CN1411420A

CN1411420A - Robots for microelectronic workpiece handling

Info

Publication number: CN1411420A
Application number: CN99810360A
Authority: CN
Inventors: 韦恩·J·施密特; 托马斯·H·奥伯里特纳
Original assignee: Semitool Inc
Current assignee: Semitool Inc
Priority date: 1998-07-11
Filing date: 1999-07-09
Publication date: 2003-04-16
Also published as: JP2003527737A; TW496848B; WO2000002808A1; EP1112220A1; KR20010074695A

Abstract

An improved conveyor system (20) for transporting a microelectronic workpiece (w) within a processing tool (14, 16) is set forth. The conveyor system (20) includes a transport unit (30, 32) slidably guided on a conveyor rail (26) for transporting and manipulating the workpiece (w). The transport unit (30, 32) includes a vertical member (220) which is connected to a base end of a two section robot arm (100). The robot arm (100) includes an end effector (108) at a distal end thereof which is actuated to grip a surrounding edge of a workpiece (w). A first rotary actuator (200) is arranged to rotate the vertical member (220) about its axis to rotate the entire robot arm (100). A second rotary actuator (240) is positioned to rotate the second section (114) of the robot arm (100), via a belt, with respect to the first section (110) of the robot arm (100). A third rotary actuator (302) is arranged to rotate the end effector (108) about its horizontal axis. The third rotary actuator (302) permits the end effector (108) to flip the microelectronic workpiece (w) between a face up and a face down orientation.

Description

The robot that is used for microelectronic workpiece handling

The application is the part continuation application of following two patent applications: apply for the U.S.S.N.08/990 on December 15th, 1997, No. 107, be entitled as " semiconductor processing equipment with linear conveyor system "; And the U.S.S.N.09/114 that applies on July 11st, 1998, No. 105, be entitled as " the improved type robot that is used for microelectronic workpiece handling ".

The Workpiece machining apparatus of numerous species finally all becomes and is microelectronic device.Because microelectronics industry develops towards the direction of the high-efficiency and economic production in enormous quantities of equipment, also improve constantly for the requirement of processing work device therefor.Satisfy these growing requirements by equipment automatization more and more.More particularly, many in the requirement that this class improves all with to be used for the automation equipment of workpiece loading and unloading relevant in the course of processing.

Apply on December 15th, 1997 No. the 08/991062nd, U.S. Patent application, be entitled as and disclose a kind of automation equipment that is used to process microelectronic workpiece in " semiconductor processing equipment " with lifting and leaning device, special the document is included in this as reference.It is that machine table is finished different manufacturing procedures that this equipment adopts several workpiece processing modules.Adopt the workpiece delivery unit near workpiece box and in whole Fabricating machinery conveying work pieces.Supporting of workpiece conveyer and guiding workpiece delivery unit, being used in work delivery module and workpiece processing module is to transmit each workpiece between the machine table.The workpiece conveyer also comprises a delivery unit guide, elongated track for example, and it constitutes a paths for one or more workpiece delivery units in equipment.The workpiece delivery unit that moves along track is shaped as has workpiece transferring arm assembly, and this assembly end has the vacuum actor that is used for holding workpiece.The transferring arm assembly can be regulated its vertical dimension, and can rotate around vertical axis, is used for actr and workpiece are accurately located.

In loading and unloading with when depositing workpiece, generally be allow workpiece machined surface (i.e. " preceding " face) up.This towards avoiding supporting structure to contact with the front.And on the other hand, the machined surface of some processing modules requirement workpiece down.In order to satisfy this demand, in such as some processing modules such as electroplating reaction devices, use the i.e. processing head of rotation that between the primary importance and the second place, to overturn, in primary importance, processing head is oriented to receive workpiece in supine mode before the workpiece, in the second place, face down before the workpiece and process.

In order to guarantee that each processing module is that machine table can be with workpiece upset so that processing need complicated processing head operating mechanism, be used for the rotary processing head.This operating mechanism may need quite heavy or large-scale structure and be used for the rotary processing head, and may need quite overhead operational space to carry out this rotary manipulation.

The inventor has realized that: reduce or subtract that slightly to process module be the demand of processing the workpiece that overturns, will simplify the whole work-piece Fabricating machinery.The inventor also recognizes: by subtracting the demand of omiting the upset workpiece, can further strengthen and save cost and simplify technology.In addition, the contriver recognizes: the dissimilar machine table of wide region more might be integrated in the single machining tool.This class machine table may require wafer to have different orientation, and a machine table needs to face up before the wafer and processes, and another machine table then requires to face down before the wafer and processes.This paper has proposed a kind of equipment of being devoted to solve above-mentioned each problem.

The inventor also recognizes in addition: it will be useful that a kind of workpiece conveyer that allows delivery unit slide thereon is provided, it can make the work requisite space minimize, that is: the conveyer that turns round between each machining cell of horizontally set and the overlay area of delivery unit minimize.

The present invention is intended to a kind of workpiece transfer system, is used at the workpiece processing platform of Workpiece machining apparatus and/or each workpiece of transmission between the module that joins.Workpiece transfer system in the equipment comprises an improved type workpiece delivery unit, for example transmits on guide rail or the similar means at one and delivers workpiece.Delivery unit contains a vertical member that stretches out from housing.The arm member stretches out from vertical member at its cardinal extremity place.Be provided with the holding workpiece end-effector at arm member end, and can optionally drive this actr and rotate, so that workpiece overturns between the orientation up and down around horizontal axis.Preferably, this actr is configured to grasp the edge such as workpiece such as semiconductor wafers, and can have the workpiece detecting sensor, is used to notify the control unit workpiece to be in actr.

According to one embodiment of present invention, the workpiece delivery unit has five motions " axis ".Therefore, delivery unit can move along horizontal axis (Y) is linear in orbit.Vertical member can be along vertical axis (Z1) vertical lift.The arm member can rotate around vertical axis (Z1), and the terminal part of arm member can rotate around vertical axis (Z2).End-effector can be around the i.e. upset of horizontal axis (R) rotation, face up before for example workpiece being orientated or before face down.For realizing this rotation, the arm member preferably contains the rotating driver that is installed in the arm member, so that end-effector rotates around horizontal axis.

By a kind of workpiece delivery unit with higher motion flexibility is provided, this motion comprises the rotation around horizontal axis, can avoid using more expensive, the heavy and complicated mechanism that the upset workpiece is used between a plurality of processing modules.And, the machine table with the requirement of different workpieces orientation might be integrated in the single Fabricating machinery.

Another aspect of the present invention provides a kind of workpiece delivery unit that has the vacuum grasping mechanism, is used for piece-holder actr endways.The vacuum grasping mechanism comprises several projections and inhales pad, is used to push down the border area of workpiece, and contains the suction mouth that passes these suction pads, is used for Work-sheet pressing is being inhaled pad.

Another aspect of the present invention is: two workpiece delivery units can be in the laterally both sides slip relatively of guide rail structure, at least one of delivery unit has first end-effector, it is higher than the alternate arm section of corresponding first mechanical arm, forms a vertical space between them.The projection in the horizontal direction of this vertical space is enough big, and corresponding another end-effector on another delivery unit of lower height operation can passed through under above-mentioned first end-effector He on first mechanical arm.So but overlapping by the wafer plane of two end-effector clampings, two delivery unit can guide rail is vertically common to be moved or moves separately along transmitting, and does not disturb mutually between the end-effector or between the wafer of their clampings.This design plan makes in the lathe that required lateral footprint territory reaches minimum between the opposed machining cell.

By following detailed description to the present invention and embodiment, by claim and pass through accompanying drawing, they have carried out disclosing fully completely to details of the present invention as the part of this detailed description, will make some other advantages of the present invention and characteristic become clearer.

Fig. 1 is the decomposition diagram of machine tool for workpieces, and this lathe contains the improved type workpiece transfer system of constructing by one embodiment of the invention;

Fig. 2 is the transparent view of improved type workpiece transfer system shown in Figure 1;

The cutaway view of Fig. 3 for being done along 3-3 line among Fig. 2;

Fig. 4 is the transparent view of the workpiece delivery unit of constructing according to one embodiment of the invention;

Fig. 5 is the decomposition diagram of workpiece delivery unit shown in Figure 4;

Fig. 6 A is the partial, exploded perspective view of mechanical arm element in the delivery unit shown in Figure 5;

Fig. 6 B is the partial, exploded perspective view of mechanical arm element shown in Fig. 6 A, and Fig. 6 B is the continuity of Fig. 6 A;

Fig. 7 is the lateral plan after the assembling of mechanical arm element shown in Fig. 6 A, the 6B;

The cutaway view of Fig. 8 for being done along 8-8 line among Fig. 7;

The cutaway view of Fig. 9 for being done along 9-9 line among Fig. 8;

Figure 10 is the local amplification view of Fig. 8;

Figure 11 is that right elevation is amplified in the part of Fig. 7;

Figure 12 is the local amplification view of Fig. 8;

Figure 13 is an enlarged perspective, is depicted as an embodiment who does not hold actr who is applicable in the workpiece delivery unit shown in Figure 4;

Figure 14 is the behind transparent view of workpiece delivery unit shown in Figure 4, and wherein arm is in different turned positions and does not hold the positive clamping of actr a workpiece;

Figure 15 is a planar view of not holding actr shown in Figure 13;

The cutaway view of Figure 16 for being done along 16-16 line among Figure 15;

Figure 17 is the local amplification view of Figure 16, is depicted as positive clamping and a workpiece;

The local amplification view of Figure 18 for being done along 18-18 line among Figure 15;

Figure 19 is the local amplification view of Figure 16;

Figure 20 is the local amplification view of another optional embodiment of mechanical arm;

Figure 21 is the enlarged view of Figure 20;

Figure 22 is the end elevation of another kind of optional machine tool for workpieces, and this lathe has the workpiece transfer system that adopts another kind of optional delivery unit, and this delivery unit contains mechanical arm shown in Figure 20.

Figure 23 is the enlarged view of Figure 22;

Figure 24 is the planar view of machine tool for workpieces shown in Figure 22;

Figure 25 is the end-effector of mechanical arm shown in Figure 20 and the decomposition diagram of a workpiece;

Figure 26 is the planar view of end-effector shown in Figure 25;

Figure 27 is the backplan of end-effector shown in Figure 26;

Figure 28 is the enlarged view of Figure 26;

Figure 29 is the enlarged view of Figure 26;

The cutaway view of Figure 30 for being done along 30-30 line among Figure 26;

Figure 31 is the plan view of the positive clamping of end-effector shown in Figure 25 when a workpiece;

The cutaway view of Figure 32 for being done along 32-32 line among Figure 31;

The cutaway view of Figure 33 for being done along 33-33 line among Figure 31; And

The cutaway view of Figure 34 for being done along 34-34 line among Figure 31.

Because the present invention admits of multiple multi-form embodiment, illustrate and describe in detail in this article some specific embodiments in the accompanying drawings, be to be understood that: the disclosure is principle in order to demonstrate the invention just, and specific embodiment shown in can not limiting the invention to.

Fig. 1 shows the modularization Workpiece machining apparatus example 10 of the improved type transfer system that can adopt the present invention, and as shown in the figure, equipment 10 contains I/O assembly 12, left and right sides processing module 14,16.Equipment 10 also contains improved type workpiece transfer system 20, top bleed assembly 24, end panel 25.As shown in the figure, left and right

sides processing module

14,16, its each all comprise some workpiece processing platforms, fixed with each other around workpiece transfer system 20, constitute a processing cavity with import and outlet of vertical setting.Preferably, workpiece conveyer 20 is arranged in the processing cavity, so it can be near in the inner some workpiece boxs handing-over modules of I/O assembly 12 each, and can be near each the workpiece processing platform in the left and right

sides processing module

14,16.

Some

processing modules

14,16 can be fixed together end to end, thereby form the processing cavity of a prolongation, can finish a plurality of procedure of processings to each workpiece, perhaps, process more a plurality of workpiece simultaneously.In this case, but the workpiece transfer system 20 that program design makes an equipment 10 match with the workpiece transfer system 20 of one or more Fabricating machinerys 10 before or after it.

Fig. 2 shows the further details of the workpiece conveyer 20 that conveying work pieces is used in Fabricating machinery 10 shown in Figure 1.As shown in the figure, workpiece conveyer 20 generally contains one or more double-type

workpiece delivery units

30,32, is used for moving along workpiece delivery unit guide 26.Preferably, delivery unit 26 is equipped with elongate ridge 26a on framework 28.Alternatively, delivery unit guide 26 is track or other elongate configuration also, is used for guiding

workpiece delivery unit

30,32 thereon.The length of workpiece conveyer 20 and delivery unit guide 26 and shape can be various, and its structure can make the

workpiece delivery unit

30,32 can be near inner each machine table of equipment 10.

In the illustrated embodiment, workpiece delivery unit guide 26 contains spine, is supporting a pair of

upper rail

36,38 that is installed in relative both sides, spine 26a top and a pair of

lower guideway

40,42 that is installed in relative both sides, spine 26a bottom.Preferably, each

workpiece delivery unit

30,32 is meshed with corresponding a pair of

upper rail

36,40 and a pair of lower guideway 38,42.Every pair of guide rail can be equipped with one or more delivery units along the 26a of spine.

Each

workpiece delivery unit

30,32 is driven along respective paths by suitable actuator.More particularly,

actuator

61,64 is installed in delivery unit guide 26 respective side, makes

workpiece delivery unit

30,32 carry out controlled axial motion along delivery unit guide 26.Actuator 61,64 can be the linear electromagnetic motor, and

workpiece delivery unit

30,32 can accurately be located along guide 26.Especially,

actuator

61,64 is preferably the linear brushless DC machine.The

preferred actuator

61,64 of this class adopts one group of magnetic shoe, produces magnetic interaction with the respective electrical magnet 69 that is installed on each

workpiece delivery unit

30,32, promotes the workpiece delivery unit along delivery unit guide 26.

Cable

protective device

72,73 can link to each other with corresponding workpiece delivery unit 30.32 and framework 28, is used to protect wherein signal wire (SW) and power lead.Cable protecting

device

72,73 can be made of some interconnective segmental arcs, so that

workpiece delivery unit

30,32 can move in the gamut of delivery unit guide 26.

As shown in Figure 3, workpiece delivery unit 30 is complementary with first side of the 26a of spine of guide 26, and workpiece delivery unit 32 is complementary with second side of the 26a of spine.Each

workpiece delivery unit

30,32 can contain four linear bearings 136,140,138,142, is used for and

linear guides

36,40 38,42 engagements respectively.

Fig. 4 shows and workpiece delivery unit 32 essentially identical workpiece delivery units 30.For for simplicity, only delivery unit 30 is described in detail.It is arm member 100 that delivery unit 30 contains a mechanical arm, and it stretches out from delivery unit housing 106 at arm member cardinal extremity, grasps formula end-effector 108 up to the edge of arm member end.Arm member 100 contains first arm 110, rotarys connection with second arm 114.First arm 110 can be around vertical axis Z1 with respect to housing 106 rotations.The second rotatable arm 114 can be around vertical axis Z2 with respect to 110 rotations of first arm.End-effector 108 can be around horizontal axis (i.e. " upset " axis) R rotation, and this axis R is perpendicular to vertical axis Z1 and Z2.

Shell 106 has vertically disposed baseplate 120, the first top cover plate 122, the second top cover plate 124, bottom cover plate 126 and U-shaped cover cap 128.U-shaped cover cap 128 is made up of sidewall 129,130 and rear wall 132.

Four linear bearings 136,138,140,142 of accepting guide rail shown in Fig. 3 are installed on the baseplate.Brushless motor 69 is installed between top linear bearing 136,138 and the bottom linear bearing 140,142, and the actuator 61 of guide 26 (seeing Fig. 2 and shown in Figure 3) is applied effect.Read head linear encoder 149 will offer the control unit that the control delivery unit is used corresponding to the position signal of delivery unit 30 present position on guide 26.

Fig. 5 shows each element that is provided with in the housing 106.As shown in the figure, the related elements of lifting assembly 154 and arm assembly 100 is arranged in the housing 106.

Lifting assembly 154 contains each element that is useful on along vertical axis Z1 driving arm assembly 100.For this reason, lifting assembly 154 contains guide rod motor 156, and this motor rotates threaded guide rod 158, the rotation in shears 160 again of this guide rod.Leader nut 162 is screwed on the guide rod 158, and fastens with lifting nut adaptor 164.The vertical motion of lifting assembly 154 is by line slideway 170 guiding.So guide rod 158 will make nut 162 and adaptor 164 axially rise along guide rod 158 around the rotation of its axis.156 counter-rotatings of guide rod motor will make nut 162 and adaptor 164 descend along guide rod 158.Provide by absolute position transducer 165 along the corresponding signal in vertical axis Z2 upright position of living in arm assembly 100.

Arm member 100 links to each other with vertical guide rail 176, is used for moving along vertical axis Z2.The vertical linearity bearing assembly 170 that has track 172 and sliding part 174 is arranged near the lifting assembly 154.Vertical member has carrier plate 180 at its pedestal end, and this plate links to each other with sliding part 174 and adaptor 164, thereby under the driving of guide rod motor 156, makes vertical guide rail 176 and arm member 100 vertical uplift and decline by adaptor 164.Linear bearing assembly 170 guarantees that vertical member can be accurately and vertical lift stably.Encoding up/down device 177 links to each other with the axle drive shaft of guide rod motor 156, sends accurate lifting position signal to the control unit of delivery unit.

Fig. 6 A and Figure 12 show first motor 200 that rotatablely moves, and by the rotation of output shaft 201, this motor makes the vertical member 176 and first arm 110 produce rotation around vertical axis Z1 with respect to housing 106.Motor 200 is linked to each other with lower case 206 by motor assembly parts 202.Lower case links to each other with carrier plate 180 by screw 210.Plunging joint 214 links up the output shaft 201 of motor 200 and the input shaft 218 of tubular assembly 220.Between tubular assembly 220 and lower case 206, be provided with bearing holdere 224, resolve sensor 226, coro bearng 230 (signal) and lower bearing retainer 232.Resolve sensor 226 and send the accurate rotational position signal of tubular assembly 220 with respect to housing 106 to the control unit of delivery unit.

Fig. 6 B, Fig. 8 and Fig. 9 show being connected between the lower case 242 of pipe fitting 220 and first arm 110.The rotation of pipe fitting 220 drives lower case 242 and first arm 110 rotates around vertical axis Z1.Be assemblied in top cover 245 on the lower case 242 and form the space 244 of a base closed that these elements are fixed therein.

Fig. 6 B and Fig. 8 to 10 show and are used to make second arm 114 to produce the element of rotation around vertical axis Z2.As shown in the figure, second rotating machine 240 is installed in pipe fitting 220 and the lower case 242.By motor flange 248 supportings, the diapire 242a and the pipe fitting 220 of this flange and housing 242 tighten together motor 240 at vertical direction.Flange 248 also tightens together by the top of fastener (not shown) and motor 240, as shown in Figure 8.The output shaft 250 of motor 240 is equipped with belt pulley flange 252, drive wheel 254 and belt pulley locking piece 256, their common pulley driving devices that constitutes as Fig. 8 was assembled into.Second rotating machine, 240 inside are integrated with position of rotation coder (not shown).This coder is to the control unit transmission rotating position signal that is used to control the delivery unit operation.

Shown in Figure 10 is clearer, wrist torque pipe fitting 260 is installed is used in lower case 242 rotation, and by 290 of arm belts around.Arm belt 290 is driven by drive wheel 254.Bearing 264 (signal) is fixed by bearing holdere 266,272 supportings of torque pipe fitting support and guiding torque pipe fitting 260.Upper and lower part back-up ring 262,263 is installed on the torque pipe fitting 260, belt 290 is remained in vertical direction be looped around on the torque pipe fitting 260.Read head fabricated section 268 is installed on the lower case 242 together with rotation absolute encoder 270.The rotation absolute encoder produces the rotating position signal of second arm 114 with respect to first arm 110.This position signal offers the control unit of delivery unit.Absolute encoder cover cap 274 matches with the bottom of lower case 242.

The mechanical arm wrist housing 280 that is positioned at lower case 242 tops is fastening with lower case 242, and end cover 282 is fastened on the torque pipe fitting 260.Trip shaft line amplifier 292 also is housed in the space of lower case 242, and by spring-loaded belt-tightening pulley 294.

With reference to Fig. 9, tension wheel 294 comprises idle pulley 295, is used to make arm belt 290 to keep tension force.Idle pulley is by dull and stereotyped 297 carryings, and this flat board can pin 296 be that fulcrum rotates with respect to lower case 242.This flat board is subjected to the spring load of spring (not shown), and this spring is strained between the spring pin on the attachment point on the lower case 242 and dull and stereotyped 297.The application force of spring makes dull and stereotyped rotation, and idle pulley 295 is pushed down belt 290.

Optionally driving belt 290 circulations of second rotating machine 240, this strap lug is around wrist torque pipe fitting 260.The circulation of belt makes second arm 114 rotate around vertical axis Z2.

Fig. 6 B and Figure 10 show the trip shaft element, and they make actr 108 rotate around horizontal axis R.Trip shaft motor 302 is positioned at second arm, 114 trip shaft cover caps, 300 belows.Trip shaft motor 302 optionally drives end-effector 108 and rotates around horizontal axis R.The trip shaft motor links to each other with actuator fabricated section 304.Bearing box 306 is positioned at cover cap 300 and fixes bearing 308 (signal) and retainer 310.Trip shaft axle sleeve 312 is installed on the end-effector 108.

The trip shaft motor comprises output shaft 350, and this rear end at motor 302 links to each other with two position of rotation coders 351.A plurality of position of rotation coders provide signal to the control unit of delivery unit, this signal corresponding to actr 108 around the position of rotation of horizontal axis R with respect to second arm 114.By the effect of clamp ring 352 and interior belling edge locking piece 354, output shaft 350 is locked on the trip shaft axle sleeve 312, and these locking piece 354 plugs squeeze between the rear portion flange 356 of trip shaft axle sleeve 312 and actr 108.Rear portion flange 356 is by fastener link to each other with trip shaft axle sleeve 312 (Fig. 6 B illustrates the fastener hole to the heart).

Trip shaft axle sleeve 312 contains annular bearing surface 360, forms the journal bearing of bearing 308 rotation usefulness.Bearing 308 is by bearing holdere 310 fix in position, and this retainer is by fastener link to each other with bearing box 306 (Fig. 6 B illustrates the fastener hole to the heart).Bearing box 306 includes base part 362, and this part is fastened on wrist torque pipe fitting 260 and the end cover 282 by fastener 364.Actuator fabricated section 304 links to each other with the rear side of bearing box 306 by fastener 305.Actuator fabricated section 304 is by fastener link to each other with the front side of motor 302 (Fig. 6 B illustrates the fastener hole to the heart).

As shown in figure 10, cylinder 414 contains spring 470, and this spring produces thrust to the piston 472 that links to each other with plunger 434 by threaded sleeve 473.The pressurized air that imports from pore 422 acts on piston 472, and the expansion power that overcomes spring makes plunger 434 withdrawals (as shown in figure 10 left).

As shown in Figure 10, under trip shaft cover cap 300, around gas 414 formation annular spaces 600, purpose is to hold airline and the signal wire (SW) and the power lead of those loose windings, so that end-effector 108 can rotate.Second arm 114 can 600 beginnings partly be passed backward from the space in the path of this airline and lead, is passed down through the centre gangway 260a of torque pipe fitting 260 again.Other lead, for example the lead of motor 302 and coder 351 can be connected up by the printed circuit board (PCB) that is located among the cavity 260b.This layout makes these cable loops quarter bend spare 260 that rotates roll or launch, thereby arm 114 can be rotated around axis Z2.So the path of these pipelines and lead can be as follows: pass encoder housing 224, upwards enter in the space 244 that forms by bottom clamshell 245, be passed down through vertical member 176 then, stretch out pipe fitting 220 from opening 604, as shown in Figure 6A.In order to make the relative rotation between first arm 110 and second arm 114 have enough flexibilities, but lead and pipeline loosely are coiled in the pipe fitting 260 before stretching out.

Figure 13 to Figure 16 shows the embodiment that the edge grasps formula end-effector 108.As shown in the figure, end-effector 108 has the blade 400 that stretches out from root 400a (seeing shown in Figure 19), and it is positioned on the carriage 402.Blade 400 is Y-shaped substantially, has two substantially parallel blade tips, i.e. first blade tip 401 and second blade tip 403.Grippers body 404 links to each other with carriage 402 by fastener 408, and the root 400a of blade 400 is locked between grippers body 404 and the carriage 402.Air impeller 414 links to each other with the up-right support 410 of carriage 402 by some fasteners 416.Air impeller 414 links to each other with the rear portion flange 356 of actr 108 by the fastener (not shown).Air impeller 414 contains pressurized air induction opening 422, and this induction opening can be a tapped bore, the pipeline of the gas supply line (not shown) that is used for being linked and packed.

Grippers body 404 has the guide card 428 that covers carriage 400 at its front end.This guide card has semi-cylindrical recesses 430 at its end face.Plunger 434 is assemblied in vertical hole of running through grippers body 404, and with 430 pairs of hearts of groove.Guide card 428 has domatic 440 at its front end, protracting along blade 400 surfaces is directed downwards inclination.

Workpiece sensor 442 is arranged on the front surface of grippers body 404.Workpiece sensor is light emission and receiving sensor, and it can launch light, and when workpiece appears on the blade, can receive the light that reflects from workpiece.If do not have workpiece then do not receive reflected light, will send the signal or the controlled condition of " not having workpiece ".Preferably, sensor 442 emission infrared rays.

Front end at blade 400 has two identical workpiece edges extracting pins 450,452.These pins preferably are made of plastics.For for simplicity, only pin 452 is illustrated.As shown in figure 17, pin 452 has cylinder 456, has the radially top flange 458 and the centre pedestal 460 of abduction.Pedestal 460 is assemblied in the shoulder district 462 of the blade tip 403 of blade 400.The bottom of cylinder 456 is fixed in the through hole 464 on the blade tip 403 by modes such as friction force, welding or bondings.Centre pedestal 460 has outwards low oblique circumference end face 466.When workpiece places on the blade 400, and before being grasped by pin at first, inclined-plane 466 guarantees to have only the edge of workpiece just can contact with actr on inclined-plane 466.

Figure 18 show workpiece W (illustrating) with solid at first with 467 at its edge on inclined-plane 466.When actr withstood pin at 450,452 o'clock by plunger 434 grabbing workpieces, the inclination outer ring surface 468 of pin makes it the vertical jack-up of workpiece W form the edge with the vertical mating surfaces 456a of pin 452 and contacts.Guarantee like this to make workpiece W have only the workpiece outer side edges to contact with pin basically along 469.Except grasp force, flange 458 is also fixed workpiece W in vertical direction, and is especially true in the turning operation process.

As shown in figure 19, plunger 434 contains conical center 434a, and its inclination position 474 promotes and cover the edge 475 of workpiece W, with workpiece vertically to being fixed on the blade 400.Domatic 440 guarantee to have only the edge 475 of workpiece to be touched, and back plane that can the rest workpiece.When end-effector 108 by the upset motor 302 when horizontal axis R rotates, the flange 458 of pin 450,452 and the conical center 434a of plunger 434 guarantee that workpiece can not come off from blade 400.

Plunger has: the cylindrical elongate that the comprises top 434a part 434b that protracts, and from its cylindrical thick drum part 434c that extends back.That link to each other with drum part 434c is cylindrical tool gripping portion 434d, and it has opposed plane 434e, and 434f is so that engage with this part 434d by spanner.The end 434g that is threaded is screwed in the tapped bore 473.Plunger 434 is assemblied in the shoulder hole 476.Shoulder hole 476 includes: anterior elongated hole 476a is used to guide the elongated part 434b that protracts; The rear portion is used to guide rear portion drum part 434c than macropore 476b.

So in operation, when workpiece W was placed on the blade 400 as shown in figure 14, air-out from cylinder 414, spring 470 (among Figure 19 left) forward promoted plunger 434.Conical center 434a promotes the workpiece edge and snaps in pin 450,452.The workpiece edge is pushed the vertical mating surfaces 456a of shove joint contact pin, and be in domatic 440 and inclined-plane 474 between.Make plunger 434 withdrawals by pressurized air being imported cylinder 414, workpiece can be unclamped.

Figure 20 shows optionally another mechanical arm assembly 500.This mechanical arm assembly has many common traits with mechanical arm assembly described in Fig. 8 for example, and the difference part is as described below.The first rotation arm 510 contains motor 240 and belt 290, is used to make wrist pipe fitting 540 to rotate around vertical axis Z2.The vacuum chamber lid 546 fastener (not shown) by some vertical orientations are fastened on the wrist pipe fitting 540.End-effector 562 is fastened on the vacuum chamber lid 546.So the rotation of wrist pipe fitting 540 can drive end-effector 562 and rotate.

Shown in Figure 21 was clearer, first arm 510 had housing 560, surrounded rotation absolute encoder 270.The Pneumatic fittings 564 that is used for linking to each other with vacuum source exposes housing 560 outsides, and is communicated with the passage 570 that runs through wrist pipe fitting 540.This passage is connected with the serration zone 572 of wrist pipe fitting 540.Vacuum chamber lid 546 has the induction part 574 that puts in serration zone 572 downwards.Induction part 574 has some admission ports 576 and an inner admission piece 578.Admission piece 578 upwards puts in the axial passage 580, and vacuum chamber 760 (not shown) in this passage and the end-effector 562 are connected.

Figure 22 shows the machining tool 600 with central workpiece transfer system 620.Workpiece transfer system 620 contains aforesaid workpiece delivery unit guide 26, and delivery unit 630,632, and they are slidably mounted on each side of above-mentioned guide.Workpiece delivery unit 630,632 is equipped with the mechanical transmission arm 500 described in Figure 20 and 21.

Figure 23 shows the intensive lateral means of delivery unit 630,631, and its horizontal outside dimension is 640, is used for sliding jointly thick and fast along guide rail 26.Lateral dimension 640 can reach and minimize, this be because: have enough big vertical open space between the end-effector 562 that cover cap 546 allows along continuous straight runs to stretch, thereby when (right side) mechanical arm 500 height of living in during a little less than (left side) mechanical arm 500, the wafer W of (right side) end-effector 562 and clamping thereof can be in the below near the wafer W of (left side) end-effector 562 of (left side) vacuum chamber lid 546 and clamping thereof.The wafer W of (left side) end-effector 562 and clamping thereof can be in the top of the wafer W of (right side) end-effector 522 and clamping thereof.In this structure, delivery unit 630,632 can move simultaneously along the track of guide rail 26, perhaps also can move separately.

Figure 24 shows this intensive device (left side and right) delivery unit 630,632 after withdrawal, and wherein wafer W is in differing heights.Delivery unit can be with wafer handling in the process vessel 650 of lateral arrangement.

Design shown in Figure 22 to 24 makes two mechanical arms can be simultaneously transmit wafer and can the phase mutual interference along the guide rail either direction is linear, and this is by an end-effector and wafer are crossed from the top of corresponding another mechanical arm end-effector and wafer.This vertically realizes to transporting the zone safely by setting one for each mechanical arm.It is enough big that the vacuum chamber of mechanical arm assembly lid 546 axial lengths that have can make end-effector exceed the distance of first arm 510, and the wafer of adjacent mechanical arm end-effector and clamping thereof can be passed through between first arm 510 and corresponding end-effector.

The result of described structure is: from planar view, the overlay area of lathe has approximately dwindled 9 inches at Width.

Also can prolong torque pipe fitting 260, make in a similar manner between first arm 110 and the end-effector 108 and form the space correct embodiment illustrated in fig. 8.

Figure 25 shows and is used to grasp such as the optional embodiment 700 of the end-effector of workpiece such as wafer W.End-effector 700 contains blade member 706 and attaching parts 708.Blade member 706 is fastened on the attaching parts 708.Blade member 706 has vacuum passage 740 in its bottom side, and this passage can be by 710 sealings of vacuum mounting.The blade member contains four holes, is used to accept tommy or protruding button 714, and they locate wafer W on blade 706.Attaching parts vacuum mounting 716 will be located at vacuum passage 760 sealings (shown in figure 32) of attaching parts bottom side.

Figure 26 shows the end face 706a of blade 706.Blade 706 has parallel blade tip 722,724.The end of blade tip has the wafer supporting of projection and distinguishes 726,727 with jut or suction pad.Locating dowel pin 714 is positioned to be inhaled near the pad district 726,727.Cardinal extremity at blade 706 has elongate wafer support projection portion or inhales pad district 730.Locating dowel pin 714 is positioned at the end opposite of inhaling pad district 730.Inhale pad district 726,727,730 and surround a border circular areas, this zone is corresponding with institute's wafer supported border area on the blade.

Figure 27 shows the bottom surface of blade member 706, and it has elongated vacuum passage 740, is surrounded by recess edge 742, and its shape is corresponding with the shape of vacuum mounting 710 shown in Figure 25.In addition, vacuum port or hole 744 are arranged in vacuum passage 740, this hole is passed the thickness of blade member 706 and is offered vacuum passage up to the vacuum openings of inhaling the pad district.

Figure 28 shows and inhales pad district 727, and it contains the vacuum port 744 that runs through wherein, and this mouth is communicated with vacuum passage 740.

Figure 31 shows between four locating dowel pins 714 and covers the wafer W of inhaling pad district 726,727,730.

Figure 32 shows the vacuum mounting 716 of transom, and this mounting has sealed elongated vacuum passage 760.Mounting 716 contains admission port 764 and air extractor duct 766.Air inlet 764 is communicated with vacuum chamber lid 546 shown in Figure 21.Air extractor duct 766 is communicated with vacuum passage 740.

Figure 33 and 34 illustrates in greater detail one of locating dowel pin 714.Locating dowel pin 714 contains inclination surface 714b, and the downward loading motion of its guiding wafer W makes wafer reach its accurately located position near inclination surface 714b root.

End-effector assembly shown in Figure 25 to 34 has vacuum manifold, vacuum pressure is communicated to is projected on three vacuum mat districts 726,727,730 that blade end face 706a goes up the maintenance district.The different vacuum pressures that act on each vacuum mat district produce suction makes wafer keep static with respect to blade.Advantage is: previously selected limited outer peripheral areas on the contact wafer surface, the vacuum mat district of projection, for example 3 millimeters zones.In addition, four protruding buttons are that locating dowel pin 714 forms the guiding " device " that has oblique angle importing end, wafer are accurately located, to guarantee the outer peripheral areas of a contact wafer with respect to the suction pad district of projection.

Whether machine tool system provides controllable vacuum source to end-effector Pneumatic vacuum assembly parts 564, make vacuum pressure sensor (not shown) in the lathe can detect wafer and exist.

Vacuum type shown in Figure 25 to 34 grasps end-effector may be had than the plunger tpe wafer grasping mechanism shown in Figure 13 and Figure 15 to 19 and more many advantage.The plunger of handle wafer may cause wafer to slide with respect to blade.For mutual interference mutually between the parts that prevent wafer and carriage or processing head in this motion process, mechanical arm must at first upwards promote end-effector, return and then operate then plunger.Vacuum type edge grippers among Figure 25 to 34 has been simplified the motion of mechanical arm, only needs lifting that the vacuum mat district is linked to each other with wafer and gets final product.In addition, plunger tpe edge grippers needs the wafer perception sensor-based system that separates with grasping mechanism.This comprises the electricity/optical sensor described in the foregoing description, and it need connect up by wrist axis.This wiring is limited in the wrist rotation in 360 degree.

Under the situation of this paper substance, can carry out multiple remodeling to said system.Although the present invention has been done detailed description with reference to one or more specific embodiments, it will be apparent to those skilled in the art that as long as the scope and spirit essence of the present invention that is proposed in the claim can make alterations to the present invention.

Claims

1. delivery unit that is used for mobile microelectronic workpiece, it comprises:

Housing;

The vertical member that stretches out from described housing;

From the arm member that described vertical member stretches out, this arm member is provided with the end-effector that is used for holding workpiece, and first rotating driver links to each other with described end-effector, is used to make described end-effector to rotate around horizontal axis.

2. delivery unit as claimed in claim 1 is characterized in that: also include second rotating driver that links to each other with described vertical member, be used to make described vertical member and described arm member to rotate around vertical axis.

3. delivery unit as claimed in claim 2, it is characterized in that: described arm member contains first arm and second arm, described first arm is rotaryed connection with described vertical member at its first end, rotary connection with described second arm at its second end, described second arm is carrying described end-effector, described delivery unit contains the 3rd rotating driver that links to each other with described first arm and second arm, is used to drive described second arm and rotates with respect to described first arm around second vertical axis.

4. delivery unit as claimed in claim 1 is characterized in that: also include the lifting actuator, be arranged in the described housing and and link to each other with described vertical member, make described vertical member with respect to described housing vertically to the location.

5. delivery unit as claimed in claim 1 is characterized in that: described housing has at least one linear bearing, is used to accept the track of external guidance system.

6. delivery unit as claimed in claim 5 is characterized in that: described housing has electromagnet, is used for transmitting described delivery unit along track.

7. delivery unit as claimed in claim 1, it is characterized in that: described first rotating driver contains motor, this motor has the output shaft of installing along horizontal axis, described end-effector contains a flange at its pedestal end, also include the bearing box that is arranged between described flange and the described motor, be arranged on the sleeve between described motor and the described flange in described bearing box inside, between described sleeve and described flange, limit the clamping element of installing around described output shaft in the space that forms, described flange is bolted on the described sleeve, and described clamping element is clamped on the described output shaft.

8. delivery unit as claimed in claim 7 is characterized in that: described liner ring constitutes bearing surface around its circumference, around described bearing surface coro bearng is installed in described bearing box.

9. delivery unit as claimed in claim 8, it is characterized in that: described arm member contains horizontally disposed arm housing, and rotating member is installed, be used for rotating with respect to described arm housing around vertical axis, described bearing box contains the base part that is located at basically in the horizontal surface, and described base part and described rotating member are connected.

10. delivery unit as claimed in claim 1, it is characterized in that: described end-effector contains the horizontal-extending member, it is provided with a protrusion member at least, be used to push down the edge that covers the workpiece on the described horizontal-extending member, also contain movable member, it can selectivity move, and the workpiece edge is pressed on the protrusion member, so that described horizontal-extending member holds on to described workpiece.

11. delivery unit as claimed in claim 10 is characterized in that: described horizontal-extending member contains Y shape blade, and at least one described protrusion member has two pins, and each pin vertically stretches out from a branch of described Y shape blade.

12. delivery unit as claimed in claim 10 is characterized in that: described movable member contains a plunger, is used to push down the edge of workpiece, and described plunger has inclination surface, is used to compress the described edge of described workpiece.

13. delivery unit as claimed in claim 10 is characterized in that: at least one described protrusion member contains two isolated pins, and the end away from described horizontal-extending member has the flange that radially extends on described pin.

14. delivery unit as claimed in claim 13, it is characterized in that: described pin contains the centre pedestal part, its surface admittance surface tilt of close described workpiece on the described horizontal-extending member, thereby described workpiece is only supported by its edge, the bottom surface of workpiece and the described end face on surface of admitting are separated.

15. delivery unit as claimed in claim 1 is characterized in that: also include the workpiece detecting sensor that is installed on the described actr, this sensor produces corresponding to the workpiece signal on actr whether.

16. delivery unit as claimed in claim 15 is characterized in that: described workpiece detecting sensor is made of light emission and receiving element, is used to launch the light reflection that light and perception are caused by described workpiece.

17. delivery unit as claimed in claim 16 is characterized in that: the described light that is produced by described projector is infrared light.

18. delivery unit as claimed in claim 1, it is characterized in that: described actr has first and second upstanding portion, they are pressed on the workpiece edge in spaced-apart position, described workpiece is firmly grasped between described first and second part, one of described first and second part can selectivity move, thereby makes actr and workpiece engagement or disengagement.

19. delivery unit as claimed in claim 18 is characterized in that: described first and second part contains retaining part, this part and above the workpiece to described end-effector area supported one side overlaid.

20. delivery unit as claimed in claim 1, it is characterized in that: described first rotating driver contains motor, this motor has the output shaft of installing along horizontal axis, described end-effector contains a flange at its pedestal end, also include the bearing box that is arranged between described flange and the described motor, be arranged on the sleeve between described motor and the described flange in described bearing box inside, between described sleeve and described flange, limit the clamping element of installing around described output shaft in the space that forms, described flange is bolted on the described sleeve, and described clamping element is clamped on the described output shaft;

Described liner ring constitutes bearing surface around its circumference, around described bearing surface coro bearng is installed in described bearing box;

Described arm member contains horizontally disposed arm housing, and rotating member is installed, be used for rotating with respect to described arm housing around vertical axis, described bearing box contains the base part that is located at basically in the horizontal surface, and described base part and described rotating member are connected;

Described rotating member is made of a pipe fitting; And described arm member comprises the belt and second motor, this motor has the output shaft that is installed in the described arm member, and have the pulley that is attached thereto, and be used for together rotating with described output shaft, can handle described pulley and make described pipe fitting by described belt driven rotary.

21. delivery unit as claimed in claim 1, it is characterized in that: described first rotating driver contains a motor, this motor has the output shaft of installing along horizontal axis, described end-effector contains a flange at its pedestal end, also include the bearing box that is arranged between described flange and the described motor, be arranged on the sleeve between described motor and the described flange in described bearing box inside, between described sleeve and described flange, limit the clamping element of installing around described output shaft in the space that forms, described flange is bolted on the described sleeve, and described clamping element is clamped on the described output shaft; And

Described flange, described bearing box and described motor are contained in the cover cap, and are higher than described arm member axis.

22. delivery unit as claimed in claim 1 is characterized in that: described arm member includes:

First arm stretches out from described vertical member;

Second arm stretches out from described first member, and described second arm links to each other with described first arm rotation, and described second arm is carrying described first rotating driver and described end-effector; And

Second rotating driver, it has first that links to each other with described first arm and the second portion that links to each other with described second arm, also has rotary power source, is used to make described first to rotate with respect to described second portion.

23. a workpiece mobile system, it comprises:

First guide rail supports along level attitude;

Delivery unit, include: by described guide rail support and the housing that guides it to slide along described guide rail, the vertical member that stretches out from described housing, the arm member that stretches out from described vertical member, described arm member has the end-effector that is used for holding workpiece, and first rotating driver that links to each other with described end-effector, be used to drive described end-effector and rotate around horizontal axis.

24. system as claimed in claim 23 is characterized in that: described delivery unit also includes second rotating driver that links to each other with described vertical member, is used to drive described vertical member and described arm member rotates around vertical axis.

25. system as claimed in claim 23, it is characterized in that: described arm member contains: first arm and second arm, described first arm is captiveed joint with described vertical member at its first end, and rotary connection with described second arm at its second end, described second arm is carrying described end-effector, described delivery unit includes the 3rd rotating driver that links to each other with described first arm and second arm, is used to drive described second arm and rotates with respect to described first arm around second vertical axis.

26. system as claimed in claim 23 is characterized in that: described delivery unit also includes the lifting actuator, is arranged in the described housing and with described vertical member to link to each other, make described vertical member with respect to described housing vertically to the location.

27. system as claimed in claim 23 is characterized in that: described housing has at least one linear bearing, is used to accept described guide rail.

28. system as claimed in claim 23 is characterized in that: described housing has electromagnet, is used for transmitting described delivery unit along described track.

29. system as claimed in claim 23, it is characterized in that: also include second guide rail that be arranged in parallel with described first guide rail, and by second delivery unit of described second guide rail carrying, described second delivery unit is vertical substantially with described first delivery unit.

30. a workpiece mobile system, it comprises:

Guide track system supports along level attitude;

First delivery unit, include: support and guide its housing along described guide track system slip by described guide track system, the vertical member that stretches out from described housing, and the arm member that stretches out from described vertical member, described arm member has the end-effector that is used for holding workpiece, and described end-effector is higher than described arm member;

Second delivery unit, include: support and guide its housing along described guide track system slip by described guide track system, the vertical member that stretches out from described housing, and the arm member that stretches out from described vertical member, described arm member has the end-effector that is used for holding workpiece, and described end-effector is higher than described arm member;

The opposed both sides that are installed in described guide track system of described first and second delivery units, the described end-effector of one of described first and second delivery units is compared with corresponding another actr in described first and second delivery units, be in slightly high position, the described end-effector of described corresponding another delivery unit is movable to the position between the described arm member of one of described end-effector and described first and second delivery unit, can cross another wafer of the described second delivery unit clamping by the wafer of the described first delivery unit clamping, described wafer is placed along the plane.

31. system as claimed in claim 30, it is characterized in that: each in described first and second delivery unit all includes the wrist pipe fitting, be connected between described associated end actr and the described arm member, described each end-effector can be rotated with respect to described corresponding arm member around vertical axis.

32. system as claimed in claim 31 is characterized in that: contain top component, be connected between associated end actr and the wrist pipe fitting, make described end-effector be higher than described arm member.

33. system as claimed in claim 30, it is characterized in that: described actr contains the high suction pad area that rises, and vacuum passage with some suctions hole, these are inhaled the hole and stretch out from described vacuum passage, pass described suction pad area and be exposed at its end face, described suction hole is used for the wafer that is covered is produced vacuum pressure, makes described end-effector clamp described wafer.

34. system as claimed in claim 33, it is characterized in that: also include some locating dowel pins, near each described suction pad area, one or more locating dowel pins are arranged, wafer accurately is positioned on the described suction pad area, and the shape of described suction pad area and direction only make it very narrow edge on the supporting wafer.

35. be used for the mechanical arm end-effector of holding workpiece, include: the member that basic horizontal is extended, it is provided with a protrusion member at least, be used to push down the edge that covers the workpiece on the described horizontal-extending member, also contain movable member, it can selectivity move, and the workpiece edge is pressed on the protrusion member, so that described horizontal-extending member holds on to described workpiece.

36. end-effector as claimed in claim 35 is characterized in that: described horizontal-extending member contains Y shape blade, and at least one described protrusion member has two pins, and each pin vertically stretches out from a branch of described Y shape blade.

37. end-effector as claimed in claim 35 is characterized in that: described movable member contains a plunger, is used to push down the edge of workpiece, and described plunger has inclination surface, is used to compress the described edge of described workpiece.

38. end-effector as claimed in claim 35 is characterized in that: at least one described protrusion member contains two isolated pins, and the end away from described horizontal-extending member has the flange that radially extends on described pin.

39. end-effector as claimed in claim 35, it is characterized in that: described pin contains the centre pedestal part, its surface admittance surface tilt of close described workpiece on the described horizontal-extending member, thereby described workpiece is only supported by its edge, the bottom surface of workpiece and the described end face on surface of admitting are separated.

40. end-effector as claimed in claim 35 is characterized in that: also include the workpiece detecting sensor that is installed on the described horizontal-extending member, this sensor produces corresponding to the workpiece signal on actr whether.

41. end-effector as claimed in claim 40, described workpiece detecting sensor is made of light emission and receiving element, is used to launch the light reflection that light and perception are caused by described workpiece.

42. end-effector as claimed in claim 41 is characterized in that: the described light that is produced by described projector is infrared light.

43. end-effector as claimed in claim 35, it is characterized in that: described actr has first and second upstanding portion, they are pressed on the workpiece edge in spaced-apart position, described workpiece is firmly grasped between described first and second part, one of described first and second part can selectivity move, thereby actr is engaged with workpiece or throws off.

44. end-effector as claimed in claim 43 is characterized in that: described first and second part contains retaining part, this part and above the workpiece to described end-effector area supported one side overlaid.

45. be used for the mechanical arm end-effector of holding workpiece, it includes the blade of slim-lined construction, have some isolated raised areas at its first surface, the surface of the work that is used for supporting with it contacts, described each zone has at least one perforate, on described raised areas, expose, and be connected with conduit between described perforate and the vacuum source.

46. end-effector as claimed in claim 45 is characterized in that: described raised areas surrounds a border circular areas, and the external edge of its shape and workpiece is along corresponding.

47. end-effector as claimed in claim 45 is characterized in that: near described raised areas, be provided with locating dowel pin, workpiece is directed on the described raised areas.

48. end-effector as claimed in claim 45 is characterized in that: described locating dowel pin has inclination surface, is used for workpiece is directed to described raised areas.

49. end-effector as claimed in claim 45 is characterized in that: described slim-lined construction has two blade tips, is positioned at the end of described blade tip by one of described raised areas of described each blade tip carrying.

50. end-effector as claimed in claim 45 is characterized in that: described conduit forms open passage on the surface of described blade, and has the dull and stereotyped mounting that is used to seal described passage.

51. end-effector as claimed in claim 45, it is characterized in that: described workpiece is circular, described elongate surface is a Y shape structure, it has two blade tips and a blade root zone, described raised areas planar constitutes a border circular areas, described border circular areas lays respectively at the end and the described blade root zone of described blade tip, described conduit is made of the passage that is shaped under described first surface in the described Y shape structure, and include some locating dowel pins, each locating dowel pin is positioned near the described raised areas and in described circular outside, in order to described workpiece is directed on the described raised areas, vacuumize by described perforate, make described raised areas clamp described workpiece.