中的第一气泡30增大，起到一个实际上的阀的作用，阻止液体在腔14和集流管16间的流动；
(d)在腔14中的第二气泡32增大，从而第一气泡30和第二气泡32接近，迅速终止液体从腔14的喷射；
(e)第一气泡30破裂，液体快速向腔14再填充。
再参看图3和图4，不用任何薄片粘接工艺，而是用组合表面(combined surface)和体效应微型机械(bulk micromachine)技术在硅片38上制成一个微型喷射器排列组10。这个工艺过程开始于磷硅酸盐-玻璃(PSG)沉积和造型形成腔的牺牲层40，并覆盖一层低应力氮化硅形成腔顶层42。
然后如图5和图6所示，用氢氧化钾(KOH)从背面44腐蚀硅片38，形成集流管16。用氢氟酸(HF)除掉牺牲层40的PSG。在图7和图8中可见到，通过精确的时间控制，再做一次KOH腐蚀使腔14的深度增大。在此步骤中必须格外小心，因为腔14的凸角部也会被腐蚀而变圆。
见图9和图10，第一加热器20和第二加热器22被装上并制成型。第一加热器20和第二加热器22最好是铂制的。制成金属线44，顶部覆盖氧化层46使其钝化。第一加热器20和共用电极24间的连接点48设置在氧化层46下。最后参见图11和图12，制成喷嘴18。假设光刻能力可达到3μm线宽度，则喷嘴18可以小到大约2μm，喷嘴18间的间距可以小到约15μm。可以看到，腔14的凸角部47明显是腐蚀形成的结果。
由此可见，本发明提供了一种新型微型喷射器，它用气泡限制液体在微型通道中的流动，从而在喷嘴喷射液体时，防止液体从腔逸出到集流管中。还可看到，利用与第一气泡结合的第二气泡可以迅速切断通过喷嘴喷射的液柱，从而消除衍生液滴。
以上描述虽然含有许多特殊性，但不应看作是对本发明范围的限定，而仅是对本发明的一些优选实施例的说明。本发明的范围由权利要求和其等效条款确定。

Claims (8)

1.一种从具有喷嘴的微型通道喷射液体的方法，包括以下步骤：
(a)在充满液体的微型通道中紧邻喷嘴处产生一个第一气泡；
(b)在所述微型通道紧邻喷嘴处产生一个第二气泡，增加微型通道压力使液体由此喷射，所述第二气泡的产生步骤在所述第一气泡产生步骤之后，其中所述第一气泡和第二气泡中彼此并列于喷嘴；
(c)在微型通道中所述第一气泡增大，起一个实际上的阀的作用，限制液体流入微型通道；
(d)在微型通道中所述第二气泡增大，从而所述第一气泡和第二气泡彼此接近，迅速终止液体从喷嘴的喷射。
2.根据权利要求1所述的方法，还包括所述第一气泡破裂，使液体加速流入微型通道的步骤。
3.根据权利要求1所述的方法，其中使用一个共用信号顺序产生所述第一和第二气泡。
4.根据权利要求1所述的方法，其中所述第一气泡的增大比第二气泡的增大要快。
5.一种从微型喷射器喷射液体的方法，所述微型喷射器具有一个腔、一个向腔供给液体的集流管和一个与腔连通的喷嘴，所述方法包括以下步骤：
(a)在腔充满液体时，在腔中紧邻喷嘴处产生一个第一气泡作为一个实际上的阀；
(b)在紧邻喷嘴处产生一个第二气泡使液体从喷嘴喷射，其中所述第二气泡的产生步骤在第一气泡产生步骤之后。
(c)所述第一气泡和所述第二气泡结合，使液体从喷嘴的喷射突然停止。
6.根据权利要求5所述的方法，还包括所述第一气泡破裂，使液体加速流入腔的步骤。
7.根据权利要求5所述的方法，其中使用一个共用信号顺序产生第一和第二气泡。
8.根据权利要求5所述的方法，其中所述第一气泡的增大比第二气泡的增大要快。
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