WO2019111369A1 - Mechanical chuck, industrial robot, and workpiece moving device - Google Patents

Mechanical chuck, industrial robot, and workpiece moving device Download PDF

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Publication number
WO2019111369A1
WO2019111369A1 PCT/JP2017/043957 JP2017043957W WO2019111369A1 WO 2019111369 A1 WO2019111369 A1 WO 2019111369A1 JP 2017043957 W JP2017043957 W JP 2017043957W WO 2019111369 A1 WO2019111369 A1 WO 2019111369A1
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WO
WIPO (PCT)
Prior art keywords
piston
mechanical chuck
state
main body
pistons
Prior art date
Application number
PCT/JP2017/043957
Other languages
French (fr)
Japanese (ja)
Inventor
識 西山
Original Assignee
株式会社Fuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to JP2019557938A priority Critical patent/JP6993427B2/en
Priority to PCT/JP2017/043957 priority patent/WO2019111369A1/en
Publication of WO2019111369A1 publication Critical patent/WO2019111369A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/08Gripping heads and other end effectors having finger members
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials

Definitions

  • the present disclosure relates to a mechanical chuck, an industrial robot, and a work moving device.
  • a mechanical chuck provided with a pair of gripping claws that grip components is known (for example, Patent Document 1).
  • the mechanical chuck described in Patent Document 1 includes a vacuum hole, a piston that reciprocates up and down in the vacuum hole, a pair of sliders, and a compression spring.
  • the force from the compression spring releases the gripping of the component by the gripping claws.
  • the piston ascends to move the slider, whereby the gripping claw grips the component.
  • the mechanical chuck is attached to a mounting head movable in the X and Y directions.
  • the present disclosure has been made to solve the above-described problems, and has as its main object to provide a mechanical chuck that can be thinned.
  • the present disclosure takes the following measures in order to achieve the above-described main objects.
  • the mechanical chuck of the present disclosure is Body part, First and second gripping members in which at least a portion of each of the main body protrudes in the thickness direction of the main body;
  • An axial direction is perpendicular to the thickness direction, and is disposed on the main body so as to move in a first direction along the axial direction and in a second direction opposite to the first direction, along with the movement
  • the first piston is disposed in the main body so that the axial direction is parallel to the first piston and moved in the first and second directions, and the second grip is moved in the axial direction according to the movement.
  • the movement of the first and second pistons is interlocked so that the first and second pistons move in opposite directions along the axial direction, and the first state and the first state are compared with each other.
  • An interlocking mechanism that switches between a second state in which the piston moves in the second direction and the second piston moves in the first direction;
  • a pressure supply passage provided in the main body for causing an externally supplied pressure to act on at least the first piston to switch from the first state to the second state;
  • An elastic member that biases at least one of the first piston and the second piston in a direction to switch from the second state to the first state by an elastic force; Is provided.
  • this mechanical chuck when pressure is supplied to the pressure supply path from the outside, this pressure acts on at least the first piston.
  • the pressure causes the first piston to move in the second direction, and the interlocking mechanism causes the second piston to move in the opposite first direction to switch from the first state to the second state.
  • the first and second pistons are moved by the elastic force of the elastic member and the interlocking mechanism to cut the second state into the first state. change. Since the first and second holding members move in the axial direction along with the movement of the first and second pistons, the first and second holding members are in the approaching state in one of the first state and the second state, and in the other It will be in the separated state.
  • the mechanical chuck can grip the workpiece in one of the approaching state and the separated state, and can release the gripping in the other state.
  • the moving directions, ie, axial directions, of the first and second pistons are perpendicular to the thickness direction of the main body, ie, the projecting direction of the first and second holding members. Therefore, the moving distance of the first and second pistons hardly affects the thickness of the mechanical chuck. Therefore, compared with, for example, the case where the moving directions of the first and second pistons are along the thickness direction, the mechanical chuck can be made thinner.
  • the "pressure” may be a positive pressure or a negative pressure.
  • Very includes substantially vertical cases.
  • Parallel includes substantially parallel cases.
  • FIG. 1 is a schematic explanatory view of a robot 10;
  • FIG. 2 is a block diagram showing an electrical connection in the work moving apparatus 100.
  • FIG. 5 is a perspective view of a mechanical chuck 50.
  • FIG. 5 is a perspective view of a mechanical chuck 50.
  • FIG. 7 is a top view of a drive mechanism 70 of the mechanical chuck 50.
  • FIG. 7 is a front view of a grip portion 60 of the mechanical chuck 50 and a drive mechanism 70.
  • FIG. 1 is a schematic explanatory view of a work moving apparatus 100.
  • FIG. 2 is a schematic explanatory view of the robot 10.
  • FIG. 3 is a block diagram showing the electrical connection relationship in the work transfer apparatus 100.
  • the left-right direction (X-axis), the front-rear direction (Y-axis), and the up-down direction (Z-axis) of the workpiece moving device 100 are as shown in FIG.
  • the robot 10 is movable in all directions, and there is no specific direction fixed, but for the convenience of description, the left-right direction (X axis), the front-rear direction (Y axis) and the up-down direction shown in FIG. It demonstrates using Z axis
  • the work transfer apparatus 100 is configured as an apparatus that performs a predetermined work including movement on an article to be worked (here, the work W).
  • the work transfer apparatus 100 includes a robot 10, a base 101, a work transfer apparatus 102, a pallet transfer apparatus 103, a pressure supply source 106, and a control unit 90 (see FIG. 3) for controlling the entire apparatus. ing.
  • a camera 40 and a mechanical chuck 50 are attached to the robot 10.
  • the base 101 arranges and fixes the robot 10, the work transfer device 102 and the pallet transfer device 103.
  • the work transfer device 102 and the pallet transfer device 103 are each configured as a belt conveyor.
  • the work transfer apparatus 102 transfers a plurality of works W supplied to the front of the apparatus by a work supply unit or a worker (not shown) to the vicinity of the rear pallet transfer apparatus 103.
  • the pallet conveyance device 103 conveys the pallet 105 in the right direction to carry in and out the pallet 105.
  • the pressure source 106 supplies pressure to a tool (here, the mechanical chuck 50) attached to the robot 10.
  • the robot 10 is configured as an industrial robot that performs predetermined work including movement on the workpiece W.
  • the workpiece W is not particularly limited, and examples thereof include various parts such as mechanical parts, electrical parts, electronic parts, and chemical parts, as well as food, bio and biological related articles.
  • the robot 10 picks up and moves a plurality of workpieces W configured as chip-like electronic components from the workpiece conveyance device 102 and places the workpieces W in the plurality of concave portions on the pallet 105. .
  • the robot 10 is a multi-axis robot configured as a vertical articulated robot, and includes an arm unit 20, a third support unit 23, a pedestal unit 24, and a tip unit 30.
  • the arm unit 20 has a plurality of arms, and in the present embodiment, has first and second arms 21 and 22.
  • the robot 10 also includes first to fifth rotation mechanisms 26a to 26e (see FIGS. 2 and 3).
  • the first to fifth rotation mechanisms 26a to 26e each have a rotation shaft, a gear mechanism, and the like.
  • Each of the first to fifth rotation mechanisms 26a to 26e is rotated by a motor (not shown) that the robot 10 has.
  • the robot 10 is provided with a plurality of encoders (not shown) for detecting the rotational position of the motor corresponding to each of the first to fifth rotation mechanisms 26a to 26e.
  • the rotation directions of the first to fifth rotation mechanisms 26a to 26e are indicated by thick arrows.
  • the end of the first arm 21 is connected to the tip 30 through the first rotation mechanism 26 a.
  • the first rotation mechanism 26 a rotates the tip 30 with respect to the first arm 21.
  • the end of the first arm 21 opposite to the tip end 30 is connected to the second arm 22 via the second rotation mechanism 26 b.
  • the second rotation mechanism 26 b rotates the first arm 21 with respect to the second arm 22.
  • An end of the second arm 22 opposite to the first arm 21 is connected to the third support 23 via a third rotation mechanism 26c.
  • the third rotation mechanism 26 c rotates the second arm 22 with respect to the third support portion 23.
  • the third support 23 is connected to the pedestal 24 via the fourth rotation mechanism 26 d and supported by the pedestal 24.
  • the fourth rotation mechanism 26 d horizontally pivots the third support 23 with respect to the pedestal 24.
  • the distal end portion 30 includes a mounting portion 32 to which various tools (also referred to as end effectors) for performing work on the workpiece W can be mounted at the lower end.
  • the mounting portion 32 is disposed on the lower surface of the tip portion 30 main body.
  • a mechanical chuck 50 is attached to the lower end of the mounting portion 32 as a tool.
  • the fifth rotation mechanism 26e is disposed in the distal end portion 30, and rotates (rotations) the mounting portion 32 about an axis extending in the vertical direction. Thereby, the mechanical chuck 50 is also rotated (rotated) together with the mounting portion 32.
  • a pressure supply nozzle 33 projecting rightward is disposed on the side surface near the lower end of the mounting portion 32.
  • the pressure supply nozzle 33 is connected to the pressure inlet member 59 of the mechanical chuck 50 by a pipe 34.
  • the pipe 34 is made of, for example, a flexible material such as resin.
  • the pressure from the pressure supply source 106 reaches the pressure supply nozzle 33 through a pipe (not shown) or a hole provided in the inside of the distal end portion 30, and is supplied from the pressure supply nozzle 33 to the mechanical chuck 50 through the piping 34. Be done.
  • the mechanical chuck 50 grips and releases the workpiece W using the pressure from the pressure supply source 106.
  • the camera 40 is attached to the lower surface of the distal end portion 30 and disposed in front of the mounting portion 32.
  • the camera 40 moves with the mechanical chuck 50 by the movement of the tip end portion 30.
  • the camera 40 includes an irradiation unit 41 and an imaging unit 42.
  • the irradiation unit 41 is illumination arranged in a circular shape on the outer periphery of the imaging unit 42, and irradiates light to the lower imaging target.
  • the imaging unit 42 is a unit capable of capturing an image, and captures an image of an object by capturing the lower side of FIG. 2.
  • the imaging unit 42 includes an optical system such as a lens, and an imaging device that generates an electric charge by receiving light and outputs the generated electric charge.
  • the camera 40 generates image data based on the charge output from the imaging unit 42, and outputs the generated image data to the control unit 90.
  • FIG. 4 and 5 are perspective views of the mechanical chuck 50.
  • FIG. FIG. 6 is a top view of the drive mechanism 70 of the mechanical chuck 50.
  • FIG. 7 is a front view of the grip portion 60 of the mechanical chuck 50 and the drive mechanism 70.
  • FIG. 8 is a cross-sectional view taken along the line AA of FIG. 6 and 7 virtually show the inside of the mechanical chuck 50 through the main body 51 virtually. 4 to 6, 7A and 8A show a first state of the mechanical chuck 50, and FIGS. 7B and 8B show a second state of the mechanical chuck 50.
  • the mechanical chuck 50 includes a main body 51, a grip 60 (see FIG. 5), and a drive mechanism 70 (see FIG. 6).
  • the main body 51 is a substantially rectangular metal member and serves as a housing of the mechanical chuck 50.
  • the main body portion 51 has the smallest length in the thickness direction (here, the vertical direction) among the lengths of the three sides of the rectangular parallelepiped.
  • the drive mechanism 70 is disposed inside the main body 51.
  • the main body 51 includes an attaching portion 52 for attaching the mechanical chuck 50 to the attaching portion 32, and a pressure supply passage 58 to which pressure is supplied from the outside (see FIG. 4).
  • a guide hole 54 and first and second upper side holes 55a and 55b are formed in the upper portion of the main body 51.
  • first and second horizontal holes 56a and 56b which are through holes parallel in the axial direction to the left and right direction, are formed (see FIGS. 4 and 8).
  • First and second lower holes 53a and 53b are formed in the lower part of the main body 51 (see FIG. 5).
  • the mounting portion 52 is provided on the upper surface of the main body portion 51, and includes a plurality of (here, four) bolt holes 52a.
  • the mechanical chuck 50 is attached to the lower surface of the mounting portion 32 using the bolt holes 52 a and a bolt (not shown).
  • the guide holes 54 are rectangular holes with rounded corners whose longitudinal direction extends in the left-right direction.
  • first and second guide members 64a and 64b which are a part of the grip portion 60 are disposed movably in the left-right direction.
  • the guide hole 54 has a step surface facing upward, and the main body 51 supports the first and second guide members 64a and 64b on the step surface.
  • the pressure supply path 58 causes pressure supplied from the outside (here, the pressure supply source 106) to act on at least the first piston 71a of the drive mechanism 70 to switch the pressure from the first state to the second state. It is a route.
  • the pressure supply passage 58 has a pressure inlet member 59 which protrudes and opens in a direction (herein, forward) perpendicular to the thickness direction with respect to the main body 51.
  • the pressure inlet member 59 is a nozzle for attaching the pipe 34, and serves as an inlet for externally supplied pressure.
  • the pressure inlet member 59 opens into the space 57a in the first horizontal hole 56a (see FIG. 8), and the pressure from the pressure inlet member 59 is supplied into the space 57a and acts on the first piston 71a. Therefore, the space 57 a also constitutes a part of the pressure supply passage 58.
  • the gripping portion 60 includes first and second gripping members 61a and 61b, first and second base members 62a and 62b, bolts 63a and 63b, and first and second guide members 64a and 64b.
  • the first and second gripping members 61a and 61b are a pair of members arranged along the left-right direction, and in the present embodiment, are claw-like members (gripping claws).
  • the first and second gripping members 61 a and 61 b grip the workpiece W below the main body 51 by approaching each other along the left-right direction. At least a part of each of the first and second gripping members 61a and 61b protrudes from the main body 51 in the thickness direction (here, downward direction) of the main body.
  • the entire first and second gripping members 61 a and 61 b protrude downward from the main body 51, that is, the whole is disposed outside the main body 51.
  • the thickness direction of the main body 51 described above is a direction parallel to the direction in which the first and second holding members 61a and 61b protrude from the main body 51 (here, downward direction) (the downward direction)
  • the first and second base members 62a and 62b are block-like members each having a shape in which rectangular parallelepipeds having different sizes are vertically stacked (see FIG. 5).
  • the first and second guide members 64a and 64b have a shaft-shaped male screw portion and a disk-shaped head integrally formed on the upper portion of the male screw portion.
  • the first guide member 64a is attached to the upper side of the first base member 62a by inserting the male screw portion into the female screw portion formed on the upper portion of the first base member 62a and screwing it with the female screw portion.
  • the second guide member 64b is attached above the second base member 62b.
  • the head portions of the first and second guide members 64a and 64b are supported by the step surface of the guide hole 54 as described above, and can move laterally along the guide hole 54.
  • the first gripping member 61a, the first base member 62a, and the first guide member 64a move integrally to the left and right, and the second gripping member 61b, the second base member 62b, and the second guide member 64b are integrated. Move left and right.
  • the drive mechanism 70 is a mechanism for moving the first and second holding members 61a and 61b to the left and right to switch between the first state and the second state.
  • the drive mechanism 70 includes first and second pistons 71a and 71b, bolts 77a and 77b, an elastic member 79, and an interlocking mechanism 80 (see FIG. 6).
  • the first and second pistons 71a and 71b are disposed in the first and second lateral holes 56a and 56b of the main body 51 (see FIG. 8).
  • the first and second pistons 71 a and 71 b are arranged in the front-rear direction which is a direction perpendicular to the thickness direction of the main body 51 and perpendicular to the axial direction.
  • the first and second pistons 71a and 71b have the same vertical position (arrangement height) in the main body 51 (see FIG. 7).
  • the first piston 71a is disposed in the first lateral hole 56a, and has a first direction (here, right direction) along the axial direction and a second direction (here, left direction) opposite to the first direction. It is movable to The first lateral hole 56a serves as a cylinder of the first piston 71a.
  • the first piston 71a has a disk-shaped first flange portion 72a, a columnar first shaft portion 73a, and thin-walled portions 74a and 75a.
  • the first flange portion 72a is a portion of the first piston 71a that protrudes in the radial direction from the first shaft portion 73a.
  • a stepped portion 56a1 is formed in the first horizontal hole 56a of the main body 51 (see FIG.
  • a stepped portion 56a2 is formed on the right side of the stepped portion 56a1 in the first horizontal hole 56a.
  • a portion of the first horizontal hole 56a from the step portion 56a2 to the right surface of the first flange portion 72a is a space 57a which is a part of the pressure supply path 58 described above.
  • the thin portions 74a and 75a are portions of the first shaft portion 73a, and the upper and lower portions are respectively chamfered (so-called two-chamfered) so that the thickness in the vertical direction is higher than the other portions of the first shaft portion 73a. It has become thinner (see Figures 6 and 7).
  • the upper and lower surfaces of the thin portions 74a and 75a are flat.
  • the thin portion 74a is located on the right side of the first flange portion 72a, and the first base member 62a is attached to the lower surface.
  • the thin portion 74a and the first base member 62a are connected and fixed via two bolts 77a inserted from the upper surface side of the thin portion 74a.
  • the first base member 62a and the first gripping member 61a move in the left-right direction integrally with the first piston 71a.
  • the bolt 77a is exposed in the first upper hole 55a of the main body 51 (see FIG. 4).
  • the thin portion 75a is located at the left end of the first shaft portion 73a, and the front end side of the link member 81 of the interlocking mechanism 80 is attached to the top surface.
  • the second piston 71b is disposed in the second horizontal hole 56b, and is movable in first and second directions (here, left and right direction) along the axial direction, similarly to the first piston 71a.
  • the second lateral hole 56b serves as a cylinder of the second piston 71b.
  • the second piston 71b has a disk-shaped second flange portion 72b, a columnar second shaft portion 73b, a thin portion 75b, and a relief hole 76.
  • the second flange portion 72b is a portion of the second piston 71b that protrudes in the radial direction from the second shaft portion 73b.
  • a stepped portion 56b1 is formed in the second horizontal hole 56b of the main body 51 (see FIG.
  • a stepped portion 56b2 is formed on the right side of the stepped portion 56b1 in the second horizontal hole 56b.
  • An elastic member 79 is disposed in a space 57b of the second horizontal hole 56b between the step 56b2 and the right surface of the second flange 72b.
  • the escape hole 76 has a hole formed along the axial direction from the right end of the second shaft portion 73b, and a through hole communicated with the hole and formed radially outward of the second shaft portion 73b. ing.
  • the escape hole 76 is a hole that allows the space 57 b to communicate with the outside of the main body 51, and maintains the inside of the space 57 b at the same pressure as the outside air pressure (usually atmospheric pressure). As a result, when the second flange portion 72b moves to the left and right, the relief hole 76 prevents the inside of the space 57b from changing to an air pressure different from the air pressure outside, and the second flange portion 72b can move smoothly. It is like that.
  • the thin portion 75b is a part of the second shaft portion 73b, and the upper and lower portions are chamfered in the same manner as the thin portion 75a, so that the thickness in the vertical direction is thinner than the other portions of the second shaft portion 73b. (See Figures 6 and 7).
  • the upper and lower surfaces of the thin portion 75b are flat.
  • the thin portion 75b is located at the left end of the second shaft portion 73b.
  • the second base member 62b is attached to the lower surface of the thin portion 75b.
  • the thin portion 74b and the second base member 62b are connected and fixed via two bolts 77b inserted from the upper surface side of the thin portion 74b.
  • the second base member 62b and the second holding member 61b move in the left-right direction integrally with the second piston 71b.
  • the bolt 77 b is exposed in the second upper side hole 55 b of the main body 51 (see FIG. 4).
  • the rear end side of the link member 81 of the interlocking mechanism 80 is attached on the left side of the upper surface of the thin portion 75b with respect to the bolt 77b.
  • the elastic member 79 is disposed between the stepped portion 56b2 of the second horizontal hole 56b and the right surface of the second flange portion 72b as described above.
  • the elastic member 79 is a compression coil spring in the present embodiment, and the second shaft portion 73 b is inserted inside.
  • the elastic member 79 presses both members in a direction in which the step portion 56b2 and the second flange portion 72b are separated in the left and right direction by the elastic force. By this elastic force, the elastic member 79 biases the second piston 71b in the direction to switch from the second state to the first state (left direction in the present embodiment).
  • the interlocking mechanism 80 interlocks the movement of both pistons so that the first and second pistons 71a and 71b move in opposite directions along the axial direction.
  • the interlocking mechanism 80 includes a link member 81, a support member 83, and first and second attachment members 84a and 84b (see FIGS. 6 and 8).
  • the link member 81 is a member having a flat plate-like long shape.
  • the link member 81 has its front end side connected to the left end side of the first piston 71a via the first mounting member 84a, and its rear end side connected to the left end side of the second piston 71b via the second mounting member 84b. There is.
  • the link member 81 connects the first piston 71a and the second piston 71b.
  • the first mounting member 84 a connects the two members while allowing the pivoting of the link member 81 with respect to the first piston 71 a (horizontal pivoting about the axis of the first mounting member 84 a).
  • the first mounting member 84a is, for example, a shaft portion vertically passing through a long hole formed in the link member 81 and a hole formed in the thin portion 75a of the first piston 71a, and an upper portion of the shaft portion integrally with the shaft portion.
  • a detachment preventing member such as an E-shaped retaining ring provided at the lower part of the shaft to prevent the detachment of the shaft.
  • the second mounting member 84b has the same configuration as the first mounting member 84a, and connects the two members while allowing the link member 81 to pivot relative to the second piston 71b.
  • the support member 83 is disposed between the connection portions of the link member 81 with the first and second pistons 71a and 71b (here, the portions where the first and second attachment members 84a and 84b exist), and the link The member 81 is rotatably supported.
  • the support member 83 connects both members while allowing the link member 81 to rotate with respect to the main body 51.
  • the support member 83 includes a shaft portion, a head portion, and a slip-off preventing member as in the first and second attachment members 84a and 84b, and the shaft portion vertically penetrates the link member 81.
  • the link member 81 is supported by the main body 51 at an intermediate position of the connection portion with the first and second pistons 71 a and 71 b by the support member 83. Therefore, when the first piston 71a moves leftward, the front end of the link member 81 moves leftward via the first attachment member 84a, and the link member 81 rotates clockwise in top view. As a result, the rear end portion of the link member 81 moves rightward, and moves the second piston 71b rightward via the second attachment member 84b. As described above, when one of the first and second pistons 71a and 71b moves in the left-right direction, the interlocking mechanism 80 interlocks with this and moves the other piston in the opposite direction.
  • the link member 81 is preferably disposed so as not to protrude in the thickness direction with respect to the first and second pistons 71a and 71b.
  • a range in the thickness direction (here, the vertical direction) in which at least one of the first and second pistons 71a and 71b is present is shown as a region R.
  • the upper and lower ends of the region R are at the same position as the upper and lower ends of the first and second flange portions 72a and 72b.
  • the thickness and the arrangement are such that the link member 81 does not protrude from the region R.
  • the link member 81 Since the link member 81 is connected to the thin portions 75a and 75b, the link member 81 can be easily disposed so as not to protrude from the region R.
  • the support member 83 and the first and second attachment members 84a and 84b slightly protrude upward from the region R, but these may also not protrude from the region R. That is, the entire interlocking mechanism 80 may not protrude from the region R.
  • the second state is a state in which the first piston 71a has moved in the second direction and the second piston 71b has moved in the first direction, as compared to the first state.
  • the second piston 71b moves in the second direction (here, the left direction) by the elastic force of the elastic member 79.
  • the first piston 71a is moved by the interlocking mechanism 80 in a first direction (here, right direction) opposite to the second piston 71b.
  • FIGS. 7 and 8 illustrate the mechanical chuck 50 in a state in which the workpiece W is not present. Therefore, in FIG. 8B, the movement of the first and second pistons 71a and 71b is stopped by bringing the second flange portion 72b of the second piston 71b into contact with the step portion 56b1, and the second state is achieved. On the other hand, when the mechanical chuck 50 grips the workpiece W, the first and second gripping members 61a and 61b grip the workpiece W before the second flange portion 72b contacts the step portion 56b1. The movement of the second pistons 71a and 71b is stopped to be in the second state.
  • the control unit 90 first controls the work transfer device 102 to transfer the work W backward, and controls the pallet transfer device 103 to transfer the pallet 105 to the vicinity of the robot 10.
  • the control unit 90 controls the first to fourth rotation mechanisms 26 a to 26 d of the robot 10 to move the tip 30 above the workpiece conveyance device 102, and controls the camera 40 to obtain image data.
  • the position and orientation of the work W on the work transfer apparatus 102 are detected based on the above.
  • the control unit 90 determines the workpiece W to be collected from the detected workpieces W, moves the tip 30 while appropriately rotating the mechanical chuck 50 by the fifth rotation mechanism 26e, and the first state
  • the workpiece W to be collected is positioned between the first and second holding members 61a and 61b of the mechanical chuck 50 as it is.
  • the control unit 90 controls the pressure supply source 106 to supply a positive pressure to the mechanical chuck 50 to switch the mechanical chuck 50 from the first state to the second state.
  • the first and second gripping members 61a and 61b come close to each other and grip the workpiece W.
  • control unit 90 moves the tip 30 on the pallet 105 while moving the mechanical chuck 50 in the second state to move it on the pallet 105, and controls the camera 40 on the pallet 105 based on the image data obtained. Detect the position of the recess of Then, the control unit 90 determines a recess for placing the work W out of the detected recesses, moves the tip 30 while appropriately rotating the mechanical chuck 50 by the fifth rotation mechanism 26e, and The work W is moved to the recess while keeping the 50 in the second state. Thereafter, the control unit 90 controls the pressure supply source 106 to stop the supply of positive pressure to the mechanical chuck 50.
  • the pressure supply path 58 is opened to the atmosphere, for example (normal pressure is supplied), and the mechanical chuck 50 switches from the second state to the first state.
  • the first and second gripping members 61a and 61b are separated from each other to release the workpiece W, and the workpiece W is placed in the recess.
  • the control unit 90 repeats such transfer processing, and places the plurality of works W on the pallet 105.
  • the moving direction of the first and second pistons 71a and 71b that is, the axial direction is the left and right direction
  • the axial direction is the thickness direction of the main body 51, that is, the first and the first.
  • the second holding members 61a and 61b are perpendicular to the vertical direction, which is the protruding direction of the second holding members 61a and 61b. Therefore, the moving distance of the first and second pistons 71 a and 71 b hardly affects the thickness of the mechanical chuck 50. Therefore, compared with, for example, the case where the moving direction of the first and second pistons 71a and 71b is along the thickness direction, the mechanical chuck 50 can be thinner.
  • the mechanical chuck 50 is thin, for example, when the control unit 90 moves the tip end portion 30 in the above-described transfer process, it can be suppressed that the mechanical chuck 50 contacts another object.
  • the first and second pistons 71a and 71b are arranged side by side in the front-rear direction which is a direction perpendicular to the thickness direction and perpendicular to the axial direction. Therefore, for example, the mechanical chuck 50 can be thinner than in the case where the first and second pistons 71a and 71b are arranged in the thickness direction.
  • the main body portion 51 has a pressure inlet member 59 which is an inlet for pressure supplied from the outside and protrudes and opens in a direction (herein, forward) perpendicular to the thickness direction with respect to the main body portion 51 There is. Therefore, for example, the mechanical chuck 50 can be thinner than in the case where the pressure inlet member 59 protrudes in the thickness direction.
  • the interlocking mechanism 80 is located between the link member 81 connecting the first and second pistons 71a and 71b and the connection portion of the link member 81 to the first and second pistons 71a and 71b. And a support member 83 rotatably supporting the Therefore, the first and second pistons 71a and 71b can be interlocked so as to move in the directions opposite to each other by the interlocking mechanism 80 having a relatively simple configuration.
  • the link member 81 is disposed so as to be contained in the region R, and is disposed so as not to protrude in the thickness direction with respect to the first and second pistons 71a and 71b. Therefore, since the link member 81 hardly affects the thickness of the mechanical chuck 50, the mechanical chuck 50 can be thinner.
  • the mechanical chuck 50 is not provided with a guide rail that is attached to the main body 51 and guides the movement of the first and second gripping members 61a and 61b in the left-right direction.
  • a guide rail is attached to the lower surface of the main body 51, for example, the mechanical chuck 50 is likely to be thicker by the amount of the guide rail.
  • the mechanical chuck 50 can be made thinner by not providing the guide rails.
  • the robot 10 further includes a camera 40 which moves with the mechanical chuck 50 and picks up an object located below in the direction along the thickness direction of the mechanical chuck 50.
  • a camera 40 which moves with the mechanical chuck 50 and picks up an object located below in the direction along the thickness direction of the mechanical chuck 50.
  • the mechanical chuck 50 may come in contact with an object or another object. Since the mechanical chuck 50 of the present embodiment can be thinned, at least one of the effects of suppressing the contact between the mechanical chuck 50 and an object and the effect of allowing the camera 40 to be closer to the object is obtained.
  • the first and second gripping members 61a and 61b approach in the second state and separate in the first state, but may approach in the first state and separate in the second state .
  • 1st, 2nd holding member 61a, 61b hold
  • the workpiece may be gripped by inserting the first and second gripping members 61a and 61b into the recess formed in the workpiece and separating the first and second gripping members 61a and 61b.
  • the mechanical chuck 50 is supplied with a positive pressure as the pressure from the outside, and the first state is switched to the second state by the positive pressure, but the present invention is not limited thereto.
  • negative pressure may be supplied to the mechanical chuck 50 from the outside, and the first state may be switched to the second state by the negative pressure.
  • the elastic member 79 applies an elastic force to the second piston 71b, but the invention is not limited to this, at least one of the first and second pistons 71a and 71b in the direction of switching from the second state to the first state. You can turn on the For example, an elastic force may be applied so that the elastic member 79 presses the first flange portion 72a in the right direction. Also, the elastic member 79 may exert an elastic force on both the first and second pistons 71a and 71b.
  • the elastic member 79 is a compression coil spring, but may be a tension coil spring or an elastic body other than a spring.
  • the interlocking mechanism 80 includes the flat link member 81, but the invention is not limited to this.
  • the interlocking mechanism 80 may include a rack and pinion.
  • the interlocking mechanism 80 does not include the link member 81 and the first and second attachment members 84a and 84b, and integrally integrates with a first rack that moves axially integrally with the first piston 71a and with the second piston 71b.
  • the first rack may be a part of the first piston 71a, such as being formed on the rear surface near the left end of the first piston 71a.
  • a pinion connects the first piston 71a and the second piston 71b, and the pinion corresponds to a link member.
  • the first and second pistons 71a and 71b have the same vertical position (arrangement height) in the main body 51, but the arrangement heights of the first and second pistons 71a and 71b are not the same. May be However, it is preferable that the range in the thickness direction in which the first piston 71 a exists and the range in the thickness direction in which the second piston 71 b exist at least partially overlap. It is easy to make the mechanical chuck 50 thinner as there are many overlapping parts.
  • the first and second pistons 71a and 71b are arranged in the front-rear direction, which is a direction perpendicular to the thickness direction and perpendicular to the axial direction, but not limited thereto. And you may arrange in order the left-right direction which is a direction parallel to an axial direction. However, in this case, since the size in the left-right direction of the mechanical chuck 50 tends to be large, it is preferable that the first and second pistons 71a and 71b be arranged in the front-rear direction. More specifically, it is preferable that the range in the left-right direction in which the first piston 71a exists and the range in the left-right direction in which the second piston 71b exist at least partially overlap. It is easier to reduce the size of the mechanical chuck 50 in the left-right direction as the number of overlapping portions increases.
  • first and second gripping members 61a and 61b are gripping claws in the above-described embodiment, the present invention is not limited to this, as long as the workpiece can be gripped and released.
  • the first and second gripping members 61a and 61b may be rectangular parallelepiped members.
  • the mechanical chuck 50 is not provided with a guide rail that is attached to the main body 51 and guides the movement of the first and second gripping members 61a and 61b in the left-right direction. It is also good. However, as described above, since the mechanical chuck 50 can be made thinner, it is preferable that the mechanical chuck 50 does not have a guide rail (formed of a separate member from the main body 51) attached to the main body 51.
  • the robot 10 is a vertical articulated robot among industrial robots, but the invention is not limited thereto.
  • the robot 10 may be a horizontal articulated robot or an XY robot.
  • the mechanical chuck, the industrial robot, and the work moving device of the present disclosure may be configured as follows.
  • the first and second pistons may be arranged in a direction perpendicular to the thickness direction and perpendicular to the axial direction.
  • the mechanical chuck can be made thinner compared to, for example, the case where the first and second pistons are arranged along the thickness direction.
  • the main body portion has a pressure inlet member which is an inlet for the pressure supplied from the outside, and which protrudes perpendicularly to the thickness direction with respect to the main body portion. It is also good. By so doing, the mechanical chuck can be made thinner compared to, for example, the case where the pressure inlet member protrudes in the thickness direction. In this case, the pressure inlet member may project in a direction perpendicular to the thickness direction and perpendicular to the axial direction.
  • the interlocking mechanism is located between a link member connecting the first piston and the second piston and a connection portion of the link member to the first and second pistons. And a support member rotatably supporting the link member.
  • the link member may be disposed so as not to protrude in the thickness direction with respect to the first piston and the second piston.
  • the mechanical chuck can be made thinner because the link member hardly affects the thickness of the mechanical chuck.
  • the mechanical chuck of the present disclosure may not include a guide rail attached to the main body and guiding the movement of the first and second gripping members in the axial direction.
  • a guide rail attached to the main body, the mechanical chuck is likely to be thicker by the amount of the guide rail.
  • the mechanical chuck can be made thinner by not providing the guide rails.
  • the industrial robot of the present disclosure is provided with the mechanical chuck of any aspect described above. Therefore, this industrial robot has the same effect as the above-described mechanical chuck of the present disclosure, for example, an effect that enables thinning of the mechanical chuck.
  • the industrial robot may be an articulated robot or an XY robot.
  • the industrial robot of the present disclosure may include a camera that moves together with the mechanical chuck and images an object located in a direction along the thickness direction of the mechanical chuck.
  • the mechanical chuck may contact the target or another object when, for example, the camera is brought close to the target. Since the mechanical chuck of the present disclosure can be thinned, at least one of the effects of suppressing the contact between the mechanical chuck and the object and the effect of allowing the camera to be closer to the object can be obtained.
  • the “target object” captured by the camera may be a workpiece held by the mechanical chuck, or may be another object.
  • the work transfer apparatus includes the industrial robot according to any one of the aspects described above. Therefore, this work moving device can obtain the same effect as the above-described mechanical chuck of the present disclosure, for example, an effect that enables thinning of the mechanical chuck.
  • the present invention is applicable to various industries that perform work of moving workpieces such as parts.

Abstract

The mechanical chuck according to the present disclosure is provided with: a body portion; first and second grip members each of which is at least partially projected from the body portion, in the thickness direction of the body portion; a first piston which has an axial direction perpendicular to the thickness direction, which moves in first and second directions extending along the axial direction, and which, in association with such movement, moves the first grip member in the axial direction; a second piston which is provided to the body portion so as to have an axial direction in parallel with that of the first piston and to move in the first and second directions, and which, in association with such movement, moves the second grip member in the axial direction; a link mechanism which links movement of the first piston with movement of the second piston such that a first state and a second state in which, compared to the first state, the first piston has moved further in the second direction and the second piston has moved further in the first direction are switched; a pressure supply path for switching from the first state to the second state; and an elastic member for switching from the second state to the first state.

Description

メカチャック,産業用ロボット及びワーク移動装置Mechanical chuck, industrial robot and work transfer device
 本開示は、メカチャック,産業用ロボット及びワーク移動装置に関する。 The present disclosure relates to a mechanical chuck, an industrial robot, and a work moving device.
 従来、部品を把持する一対の把持爪を備えたメカチャックが知られている(例えば、特許文献1)。特許文献1に記載のメカチャックは、真空孔と、真空孔内を上下に往復道するピストンと、一対のスライダと、圧縮バネとを備えている。このメカチャックでは、真空孔が真空OFFの状態において、圧縮バネからの力によって把持爪による部品の把持が解除される。また、このメカチャックでは、真空孔が真空ONの状態では、ピストンが上昇してスライダを移動させることで、把持爪が部品を把持する。このメカチャックは、XY方向に移動可能な装着ヘッドに取り付けられる。 BACKGROUND Conventionally, a mechanical chuck provided with a pair of gripping claws that grip components is known (for example, Patent Document 1). The mechanical chuck described in Patent Document 1 includes a vacuum hole, a piston that reciprocates up and down in the vacuum hole, a pair of sliders, and a compression spring. In this mechanical chuck, when the vacuum hole is in the vacuum OFF state, the force from the compression spring releases the gripping of the component by the gripping claws. Further, in this mechanical chuck, when the vacuum hole is in the vacuum ON state, the piston ascends to move the slider, whereby the gripping claw grips the component. The mechanical chuck is attached to a mounting head movable in the X and Y directions.
特開2012-199315号JP 2012-199315
 しかし、特許文献1に記載のメカチャックでは、把持爪が左右方向に移動するのに対してピストンは上下方向に往復動するため、メカチャックの上下方向の厚さが大きくなりやすいという問題があった。メカチャックの上下方向の厚さが大きい場合、例えばメカチャックを移動させる際にメカチャックが他の物体に接触してしまう場合があった。 However, in the mechanical chuck described in Patent Document 1, there is a problem that the thickness of the mechanical chuck in the vertical direction tends to be large because the piston reciprocates in the vertical direction while the gripping claws move in the horizontal direction. The When the thickness in the vertical direction of the mechanical chuck is large, for example, the mechanical chuck may contact another object when moving the mechanical chuck.
 本開示は、上述した課題を解決するためになされたものであり、薄型化が可能なメカチャックを提供することを主目的とする。 The present disclosure has been made to solve the above-described problems, and has as its main object to provide a mechanical chuck that can be thinned.
 本開示は、上述した主目的を達成するために以下の手段を採った。 The present disclosure takes the following measures in order to achieve the above-described main objects.
 本開示のメカチャックは、
 本体部と、
 前記本体部から各々の少なくとも一部が前記本体部の厚さ方向に突出する第1,第2把持部材と、
 軸方向が前記厚さ方向に垂直であり、該軸方向に沿った第1方向及び該第1方向とは反対の第2方向に移動するように前記本体部に配設され、該移動に伴って前記第1把持部を前記軸方向に移動させる第1ピストンと、
 前記第1ピストンと軸方向が平行になり且つ前記第1,第2方向に移動するように前記本体部に配設され、該移動に伴って前記第2把持部を前記軸方向に移動させる第2ピストンと、
 前記第1,第2ピストンが前記軸方向に沿って互いに反対方向に移動するよう該第1,第2ピストンの移動を連動させて、第1状態と、該第1状態と比べて前記第1ピストンが前記第2方向に移動し前記第2ピストンが前記第1方向に移動した第2状態と、を切り替える連動機構と、
 前記本体部に設けられ、外部から供給される圧力を少なくとも前記第1ピストンに作用させて前記第1状態から前記第2状態への切り替えを行うための圧力供給路と、
 弾性力により、前記第2状態から前記第1状態に切り替える方向に前記第1ピストン及び前記第2ピストンの少なくとも一方を付勢する弾性部材と、
 を備えたものである。
The mechanical chuck of the present disclosure is
Body part,
First and second gripping members in which at least a portion of each of the main body protrudes in the thickness direction of the main body;
An axial direction is perpendicular to the thickness direction, and is disposed on the main body so as to move in a first direction along the axial direction and in a second direction opposite to the first direction, along with the movement A first piston for moving the first grip in the axial direction;
The first piston is disposed in the main body so that the axial direction is parallel to the first piston and moved in the first and second directions, and the second grip is moved in the axial direction according to the movement. With 2 pistons,
The movement of the first and second pistons is interlocked so that the first and second pistons move in opposite directions along the axial direction, and the first state and the first state are compared with each other. An interlocking mechanism that switches between a second state in which the piston moves in the second direction and the second piston moves in the first direction;
A pressure supply passage provided in the main body for causing an externally supplied pressure to act on at least the first piston to switch from the first state to the second state;
An elastic member that biases at least one of the first piston and the second piston in a direction to switch from the second state to the first state by an elastic force;
Is provided.
 このメカチャックでは、外部から圧力供給路に圧力が供給されると、この圧力が少なくとも第1ピストンに作用する。そして、この圧力により第1ピストンが第2方向に移動すると共に連動機構によって第2ピストンが反対の第1方向に移動して、第1状態から第2状態に切り替わる。また、このメカチャックは、第2状態に切り替えるための圧力の供給がない状態では、弾性部材の弾性力及び連動機構によって第1,第2ピストンが移動して第2状態から第1状態に切り変わる。第1,第2ピストンの移動に伴って第1,第2把持部材が軸方向に移動するため、第1,第2把持部材は第1状態と第2状態との一方では接近状態となり他方では離間状態となる。そのため、このメカチャックは、この接近状態と離間状態との一方の状態でワークを把持し、他方の状態でワークを把持解除することができる。そして、このメカチャックでは、第1,第2ピストンの移動方向すなわち軸方向が、本体部の厚さ方向すなわち第1,第2把持部材の突出方向に対して垂直になっている。そのため、第1,第2ピストンの移動距離の長さがメカチャックの厚さにほとんど影響しない。したがって、例えば第1,第2ピストンの移動方向が厚さ方向に沿っている場合と比較して、このメカチャックはより薄型化が可能になる。ここで、「圧力」は、正圧としてもよいし、負圧としてもよい。「垂直」は略垂直な場合を含む。「平行」は略平行な場合を含む。 In this mechanical chuck, when pressure is supplied to the pressure supply path from the outside, this pressure acts on at least the first piston. The pressure causes the first piston to move in the second direction, and the interlocking mechanism causes the second piston to move in the opposite first direction to switch from the first state to the second state. Further, in the state in which the mechanical chuck does not supply pressure for switching to the second state, the first and second pistons are moved by the elastic force of the elastic member and the interlocking mechanism to cut the second state into the first state. change. Since the first and second holding members move in the axial direction along with the movement of the first and second pistons, the first and second holding members are in the approaching state in one of the first state and the second state, and in the other It will be in the separated state. Therefore, the mechanical chuck can grip the workpiece in one of the approaching state and the separated state, and can release the gripping in the other state. In this mechanical chuck, the moving directions, ie, axial directions, of the first and second pistons are perpendicular to the thickness direction of the main body, ie, the projecting direction of the first and second holding members. Therefore, the moving distance of the first and second pistons hardly affects the thickness of the mechanical chuck. Therefore, compared with, for example, the case where the moving directions of the first and second pistons are along the thickness direction, the mechanical chuck can be made thinner. Here, the "pressure" may be a positive pressure or a negative pressure. "Vertical" includes substantially vertical cases. "Parallel" includes substantially parallel cases.
ワーク移動装置100の概略説明図。BRIEF DESCRIPTION OF THE DRAWINGS FIG. ロボット10の概略説明図。FIG. 1 is a schematic explanatory view of a robot 10; ワーク移動装置100における電気的な接続関係を表すブロック図。FIG. 2 is a block diagram showing an electrical connection in the work moving apparatus 100. メカチャック50の斜視図。FIG. 5 is a perspective view of a mechanical chuck 50. メカチャック50の斜視図。FIG. 5 is a perspective view of a mechanical chuck 50. メカチャック50の駆動機構70の上面図。FIG. 7 is a top view of a drive mechanism 70 of the mechanical chuck 50. メカチャック50の把持部60及び駆動機構70の正面図。FIG. 7 is a front view of a grip portion 60 of the mechanical chuck 50 and a drive mechanism 70. 図4のA-A断面図。AA sectional drawing of FIG.
 本開示のワーク移動装置の実施形態について図面を参照しながら以下に説明する。図1はワーク移動装置100の概略説明図である。図2はロボット10の概略説明図である。図3はワーク移動装置100における電気的な接続関係を表すブロック図である。ワーク移動装置100の左右方向(X軸)、前後方向(Y軸)及び上下方向(Z軸)は、図1に示した通りとする。また、ロボット10については全方位に可動するため固定される特定の方向はないが、説明の便宜のため、図2に示した左右方向(X軸)、前後方向(Y軸)及び上下方向(Z軸)を用いて説明する。 Embodiments of the work transfer apparatus of the present disclosure will be described below with reference to the drawings. FIG. 1 is a schematic explanatory view of a work moving apparatus 100. As shown in FIG. FIG. 2 is a schematic explanatory view of the robot 10. FIG. 3 is a block diagram showing the electrical connection relationship in the work transfer apparatus 100. As shown in FIG. The left-right direction (X-axis), the front-rear direction (Y-axis), and the up-down direction (Z-axis) of the workpiece moving device 100 are as shown in FIG. Also, the robot 10 is movable in all directions, and there is no specific direction fixed, but for the convenience of description, the left-right direction (X axis), the front-rear direction (Y axis) and the up-down direction shown in FIG. It demonstrates using Z axis | shaft).
 ワーク移動装置100は、作業対象の物品(ここではワークW)に対して移動を含む所定の作業を行う装置として構成されている。ワーク移動装置100は、ロボット10と、基台101と、ワーク搬送装置102と、パレット搬送装置103と、圧力供給源106と、装置全体を制御する制御部90(図3参照)と、を備えている。ロボット10には、カメラ40及びメカチャック50が取り付けられている。基台101は、ロボット10,ワーク搬送装置102及びパレット搬送装置103を配設固定する。ワーク搬送装置102及びパレット搬送装置103は、それぞれベルトコンベアとして構成されている。ワーク搬送装置102は、図示しないワーク供給部又は作業者によって装置前方に供給された複数のワークWを、後方のパレット搬送装置103付近まで搬送する。パレット搬送装置103は、パレット105を右方向に搬送して、パレット105の搬入及び搬出を行う。圧力供給源106は、ロボット10に取り付けられたツール(ここではメカチャック50)に圧力を供給する。 The work transfer apparatus 100 is configured as an apparatus that performs a predetermined work including movement on an article to be worked (here, the work W). The work transfer apparatus 100 includes a robot 10, a base 101, a work transfer apparatus 102, a pallet transfer apparatus 103, a pressure supply source 106, and a control unit 90 (see FIG. 3) for controlling the entire apparatus. ing. A camera 40 and a mechanical chuck 50 are attached to the robot 10. The base 101 arranges and fixes the robot 10, the work transfer device 102 and the pallet transfer device 103. The work transfer device 102 and the pallet transfer device 103 are each configured as a belt conveyor. The work transfer apparatus 102 transfers a plurality of works W supplied to the front of the apparatus by a work supply unit or a worker (not shown) to the vicinity of the rear pallet transfer apparatus 103. The pallet conveyance device 103 conveys the pallet 105 in the right direction to carry in and out the pallet 105. The pressure source 106 supplies pressure to a tool (here, the mechanical chuck 50) attached to the robot 10.
 ロボット10は、ワークWに対して移動を含む所定の作業を行う産業用ロボットとして構成されている。ワークWは、特に限定されないが、例えば、機械部品、電気部品、電子部品、化学部品など各種の部品のほか、食品、バイオ、生物関連の物品などが挙げられる。本実施形態では、ロボット10は、チップ状の電子部品などとして構成された複数のワークWをワーク搬送装置102上から採取して移動させ、パレット105上の複数の凹部に載置する処理を行う。 The robot 10 is configured as an industrial robot that performs predetermined work including movement on the workpiece W. The workpiece W is not particularly limited, and examples thereof include various parts such as mechanical parts, electrical parts, electronic parts, and chemical parts, as well as food, bio and biological related articles. In the present embodiment, the robot 10 picks up and moves a plurality of workpieces W configured as chip-like electronic components from the workpiece conveyance device 102 and places the workpieces W in the plurality of concave portions on the pallet 105. .
 ロボット10は、垂直多関節ロボットとして構成された多軸ロボットであり、アーム部20と、第3支持部23と、台座部24と、先端部30と、を備えている。アーム部20は、複数のアームを有しており、本実施形態では第1,第2アーム21,22を有している。また、ロボット10は、第1~第5回転機構26a~26eを備えている(図2,3参照)。第1~第5回転機構26a~26eは、それぞれ、回転軸及び歯車機構などを有している。第1~第5回転機構26a~26eの各々は、ロボット10が有する図示しないモータによって回転する。また、ロボット10は、第1~第5回転機構26a~26eの各々に対応するモータの回転位置を検出するための図示しない複数のエンコーダを備えている。図2には、第1~第5回転機構26a~26eの各々の回転方向を太線矢印で示した。 The robot 10 is a multi-axis robot configured as a vertical articulated robot, and includes an arm unit 20, a third support unit 23, a pedestal unit 24, and a tip unit 30. The arm unit 20 has a plurality of arms, and in the present embodiment, has first and second arms 21 and 22. The robot 10 also includes first to fifth rotation mechanisms 26a to 26e (see FIGS. 2 and 3). The first to fifth rotation mechanisms 26a to 26e each have a rotation shaft, a gear mechanism, and the like. Each of the first to fifth rotation mechanisms 26a to 26e is rotated by a motor (not shown) that the robot 10 has. Further, the robot 10 is provided with a plurality of encoders (not shown) for detecting the rotational position of the motor corresponding to each of the first to fifth rotation mechanisms 26a to 26e. In FIG. 2, the rotation directions of the first to fifth rotation mechanisms 26a to 26e are indicated by thick arrows.
 図2に示すように、第1アーム21は、端部が第1回転機構26aを介して先端部30に接続されている。第1回転機構26aは、先端部30を第1アーム21に対して回動させる。第1アーム21は、先端部30とは反対側の端部が第2回転機構26bを介して第2アーム22に接続されている。第2回転機構26bは、第1アーム21を第2アーム22に対して回動させる。第2アーム22は、第1アーム21とは反対側の端部が第3回転機構26cを介して第3支持部23に接続されている。第3回転機構26cは、第2アーム22を第3支持部23に対して回動させる。第3支持部23は、第4回転機構26dを介して台座部24に接続されて、台座部24に支持されている。第4回転機構26dは、台座部24に対して第3支持部23を水平旋回させる。 As shown in FIG. 2, the end of the first arm 21 is connected to the tip 30 through the first rotation mechanism 26 a. The first rotation mechanism 26 a rotates the tip 30 with respect to the first arm 21. The end of the first arm 21 opposite to the tip end 30 is connected to the second arm 22 via the second rotation mechanism 26 b. The second rotation mechanism 26 b rotates the first arm 21 with respect to the second arm 22. An end of the second arm 22 opposite to the first arm 21 is connected to the third support 23 via a third rotation mechanism 26c. The third rotation mechanism 26 c rotates the second arm 22 with respect to the third support portion 23. The third support 23 is connected to the pedestal 24 via the fourth rotation mechanism 26 d and supported by the pedestal 24. The fourth rotation mechanism 26 d horizontally pivots the third support 23 with respect to the pedestal 24.
 先端部30は、ワークWに対して作業を行う種々のツール(エンドエフェクタともいう)を下端に取り付け可能な装着部32を備えている。装着部32は、先端部30本体の下面に配設されている。本実施形態では、装着部32の下端にはツールとしてメカチャック50が取り付けられている。第5回転機構26eは、先端部30内に配設されており、装着部32を上下方向に沿った軸を中心として回転(自転)させる。これにより、装着部32と共にメカチャック50も回転(自転)する。装着部32の下端付近の側面には、右方向に突出する圧力供給ノズル33が配設されている。圧力供給ノズル33は、メカチャック50の圧力入口部材59と配管34で接続されている。配管34は、例えば樹脂などの可撓性のある材質からなる。圧力供給源106からの圧力は、図示しない配管や先端部30の内部に設けられた孔などを介して圧力供給ノズル33まで到達し、圧力供給ノズル33から配管34を介してメカチャック50に供給される。メカチャック50は、圧力供給源106からの圧力を利用してワークWの把持及び把持解除を行う。 The distal end portion 30 includes a mounting portion 32 to which various tools (also referred to as end effectors) for performing work on the workpiece W can be mounted at the lower end. The mounting portion 32 is disposed on the lower surface of the tip portion 30 main body. In the present embodiment, a mechanical chuck 50 is attached to the lower end of the mounting portion 32 as a tool. The fifth rotation mechanism 26e is disposed in the distal end portion 30, and rotates (rotations) the mounting portion 32 about an axis extending in the vertical direction. Thereby, the mechanical chuck 50 is also rotated (rotated) together with the mounting portion 32. On the side surface near the lower end of the mounting portion 32, a pressure supply nozzle 33 projecting rightward is disposed. The pressure supply nozzle 33 is connected to the pressure inlet member 59 of the mechanical chuck 50 by a pipe 34. The pipe 34 is made of, for example, a flexible material such as resin. The pressure from the pressure supply source 106 reaches the pressure supply nozzle 33 through a pipe (not shown) or a hole provided in the inside of the distal end portion 30, and is supplied from the pressure supply nozzle 33 to the mechanical chuck 50 through the piping 34. Be done. The mechanical chuck 50 grips and releases the workpiece W using the pressure from the pressure supply source 106.
 カメラ40は、先端部30の下面に取り付けられており、装着部32の前方に配置されている。カメラ40は、先端部30の移動によりメカチャック50と共に移動する。カメラ40は、照射部41と、撮像部42と、を備える。照射部41は、撮像部42の外周に円状に配設された照明であり、下方の撮像対象物に対して光を照射する。撮像部42は、画像を撮像可能なユニットであり、図2の下方を撮像することで対象物を撮像する。撮像部42は、レンズなどの光学系と、受光により電荷を発生させ発生した電荷を出力する撮像素子とを備えている。カメラ40は、撮像部42から出力された電荷に基づいて画像データを生成し、生成した画像データを制御部90へ出力する。 The camera 40 is attached to the lower surface of the distal end portion 30 and disposed in front of the mounting portion 32. The camera 40 moves with the mechanical chuck 50 by the movement of the tip end portion 30. The camera 40 includes an irradiation unit 41 and an imaging unit 42. The irradiation unit 41 is illumination arranged in a circular shape on the outer periphery of the imaging unit 42, and irradiates light to the lower imaging target. The imaging unit 42 is a unit capable of capturing an image, and captures an image of an object by capturing the lower side of FIG. 2. The imaging unit 42 includes an optical system such as a lens, and an imaging device that generates an electric charge by receiving light and outputs the generated electric charge. The camera 40 generates image data based on the charge output from the imaging unit 42, and outputs the generated image data to the control unit 90.
 制御部90は、CPUを中心とするマイクロプロセッサとして構成されており、ワーク移動装置100全体を制御する。制御部90は、上述したモータに駆動信号を出力して第1~第5回転機構26a~26eを駆動させたり、上述したエンコーダからの信号を入力したりして、先端部30の位置及びメカチャック50の向きを制御する。制御部90は、カメラ40,ワーク搬送装置102,及びパレット搬送装置103に制御信号を出力したり、カメラ40からの画像データを入力したりする。制御部90は、圧力供給源106に制御信号を出力して圧力供給源106が供給する圧力(ここでは正圧とする)の有無を制御することにより、メカチャック50の把持及び把持解除を制御する。 The control unit 90 is configured as a microprocessor centering on a CPU, and controls the entire work moving apparatus 100. The control unit 90 outputs a drive signal to the above-described motor to drive the first to fifth rotation mechanisms 26a to 26e, or receives a signal from the above-described encoder, and thereby the position and mechanism of the tip portion 30. The direction of the chuck 50 is controlled. The control unit 90 outputs control signals to the camera 40, the work transfer device 102, and the pallet transfer device 103, and inputs image data from the camera 40. The control unit 90 outputs a control signal to the pressure supply source 106 to control the presence or absence of the pressure (here, positive pressure) supplied by the pressure supply source 106, thereby controlling the gripping and releasing of the mechanical chuck 50. Do.
 メカチャック50について詳細に説明する。図4,5はメカチャック50の斜視図である。図6はメカチャック50の駆動機構70の上面図である。図7はメカチャック50の把持部60及び駆動機構70の正面図である。図8は図4のA-A断面図であり、メカチャック50を水平方向(前後左右方向)に沿って切断した断面を示している。図6,7では、本体部51を仮想的に透過してメカチャック50の内部の様子を示している。また、図4~6,7A,8Aはメカチャック50の第1状態を示し、図7B及び図8Bはメカチャック50の第2状態を示している。本実施形態では、第1状態はメカチャック50がワークWを把持しない(把持解除)状態であり、第2状態はメカチャック50がワークWを把持する状態である。メカチャック50についてもロボット10と同様に、図2に示した方向を用いて図4~8を説明する。 The mechanical chuck 50 will be described in detail. 4 and 5 are perspective views of the mechanical chuck 50. FIG. FIG. 6 is a top view of the drive mechanism 70 of the mechanical chuck 50. As shown in FIG. FIG. 7 is a front view of the grip portion 60 of the mechanical chuck 50 and the drive mechanism 70. FIG. 8 is a cross-sectional view taken along the line AA of FIG. 6 and 7 virtually show the inside of the mechanical chuck 50 through the main body 51 virtually. 4 to 6, 7A and 8A show a first state of the mechanical chuck 50, and FIGS. 7B and 8B show a second state of the mechanical chuck 50. In the present embodiment, the first state is a state in which the mechanical chuck 50 does not grip the workpiece W (grip release), and the second state is a state in which the mechanical chuck 50 grips the workpiece W. Similarly to the robot 10, the mechanical chuck 50 will be described with reference to FIGS. 4 to 8 using the directions shown in FIG.
 メカチャック50は、本体部51と、把持部60(図5参照)と、駆動機構70(図6参照)と、を備えている。本体部51は、略直方体の金属製部材であり、メカチャック50の筐体の役割を果たす。本体部51は、直方体の3辺の長さのうち厚さ方向(ここでは上下方向)の長さが最も小さくなっている。駆動機構70は本体部51の内部に配設されている。 The mechanical chuck 50 includes a main body 51, a grip 60 (see FIG. 5), and a drive mechanism 70 (see FIG. 6). The main body 51 is a substantially rectangular metal member and serves as a housing of the mechanical chuck 50. The main body portion 51 has the smallest length in the thickness direction (here, the vertical direction) among the lengths of the three sides of the rectangular parallelepiped. The drive mechanism 70 is disposed inside the main body 51.
 本体部51は、メカチャック50を装着部32に取り付けるための取付部52と、外部から圧力が供給される圧力供給路58と、を備えている(図4参照)。本体部51の上部には、ガイド孔54と、第1,第2上側孔55a,55bと、が形成されている。本体部には、軸方向が左右方向と平行な貫通孔である第1,第2横孔56a,56bが形成されている(図4,8参照)。本体部51の下部には、第1,第2下側孔53a,53bが形成されている(図5参照)。 The main body 51 includes an attaching portion 52 for attaching the mechanical chuck 50 to the attaching portion 32, and a pressure supply passage 58 to which pressure is supplied from the outside (see FIG. 4). A guide hole 54 and first and second upper side holes 55a and 55b are formed in the upper portion of the main body 51. In the main body portion, first and second horizontal holes 56a and 56b, which are through holes parallel in the axial direction to the left and right direction, are formed (see FIGS. 4 and 8). First and second lower holes 53a and 53b are formed in the lower part of the main body 51 (see FIG. 5).
 取付部52は、本体部51の上面に設けられ、複数(ここでは4個)のボルト孔52aを備えている。メカチャック50は、このボルト孔52aと図示しないボルトとを用いて、装着部32の下面に取り付けられる。ガイド孔54は、長手方向が左右方向に沿った角丸の長方形状の孔である。ガイド孔54内には把持部60の一部である第1,第2ガイド部材64a,64bが左右方向に移動可能に配置されている。ガイド孔54は上方を向いた段差面を有しており、本体部51はこの段差面で第1,第2ガイド部材64a,64bを支持する。 The mounting portion 52 is provided on the upper surface of the main body portion 51, and includes a plurality of (here, four) bolt holes 52a. The mechanical chuck 50 is attached to the lower surface of the mounting portion 32 using the bolt holes 52 a and a bolt (not shown). The guide holes 54 are rectangular holes with rounded corners whose longitudinal direction extends in the left-right direction. In the guide hole 54, first and second guide members 64a and 64b which are a part of the grip portion 60 are disposed movably in the left-right direction. The guide hole 54 has a step surface facing upward, and the main body 51 supports the first and second guide members 64a and 64b on the step surface.
 圧力供給路58は、外部(ここでは圧力供給源106)から供給される圧力を少なくとも駆動機構70の第1ピストン71aに作用させて第1状態から第2状態への切り替えを行うための圧力の経路である。圧力供給路58は、本体部51に対して厚さ方向に垂直な方向(ここでは前方)に突出して開口している圧力入口部材59を有している。圧力入口部材59は、配管34を取り付けるためのノズルであり、外部から供給される圧力の入口となる。圧力入口部材59は第1横孔56a内の空間57aに開口しており(図8参照)、圧力入口部材59からの圧力は空間57a内に供給されて第1ピストン71aに作用する。そのため、空間57aも圧力供給路58の一部を構成している。 The pressure supply path 58 causes pressure supplied from the outside (here, the pressure supply source 106) to act on at least the first piston 71a of the drive mechanism 70 to switch the pressure from the first state to the second state. It is a route. The pressure supply passage 58 has a pressure inlet member 59 which protrudes and opens in a direction (herein, forward) perpendicular to the thickness direction with respect to the main body 51. The pressure inlet member 59 is a nozzle for attaching the pipe 34, and serves as an inlet for externally supplied pressure. The pressure inlet member 59 opens into the space 57a in the first horizontal hole 56a (see FIG. 8), and the pressure from the pressure inlet member 59 is supplied into the space 57a and acts on the first piston 71a. Therefore, the space 57 a also constitutes a part of the pressure supply passage 58.
 把持部60は、第1,第2把持部材61a,61bと、第1,第2ベース部材62a,62bと、ボルト63a,63bと、第1,第2ガイド部材64a,64bと、を備えている(図5~7参照)。第1,第2把持部材61a,61bは、左右方向に沿って並べられた一対の部材であり、本実施形態では爪状の部材(把持爪)である。第1,第2把持部材61a,61bは、互いに左右方向に沿って接近することでワークWを本体部51の下方で把持する。第1,第2把持部材61a,61bは、本体部51から各々の少なくとも一部が本体部の厚さ方向(ここでは下方向)に突出している。本実施形態では、第1,第2把持部材61a,61bは、全体が本体部51から下方向に突出している、すなわち全体が本体部51の外側に配置されている。ここで、上述した本体部51の厚さ方向は、第1,第2把持部材61a,61bの本体部51からの突出方向(ここでは下方向)を基準として、この突出方向に平行な方向(ここでは上下方向)として定義されるものとする。第1,第2ベース部材62a,62bは、それぞれ、大きさの異なる直方体を上下に重ねた形状をしているブロック状の部材である(図5参照)。第1ベース部材62aは、本体部51の第1下側孔53a内に配置されており、第1下側孔53a内で左右に移動可能である。第2ベース部材62bは、本体部51の第2下側孔53b内に配置されており、第2下側孔53b内で左右に移動可能である。第1ベース部材62aの下面には、2本のボルト63aを介して第1把持部材61aが固定されている。第2ベース部材62bの下面には、2本のボルト63bを介して第2把持部材61bが固定されている。第1,第2ガイド部材64a,64bは、第1,第2把持部材61a,61bの左右方向の移動を案内する部材である。第1,第2ガイド部材64a,64bは、軸状の雄ねじ部と雄ねじ部の上部に一体形成された円板状の頭部とを有している。第1ガイド部材64aは、雄ねじ部が第1ベース部材62aの上部に形成された雌ねじ部に挿入されて雌ねじ部と螺合することで、第1ベース部材62aの上方に取り付けられている。第2ガイド部材64bについても同様にして第2ベース部材62bの上方に取り付けられている。第1,第2ガイド部材64a,64bの頭部は上述したようにガイド孔54の段差面に支持されており、ガイド孔54に沿って左右に移動可能である。これにより、第1把持部材61a,第1ベース部材62a,及び第1ガイド部材64aは一体的に左右に移動し、第2把持部材61b,第2ベース部材62b,及び第2ガイド部材64bは一体的に左右に移動する。 The gripping portion 60 includes first and second gripping members 61a and 61b, first and second base members 62a and 62b, bolts 63a and 63b, and first and second guide members 64a and 64b. (See Figures 5-7). The first and second gripping members 61a and 61b are a pair of members arranged along the left-right direction, and in the present embodiment, are claw-like members (gripping claws). The first and second gripping members 61 a and 61 b grip the workpiece W below the main body 51 by approaching each other along the left-right direction. At least a part of each of the first and second gripping members 61a and 61b protrudes from the main body 51 in the thickness direction (here, downward direction) of the main body. In the present embodiment, the entire first and second gripping members 61 a and 61 b protrude downward from the main body 51, that is, the whole is disposed outside the main body 51. Here, the thickness direction of the main body 51 described above is a direction parallel to the direction in which the first and second holding members 61a and 61b protrude from the main body 51 (here, downward direction) (the downward direction) Here, it is defined as vertical direction). The first and second base members 62a and 62b are block-like members each having a shape in which rectangular parallelepipeds having different sizes are vertically stacked (see FIG. 5). The first base member 62a is disposed in the first lower hole 53a of the main body 51, and is movable laterally in the first lower hole 53a. The second base member 62b is disposed in the second lower hole 53b of the main body 51, and is movable laterally in the second lower hole 53b. The first holding member 61a is fixed to the lower surface of the first base member 62a via two bolts 63a. The second holding member 61b is fixed to the lower surface of the second base member 62b via two bolts 63b. The first and second guide members 64a and 64b are members for guiding the lateral movement of the first and second gripping members 61a and 61b. The first and second guide members 64a and 64b have a shaft-shaped male screw portion and a disk-shaped head integrally formed on the upper portion of the male screw portion. The first guide member 64a is attached to the upper side of the first base member 62a by inserting the male screw portion into the female screw portion formed on the upper portion of the first base member 62a and screwing it with the female screw portion. Similarly, the second guide member 64b is attached above the second base member 62b. The head portions of the first and second guide members 64a and 64b are supported by the step surface of the guide hole 54 as described above, and can move laterally along the guide hole 54. As a result, the first gripping member 61a, the first base member 62a, and the first guide member 64a move integrally to the left and right, and the second gripping member 61b, the second base member 62b, and the second guide member 64b are integrated. Move left and right.
 駆動機構70は、第1,第2把持部材61a,61bを左右に移動させて第1状態と第2状態との切り替えを行うための機構である。駆動機構70は、第1,第2ピストン71a,71bと、ボルト77a,77bと、弾性部材79と、連動機構80と、を備えている(図6参照)。 The drive mechanism 70 is a mechanism for moving the first and second holding members 61a and 61b to the left and right to switch between the first state and the second state. The drive mechanism 70 includes first and second pistons 71a and 71b, bolts 77a and 77b, an elastic member 79, and an interlocking mechanism 80 (see FIG. 6).
 第1,第2ピストン71a,71bは、軸方向が互いに平行になり、且つ、軸方向が本体部51の厚さ方向に垂直(=前後左右方向と平行)になるように配置されている。本実施形態では、第1,第2ピストン71a,71bの軸方向はいずれも左右方向に平行である。第1,第2ピストン71a,71bは、それぞれ本体部51の第1,第2横孔56a,56b内に配置されている(図8参照)。第1,第2ピストン71a,71bは、本体部51の厚さ方向に垂直且つ軸方向に垂直な方向である前後方向に並べて配置されている。第1,第2ピストン71a,71bは、本体部51内での上下方向の位置(配置高さ)が同じになっている(図7参照)。 The first and second pistons 71a and 71b are arranged such that the axial directions are parallel to each other, and the axial directions are perpendicular to the thickness direction of the main body 51 (= parallel to the front and rear, right and left directions). In the present embodiment, the axial directions of the first and second pistons 71a and 71b are both parallel to the left and right direction. The first and second pistons 71a and 71b are disposed in the first and second lateral holes 56a and 56b of the main body 51 (see FIG. 8). The first and second pistons 71 a and 71 b are arranged in the front-rear direction which is a direction perpendicular to the thickness direction of the main body 51 and perpendicular to the axial direction. The first and second pistons 71a and 71b have the same vertical position (arrangement height) in the main body 51 (see FIG. 7).
 第1ピストン71aは、第1横孔56a内に配置されており、軸方向に沿った第1方向(ここでは右方向)及び第1方向とは反対側の第2方向(ここでは左方向)に移動可能である。第1横孔56aは第1ピストン71aのシリンダーとしての役割を果たす。第1ピストン71aは、円板状の第1フランジ部72aと、円柱状の第1軸部73aと、薄肉部74a,75aと、を有している。第1フランジ部72aは、第1ピストン71aのうち第1軸部73aから径方向に突出した部分である。本体部51の第1横孔56aには段差部56a1が形成されており(図8参照)、この段差部56a1と第1フランジ部72aの右側の面とが接触することで、第1ピストン71aの右方向への移動範囲が制限されている。また、第1横孔56aには段差部56a1よりも右側に段差部56a2が形成されている。第1横孔56aのうち、段差部56a2から第1フランジ部72aの右面までの部分が、上述した圧力供給路58の一部である空間57aである。この空間57aに正圧が供給されると、第1フランジ部72aの右面に正圧が作用し、第1ピストン71aは左方向に押圧されて移動する。 The first piston 71a is disposed in the first lateral hole 56a, and has a first direction (here, right direction) along the axial direction and a second direction (here, left direction) opposite to the first direction. It is movable to The first lateral hole 56a serves as a cylinder of the first piston 71a. The first piston 71a has a disk-shaped first flange portion 72a, a columnar first shaft portion 73a, and thin- walled portions 74a and 75a. The first flange portion 72a is a portion of the first piston 71a that protrudes in the radial direction from the first shaft portion 73a. A stepped portion 56a1 is formed in the first horizontal hole 56a of the main body 51 (see FIG. 8), and the first piston 71a is brought into contact with the stepped portion 56a1 and the right side surface of the first flange portion 72a. The range of movement to the right is limited. A stepped portion 56a2 is formed on the right side of the stepped portion 56a1 in the first horizontal hole 56a. A portion of the first horizontal hole 56a from the step portion 56a2 to the right surface of the first flange portion 72a is a space 57a which is a part of the pressure supply path 58 described above. When the positive pressure is supplied to the space 57a, the positive pressure acts on the right surface of the first flange portion 72a, and the first piston 71a is pressed and moved leftward.
 薄肉部74a,75aは、第1軸部73aの一部であり、それぞれ、上下の一部が面取り(いわゆる2面取り)されることで第1軸部73aの他の部分よりも上下方向の厚さが薄くなっている(図6,7参照)。薄肉部74a,75aは、それぞれ、上面及び下面が平面になっている。薄肉部74aは、第1フランジ部72aよりも右側に位置しており、下面には第1ベース部材62aが取り付けられている。薄肉部74aと第1ベース部材62aとは、薄肉部74aの上面側から挿入された2本のボルト77aを介して接続固定されている。そのため、第1ピストン71aの左右方向の移動に伴って、第1ベース部材62a及び第1把持部材61aが第1ピストン71aと一体的に左右方向に移動する。ボルト77aは、本体部51の第1上側孔55a内に露出している(図4参照)。薄肉部75aは、第1軸部73aの左端部に位置しており、上面に連動機構80のリンク部材81の前端側が取り付けられている。 The thin portions 74a and 75a are portions of the first shaft portion 73a, and the upper and lower portions are respectively chamfered (so-called two-chamfered) so that the thickness in the vertical direction is higher than the other portions of the first shaft portion 73a. It has become thinner (see Figures 6 and 7). The upper and lower surfaces of the thin portions 74a and 75a are flat. The thin portion 74a is located on the right side of the first flange portion 72a, and the first base member 62a is attached to the lower surface. The thin portion 74a and the first base member 62a are connected and fixed via two bolts 77a inserted from the upper surface side of the thin portion 74a. Therefore, along with the movement of the first piston 71a in the left-right direction, the first base member 62a and the first gripping member 61a move in the left-right direction integrally with the first piston 71a. The bolt 77a is exposed in the first upper hole 55a of the main body 51 (see FIG. 4). The thin portion 75a is located at the left end of the first shaft portion 73a, and the front end side of the link member 81 of the interlocking mechanism 80 is attached to the top surface.
 第2ピストン71bは、第2横孔56b内に配置されており、第1ピストン71aと同様に軸方向に沿った第1,第2方向(ここでは左右方向)に移動可能である。第2横孔56bは第2ピストン71bのシリンダーとしての役割を果たす。第2ピストン71bは、円板状の第2フランジ部72bと、円柱状の第2軸部73bと、薄肉部75bと、逃がし孔76と、を有している。第2フランジ部72bは、第2ピストン71bのうち第2軸部73bから径方向に突出した部分である。本体部51の第2横孔56bには段差部56b1が形成されており(図8参照)、この段差部56b1と第2フランジ部72bの右側の面とが接触することで、第2ピストン71bの右方向への移動範囲が制限されている。また、第2横孔56bには段差部56b1よりも右側に段差部56b2が形成されている。第2横孔56bのうち段差部56b2と第2フランジ部72bの右面との間の空間57bには、弾性部材79が配置されている。逃がし孔76は、第2軸部73bの右端から軸方向に沿って形成された穴と、この穴に連通し第2軸部73bの径方向外側に向かって形成された貫通孔とを有している。逃がし孔76は、空間57bと本体部51の外部とを連通させる孔であり、空間57b内を外部の気圧(通常は大気圧)と同じ気圧に保っている。これにより、逃がし孔76は、第2フランジ部72bが左右に移動する際に、空間57b内が外部の気圧と異なる気圧に変化するのを抑制して、第2フランジ部72bが滑らかに移動できるようにしている。 The second piston 71b is disposed in the second horizontal hole 56b, and is movable in first and second directions (here, left and right direction) along the axial direction, similarly to the first piston 71a. The second lateral hole 56b serves as a cylinder of the second piston 71b. The second piston 71b has a disk-shaped second flange portion 72b, a columnar second shaft portion 73b, a thin portion 75b, and a relief hole 76. The second flange portion 72b is a portion of the second piston 71b that protrudes in the radial direction from the second shaft portion 73b. A stepped portion 56b1 is formed in the second horizontal hole 56b of the main body 51 (see FIG. 8), and the second piston 71b is brought into contact with the stepped portion 56b1 and the right surface of the second flange portion 72b. The range of movement to the right is limited. A stepped portion 56b2 is formed on the right side of the stepped portion 56b1 in the second horizontal hole 56b. An elastic member 79 is disposed in a space 57b of the second horizontal hole 56b between the step 56b2 and the right surface of the second flange 72b. The escape hole 76 has a hole formed along the axial direction from the right end of the second shaft portion 73b, and a through hole communicated with the hole and formed radially outward of the second shaft portion 73b. ing. The escape hole 76 is a hole that allows the space 57 b to communicate with the outside of the main body 51, and maintains the inside of the space 57 b at the same pressure as the outside air pressure (usually atmospheric pressure). As a result, when the second flange portion 72b moves to the left and right, the relief hole 76 prevents the inside of the space 57b from changing to an air pressure different from the air pressure outside, and the second flange portion 72b can move smoothly. It is like that.
 薄肉部75bは、第2軸部73bの一部であり、薄肉部75aと同様に上下の一部が面取りされることで第2軸部73bの他の部分よりも上下方向の厚さが薄くなっている(図6,7参照)。薄肉部75bは、上面及び下面が平面になっている。薄肉部75bは、第2軸部73bの左端部に位置している。薄肉部75bの下面には、第2ベース部材62bが取り付けられている。薄肉部74bと第2ベース部材62bとは、薄肉部74bの上面側から挿入された2本のボルト77bを介して接続固定されている。そのため、第2ピストン71bの左右方向の移動に伴って、第2ベース部材62b及び第2把持部材61bが第2ピストン71bと一体的に左右方向に移動する。ボルト77bは、本体部51の第2上側孔55b内に露出している(図4参照)。薄肉部75bの上面のうちボルト77bよりも左側には、連動機構80のリンク部材81の後端側が取り付けられている。 The thin portion 75b is a part of the second shaft portion 73b, and the upper and lower portions are chamfered in the same manner as the thin portion 75a, so that the thickness in the vertical direction is thinner than the other portions of the second shaft portion 73b. (See Figures 6 and 7). The upper and lower surfaces of the thin portion 75b are flat. The thin portion 75b is located at the left end of the second shaft portion 73b. The second base member 62b is attached to the lower surface of the thin portion 75b. The thin portion 74b and the second base member 62b are connected and fixed via two bolts 77b inserted from the upper surface side of the thin portion 74b. Therefore, with the movement of the second piston 71b in the left-right direction, the second base member 62b and the second holding member 61b move in the left-right direction integrally with the second piston 71b. The bolt 77 b is exposed in the second upper side hole 55 b of the main body 51 (see FIG. 4). The rear end side of the link member 81 of the interlocking mechanism 80 is attached on the left side of the upper surface of the thin portion 75b with respect to the bolt 77b.
 弾性部材79は、上述したように第2横孔56bの段差部56b2と第2フランジ部72bの右面との間に配置されている。弾性部材79は、本実施形態では圧縮コイルばねであり、内側に第2軸部73bが挿通されている。弾性部材79は、弾性力により、段差部56b2と第2フランジ部72bとが左右に離間する方向に両部材を押圧する。この弾性力により、弾性部材79は、第2状態から第1状態に切り替える方向(本実施形態では左方向)に第2ピストン71bを付勢する。 The elastic member 79 is disposed between the stepped portion 56b2 of the second horizontal hole 56b and the right surface of the second flange portion 72b as described above. The elastic member 79 is a compression coil spring in the present embodiment, and the second shaft portion 73 b is inserted inside. The elastic member 79 presses both members in a direction in which the step portion 56b2 and the second flange portion 72b are separated in the left and right direction by the elastic force. By this elastic force, the elastic member 79 biases the second piston 71b in the direction to switch from the second state to the first state (left direction in the present embodiment).
 連動機構80は、第1,第2ピストン71a,71bが軸方向に沿って互いに反対方向に移動するよう両ピストンの移動を連動させる機構である。連動機構80は、リンク部材81と、支持部材83と、第1,第2取付部材84a,84bと、を備えている(図6,8参照)。リンク部材81は、平板状の長尺な形状をした部材である。リンク部材81は、前端側が第1取付部材84aを介して第1ピストン71aの左端側と接続されており、後端側が第2取付部材84bを介して第2ピストン71bの左端側と接続されている。これにより、リンク部材81は第1ピストン71aと第2ピストン71bとを接続している。第1取付部材84aは、第1ピストン71aに対するリンク部材81の回動(第1取付部材84aの軸を中心とした水平旋回)を許容しつつ両部材を接続している。第1取付部材84aは、例えば、リンク部材81に形成された長孔及び第1ピストン71aの薄肉部75aに形成された孔を上下に貫通する軸部と、軸部の上部に軸部と一体的に形成された頭部と、軸部の下部に設けられて軸部の抜けを防止するE型止め輪などの抜け防止部材と、を有している。第2取付部材84bは、第1取付部材84aと同様の構成をしており、第2ピストン71bに対するリンク部材81の回動を許容しつつ両部材を接続している。支持部材83は、リンク部材81のうち第1,第2ピストン71a,71bとの接続部分(ここでは第1,第2取付部材84a,84bが存在する部分)の間に配置されており、リンク部材81を回動可能に支持している。支持部材83は、本体部51に対するリンク部材81の回動を許容しつつ両部材を接続している。支持部材83は、第1,第2取付部材84a,84bと同様に軸部と頭部と抜け防止部材とを備えており、軸部がリンク部材81を上下に貫通している。リンク部材81は、支持部材83により、第1,第2ピストン71a,71bとの接続部分の中間位置で本体部51に支持されている。そのため、第1ピストン71aが左方向に移動すると、第1取付部材84aを介してリンク部材81の前端部が左方向に移動して、リンク部材81は上面視で右回りに回転する。これにより、リンク部材81の後端部は右方向に移動して、第2取付部材84bを介して第2ピストン71bを右方向に移動させる。このように、連動機構80は、第1,第2ピストン71a,71bのうち一方のピストンが左右方向の一方に移動すると、これに連動して他方のピストンを反対方向に移動させる。 The interlocking mechanism 80 interlocks the movement of both pistons so that the first and second pistons 71a and 71b move in opposite directions along the axial direction. The interlocking mechanism 80 includes a link member 81, a support member 83, and first and second attachment members 84a and 84b (see FIGS. 6 and 8). The link member 81 is a member having a flat plate-like long shape. The link member 81 has its front end side connected to the left end side of the first piston 71a via the first mounting member 84a, and its rear end side connected to the left end side of the second piston 71b via the second mounting member 84b. There is. Thus, the link member 81 connects the first piston 71a and the second piston 71b. The first mounting member 84 a connects the two members while allowing the pivoting of the link member 81 with respect to the first piston 71 a (horizontal pivoting about the axis of the first mounting member 84 a). The first mounting member 84a is, for example, a shaft portion vertically passing through a long hole formed in the link member 81 and a hole formed in the thin portion 75a of the first piston 71a, and an upper portion of the shaft portion integrally with the shaft portion. And a detachment preventing member such as an E-shaped retaining ring provided at the lower part of the shaft to prevent the detachment of the shaft. The second mounting member 84b has the same configuration as the first mounting member 84a, and connects the two members while allowing the link member 81 to pivot relative to the second piston 71b. The support member 83 is disposed between the connection portions of the link member 81 with the first and second pistons 71a and 71b (here, the portions where the first and second attachment members 84a and 84b exist), and the link The member 81 is rotatably supported. The support member 83 connects both members while allowing the link member 81 to rotate with respect to the main body 51. The support member 83 includes a shaft portion, a head portion, and a slip-off preventing member as in the first and second attachment members 84a and 84b, and the shaft portion vertically penetrates the link member 81. The link member 81 is supported by the main body 51 at an intermediate position of the connection portion with the first and second pistons 71 a and 71 b by the support member 83. Therefore, when the first piston 71a moves leftward, the front end of the link member 81 moves leftward via the first attachment member 84a, and the link member 81 rotates clockwise in top view. As a result, the rear end portion of the link member 81 moves rightward, and moves the second piston 71b rightward via the second attachment member 84b. As described above, when one of the first and second pistons 71a and 71b moves in the left-right direction, the interlocking mechanism 80 interlocks with this and moves the other piston in the opposite direction.
 リンク部材81は、第1,第2ピストン71a,71bに対して厚さ方向にはみ出さないように配置されていることが好ましい。図7Aには、第1,第2ピストン71a,71bの少なくとも一方が存在する厚さ方向(ここでは上下方向)の範囲を領域Rとして示した。本実施形態では、領域Rの上下端は、第1,第2フランジ部72a,72bの上下端と同じ位置になっている。本実施形態では、図7Aに示すように、リンク部材81がこの領域Rからはみ出さないような厚さ及び配置がなされている。リンク部材81は薄肉部75a,75bに接続されているため、領域Rからはみ出さないように配置しやすくなっている。本実施形態では、支持部材83及び第1,第2取付部材84a,84bは上方向にわずかに領域Rからはみ出しているが、これらについても領域Rからはみ出さないようにしてもよい。すなわち、連動機構80全体が領域Rからはみ出さないようにしてもよい。 The link member 81 is preferably disposed so as not to protrude in the thickness direction with respect to the first and second pistons 71a and 71b. In FIG. 7A, a range in the thickness direction (here, the vertical direction) in which at least one of the first and second pistons 71a and 71b is present is shown as a region R. In the present embodiment, the upper and lower ends of the region R are at the same position as the upper and lower ends of the first and second flange portions 72a and 72b. In the present embodiment, as shown in FIG. 7A, the thickness and the arrangement are such that the link member 81 does not protrude from the region R. Since the link member 81 is connected to the thin portions 75a and 75b, the link member 81 can be easily disposed so as not to protrude from the region R. In the present embodiment, the support member 83 and the first and second attachment members 84a and 84b slightly protrude upward from the region R, but these may also not protrude from the region R. That is, the entire interlocking mechanism 80 may not protrude from the region R.
 こうして構成されたメカチャック50の動作について説明する。メカチャック50が第1状態である時(図7A,8A)に、外部から圧力供給路58に正圧が供給されると、この正圧が空間57aから第1ピストン71aの第1フランジ部72aに作用する。そして、この正圧により第1ピストン71aが第2方向(ここでは左方向)に移動する。このとき、連動機構80によって第2ピストン71bが第1ピストン71aとは反対の第1方向(ここでは右方向)に移動する。第2ピストン71bが右方向に移動するにつれて弾性部材79は圧縮されていく。そして、第1,第2ピストン71a,71bの移動が停止して、第1状態から第2状態(図7B,8B)に切り替わる。第2状態は、第1状態と比べて第1ピストン71aが第2方向に移動し第2ピストン71bが第1方向に移動した状態である。第2状態に切り替えるための外部からの正圧の供給がなくなると、弾性部材79の弾性力によって第2ピストン71bが第2方向(ここでは左方向)に移動する。このとき、連動機構80によって第1ピストン71aが第2ピストン71bとは反対の第1方向(ここでは右方向)に移動する。第1ピストン71aの第1フランジ部72aが段差部56a1に接触すると第1,第2ピストン71a,71bの移動が停止して、第2状態から第1状態(図7A,8A)に切り替わる。第1,第2ピストン71a,71bの移動に伴って第1,第2把持部材61a,61bが左右方向に移動するため、第1,第2把持部材61a,61bは第1状態では離間状態(図7A)となり第2状態では接近状態(図7B)となる。そのため、メカチャック50は、第2状態でワークWを把持し、第1状態でワークWを把持解除することができる。 The operation of the mechanical chuck 50 configured in this way will be described. When the mechanical chuck 50 is in the first state (FIGS. 7A and 8A) and a positive pressure is supplied from the outside to the pressure supply passage 58, this positive pressure is supplied from the space 57a to the first flange portion 72a of the first piston 71a. Act on. The positive pressure causes the first piston 71a to move in the second direction (here, the left direction). At this time, the second piston 71b is moved by the interlocking mechanism 80 in a first direction (here, right direction) opposite to the first piston 71a. The elastic member 79 is compressed as the second piston 71b moves to the right. Then, the movement of the first and second pistons 71a and 71b is stopped, and the first state is switched to the second state (FIGS. 7B and 8B). The second state is a state in which the first piston 71a has moved in the second direction and the second piston 71b has moved in the first direction, as compared to the first state. When the supply of positive pressure from the outside to switch to the second state is lost, the second piston 71b moves in the second direction (here, the left direction) by the elastic force of the elastic member 79. At this time, the first piston 71a is moved by the interlocking mechanism 80 in a first direction (here, right direction) opposite to the second piston 71b. When the first flange portion 72a of the first piston 71a contacts the step portion 56a1, the movement of the first and second pistons 71a and 71b is stopped, and the second state is switched to the first state (FIGS. 7A and 8A). Since the first and second holding members 61a and 61b move in the left and right direction along with the movement of the first and second pistons 71a and 71b, the first and second holding members 61a and 61b are in the separated state in the first state It becomes an approach state (FIG. 7B) in a 2nd state, and it becomes FIG. 7A. Therefore, the mechanical chuck 50 can grip the workpiece W in the second state and can release the grip of the workpiece W in the first state.
 ここで、図7,8はワークWがない状態でのメカチャック50を図示している。そのため、図8Bでは第2ピストン71bの第2フランジ部72bが段差部56b1に接触することで第1,第2ピストン71a,71bの移動が停止して第2状態になっている。一方、メカチャック50がワークWを把持する場合には、第2フランジ部72bが段差部56b1に接触する前に第1,第2把持部材61a,61bがワークWを把持することで第1,第2ピストン71a,71bの移動が停止して第2状態となる。 Here, FIGS. 7 and 8 illustrate the mechanical chuck 50 in a state in which the workpiece W is not present. Therefore, in FIG. 8B, the movement of the first and second pistons 71a and 71b is stopped by bringing the second flange portion 72b of the second piston 71b into contact with the step portion 56b1, and the second state is achieved. On the other hand, when the mechanical chuck 50 grips the workpiece W, the first and second gripping members 61a and 61b grip the workpiece W before the second flange portion 72b contacts the step portion 56b1. The movement of the second pistons 71a and 71b is stopped to be in the second state.
 次に、こうして構成された本実施形態のワーク移動装置100の動作、特に、ワークWをワーク搬送装置102上から採取して移動しパレット105上の凹部に載置する移載処理について説明する。この移載処理では、制御部90は、まず、ワーク搬送装置102を制御してワークWを後方に搬送すると共に、パレット搬送装置103を制御してパレット105をロボット10付近まで搬送する。次に、制御部90は、ロボット10の第1~第4回転機構26a~26dを制御して先端部30をワーク搬送装置102の上方に移動させ、カメラ40を制御して得られた画像データに基づいてワーク搬送装置102上のワークWの位置や向きを検出する。そして、制御部90は、検出したワークWの中から採取対象のワークWを決定して、第5回転機構26eによるメカチャック50の回転を適宜行いながら先端部30を移動させて、第1状態のままメカチャック50の第1,第2把持部材61a,61bの間に採取対象のワークWが位置するようにする。その後、制御部90は圧力供給源106を制御してメカチャック50に正圧を供給してメカチャック50を第1状態から第2状態に切り替える。これにより、第1,第2把持部材61a,61bは接近状態となってワークWを把持する。次に、制御部90は、メカチャック50を第2状態に保ったまま先端部30を移動させてパレット105上に移動させ、カメラ40を制御して得られた画像データに基づいてパレット105上の凹部の位置を検出する。そして、制御部90は、検出した凹部の中からワークWを載置する凹部を決定して、第5回転機構26eによるメカチャック50の回転を適宜行いながら先端部30を移動させて、メカチャック50を第2状態に保ったまま凹部にワークWを移動させる。その後、制御部90は、圧力供給源106を制御してメカチャック50への正圧の供給を停止する。これにより圧力供給路58は例えば大気開放されて(常圧が供給されて)、メカチャック50は第2状態から第1状態に切り替わる。これにより、第1,第2把持部材61a,61bは離間状態となってワークWを把持解除し、ワークWが凹部に載置される。制御部90はこのような移載処理を繰り返して、複数のワークWをパレット105に載置していく。 Next, the operation of the work moving apparatus 100 according to this embodiment configured as described above, in particular, the transfer processing for collecting the work W from the work conveying apparatus 102, moving it, and placing it in the recess on the pallet 105 will be described. In this transfer process, the control unit 90 first controls the work transfer device 102 to transfer the work W backward, and controls the pallet transfer device 103 to transfer the pallet 105 to the vicinity of the robot 10. Next, the control unit 90 controls the first to fourth rotation mechanisms 26 a to 26 d of the robot 10 to move the tip 30 above the workpiece conveyance device 102, and controls the camera 40 to obtain image data. The position and orientation of the work W on the work transfer apparatus 102 are detected based on the above. Then, the control unit 90 determines the workpiece W to be collected from the detected workpieces W, moves the tip 30 while appropriately rotating the mechanical chuck 50 by the fifth rotation mechanism 26e, and the first state The workpiece W to be collected is positioned between the first and second holding members 61a and 61b of the mechanical chuck 50 as it is. Thereafter, the control unit 90 controls the pressure supply source 106 to supply a positive pressure to the mechanical chuck 50 to switch the mechanical chuck 50 from the first state to the second state. As a result, the first and second gripping members 61a and 61b come close to each other and grip the workpiece W. Next, the control unit 90 moves the tip 30 on the pallet 105 while moving the mechanical chuck 50 in the second state to move it on the pallet 105, and controls the camera 40 on the pallet 105 based on the image data obtained. Detect the position of the recess of Then, the control unit 90 determines a recess for placing the work W out of the detected recesses, moves the tip 30 while appropriately rotating the mechanical chuck 50 by the fifth rotation mechanism 26e, and The work W is moved to the recess while keeping the 50 in the second state. Thereafter, the control unit 90 controls the pressure supply source 106 to stop the supply of positive pressure to the mechanical chuck 50. Thus, the pressure supply path 58 is opened to the atmosphere, for example (normal pressure is supplied), and the mechanical chuck 50 switches from the second state to the first state. As a result, the first and second gripping members 61a and 61b are separated from each other to release the workpiece W, and the workpiece W is placed in the recess. The control unit 90 repeats such transfer processing, and places the plurality of works W on the pallet 105.
 以上詳述した本実施形態のメカチャック50は、第1,第2ピストン71a,71bの移動方向すなわち軸方向は左右方向であり、この軸方向は、本体部51の厚さ方向すなわち第1,第2把持部材61a,61bの突出方向である上下方向に対して垂直になっている。そのため、第1,第2ピストン71a,71bの移動距離の長さがメカチャック50の厚さにほとんど影響しない。したがって、例えば第1,第2ピストン71a,71bの移動方向が厚さ方向に沿っている場合と比較して、このメカチャック50はより薄型化が可能になる。メカチャック50が薄いことで、例えば上述した移載処理において制御部90が先端部30を移動させる際に、メカチャック50が他の物体に接触してしまうことを抑制できる。 In the mechanical chuck 50 of the present embodiment described above, the moving direction of the first and second pistons 71a and 71b, that is, the axial direction is the left and right direction, and the axial direction is the thickness direction of the main body 51, that is, the first and the first. The second holding members 61a and 61b are perpendicular to the vertical direction, which is the protruding direction of the second holding members 61a and 61b. Therefore, the moving distance of the first and second pistons 71 a and 71 b hardly affects the thickness of the mechanical chuck 50. Therefore, compared with, for example, the case where the moving direction of the first and second pistons 71a and 71b is along the thickness direction, the mechanical chuck 50 can be thinner. When the mechanical chuck 50 is thin, for example, when the control unit 90 moves the tip end portion 30 in the above-described transfer process, it can be suppressed that the mechanical chuck 50 contacts another object.
 また、第1,第2ピストン71a,71bは、厚さ方向に垂直且つ軸方向に垂直な方向である前後方向に並べて配置されている。そのため、例えば第1,第2ピストン71a,71bが厚さ方向に沿って並べられている場合と比較して、メカチャック50はより薄型化が可能になる。 The first and second pistons 71a and 71b are arranged side by side in the front-rear direction which is a direction perpendicular to the thickness direction and perpendicular to the axial direction. Therefore, for example, the mechanical chuck 50 can be thinner than in the case where the first and second pistons 71a and 71b are arranged in the thickness direction.
 さらに、本体部51は、外部から供給される圧力の入口であり本体部51に対して厚さ方向に垂直な方向(ここでは前方)に突出して開口している圧力入口部材59を有している。そのため、例えば圧力入口部材59が厚さ方向に突出している場合と比較して、メカチャック50はより薄型化が可能になる。 Furthermore, the main body portion 51 has a pressure inlet member 59 which is an inlet for pressure supplied from the outside and protrudes and opens in a direction (herein, forward) perpendicular to the thickness direction with respect to the main body portion 51 There is. Therefore, for example, the mechanical chuck 50 can be thinner than in the case where the pressure inlet member 59 protrudes in the thickness direction.
 さらにまた、連動機構80は、第1,第2ピストン71a,71bを接続するリンク部材81と、リンク部材81の第1,第2ピストン71a,71bとの接続部分の間に位置しリンク部材81を回動可能に支持する支持部材83と、を有している。そのため、比較的簡易な構成の連動機構80によって第1,第2ピストン71a,71bを互いに反対方向に移動するように連動させることができる。 Furthermore, the interlocking mechanism 80 is located between the link member 81 connecting the first and second pistons 71a and 71b and the connection portion of the link member 81 to the first and second pistons 71a and 71b. And a support member 83 rotatably supporting the Therefore, the first and second pistons 71a and 71b can be interlocked so as to move in the directions opposite to each other by the interlocking mechanism 80 having a relatively simple configuration.
 そして、リンク部材81は、領域R内に収まるように配置されており、第1,第2ピストン71a,71bに対して厚さ方向にはみ出さないように配置されている。したがって、リンク部材81がメカチャック50の厚さにほとんど影響しないため、メカチャック50はより薄型化が可能になる。 The link member 81 is disposed so as to be contained in the region R, and is disposed so as not to protrude in the thickness direction with respect to the first and second pistons 71a and 71b. Therefore, since the link member 81 hardly affects the thickness of the mechanical chuck 50, the mechanical chuck 50 can be thinner.
 そしてまた、メカチャック50は、本体部51に取り付けられ第1,第2把持部材61a,61bの左右方向への移動をガイドするガイドレールを備えていない。このようなガイドレールが例えば本体部51の下面に取り付けられていると、ガイドレールの分だけメカチャック50が厚くなりやすい。ガイドレールを備えないことでメカチャック50はより薄型化が可能になる。 Also, the mechanical chuck 50 is not provided with a guide rail that is attached to the main body 51 and guides the movement of the first and second gripping members 61a and 61b in the left-right direction. When such a guide rail is attached to the lower surface of the main body 51, for example, the mechanical chuck 50 is likely to be thicker by the amount of the guide rail. The mechanical chuck 50 can be made thinner by not providing the guide rails.
 そしてさらに、ロボット10は、メカチャック50と共に移動し、メカチャック50の厚さ方向に沿った方向である下方に位置する対象物を撮像するカメラ40、を備えている。ロボット10がこのようなカメラ40を備える場合、メカチャック50の厚さが大きいと、例えば対象物(ここではワークWやパレット105など)に撮像のためにカメラ40を接近させる際などにメカチャック50が対象物や他の物体に接触してしまう場合がある。本実施形態のメカチャック50は薄型化が可能であるため、メカチャック50と物体との接触を抑制する効果と、カメラ40を対象物により近づけることができる効果との、少なくとも一方の効果が得られる。 The robot 10 further includes a camera 40 which moves with the mechanical chuck 50 and picks up an object located below in the direction along the thickness direction of the mechanical chuck 50. In the case where the robot 10 includes such a camera 40, when the thickness of the mechanical chuck 50 is large, for example, when the camera 40 is brought close to an object (here, the workpiece W or the pallet 105) for imaging, the mechanical chuck 50 may come in contact with an object or another object. Since the mechanical chuck 50 of the present embodiment can be thinned, at least one of the effects of suppressing the contact between the mechanical chuck 50 and an object and the effect of allowing the camera 40 to be closer to the object is obtained. Be
 なお、本発明は上述した実施形態に何ら限定されることはなく、本発明の技術的範囲に属する限り種々の態様で実施し得ることはいうまでもない。 It is needless to say that the present invention is not limited to the above-mentioned embodiment at all, and can be implemented in various modes within the technical scope of the present invention.
 例えば、上述した実施形態では、第1,第2把持部材61a,61bは、第2状態で接近し、第1状態で離間したが、第1状態で接近し第2状態で離間してもよい。また、第1,第2把持部材61a,61bは、接近状態でワークWを把持したが、離間状態でワークを把持してもよい。例えば、ワークに形成された凹部に第1,第2把持部材61a,61bを挿入して、第1,第2把持部材61a,61bを離間することでワークを把持してもよい。 For example, in the embodiment described above, the first and second gripping members 61a and 61b approach in the second state and separate in the first state, but may approach in the first state and separate in the second state . Moreover, although 1st, 2nd holding member 61a, 61b hold | gripped the workpiece | work W in the approach state, you may hold a workpiece | work in a separated state. For example, the workpiece may be gripped by inserting the first and second gripping members 61a and 61b into the recess formed in the workpiece and separating the first and second gripping members 61a and 61b.
 上述した実施形態では、メカチャック50には外部からの圧力として正圧が供給されて、正圧により第1状態から第2状態に切り替わったが、これに限られない。例えば、メカチャック50には外部から負圧が供給されて負圧により第1状態から第2状態に切り替わってもよい。 In the embodiment described above, the mechanical chuck 50 is supplied with a positive pressure as the pressure from the outside, and the first state is switched to the second state by the positive pressure, but the present invention is not limited thereto. For example, negative pressure may be supplied to the mechanical chuck 50 from the outside, and the first state may be switched to the second state by the negative pressure.
 上述した実施形態では、弾性部材79は第2ピストン71bに弾性力を作用させたが、これに限らず第2状態から第1状態に切り替える方向に第1,第2ピストン71a,71bの少なくとも一方を付勢すればよい。例えば、弾性部材79が第1フランジ部72aを右方向に押圧するように弾性力を作用させてもよい。また、弾性部材79は第1,第2ピストン71a,71bの両方に弾性力を作用させてもよい。また、弾性部材79は圧縮コイルばねとしたが、引張コイルばねでもよいし、ばね以外の弾性体であってもよい。 In the embodiment described above, the elastic member 79 applies an elastic force to the second piston 71b, but the invention is not limited to this, at least one of the first and second pistons 71a and 71b in the direction of switching from the second state to the first state. You can turn on the For example, an elastic force may be applied so that the elastic member 79 presses the first flange portion 72a in the right direction. Also, the elastic member 79 may exert an elastic force on both the first and second pistons 71a and 71b. The elastic member 79 is a compression coil spring, but may be a tension coil spring or an elastic body other than a spring.
 上述した実施形態では、連動機構80は平板状のリンク部材81を備えていたが、これに限られない。例えば、連動機構80はラック・アンド・ピニオンを備えていてもよい。例えば、連動機構80は、リンク部材81及び第1,第2取付部材84a,84bを備えず、第1ピストン71aと一体的に軸方向に移動する第1ラックと、第2ピストン71bと一体的に軸方向に移動する第2ラックと、第1,第2ラックと噛合するピニオンと、ピニオンを回動(自転)可能に支持する支持部材83と、を備えていてもよい。第1ラックは、第1ピストン71aのうち左端付近の後面に形成されるなど、第1ピストン71aの一部であってもよい。第2ラックについても同様である。この変形例の連動機構80では、ピニオンが第1ピストン71aと第2ピストン71bとを接続しており、ピニオンがリンク部材に相当する。このようにラック・アンド・ピニオンを用いた連動機構でも、第1,第2ピストン71a,71bが軸方向に沿って互いに反対方向に移動するよう両ピストンの移動を連動させることができる。 In the embodiment described above, the interlocking mechanism 80 includes the flat link member 81, but the invention is not limited to this. For example, the interlocking mechanism 80 may include a rack and pinion. For example, the interlocking mechanism 80 does not include the link member 81 and the first and second attachment members 84a and 84b, and integrally integrates with a first rack that moves axially integrally with the first piston 71a and with the second piston 71b. A second rack moving in the axial direction, a pinion meshing with the first and second racks, and a support member 83 rotatably supporting the pinion. The first rack may be a part of the first piston 71a, such as being formed on the rear surface near the left end of the first piston 71a. The same applies to the second rack. In the interlocking mechanism 80 of this modification, a pinion connects the first piston 71a and the second piston 71b, and the pinion corresponds to a link member. As described above, even in the interlocking mechanism using the rack and pinion, the movement of both pistons can be interlocked so that the first and second pistons 71a and 71b move in opposite directions along the axial direction.
 上述した実施形態では、第1,第2ピストン71a,71bは、本体部51内での上下方向の位置(配置高さ)が同じとしたが、これに限らず互いの配置高さがずれていてもよい。ただし、第1ピストン71aが存在する厚さ方向の範囲と、第2ピストン71bが存在する厚さ方向の範囲とが、少なくとも一部重複していることが好ましい。重複している部分が多いほど、メカチャック50を薄型化しやすい。 In the embodiment described above, the first and second pistons 71a and 71b have the same vertical position (arrangement height) in the main body 51, but the arrangement heights of the first and second pistons 71a and 71b are not the same. May be However, it is preferable that the range in the thickness direction in which the first piston 71 a exists and the range in the thickness direction in which the second piston 71 b exist at least partially overlap. It is easy to make the mechanical chuck 50 thinner as there are many overlapping parts.
 上述した実施形態では、第1,第2ピストン71a,71bは、厚さ方向に垂直且つ軸方向に垂直な方向である前後方向に並べて配置されていたが、これに限らず厚さ方向に垂直且つ軸方向に平行な方向である左右方向に並べて配置されていてもよい。ただし、その場合はメカチャック50の左右方向の大きさが大きくなりやすいため、第1,第2ピストン71a,71bが前後方向に並べられていることが好ましい。より具体的には、第1ピストン71aが存在する左右方向の範囲と、第2ピストン71bが存在する左右方向の範囲とが、少なくとも一部重複していることが好ましい。重複している部分が多いほど、メカチャック50の左右方向の大きさを小さくしやすくい。 In the embodiment described above, the first and second pistons 71a and 71b are arranged in the front-rear direction, which is a direction perpendicular to the thickness direction and perpendicular to the axial direction, but not limited thereto. And you may arrange in order the left-right direction which is a direction parallel to an axial direction. However, in this case, since the size in the left-right direction of the mechanical chuck 50 tends to be large, it is preferable that the first and second pistons 71a and 71b be arranged in the front-rear direction. More specifically, it is preferable that the range in the left-right direction in which the first piston 71a exists and the range in the left-right direction in which the second piston 71b exist at least partially overlap. It is easier to reduce the size of the mechanical chuck 50 in the left-right direction as the number of overlapping portions increases.
 上述した実施形態では、第1,第2把持部材61a,61bは把持爪としたが、これに限らずワークを把持及び把持解除できればよい。例えば、第1,第2把持部材61a,61bは直方体形状の部材であってもよい。 Although the first and second gripping members 61a and 61b are gripping claws in the above-described embodiment, the present invention is not limited to this, as long as the workpiece can be gripped and released. For example, the first and second gripping members 61a and 61b may be rectangular parallelepiped members.
 上述した実施形態では、メカチャック50は、本体部51に取り付けられ第1,第2把持部材61a,61bの左右方向への移動をガイドするガイドレールを備えなかったが、ガイドレールを備えていてもよい。ただし、上述したようにメカチャック50をより薄型化できるため、メカチャック50は本体部51に取り付けられた(本体部51とは別部材で構成された)ガイドレールを備えないことが好ましい。 In the embodiment described above, the mechanical chuck 50 is not provided with a guide rail that is attached to the main body 51 and guides the movement of the first and second gripping members 61a and 61b in the left-right direction. It is also good. However, as described above, since the mechanical chuck 50 can be made thinner, it is preferable that the mechanical chuck 50 does not have a guide rail (formed of a separate member from the main body 51) attached to the main body 51.
 上述した実施形態では、ロボット10は産業用ロボットのうち垂直多関節ロボットとしたが、これに限られない。例えば、ロボット10は水平多関節ロボットであってもよいし、XYロボットであってもよい。 In the embodiment described above, the robot 10 is a vertical articulated robot among industrial robots, but the invention is not limited thereto. For example, the robot 10 may be a horizontal articulated robot or an XY robot.
 本開示のメカチャック,産業用ロボット及びワーク移動装置は、以下のように構成してもよい。 The mechanical chuck, the industrial robot, and the work moving device of the present disclosure may be configured as follows.
 本開示のメカチャックにおいて、前記第1,第2ピストンは、前記厚さ方向に垂直且つ前記軸方向に垂直な方向に並べて配置されていてもよい。こうすれば、例えば第1,第2ピストンが厚さ方向に沿って並べられている場合と比較して、このメカチャックはより薄型化が可能になる。 In the mechanical chuck of the present disclosure, the first and second pistons may be arranged in a direction perpendicular to the thickness direction and perpendicular to the axial direction. By so doing, the mechanical chuck can be made thinner compared to, for example, the case where the first and second pistons are arranged along the thickness direction.
 本開示のメカチャックにおいて、前記本体部は、外部から供給される前記圧力の入口であり前記本体部に対して前記厚さ方向に垂直に突出して開口している圧力入口部材を有していてもよい。こうすれば、例えば圧力入口部材が厚さ方向に突出している場合と比較して、このメカチャックはより薄型化が可能になる。この場合において、前記圧力入口部材は、前記厚さ方向に垂直且つ前記軸方向に垂直な方向に突出していてもよい。 In the mechanical chuck of the present disclosure, the main body portion has a pressure inlet member which is an inlet for the pressure supplied from the outside, and which protrudes perpendicularly to the thickness direction with respect to the main body portion. It is also good. By so doing, the mechanical chuck can be made thinner compared to, for example, the case where the pressure inlet member protrudes in the thickness direction. In this case, the pressure inlet member may project in a direction perpendicular to the thickness direction and perpendicular to the axial direction.
 本開示のメカチャックにおいて、前記連動機構は、前記第1ピストンと前記第2ピストンとを接続するリンク部材と、該リンク部材の前記第1,第2ピストンとの接続部分の間に位置し該リンク部材を回動可能に支持する支持部材と、を有していてもよい。こうすれば、比較的簡易な構成で第1,第2ピストンを互いに反対方向に移動するように連動させることができる。 In the mechanical chuck of the present disclosure, the interlocking mechanism is located between a link member connecting the first piston and the second piston and a connection portion of the link member to the first and second pistons. And a support member rotatably supporting the link member. By so doing, it is possible to interlock the first and second pistons to move in opposite directions with a relatively simple configuration.
 この場合において、前記リンク部材は、前記第1ピストン及び前記第2ピストンに対して前記厚さ方向にはみ出さないように配置されていてもよい。こうすれば、リンク部材がメカチャックの厚さにほとんど影響しないため、このメカチャックはより薄型化が可能になる。 In this case, the link member may be disposed so as not to protrude in the thickness direction with respect to the first piston and the second piston. In this case, the mechanical chuck can be made thinner because the link member hardly affects the thickness of the mechanical chuck.
 本開示のメカチャックは、前記本体部に取り付けられ前記第1,第2把持部材の前記軸方向への移動をガイドするガイドレールを備えなくてもよい。このようなガイドレールが本体部に取り付けられているとガイドレールの分だけメカチャックが厚くなりやすい。ガイドレールを備えないことでこのメカチャックはより薄型化が可能になる。 The mechanical chuck of the present disclosure may not include a guide rail attached to the main body and guiding the movement of the first and second gripping members in the axial direction. When such a guide rail is attached to the main body, the mechanical chuck is likely to be thicker by the amount of the guide rail. The mechanical chuck can be made thinner by not providing the guide rails.
 本開示の産業用ロボットは、上述したいずれかの態様のメカチャックを備えたものである。そのため、この産業用ロボットは、上述した本開示のメカチャックと同様の効果、例えばメカチャックの薄型化が可能になる効果が得られる。この場合において、産業用ロボットは、多関節ロボットであってもよいし、XYロボットであってもよい。 The industrial robot of the present disclosure is provided with the mechanical chuck of any aspect described above. Therefore, this industrial robot has the same effect as the above-described mechanical chuck of the present disclosure, for example, an effect that enables thinning of the mechanical chuck. In this case, the industrial robot may be an articulated robot or an XY robot.
 本開示の産業用ロボットは、前記メカチャックと共に移動し、前記メカチャックの厚さ方向に沿った方向に位置する対象物を撮像するカメラ、を備えていてもよい。産業用ロボットがこのようなカメラを備える場合、メカチャックの厚さが大きいと、例えば対象物にカメラを接近させる際などにメカチャックが対象物や他の物体に接触してしまう場合がある。本開示のメカチャックは薄型化が可能であるため、メカチャックと物体との接触を抑制する効果と、カメラを対象物により近づけることができる効果との、少なくとも一方の効果が得られる。ここで、カメラが撮像する「対象物」は、前記メカチャックが把持するワークとしてもよいし、その他の物体としてもよい。 The industrial robot of the present disclosure may include a camera that moves together with the mechanical chuck and images an object located in a direction along the thickness direction of the mechanical chuck. When the industrial robot is equipped with such a camera, if the thickness of the mechanical chuck is large, the mechanical chuck may contact the target or another object when, for example, the camera is brought close to the target. Since the mechanical chuck of the present disclosure can be thinned, at least one of the effects of suppressing the contact between the mechanical chuck and the object and the effect of allowing the camera to be closer to the object can be obtained. Here, the “target object” captured by the camera may be a workpiece held by the mechanical chuck, or may be another object.
 本開示のワーク移動装置は、上述したいずれかの態様の産業用ロボットを備えたものである。そのため、このワーク移動装置は、上述した本開示のメカチャックと同様の効果、例えばメカチャックの薄型化が可能になる効果が得られる。 The work transfer apparatus according to the present disclosure includes the industrial robot according to any one of the aspects described above. Therefore, this work moving device can obtain the same effect as the above-described mechanical chuck of the present disclosure, for example, an effect that enables thinning of the mechanical chuck.
 本発明は、部品などのワークを移動させる作業を行う各種産業に利用可能である。 The present invention is applicable to various industries that perform work of moving workpieces such as parts.
 10 ロボット、20 アーム部、21,22 第1,第2アーム、23 第3支持部、24 台座部、26a~26e 第1~第5回転機構、30 先端部、32 装着部、33 圧力供給ノズル、34 配管、40 カメラ、41 照射部、42 撮像部、50 メカチャック、51 本体部、52 取付部、52a ボルト孔、53a,53b 第1,第2下側孔、54 ガイド孔、55a,55b 第1,第2上側孔、56a,56b 第1,第2横孔、56a1,56a2,56b1,56b2 段差部、57a,57b 空間、58 圧力供給路、59 圧力入口部材、60 把持部、61a,61b 第1,第2把持部材、62a,62b 第1,第2ベース部材、63a,63b ボルト、64a,64b 第1,第2ガイド部材、70 駆動機構、71a,71b 第1,第2ピストン、72a,72b 第1,第2フランジ部、73a,73b 第1,第2軸部、74a,75a,75b 薄肉部、76 逃がし孔、77a,77b ボルト、79 弾性部材、80 連動機構、81 リンク部材、83 支持部材、84a,84b 第1,第2取付部材、90 制御部、100 ワーク移動装置、101 基台、102 ワーク搬送装置、103 パレット搬送装置、105 パレット、106 圧力供給源、W ワーク。 DESCRIPTION OF SYMBOLS 10 robot, 20 arm part, 21, 22 1st, 2nd arm, 23 3rd support part, 24 pedestal part, 26a-26e 1st-5th rotation mechanism, 30 tip part, 32 mounting part, 33 pressure supply nozzle , 34 piping, 40 camera, 41 irradiation unit, 42 imaging unit, 50 mechanical chuck, 51 main body, 52 mounting unit, 52a bolt hole, 53a, 53b first and second lower holes, 54 guide hole, 55a, 55b First and second upper holes 56a and 56b First and second lateral holes 56a1 and 56a2 and 56b1 and 56b2 stepped portion 57a and 57b space 58 pressure supply passage 59 pressure inlet member 60 grip portion 61a and 61b first and second holding members 62a and 62b first and second base members 63a and 63b bolts 64a and 64b first and second gears 70, drive mechanism 71a, 71b first and second pistons 72a and 72b first and second flanges 73a and 73b first and second shafts 74a, 75a and 75b thin wall 76 escape hole , 77a, 77b bolt, 79 elastic member, 80 interlocking mechanism, 81 link member, 83 support member, 84a, 84b first and second mounting members, 90 control unit, 100 work moving device, 101 base, 102 work transfer device , 103 pallet transfer device, 105 pallet, 106 pressure source, W work.

Claims (9)

  1.  本体部と、
     前記本体部から各々の少なくとも一部が前記本体部の厚さ方向に突出する第1,第2把持部材と、
     軸方向が前記厚さ方向に垂直であり、該軸方向に沿った第1方向及び該第1方向とは反対の第2方向に移動するように前記本体部に配設され、該移動に伴って前記第1把持部を前記軸方向に移動させる第1ピストンと、
     前記第1ピストンと軸方向が平行になり且つ前記第1,第2方向に移動するように前記本体部に配設され、該移動に伴って前記第2把持部を前記軸方向に移動させる第2ピストンと、
     前記第1,第2ピストンが前記軸方向に沿って互いに反対方向に移動するよう該第1,第2ピストンの移動を連動させて、第1状態と、該第1状態と比べて前記第1ピストンが前記第2方向に移動し前記第2ピストンが前記第1方向に移動した第2状態と、を切り替える連動機構と、
     前記本体部に設けられ、外部から供給される圧力を少なくとも前記第1ピストンに作用させて前記第1状態から前記第2状態への切り替えを行うための圧力供給路と、
     弾性力により、前記第2状態から前記第1状態に切り替える方向に前記第1ピストン及び前記第2ピストンの少なくとも一方を付勢する弾性部材と、
     を備えたメカチャック。
    Body part,
    First and second gripping members in which at least a portion of each of the main body protrudes in the thickness direction of the main body;
    An axial direction is perpendicular to the thickness direction, and is disposed on the main body so as to move in a first direction along the axial direction and in a second direction opposite to the first direction, along with the movement A first piston for moving the first grip in the axial direction;
    The first piston is disposed in the main body so that the axial direction is parallel to the first piston and moved in the first and second directions, and the second grip is moved in the axial direction according to the movement. With 2 pistons,
    The movement of the first and second pistons is interlocked so that the first and second pistons move in opposite directions along the axial direction, and the first state and the first state are compared with each other. An interlocking mechanism that switches between a second state in which the piston moves in the second direction and the second piston moves in the first direction;
    A pressure supply passage provided in the main body for causing an externally supplied pressure to act on at least the first piston to switch from the first state to the second state;
    An elastic member that biases at least one of the first piston and the second piston in a direction to switch from the second state to the first state by an elastic force;
    Mechanical chuck with
  2.  前記第1,第2ピストンは、前記厚さ方向に垂直且つ前記軸方向に垂直な方向に並べて配置されている、
     請求項1に記載のメカチャック。
    The first and second pistons are arranged in a direction perpendicular to the thickness direction and perpendicular to the axial direction.
    The mechanical chuck according to claim 1.
  3.  前記本体部は、外部から供給される前記圧力の入口であり前記本体部に対して前記厚さ方向に垂直に突出して開口している圧力入口部材を有する、
     請求項1又は2に記載のメカチャック。
    The main body portion has a pressure inlet member which is an inlet for the pressure supplied from the outside, and which protrudes and opens perpendicularly to the thickness direction with respect to the main body portion.
    The mechanical chuck according to claim 1.
  4.  前記連動機構は、前記第1ピストンと前記第2ピストンとを接続するリンク部材と、該リンク部材の前記第1,第2ピストンとの接続部分の間に位置し該リンク部材を回動可能に支持する支持部材と、を有する、
     請求項1~3のいずれか1項に記載のメカチャック。
    The interlocking mechanism is located between a link member connecting the first piston and the second piston, and a connection portion of the link member to the first and second pistons, and the link member can be pivoted. And a supporting member to support the
    The mechanical chuck according to any one of claims 1 to 3.
  5.  前記リンク部材は、前記第1ピストン及び前記第2ピストンに対して前記厚さ方向にはみ出さないように配置されている、
     請求項4に記載のメカチャック。
    The link member is disposed so as not to protrude in the thickness direction with respect to the first piston and the second piston.
    The mechanical chuck according to claim 4.
  6.  前記本体部に取り付けられ前記第1,第2把持部材の前記軸方向への移動をガイドするガイドレールを備えない、
     請求項1~5のいずれか1項に記載のメカチャック。
    There is no guide rail attached to the main body and guiding the axial movement of the first and second gripping members.
    The mechanical chuck according to any one of claims 1 to 5.
  7.  請求項1~6のいずれか1項に記載のメカチャックを備えた産業用ロボット。 An industrial robot comprising the mechanical chuck according to any one of claims 1 to 6.
  8.  請求項7に記載の産業用ロボットであって、
     前記メカチャックと共に移動し、前記メカチャックの厚さ方向に沿った方向に位置する対象物を撮像するカメラ、
     を備えた産業用ロボット。
    The industrial robot according to claim 7, wherein
    A camera which moves together with the mechanical chuck and picks up an object located in a direction along the thickness direction of the mechanical chuck;
    Industrial robot equipped with
  9.  請求項7又は8に記載の産業用ロボットを備え、前記メカチャックによりワークを把持して移動させるワーク移動装置。 A work moving apparatus comprising the industrial robot according to claim 7 or 8, wherein the mechanical chuck holds and moves a work.
PCT/JP2017/043957 2017-12-07 2017-12-07 Mechanical chuck, industrial robot, and workpiece moving device WO2019111369A1 (en)

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