CN114323310A - High-resolution Hartmann wavefront sensor - Google Patents
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Abstract
The invention discloses a high-resolution Hartmann wavefront sensor, wherein the number of pixels of an image sensor corresponding to a single sub-aperture is set to be 4 pixels in a 2 multiplied by 2 array, and the sub-aperture sampling spatial resolution of the Hartmann wavefront sensor finally reaches a double-pixel level through the optimization design of the focal length of a micro lens, and the measurement precision is kept. The invention solves the key problems of low pixel utilization rate and redundant image data of the image sensor in the traditional Hartmann wavefront sensor technical scheme, increases the pixel utilization rate to nearly one hundred percent, simultaneously increases the spatial resolution of the Hartmann wavefront sensor to a near pixel level, and reduces the pixel demand and the image data quantity of the Hartmann wavefront sensor by more than one order of magnitude under the same spatial resolution, thereby providing a feasible technical scheme for developing the Hartmann wavefront sensor with ultrahigh spatial resolution, and in addition, the extremely few pixel demands can also be used for developing the ultrahigh-speed Hartmann wavefront sensor.
Description
Technical Field
The invention belongs to the technical field of optical engineering, relates to a device for detecting wave front distortion of a light beam, and particularly relates to a high-resolution Hartmann wavefront sensor.
Background
The Hartmann wavefront sensor is a widely applied light beam wavefront distortion measuring device, and has the advantages of simple structure, high speed, high precision, good environmental adaptability and the like, so that the Hartmann wavefront sensor is continuously and successfully applied to the fields of adaptive optics, optical detection, flow field measurement and the like.
A typical hartmann wavefront sensor structure can be referred to an optical wavefront sensor disclosed in chinese patent application publication (application No. 98112210.8, publication No. CN1245904), and its implementation mainly adopts a wavefront division sampling array element such as a microlens array to perform sub-aperture division on a wavefront, and applies a processing method similar to mathematical calculus to wavefront measurement, so that only the magnitude of the oblique aberration in each sub-aperture needs to be measured, and the wavefront aberration of the entire aperture can be recovered by a specific recovery algorithm. Whereas the oblique aberration component in the sub-aperture is determined from the centroid shift of the far-field spots obtained by focusing the light waves through the microlens, a hartmann wavefront sensor typically uses an array-type image sensor (such as a CCD or CMOS camera) to detect the array of spots formed on the focal plane of the microlens array.
According to the detection principle, the detection spatial resolution of the Hartmann wavefront sensor is limited by the segmentation density of the micro-lens array, and pixels for defining a certain area for each sub-light spot on the image sensor are used as sub-apertures. Under the limitation, the spatial resolution of the Hartmann wavefront sensor is difficult to reach a near pixel level, and the image sensor needs to have a certain pixel resolution for imaging of the whole sub-light spot array. Therefore, the Hartmann wavefront sensor has higher pixel resolution requirement on the image sensor, but has lower utilization rate, and the actual measurement speed is severely limited by massive high-resolution image data during the ultra-high-speed wavefront detection scene.
Aiming at the problems of spatial resolution and pixel utilization rate of Hartmann wavefront sensor, in 1996, Ragazzoni first proposed a Pyramid (Pyramid) wavefront sensing technology concept (Ragazzoni R.Pupil plan wavefront sensing with an oscillomining prism [ J ]. J.Mod.Opt.,1996,43: 289-293). The sensor takes the rectangular pyramid as a two-dimensional beam splitting prism, realizes pupil division and imaging of incident beams by matching with a lens group, divides four-quadrant regions on a detector to respectively detect wavefront slopes of different pupil apertures, further completes wavefront detection, and has the advantages of large dynamic range of wavefront measurement, high sensitivity, flexible sampling division mode and the like. Theoretically, each wave-front slope sampling point of the rectangular pyramid sensor only needs four pixels, and high-resolution wave-front detection can be realized. However, the rectangular pyramid wavefront sensor still has the problems of beam focusing position control, high-precision processing requirements on edges and vertex angles of the rectangular pyramid, fitting model solving and the like, so that the wide application of the rectangular pyramid wavefront sensor is limited.
With the continuous extension of the application field, the demand on the high-performance wavefront sensor is increasingly strong, and the novel wavefront sensor technology with high spatial resolution, high pixel utilization rate, light energy utilization rate and high-speed detection potential has better application prospect.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the method overcomes the defects of the existing Hartmann wavefront sensor in the aspects of resolution and pixel utilization rate, and improves the spatial resolution of the Hartmann wavefront sensor to 2 pixel size levels by the corresponding design of specific sub-apertures and pixels and the selection of the focal length of a micro-lens array, and the pixel utilization rate almost reaches one hundred percent.
The technical scheme adopted by the invention for solving the technical problems is as follows: a high resolution Hartmann wavefront sensor is mainly composed of a micro lens array and an array type image sensor, wherein the micro lens array covers the upper part of a photosensitive chip of the array type image sensor, an incident light beam to be measured is divided into a sub-aperture array, namely a thin light beam array, and is focused, the photosensitive chip of the array type image sensor is arranged below the micro lens array, the distance between the micro lens array and the photosensitive chip is the focal length of the micro lens array,the micro-lens array is used for detecting the intensity distribution information of a light beam to be detected which is divided and focused by the micro-lens array, each sub-aperture only corresponds to 4 image sensor pixels which are arranged by 2 multiplied by 2, the central distance of the pixel area corresponding to the adjacent sub-apertures is 2 times of the size of a single pixel, and the focal length f range of the micro-lens array is Lp 2/λ≤f≤4Lp 2Lambda, wherein LpAnd (3) obtaining the focusing light spot centroid data of the beamlets corresponding to the current sub-apertures according to the light intensity signal value of the 2 multiplied by 2 arrayed pixels corresponding to each sub-aperture, wherein the width size of the pixel is lambda is the wavelength of the detection light beam:
wherein, I1、I2、I3、I4And the gray values of the pixels at the upper left, the upper right, the lower left and the lower right in the pixels of the 2 multiplied by 2 arranged image sensor respectively, the centroid data of the light spots in each sub-aperture is calculated according to the centroid calculation formula, and finally the wavefront distortion information of the whole light beam to be detected can be reconstructed by utilizing a Hartmann wavefront sensor wavefront restoration algorithm based on the centroid data of the light spots of all effective sub-apertures.
Further, the array type image sensor has photosensitive pixels arranged in a two-dimensional array, and may be a CCD sensor camera, a CMOS sensor camera, a PDA detector, or the like.
Furthermore, the 2 × 2 array may be 4 image sensor pixels, which may be a single physical pixel of the image sensor, or a single numerical pixel in an output image of the image sensor after the image sensor is subjected to a pixel merging function, where the size of the single numerical pixel is an integer multiple of the size of the single physical pixel of the image sensor.
Further, the effective sub-aperture refers to a sub-aperture where the corresponding spot centroid data participates in the wavefront recovery calculation, and may be a sub-aperture completely covered by the incident light beam or a sub-aperture partially covered by the incident light beam.
Compared with the prior art, the invention has the following advantages: the method only needs 4 pixels of 2 multiplied by 2 for detecting each sub-aperture, and can segment more sub-aperture arrays and realize higher wavefront sampling resolution compared with the prior art under the same pixel resolution of the image sensor; secondly, a single sub-aperture only needs 4 pixels, under the same sub-aperture array number, the number of pixels of an image sensor required for realizing wavefront detection can be reduced by more than at least one order of magnitude compared with the prior art, and the image pixel number compression is important for realizing real-time high-speed wavefront measurement; finally, through specific focal length design, 4 pixels corresponding to each sub-aperture of the invention have effective light intensity information, so that the image sensor pixels used for wavefront detection of the invention theoretically have light intensity data, the pixel utilization rate can reach one hundred percent, and the improvement is at least 2 times compared with the prior art. Therefore, the method can realize the wave-front detection with extremely high resolution and extremely high pixel utilization rate of the image sensor theoretically, has the technical potential of extremely high-speed wave-front detection, and has important application value in high-performance wave-front detection scenes. The invention takes every 2 x 2 pixels on the image sensor as the position sensor, changes the image sensor into a large-scale position sensor array, and the application mode is an innovation for the image sensor.
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FIG. 1 is a schematic block diagram of a high resolution Hartmann wavefront sensor of the present invention;
FIG. 2 is a diagram illustrating a sub-aperture segmentation design of a high and medium resolution Hartmann wavefront sensor according to an embodiment of the present invention;
FIG. 3 is a diagram illustrating a randomly generated distorted wavefront distribution according to one embodiment of the present invention;
FIG. 4 is a diagram of a spot image on a parallel cursor timing image sensor of a medium-high resolution Hartmann wavefront sensor in accordance with an embodiment of the present invention;
FIG. 5 is an image of a spot on an image sensor of a high resolution Hartmann wavefront sensor with distorted wavefront beam incidence according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of the aberration mode coefficients (white bar data) of the restored wavefront 23 th order measured by the Hartmann wavefront sensor with medium and high resolution and the aberration mode coefficients (black bar data) constituting the input wavefront according to the first embodiment of the present invention;
FIG. 7 is a schematic diagram of a reconstructed wavefront of a Hartmann wavefront sensor with medium and high resolution according to an embodiment of the present invention;
FIG. 8 is a diagram illustrating an error wavefront between a recovered wavefront and an input wavefront for a wavefront sensor according to an embodiment of the present invention.
Detailed Description
The invention is further illustrated by the following figures and examples.
Fig. 1 is a schematic diagram of a high-resolution hartmann wavefront sensor according to the present invention, in which sub-apertures of a microlens array of a light beam to be measured are divided and then focused on a photo-sensitive chip of an image sensor to form a light spot array, and each microlens or sub-aperture corresponds to 2 × 2 pixel regions on the photo-sensitive chip of the image sensor. Fig. 2 shows a sub-aperture division diagram of a high-resolution hartmann wavefront sensor designed according to an embodiment of the present invention, where the wavelength λ of an input light beam to be measured is set to 635nm, the pupil is circular, and the wavefront sensor adopts 12 × 12 aperture division (grid lines in the diagram). For convenience of calculation, the sub-aperture which is completely covered by the light beam and is filled with light energy is selected as an effective sub-aperture, and the effective sub-aperture is represented by a solid line grid in the figure; and the sub-aperture of the dotted line grid part is set as an invalid sub-aperture and does not participate in the wave front restoration calculation. The top right sub-figure in fig. 2 gives an illustration of each sub-aperture corresponding to 2 x 2 pixels of the image sensor, the image sensor pixel size L p14 μm, directly corresponding to each microlens and sub-aperture size of 28 μm x 28 μm, 2 times the size of a single physical pixel, and a microlens array focal length f at Lp 2/λ≤f≤4Lp 2The value of/lambda is 1.5L in the required rangep 2And/lambda, about 926. mu.m. Under the 12 × 12 sub-aperture division, the pixel resolution required for completely sampling the image information of the optical spot array is 28 × 28, and it can be seen that the wavefront sensor of the first embodiment has very little requirement on the pixel resources of the image sensor.
To test the aberration measurement capability of a high resolution Hartmann wavefront sensor of an embodiment, the wavefront distortion of an input beam is formed by adopting a front 23-order Zernike aberration mode, and the coefficients of the 23-order Zernike aberration mode areRandomly generated, distributed to satisfy the Colombounoff turbulence model, generated random wavefronts as shown in FIG. 3, with a PV value of 2.8874 λ and an RMS value of 0.4861 λ. The light spot image on the high-resolution Hartmann wavefront sensor parallel cursor timing image sensor is shown in fig. 4, the light spot array image is greatly different from the light spot array image of the conventional Hartmann wavefront sensor, no independent sub-light spot image exists, each pixel in a pupil area has data, and the high pixel utilization rate of the high-resolution Hartmann wavefront sensor is shown. Under the calibration state, the initial x and y direction mass center position x of the light spot in each sub-aperturecali、ycaliCan be obtained by the following formula:
wherein,
respectively representing the gray values of the pixels at the upper left, the upper right, the lower left and the lower right in the pixels of the 2 multiplied by 2 arranged image sensor corresponding to a single sub-aperture under the calibration state.
The invention only relates to a new method for realizing high resolution of the wavefront slope, and has no special requirement on the mathematical process of reconstructing the wavefront after obtaining the wavefront slope information, so the invention can be adapted to various Hartmann wavefront sensor wavefront reconstruction algorithms. In the embodiment, the Hartmann wavefront sensor adopts a mode method to restore wavefront, and a restoration matrix of aberration mode coefficients can be calculated according to the centroid shift or slope data of light spots in sub-apertures and a classical mode method according to the division arrangement of the sub-apertures and a set 23-order Zernike aberration mode, and the matrix can be generated in advance as system configuration.
In the first embodiment, with the input of the wavefront distortion light beam to be measured, as shown in fig. 5, the light spot image on the image sensor of the high-resolution hartmann wavefront sensor has obvious pixel information change compared with that during calibration. The centroid position x in the x direction and the y direction in each sub-aperture under the input of the wavefront distortion light beam to be detected is contained in the light spot imagec、ycCan be composed ofThe centroid calculation formula of (a) yields:
wherein, I1、I2、I3、I4Representing the pixel gray values of the top left, top right, bottom left and bottom right of the 2 x 2 arranged image sensor pixels, respectively. X of light spot in each sub-aperturec、ycInitial position x corresponding to calibrationcali、ycaliAnd subtracting to obtain the spot centroid shift or wavefront slope data in each sub-aperture under the input of the wavefront distortion to be detected. And finally, calculating the Zernike aberration mode coefficient component of the input wavefront distortion by using a Hartmann wavefront sensor mode restoration algorithm and a restoration matrix based on the spot centroid offset data in all the effective sub-apertures, as shown in FIG. 6. The aberration mode coefficients (white bar data) of 23 th order measured by the wavefront sensor in fig. 6 are well matched with the aberration mode coefficients (black bar data) of the input wavefront, which shows that the hartmann wavefront sensor with medium and high resolution in the first embodiment accurately measures the input aberration components. Further, the restored aberration mode coefficients are used to reconstruct the wavefront distortion information of the whole measured light beam, as shown in fig. 7. The magnitude, distribution of the recovered wavefront in fig. 7 is highly consistent with the input wavefront, with PV and RMS values matching up to 99% and 98%. The error wavefront between the recovered wavefront and the input wavefront is shown in fig. 8, with the PV and RMS values of the error wavefront being only 0.08 λ and 0.0122 λ, respectively, again demonstrating that the wavefront sensor accurately recovered the distribution of the input wavefront aberrations. The first embodiment shows that the proposed high-resolution Hartmann wavefront sensor can realize accurate restoration of wavefront distortion under the condition that each sub-aperture only corresponds to 4 pixels, namely 2 × 2, the size of the sub-aperture is 2 times of the size of a physical pixel, and the spatial resolution of the Hartmann wavefront sensor is improved to a double-pixel level.
The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can understand that the modifications or substitutions within the technical scope of the present invention are included in the scope of the present invention.
Claims (4)
1. A high resolution hartmann wavefront sensor, characterized by: the micro-lens array covers the photosensitive chip of the array type image sensor, divides the incident light beam to be detected into a sub-aperture array, namely a thin light beam array, and focuses the light beam, the photosensitive chip of the array type image sensor is arranged below the micro-lens array, the distance between the two is the focal length of the micro-lens array and is used for detecting the intensity distribution information of the light beam to be detected which is divided and focused by the micro-lens array, each sub-aperture only corresponds to 4 image sensor pixels which are arranged by 2 multiplied by 2, the central distance between the pixel areas corresponding to the adjacent sub-apertures is 2 times of the size of a single pixel, and the focal length f of the micro-lens array is L rangep 2/λ≤f≤4Lp 2Lambda, wherein LpAnd (3) obtaining the focusing light spot centroid data of the beamlets corresponding to the current sub-apertures according to the light intensity signal value of the 2 multiplied by 2 arrayed pixels corresponding to each sub-aperture, wherein the width size of the pixel is lambda is the wavelength of the detection light beam:
wherein, I1、I2、I3、I4Respectively representing pixel gray values of the upper left, the upper right, the lower left and the lower right in the pixels of the 2 multiplied by 2 arranged image sensor, calculating the centroid data of the light spots in each sub-aperture according to the centroid calculation formula, and finally reconstructing the wavefront distortion information of the whole light beam to be detected by using a conventional Hartmann wavefront sensor wavefront restoration algorithm based on the centroid data of the light spots of all effective sub-apertures.
2. The high resolution hartmann wavefront sensor of claim 1, wherein: the array type image sensor has photosensitive pixels arranged in a two-dimensional array, and can be a CCD sensor camera, a CMOS sensor camera and a PDA detector.
3. The high resolution hartmann wavefront sensor of claim 1, wherein: the 2 × 2 arrangement of the pixels of the 4 image sensors may be a single physical pixel of the image sensor, or a single numerical pixel in an output image of the image sensor after a pixel merging function, where the size of the single numerical pixel is an integral multiple of the size of the single physical pixel of the sensor.
4. The high resolution hartmann wavefront sensor of claim 1, wherein: the effective sub-aperture refers to a sub-aperture of which the corresponding spot centroid data participates in the wavefront recovery calculation, and can be a sub-aperture completely covered by an incident light beam or a sub-aperture partially covered by the incident light beam.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114964522A (en) * | 2022-05-31 | 2022-08-30 | 中国科学院光电技术研究所 | Hartmann wavefront restoration method based on pupil mapping model |
| CN115031856A (en) * | 2022-06-08 | 2022-09-09 | 中国科学院光电技术研究所 | Sub-light spot screening-based wavefront restoration method for shack-Hartmann wavefront sensor |
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