CN1428597A - Annular eccentric Hartmann shack wavefront sensor - Google Patents
Annular eccentric Hartmann shack wavefront sensor Download PDFInfo
- Publication number
- CN1428597A CN1428597A CN 01136993 CN01136993A CN1428597A CN 1428597 A CN1428597 A CN 1428597A CN 01136993 CN01136993 CN 01136993 CN 01136993 A CN01136993 A CN 01136993A CN 1428597 A CN1428597 A CN 1428597A
- Authority
- CN
- China
- Prior art keywords
- sub
- lens
- ccd detector
- microlens array
- target surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 241000251730 Chondrichthyes Species 0.000 claims description 15
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000003044 adaptive effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Images
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
An annular eccentric Hartmann shack wavefront sensor relates to a sensor, belonging to a dynamic detection element of an optical system. The invention discloses an annular eccentric Hartmann shack wavefront sensor capable of carrying out complete wavefront measurement on circular and annular light spots. Each sub-lens of the micro-lens array is mapped to a corresponding pixel area on the target surface of the CCD detector, the pixel contained in the pixel area is not less than 2 multiplied by 2, and the optical axis position of the sub-aperture is positioned in the center of the pixel area. The invention can carry out complete wave-front measurement on common annular light spots, can be applied to a self-adaptive optical system, and has the advantages that the wave-front error is convenient to obtain, the speed is high, the applicable wavelength range is large, and the like which cannot be compared with other wave-front sensors.
Description
Technical field
The present invention relates to a kind of Hartmann shark wavefront sensor, belong to the dynamic instrumentation element of optical system.
Hartmann shark wavefront sensor is based on improved Hartmann's method of testing.Hartmann shark wavefront sensor adopts the aperture segmentation element that incident wavefront is divided into sub-aperture, and is converged to sub-hot spot, and sub-hot spot images in the ccd detector target surface; By computing machine the signal of ccd detector is handled, obtained the corrugated error signal of incident wavefront.Hartmann shark wavefront sensor has the advantage that other Wavefront sensors such as wavefront error is obtained conveniently, speed is fast, the applicable wavelengths scope is big can not be compared, the dynamic Wavefront detecting element of Chang Zuowei ADAPTIVE OPTICS SYSTEMS.
Background technology
Existing Hartmann wave front sensor adopts microlens array-ccd detector structure usually." the high resolving power wavefront control: method of SPIE's publication in 2000, device and use II " " measure ICF amplifier laser wave with the Hartmann shark wave front detector before " (" Laserwave-front measurement of ICF amplifiers using Hartmann-Shack wave-frontsensor " 148 High-resolution Wavefront Control:Methods of the 148th page of SPIE collected works 4124 volume, Devices, andApplications II/Proceedings of SPIE/Vol.4124) the disclosed a kind of Hartmann wave front sensor of a literary composition, constitute by microlens array and ccd detector, the sub-aperture of microlens array is a square, and the optical axis position is positioned at square center.The advantage of this sensor is that imaging facula is arranged on the CCD image planes regular, is convenient to the computing of ccd detector output data; But, because the Hartmann shark wavefront sensor that is made of this microlens array can not perfect measurement to common circle, ring-shaped light spot marginal portion wavefront, influenced the measuring accuracy of Hartmann shark detector to the wavefront error of above-mentioned light beam, particularly annular beam.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide a kind of and promptly can measure fully, keep existing hartmann shack sensor ccd detector output data to be convenient to the ring eccentric type Hartmann shark wavefront sensor of computing again ring-shaped light spot.
Purpose of the present invention can realize by following technical measures: arranged by annular by the microlens array (1) that a plurality of sub-lens (3) are formed; Each sub-lens (3) is mapped on ccd detector (2) target surface corresponding pixel (4) and is (n * m); Optical axis (5) position of each sub-lens (3) is not to determine with the geometric center of sub-lens, (centralized positioning in the zone of n * m), promptly the optical axis (5) of sub-lens (3) is positioned at (center in zone of n * m) of respective pixel (4) on ccd detector (2) target surface but be mapped to respective pixel (4) on ccd detector (2) target surface with each sub-lens (3).
Purpose of the present invention also can realize by following technical measures: each sub-lens (3) of microlens array (1) is mapped to pixel (4) zone corresponding on ccd detector (2) target surface (n * m), n=1～N, m=1～M must satisfy min (N * M) ≮ (2 * 2), min (N, M) 〉=2.
Purpose of the present invention also can realize by following technical measures: microlens array (1) can be a centering type binary optical micro fresnel lens array, also can be centering type continuous surface microlens array.
The present invention compared with prior art has following advantage: ring eccentric type Hartmann shark wavefront sensor disclosed in this invention, the sub-aperture of microlens array is arranged into annular, the optical axis position in each sub-aperture determine that (n * m) center in zone is as the criterion to be mapped to respective pixel on the ccd detector target surface, it is the pixel (center in the zone of n * m), guaranteed that hartmann shack sensor promptly can the common ring-shaped light spot wavefront of perfect measurement, inherited prior art again and the ccd detector output data has been convenient to the advantage of computing, improved the detection accuracy of hartmann shack sensor, can be used for ADAPTIVE OPTICS SYSTEMS ring-shaped light spot.
Description of drawings:
Fig. 1 is an embodiment of the invention ring eccentric type microlens array annular layout synoptic diagram.1 is microlens array, and 3 is sub-lens.
Fig. 2 is the (synoptic diagram of arranging in the zone of n * m) of sub-aperture respective pixel on the embodiment of the invention ccd detector target surface.2 is ccd detector.
Fig. 3 is embodiment of the invention ring eccentric type microlens array layout and ccd detector respective pixel zone contraposition synoptic diagram.3 is sub-lens, and 4 is pixel corresponding on the target surface, and 5 is optical axis.
Embodiment
As shown in Figure 1 and Figure 2, the ring eccentric type Hartmann shark wavefront sensor of the embodiment of the invention, comprise binary optical micro fresnel lens array (1) and ccd detector (2), ring eccentric type microlens array layout and ccd detector respective pixel zone contraposition relation are as Fig. 3.
Microlens array (1) is made up of 36 centering type binary optical Fresnel sub-lens (3).Sub-lens (3) is divided into a plurality of sub-apertures with tested aperture.The corresponding sub-aperture of each sub-lens (3).Each sub-lens 3 be mapped to pixel (4) corresponding on the target surface of ccd detector 2 (n * m), n=1～N, m=1～M, must satisfy min (N * M) ≮ (2 * 2), min (N, M) 〉=2.Optical axis (5) position of each sub-lens (3) all is positioned at pixel corresponding on the target surface of ccd detector (the 2) (center in zone of n * m).
Ring eccentric type Hartmann shark wavefront sensor among the embodiment, the sub-lens (3) of its microlens array (1) is arranged by 20 of outer shrouds, and 16 on interior ring is arranged, and each sub-aperture has 4 * 4 pixels on ccd detector (2) target surface.
When ring-shaped light spot incided the ring eccentric type Hartmann wave front sensor, wavefront was divided into the zonule of almost plane by microlens array (1).Converge on the pixel (4) of corresponding C CD detector (2) target surface separately through sub-lens (3) respectively before these wavelets, form spot array.The center of hot spot (xi, yi) calculate by following formula:
1. in the formula, I
N, mBe coordinate (x on ccd detector (2) target surface
i, y
j) the light intensity gray-scale value located, x
i, y
jBe respectively pixel (4) at x, the coordinate of y direction.Wherein (n, m), m=1～M, n=1～N are that sub-lens (3) is mapped to pixel corresponding on the target surface of ccd detector (2), I to pixel 4
NmBe (n, m) the spot intensity value of individual pixel output.
The position that can calculate all hot spots by 1. formula, then, according to 2. formula:
Obtain wavefront slope g
Xi, g
Yi, realize the detecting function of Hartmann wave front sensor to distorted wavefront.
Claims (3)
1. a ring eccentric type Hartmann shark wavefront sensor that is made of microlens array (1), ccd detector (2), sub-lens (3) is characterized in that: arranged by annular by the microlens array (1) that a plurality of sub-lens (3) are formed; Each sub-lens (3) is mapped on ccd detector (2) target surface corresponding pixel (4) and is (n * m); Optical axis (5) position of each sub-lens (3) is not to determine with the geometric center of sub-lens, (centralized positioning in the zone of n * m), promptly the optical axis (5) of sub-lens (3) is positioned at (center in zone of n * m) of respective pixel (4) on ccd detector (2) target surface but be mapped to respective pixel (4) on ccd detector (2) target surface with each sub-lens (3).
2. ring eccentric type Hartmann shark wavefront sensor according to claim 1, it is characterized in that: each sub-lens (3) of microlens array (1) is mapped on ccd detector (2) target surface corresponding pixel (4) zone (n * m), n=1～N, m=1～M, must satisfy min (N * M) ≮ (2 * 2), min (N, M) 〉=2.
3. according to claim 1 and 2 described ring eccentric type Hartmann shark wavefront sensors, it is characterized in that: microlens array (1) can be a centering type binary optical micro fresnel lens array, also can be centering type continuous surface microlens array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01136993 CN1267709C (en) | 2001-12-27 | 2001-12-27 | Annular eccentric Hartmann shack wavefront sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01136993 CN1267709C (en) | 2001-12-27 | 2001-12-27 | Annular eccentric Hartmann shack wavefront sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1428597A true CN1428597A (en) | 2003-07-09 |
| CN1267709C CN1267709C (en) | 2006-08-02 |
Family
ID=4674067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01136993 Expired - Fee Related CN1267709C (en) | 2001-12-27 | 2001-12-27 | Annular eccentric Hartmann shack wavefront sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1267709C (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292910A (en) * | 2012-02-29 | 2013-09-11 | 深圳光启创新技术有限公司 | Hartmann wave-front sensor based on metamaterials |
| CN107615020A (en) * | 2015-05-22 | 2018-01-19 | 西默有限公司 | The spectral signature of pulsed light beam measures |
| CN111863846A (en) * | 2020-07-23 | 2020-10-30 | 湖南正芯微电子探测器有限公司 | Fan-shaped alternating silicon pixel detector |
| CN112484864A (en) * | 2020-11-20 | 2021-03-12 | 中国科学院光电技术研究所 | Polarization modulation Hartmann-shack wavefront detection device |
| WO2022042581A1 (en) * | 2020-08-26 | 2022-03-03 | 华为技术有限公司 | Tap pd and optical fiber communication system |
| CN114323310A (en) * | 2021-12-28 | 2022-04-12 | 中国科学院光电技术研究所 | High-resolution Hartmann wavefront sensor |
| CN114424040A (en) * | 2019-09-24 | 2022-04-29 | 光科精密有限公司 | Combined detector for detecting visual and optical properties of an optical device and associated inspection apparatus for an optical device |
| CN117232785A (en) * | 2023-08-18 | 2023-12-15 | 青岛芯微半导体科技有限公司 | Device for improving optical wavefront error detection precision with controllable sub-optical path channel switch |
-
2001
- 2001-12-27 CN CN 01136993 patent/CN1267709C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292910B (en) * | 2012-02-29 | 2017-05-24 | 深圳光启高等理工研究院 | Hartmann wave-front sensor based on metamaterials |
| CN103292910A (en) * | 2012-02-29 | 2013-09-11 | 深圳光启创新技术有限公司 | Hartmann wave-front sensor based on metamaterials |
| CN107615020A (en) * | 2015-05-22 | 2018-01-19 | 西默有限公司 | The spectral signature of pulsed light beam measures |
| CN114424040A (en) * | 2019-09-24 | 2022-04-29 | 光科精密有限公司 | Combined detector for detecting visual and optical properties of an optical device and associated inspection apparatus for an optical device |
| US12085472B2 (en) | 2019-09-24 | 2024-09-10 | Optocraft Gmbh | Combination detector for detecting visual and optical properties of an optical system and associated testing apparatus for an optical system |
| CN111863846B (en) * | 2020-07-23 | 2024-05-28 | 湖南脉探芯半导体科技有限公司 | Fan-shaped alternating silicon pixel detector |
| CN111863846A (en) * | 2020-07-23 | 2020-10-30 | 湖南正芯微电子探测器有限公司 | Fan-shaped alternating silicon pixel detector |
| WO2022042581A1 (en) * | 2020-08-26 | 2022-03-03 | 华为技术有限公司 | Tap pd and optical fiber communication system |
| CN112484864A (en) * | 2020-11-20 | 2021-03-12 | 中国科学院光电技术研究所 | Polarization modulation Hartmann-shack wavefront detection device |
| CN112484864B (en) * | 2020-11-20 | 2022-07-19 | 中国科学院光电技术研究所 | Polarization modulation Hartmann-shack wavefront detection device |
| CN114323310A (en) * | 2021-12-28 | 2022-04-12 | 中国科学院光电技术研究所 | High-resolution Hartmann wavefront sensor |
| CN114323310B (en) * | 2021-12-28 | 2023-05-26 | 中国科学院光电技术研究所 | High-resolution Hartmann wavefront sensor |
| CN117232785A (en) * | 2023-08-18 | 2023-12-15 | 青岛芯微半导体科技有限公司 | Device for improving optical wavefront error detection precision with controllable sub-optical path channel switch |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1267709C (en) | 2006-08-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102252832B (en) | Wavefront quality detection device and method for large-aperture collimation system | |
| US8158917B2 (en) | Optical wavefront sensor and optical wavefront sensing method | |
| US5287165A (en) | High sensitivity-wide dynamic range optical tilt sensor | |
| CN101261161A (en) | Hartmann wavefront sensor with large dynamic range and testing method thereof | |
| CN1189774C (en) | Optical Wavefront Sensor | |
| CN109520625B (en) | Wavefront sensor | |
| CN106052585A (en) | Surface shape detection device and detection method | |
| CN102914373A (en) | Hartmann wave-front sensor based on micro-cylindrical lens array | |
| CN1267709C (en) | Annular eccentric Hartmann shack wavefront sensor | |
| CN114323310B (en) | High-resolution Hartmann wavefront sensor | |
| CN112180583B (en) | Self-adaptive optical system based on all-optical neural network | |
| CN114186664B (en) | Mode wavefront restoration method based on neural network | |
| CN102879110A (en) | Adaptive optical system based on modulation and non-modulation combined pyramid wave-front sensor | |
| US12085510B2 (en) | Device for wavefront analysis and microscopic imaging systems comprising such analysis devices | |
| JP2863874B2 (en) | Particle size distribution analyzer | |
| CN101907490B (en) | Method for measuring small facula intensity distribution based on two-dimension subdivision method | |
| CN110455418B (en) | Super-structure lens array and method for correcting non-uniformity of infrared detector | |
| CN100562723C (en) | Aberration detection system in positive-branch confocal unstable cavity | |
| CN105466576A (en) | Device and method for synchronously measuring height and angle non-isohalo wavefront errors of atmospheric turbulence | |
| CN101285712A (en) | Linear phase inversion wavefront sensor based on discrete light intensity measuring device | |
| CN108088371B (en) | Photoelectric detector position layout for large displacement monitoring | |
| CN210893429U (en) | Defocusing type light field camera wavefront sensor | |
| CN101285713A (en) | Continuous zooming Hartmann sensor calibrated by utilizing parallel light source | |
| EP0298588A1 (en) | Shadow detecting optical micrometer | |
| CN106052885A (en) | Wave-front sensor and wave-front aberration detection method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |