CN1404113A - 一种氮化氧化膜的制备方法 - Google Patents
一种氮化氧化膜的制备方法 Download PDFInfo
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- CN1404113A CN1404113A CN 02147232 CN02147232A CN1404113A CN 1404113 A CN1404113 A CN 1404113A CN 02147232 CN02147232 CN 02147232 CN 02147232 A CN02147232 A CN 02147232A CN 1404113 A CN1404113 A CN 1404113A
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CNB021472327A CN1178282C (zh) | 2002-10-18 | 2002-10-18 | 一种氮化氧化膜的制备方法 |
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CNB021472327A CN1178282C (zh) | 2002-10-18 | 2002-10-18 | 一种氮化氧化膜的制备方法 |
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CN1404113A true CN1404113A (zh) | 2003-03-19 |
CN1178282C CN1178282C (zh) | 2004-12-01 |
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CNB021472327A Expired - Fee Related CN1178282C (zh) | 2002-10-18 | 2002-10-18 | 一种氮化氧化膜的制备方法 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7268064B2 (en) | 2004-06-29 | 2007-09-11 | Hynix Semiconductor Inc. | Method of forming polysilicon layer in semiconductor device |
CN100399523C (zh) * | 2005-09-22 | 2008-07-02 | 中国科学院微电子研究所 | 一种超薄氮化硅/二氧化硅叠层栅介质的制备方法 |
CN1981368B (zh) * | 2004-07-16 | 2011-08-17 | 国立大学法人东北大学 | 半导体装置的处理液及处理方法 |
CN102280375A (zh) * | 2010-06-08 | 2011-12-14 | 中国科学院微电子研究所 | 一种先栅工艺中叠层金属栅结构的制备方法 |
CN102315312A (zh) * | 2010-07-09 | 2012-01-11 | 国立清华大学 | 硅异质接面太阳能电池的制程 |
CN103320855A (zh) * | 2013-05-27 | 2013-09-25 | 上海宏力半导体制造有限公司 | 多晶硅薄膜层淀积方法 |
CN105655246A (zh) * | 2016-01-04 | 2016-06-08 | 株洲南车时代电气股份有限公司 | 一种沟槽式igbt栅极的制作方法 |
CN112201578A (zh) * | 2020-09-21 | 2021-01-08 | 上海华力集成电路制造有限公司 | 一种提升栅氧膜厚均匀性的方法 |
CN113451115A (zh) * | 2021-06-30 | 2021-09-28 | 安徽华晟新能源科技有限公司 | 一种太阳能电池的清洗方法 |
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2002
- 2002-10-18 CN CNB021472327A patent/CN1178282C/zh not_active Expired - Fee Related
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100372066C (zh) * | 2004-06-29 | 2008-02-27 | 海力士半导体有限公司 | 在半导体装置中形成多晶硅层的方法 |
US7268064B2 (en) | 2004-06-29 | 2007-09-11 | Hynix Semiconductor Inc. | Method of forming polysilicon layer in semiconductor device |
CN1981368B (zh) * | 2004-07-16 | 2011-08-17 | 国立大学法人东北大学 | 半导体装置的处理液及处理方法 |
CN100399523C (zh) * | 2005-09-22 | 2008-07-02 | 中国科学院微电子研究所 | 一种超薄氮化硅/二氧化硅叠层栅介质的制备方法 |
CN102280375B (zh) * | 2010-06-08 | 2013-10-16 | 中国科学院微电子研究所 | 一种先栅工艺中叠层金属栅结构的制备方法 |
CN102280375A (zh) * | 2010-06-08 | 2011-12-14 | 中国科学院微电子研究所 | 一种先栅工艺中叠层金属栅结构的制备方法 |
WO2011153843A1 (zh) * | 2010-06-08 | 2011-12-15 | 中国科学院微电子研究所 | 一种先栅工艺中叠层金属栅结构的制备方法 |
US8598002B2 (en) | 2010-06-08 | 2013-12-03 | Institute of Microelectronics, Chinese Academy of Sciences | Method for manufacturing metal gate stack structure in gate-first process |
CN102315312A (zh) * | 2010-07-09 | 2012-01-11 | 国立清华大学 | 硅异质接面太阳能电池的制程 |
CN102315312B (zh) * | 2010-07-09 | 2013-11-13 | 国立清华大学 | 硅异质接面太阳能电池的制程 |
CN103320855A (zh) * | 2013-05-27 | 2013-09-25 | 上海宏力半导体制造有限公司 | 多晶硅薄膜层淀积方法 |
CN103320855B (zh) * | 2013-05-27 | 2016-08-10 | 上海华虹宏力半导体制造有限公司 | 多晶硅薄膜层淀积方法 |
CN105655246A (zh) * | 2016-01-04 | 2016-06-08 | 株洲南车时代电气股份有限公司 | 一种沟槽式igbt栅极的制作方法 |
CN112201578A (zh) * | 2020-09-21 | 2021-01-08 | 上海华力集成电路制造有限公司 | 一种提升栅氧膜厚均匀性的方法 |
CN113451115A (zh) * | 2021-06-30 | 2021-09-28 | 安徽华晟新能源科技有限公司 | 一种太阳能电池的清洗方法 |
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Publication number | Publication date |
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CN1178282C (zh) | 2004-12-01 |
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