CN1428597A - Ring eccentric type Hartmann shark wavefront sensor - Google Patents
Ring eccentric type Hartmann shark wavefront sensor Download PDFInfo
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- CN1428597A CN1428597A CN 01136993 CN01136993A CN1428597A CN 1428597 A CN1428597 A CN 1428597A CN 01136993 CN01136993 CN 01136993 CN 01136993 A CN01136993 A CN 01136993A CN 1428597 A CN1428597 A CN 1428597A
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Abstract
The ringlike eccentric Hartmann-Xiake wavefront sensor belongs to a dynamic detection element of optical system, and it can be used for making complete wavefront measurement of circular and ring facula. Said wavefront sensor includes ringlike eccentric microlens array and CCD detector, and every sublens of microlens array can be mapped on the target surface of CCD detector, and the pixel contained in the correspondent pixel zone is not less than 2X2, and the optical axle center position of subaperture is positioned in the centre of pixel zone. Said invention can be used in the adaptive optical system, can make complete wavefront measurement for common ringlike facula, can easily obtain wavefront error.
Description
Technical field
The present invention relates to a kind of Hartmann shark wavefront sensor, belong to the dynamic instrumentation element of optical system.
Hartmann shark wavefront sensor is based on improved Hartmann's method of testing.Hartmann shark wavefront sensor adopts the aperture segmentation element that incident wavefront is divided into sub-aperture, and is converged to sub-hot spot, and sub-hot spot images in the ccd detector target surface; By computing machine the signal of ccd detector is handled, obtained the corrugated error signal of incident wavefront.Hartmann shark wavefront sensor has the advantage that other Wavefront sensors such as wavefront error is obtained conveniently, speed is fast, the applicable wavelengths scope is big can not be compared, the dynamic Wavefront detecting element of Chang Zuowei ADAPTIVE OPTICS SYSTEMS.
Background technology
Existing Hartmann wave front sensor adopts microlens array-ccd detector structure usually." the high resolving power wavefront control: method of SPIE's publication in 2000, device and use II " " measure ICF amplifier laser wave with the Hartmann shark wave front detector before " (" Laserwave-front measurement of ICF amplifiers using Hartmann-Shack wave-frontsensor " 148 High-resolution Wavefront Control:Methods of the 148th page of SPIE collected works 4124 volume, Devices, andApplications II/Proceedings of SPIE/Vol.4124) the disclosed a kind of Hartmann wave front sensor of a literary composition, constitute by microlens array and ccd detector, the sub-aperture of microlens array is a square, and the optical axis position is positioned at square center.The advantage of this sensor is that imaging facula is arranged on the CCD image planes regular, is convenient to the computing of ccd detector output data; But, because the Hartmann shark wavefront sensor that is made of this microlens array can not perfect measurement to common circle, ring-shaped light spot marginal portion wavefront, influenced the measuring accuracy of Hartmann shark detector to the wavefront error of above-mentioned light beam, particularly annular beam.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide a kind of and promptly can measure fully, keep existing hartmann shack sensor ccd detector output data to be convenient to the ring eccentric type Hartmann shark wavefront sensor of computing again ring-shaped light spot.
Purpose of the present invention can realize by following technical measures: arranged by annular by the microlens array (1) that a plurality of sub-lens (3) are formed; Each sub-lens (3) is mapped on ccd detector (2) target surface corresponding pixel (4) and is (n * m); Optical axis (5) position of each sub-lens (3) is not to determine with the geometric center of sub-lens, (centralized positioning in the zone of n * m), promptly the optical axis (5) of sub-lens (3) is positioned at (center in zone of n * m) of respective pixel (4) on ccd detector (2) target surface but be mapped to respective pixel (4) on ccd detector (2) target surface with each sub-lens (3).
Purpose of the present invention also can realize by following technical measures: each sub-lens (3) of microlens array (1) is mapped to pixel (4) zone corresponding on ccd detector (2) target surface (n * m), n=1～N, m=1～M must satisfy min (N * M) ≮ (2 * 2), min (N, M) 〉=2.
Purpose of the present invention also can realize by following technical measures: microlens array (1) can be a centering type binary optical micro fresnel lens array, also can be centering type continuous surface microlens array.
The present invention compared with prior art has following advantage: ring eccentric type Hartmann shark wavefront sensor disclosed in this invention, the sub-aperture of microlens array is arranged into annular, the optical axis position in each sub-aperture determine that (n * m) center in zone is as the criterion to be mapped to respective pixel on the ccd detector target surface, it is the pixel (center in the zone of n * m), guaranteed that hartmann shack sensor promptly can the common ring-shaped light spot wavefront of perfect measurement, inherited prior art again and the ccd detector output data has been convenient to the advantage of computing, improved the detection accuracy of hartmann shack sensor, can be used for ADAPTIVE OPTICS SYSTEMS ring-shaped light spot.
Description of drawings:
Fig. 1 is an embodiment of the invention ring eccentric type microlens array annular layout synoptic diagram.1 is microlens array, and 3 is sub-lens.
Fig. 2 is the (synoptic diagram of arranging in the zone of n * m) of sub-aperture respective pixel on the embodiment of the invention ccd detector target surface.2 is ccd detector.
Fig. 3 is embodiment of the invention ring eccentric type microlens array layout and ccd detector respective pixel zone contraposition synoptic diagram.3 is sub-lens, and 4 is pixel corresponding on the target surface, and 5 is optical axis.
Embodiment
As shown in Figure 1 and Figure 2, the ring eccentric type Hartmann shark wavefront sensor of the embodiment of the invention, comprise binary optical micro fresnel lens array (1) and ccd detector (2), ring eccentric type microlens array layout and ccd detector respective pixel zone contraposition relation are as Fig. 3.
Microlens array (1) is made up of 36 centering type binary optical Fresnel sub-lens (3).Sub-lens (3) is divided into a plurality of sub-apertures with tested aperture.The corresponding sub-aperture of each sub-lens (3).Each sub-lens 3 be mapped to pixel (4) corresponding on the target surface of ccd detector 2 (n * m), n=1～N, m=1～M, must satisfy min (N * M) ≮ (2 * 2), min (N, M) 〉=2.Optical axis (5) position of each sub-lens (3) all is positioned at pixel corresponding on the target surface of ccd detector (the 2) (center in zone of n * m).
Ring eccentric type Hartmann shark wavefront sensor among the embodiment, the sub-lens (3) of its microlens array (1) is arranged by 20 of outer shrouds, and 16 on interior ring is arranged, and each sub-aperture has 4 * 4 pixels on ccd detector (2) target surface.
When ring-shaped light spot incided the ring eccentric type Hartmann wave front sensor, wavefront was divided into the zonule of almost plane by microlens array (1).Converge on the pixel (4) of corresponding C CD detector (2) target surface separately through sub-lens (3) respectively before these wavelets, form spot array.The center of hot spot (xi, yi) calculate by following formula:
1. in the formula, I
N, mBe coordinate (x on ccd detector (2) target surface
i, y
j) the light intensity gray-scale value located, x
i, y
jBe respectively pixel (4) at x, the coordinate of y direction.Wherein (n, m), m=1～M, n=1～N are that sub-lens (3) is mapped to pixel corresponding on the target surface of ccd detector (2), I to pixel 4
NmBe (n, m) the spot intensity value of individual pixel output.
The position that can calculate all hot spots by 1. formula, then, according to 2. formula:
Obtain wavefront slope g
Xi, g
Yi, realize the detecting function of Hartmann wave front sensor to distorted wavefront.
Claims (3)
1. a ring eccentric type Hartmann shark wavefront sensor that is made of microlens array (1), ccd detector (2), sub-lens (3) is characterized in that: arranged by annular by the microlens array (1) that a plurality of sub-lens (3) are formed; Each sub-lens (3) is mapped on ccd detector (2) target surface corresponding pixel (4) and is (n * m); Optical axis (5) position of each sub-lens (3) is not to determine with the geometric center of sub-lens, (centralized positioning in the zone of n * m), promptly the optical axis (5) of sub-lens (3) is positioned at (center in zone of n * m) of respective pixel (4) on ccd detector (2) target surface but be mapped to respective pixel (4) on ccd detector (2) target surface with each sub-lens (3).
2. ring eccentric type Hartmann shark wavefront sensor according to claim 1, it is characterized in that: each sub-lens (3) of microlens array (1) is mapped on ccd detector (2) target surface corresponding pixel (4) zone (n * m), n=1～N, m=1～M, must satisfy min (N * M) ≮ (2 * 2), min (N, M) 〉=2.
3. according to claim 1 and 2 described ring eccentric type Hartmann shark wavefront sensors, it is characterized in that: microlens array (1) can be a centering type binary optical micro fresnel lens array, also can be centering type continuous surface microlens array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01136993 CN1267709C (en) | 2001-12-27 | 2001-12-27 | Ring eccentric type Hartmann shark wavefront sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01136993 CN1267709C (en) | 2001-12-27 | 2001-12-27 | Ring eccentric type Hartmann shark wavefront sensor |
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| CN1428597A true CN1428597A (en) | 2003-07-09 |
| CN1267709C CN1267709C (en) | 2006-08-02 |
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| CN 01136993 Expired - Fee Related CN1267709C (en) | 2001-12-27 | 2001-12-27 | Ring eccentric type Hartmann shark wavefront sensor |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292910A (en) * | 2012-02-29 | 2013-09-11 | 深圳光启创新技术有限公司 | Hartmann wave-front sensor based on metamaterials |
| CN107615020A (en) * | 2015-05-22 | 2018-01-19 | 西默有限公司 | The spectral signature of pulsed light beam measures |
| CN111863846A (en) * | 2020-07-23 | 2020-10-30 | 湖南正芯微电子探测器有限公司 | Fan-shaped alternating silicon pixel detector |
| CN112484864A (en) * | 2020-11-20 | 2021-03-12 | 中国科学院光电技术研究所 | Polarization modulation Hartmann-shack wavefront detection device |
| WO2022042581A1 (en) * | 2020-08-26 | 2022-03-03 | 华为技术有限公司 | Tap pd and optical fiber communication system |
| CN114323310A (en) * | 2021-12-28 | 2022-04-12 | 中国科学院光电技术研究所 | High-resolution Hartmann wavefront sensor |
| CN114424040A (en) * | 2019-09-24 | 2022-04-29 | 光科精密有限公司 | Combined detector for detecting visual and optical properties of an optical device and associated inspection apparatus for an optical device |
| CN117232785A (en) * | 2023-08-18 | 2023-12-15 | 青岛芯微半导体科技有限公司 | Device for improving optical wavefront error detection precision with controllable sub-optical path channel switch |
-
2001
- 2001-12-27 CN CN 01136993 patent/CN1267709C/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292910A (en) * | 2012-02-29 | 2013-09-11 | 深圳光启创新技术有限公司 | Hartmann wave-front sensor based on metamaterials |
| CN103292910B (en) * | 2012-02-29 | 2017-05-24 | 深圳光启高等理工研究院 | Hartmann wave-front sensor based on metamaterials |
| CN107615020A (en) * | 2015-05-22 | 2018-01-19 | 西默有限公司 | The spectral signature of pulsed light beam measures |
| CN114424040A (en) * | 2019-09-24 | 2022-04-29 | 光科精密有限公司 | Combined detector for detecting visual and optical properties of an optical device and associated inspection apparatus for an optical device |
| CN111863846A (en) * | 2020-07-23 | 2020-10-30 | 湖南正芯微电子探测器有限公司 | Fan-shaped alternating silicon pixel detector |
| CN111863846B (en) * | 2020-07-23 | 2024-05-28 | 湖南脉探芯半导体科技有限公司 | Fan-shaped alternating silicon pixel detector |
| WO2022042581A1 (en) * | 2020-08-26 | 2022-03-03 | 华为技术有限公司 | Tap pd and optical fiber communication system |
| CN112484864A (en) * | 2020-11-20 | 2021-03-12 | 中国科学院光电技术研究所 | Polarization modulation Hartmann-shack wavefront detection device |
| CN112484864B (en) * | 2020-11-20 | 2022-07-19 | 中国科学院光电技术研究所 | Polarization modulation Hartmann-shack wavefront detection device |
| CN114323310A (en) * | 2021-12-28 | 2022-04-12 | 中国科学院光电技术研究所 | High-resolution Hartmann wavefront sensor |
| CN114323310B (en) * | 2021-12-28 | 2023-05-26 | 中国科学院光电技术研究所 | High-resolution Hartmann wavefront sensor |
| CN117232785A (en) * | 2023-08-18 | 2023-12-15 | 青岛芯微半导体科技有限公司 | Device for improving optical wavefront error detection precision with controllable sub-optical path channel switch |
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| Publication number | Publication date |
|---|---|
| CN1267709C (en) | 2006-08-02 |
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