CN1379484A - 高亮度氮化镓基发光二极管外延片的衬底处理方法 - Google Patents
高亮度氮化镓基发光二极管外延片的衬底处理方法 Download PDFInfo
- Publication number
- CN1379484A CN1379484A CN02117329A CN02117329A CN1379484A CN 1379484 A CN1379484 A CN 1379484A CN 02117329 A CN02117329 A CN 02117329A CN 02117329 A CN02117329 A CN 02117329A CN 1379484 A CN1379484 A CN 1379484A
- Authority
- CN
- China
- Prior art keywords
- gallium nitride
- epitaxial
- micron
- growth
- sapphire substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 56
- 238000000034 method Methods 0.000 title claims abstract description 25
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 title claims description 11
- 229910052733 gallium Inorganic materials 0.000 title claims description 11
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 45
- 239000010980 sapphire Substances 0.000 claims abstract description 45
- 239000000463 material Substances 0.000 claims description 29
- 239000010408 film Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 6
- 229910002601 GaN Inorganic materials 0.000 abstract description 43
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 abstract description 42
- 238000009825 accumulation Methods 0.000 abstract description 3
- 238000005530 etching Methods 0.000 abstract 1
- 238000003672 processing method Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- CHPZKNULDCNCBW-UHFFFAOYSA-N gallium nitrate Chemical compound [Ga+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O CHPZKNULDCNCBW-UHFFFAOYSA-N 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 241001062009 Indigofera Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 229940044658 gallium nitrate Drugs 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB02117329XA CN1167140C (zh) | 2002-05-17 | 2002-05-17 | 高亮度氮化镓基发光二极管外延片的衬底处理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB02117329XA CN1167140C (zh) | 2002-05-17 | 2002-05-17 | 高亮度氮化镓基发光二极管外延片的衬底处理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1379484A true CN1379484A (zh) | 2002-11-13 |
CN1167140C CN1167140C (zh) | 2004-09-15 |
Family
ID=4744390
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB02117329XA Expired - Fee Related CN1167140C (zh) | 2002-05-17 | 2002-05-17 | 高亮度氮化镓基发光二极管外延片的衬底处理方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1167140C (zh) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7045223B2 (en) | 2003-09-23 | 2006-05-16 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel articles and methods for forming same |
CN1318661C (zh) * | 2003-05-08 | 2007-05-30 | 住友电气工业株式会社 | Ⅲ-v族晶体及其生产方法 |
CN100365767C (zh) * | 2004-09-17 | 2008-01-30 | 同济大学 | 一种提高氮化镓基材料外延层质量的衬底处理方法 |
US7326477B2 (en) | 2003-09-23 | 2008-02-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel boules, wafers, and methods for fabricating same |
WO2009082982A1 (fr) * | 2007-12-27 | 2009-07-09 | Shenzhen Fangda Semiconductor Co., Ltd | Procédé pour augmenter l'efficacité lumineuse d'une puce et procédé de fabrication d'un substrat en saphir à motif |
CN101325235B (zh) * | 2008-07-10 | 2010-06-09 | 中山大学 | 一种用于led的硅基氮化镓外延层转移方法 |
CN101515626B (zh) * | 2009-03-31 | 2010-10-13 | 上海蓝光科技有限公司 | 发光二极管芯片衬底结构的制造方法 |
US7919815B1 (en) | 2005-02-24 | 2011-04-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel wafers and methods of preparation |
CN102822996A (zh) * | 2010-03-30 | 2012-12-12 | 丰田合成株式会社 | 半导体发光器件 |
CN102903812A (zh) * | 2011-07-27 | 2013-01-30 | 南通同方半导体有限公司 | 一种能消除应力的发光二极管结构及其制作方法 |
-
2002
- 2002-05-17 CN CNB02117329XA patent/CN1167140C/zh not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1318661C (zh) * | 2003-05-08 | 2007-05-30 | 住友电气工业株式会社 | Ⅲ-v族晶体及其生产方法 |
US7045223B2 (en) | 2003-09-23 | 2006-05-16 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel articles and methods for forming same |
US7326477B2 (en) | 2003-09-23 | 2008-02-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel boules, wafers, and methods for fabricating same |
CN100365767C (zh) * | 2004-09-17 | 2008-01-30 | 同济大学 | 一种提高氮化镓基材料外延层质量的衬底处理方法 |
US7919815B1 (en) | 2005-02-24 | 2011-04-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel wafers and methods of preparation |
WO2009082982A1 (fr) * | 2007-12-27 | 2009-07-09 | Shenzhen Fangda Semiconductor Co., Ltd | Procédé pour augmenter l'efficacité lumineuse d'une puce et procédé de fabrication d'un substrat en saphir à motif |
CN101471404B (zh) * | 2007-12-27 | 2012-02-01 | 沈阳方大半导体照明有限公司 | 蓝宝石图形衬底的制备方法 |
CN101325235B (zh) * | 2008-07-10 | 2010-06-09 | 中山大学 | 一种用于led的硅基氮化镓外延层转移方法 |
CN101515626B (zh) * | 2009-03-31 | 2010-10-13 | 上海蓝光科技有限公司 | 发光二极管芯片衬底结构的制造方法 |
CN102822996A (zh) * | 2010-03-30 | 2012-12-12 | 丰田合成株式会社 | 半导体发光器件 |
CN102822996B (zh) * | 2010-03-30 | 2015-05-06 | 丰田合成株式会社 | 半导体发光器件 |
CN102903812A (zh) * | 2011-07-27 | 2013-01-30 | 南通同方半导体有限公司 | 一种能消除应力的发光二极管结构及其制作方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1167140C (zh) | 2004-09-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1080453C (zh) | 制备发光器件晶片的方法及其发光器件 | |
CN102157644B (zh) | 具有垂直结构的发光二极管及其制造方法 | |
CN104037287B (zh) | 生长在Si衬底上的LED外延片及其制备方法 | |
US10014436B2 (en) | Method for manufacturing a light emitting element | |
KR20000020751A (ko) | 질화갈륨 기판 제조방법 | |
CN106544643B (zh) | 一种氮化物薄膜的制备方法 | |
CN105932125A (zh) | 一种GaN基绿光LED外延结构及其制备方法 | |
CN1801459A (zh) | 用于制造基于氮化镓的单晶衬底的方法和装置 | |
CN1314135C (zh) | 氮化物半导体发光二极管芯片及其制造方法 | |
CN1167140C (zh) | 高亮度氮化镓基发光二极管外延片的衬底处理方法 | |
CN104037291B (zh) | 一种生长在图形化硅衬底上的半极性GaN薄膜及其制备方法 | |
CN101728472A (zh) | 一种多层led芯片结构及其制备方法 | |
CN103811601A (zh) | 一种以蓝宝石衬底为基板的GaN基LED多阶缓冲层生长方法 | |
EP2802002B1 (en) | Method for the manufacturing of a substrate having a hetero-structure | |
CN105870287A (zh) | GaN基白光LED及制备方法 | |
MY114592A (en) | Gallium nitride compound-based semiconductor light emitting device and process for producing gallium nitride compound-based semiconductor thin film | |
CN1983656A (zh) | 具有垂直结构的发光二极管及其制造方法 | |
US7074652B2 (en) | Method for separating sapphire wafer into chips | |
CN1658406A (zh) | GaP外延片及GaP发光元件 | |
CN106601881A (zh) | ZnO导电协变衬底垂直结构型GaN紫外LED | |
CN101924021A (zh) | 半导体装置及其制造方法和发光器件 | |
CN105047769B (zh) | 一种利用湿法蚀刻进行衬底剥离的发光二极管制备方法 | |
CN102969410A (zh) | 制备GaN厚膜垂直结构LED的方法 | |
CN107305920A (zh) | 基板晶片以及ⅲ族氮化物半导体元件的制造方法 | |
CN1779910A (zh) | 在硅衬底上生长氮化镓自支撑衬底材料的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: JIANGSU BRIGHT HIGH TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: TSINGHUA UNIVERSITY Effective date: 20110928 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100084 HAIDIAN, BEIJING TO: 214200 WUXI, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20110928 Address after: 214200 building B, creative software building, Wen Zhuang Road, Yixing Economic Development Zone, Jiangsu, Wuxi 325, China Patentee after: Jiangsu Arctic Hao Tian Technology Co., Ltd. Address before: 100084 Beijing 100084-82 mailbox Patentee before: Tsinghua University |
|
DD01 | Delivery of document by public notice |
Addressee: Jiangsu Arctic Hao Tian Technology Co., Ltd. Document name: Notification to Pay the Fees |
|
DD01 | Delivery of document by public notice |
Addressee: Jiangsu Arctic Hao Tian Technology Co., Ltd. Document name: Notification of Termination of Patent Right |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040915 Termination date: 20150517 |
|
EXPY | Termination of patent right or utility model |