CN1334748A - 电子束多级加速器驱动的探针装置 - Google Patents

电子束多级加速器驱动的探针装置 Download PDF

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Publication number
CN1334748A
CN1334748A CN99816178A CN99816178A CN1334748A CN 1334748 A CN1334748 A CN 1334748A CN 99816178 A CN99816178 A CN 99816178A CN 99816178 A CN99816178 A CN 99816178A CN 1334748 A CN1334748 A CN 1334748A
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China
Prior art keywords
stage
central axis
anode
electron beam
accelerator
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CN99816178A
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English (en)
Chinese (zh)
Inventor
M·丁斯默雷
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Photoelectron Corp
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Photoelectron Corp
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Publication of CN1334748A publication Critical patent/CN1334748A/zh
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00—Radiation therapy
    • A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
    • A61N5/1001—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy using radiation sources introduced into or applied onto the body; brachytherapy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H15/00—Methods or devices for acceleration of charged particles not otherwise provided for, e.g. wakefield accelerators

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Plasma & Fusion (AREA)
  • Public Health (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pathology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Veterinary Medicine (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Medical Informatics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biophysics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • X-Ray Techniques (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Radiation-Therapy Devices (AREA)
CN99816178A 1998-12-14 1999-11-30 电子束多级加速器驱动的探针装置 Pending CN1334748A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/211,144 US6111932A (en) 1998-12-14 1998-12-14 Electron beam multistage accelerator
US09/211,144 1998-12-14

Publications (1)

Publication Number Publication Date
CN1334748A true CN1334748A (zh) 2002-02-06

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Family Applications (1)

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CN99816178A Pending CN1334748A (zh) 1998-12-14 1999-11-30 电子束多级加速器驱动的探针装置

Country Status (8)

Country Link
US (2) US6111932A (enExample)
EP (1) EP1146931A4 (enExample)
JP (1) JP2002532167A (enExample)
KR (1) KR20010101202A (enExample)
CN (1) CN1334748A (enExample)
AU (1) AU1927400A (enExample)
CA (1) CA2356619A1 (enExample)
WO (1) WO2000035535A1 (enExample)

Cited By (4)

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CN1879187B (zh) * 2003-12-02 2010-04-28 康姆艾德控股公司 模块化的x射线管以及制造这种模块化的x射线管的方法
CN104284507A (zh) * 2013-07-10 2015-01-14 阿戴姆股份公司 线性质子加速器
CN107293342A (zh) * 2016-04-12 2017-10-24 瓦里安医疗系统公司 线性加速器的屏蔽结构
WO2020252750A1 (en) * 2019-06-20 2020-12-24 Shanghai United Imaging Healthcare Co., Ltd. System and method for radiation therapy

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US6195411B1 (en) * 1999-05-13 2001-02-27 Photoelectron Corporation Miniature x-ray source with flexible probe
US6875165B2 (en) 2001-02-22 2005-04-05 Retinalabs, Inc. Method of radiation delivery to the eye
RU2344513C2 (ru) * 2003-12-02 2009-01-20 Комет Холдинг АГ Модульная рентгеновская трубка, а также способ изготовления такой модульной рентгеновской трубки
WO2005079915A1 (en) * 2004-02-12 2005-09-01 Neo Vista, Inc. Methods and apparatus for intraocular brachytherapy
US7563222B2 (en) 2004-02-12 2009-07-21 Neovista, Inc. Methods and apparatus for intraocular brachytherapy
US7336764B2 (en) * 2005-10-20 2008-02-26 Agilent Technologies, Inc. Electron beam accelerator and ceramic stage with electrically-conductive layer or coating therefor
AU2006315425A1 (en) 2005-11-15 2007-05-24 Neovista Inc. Methods and apparatus for intraocular brachytherapy
JP2011522603A (ja) 2008-06-04 2011-08-04 ネオビスタ、インコーポレイテッド 放射線源ワイヤを前進させるための手持ち放射線送達システム
US9805903B2 (en) * 2011-09-14 2017-10-31 Schlumberger Technology Corporation Energy radiation generator with uni-polar voltage ladder
CN103140014B (zh) * 2011-11-25 2015-12-09 中国原子能科学研究院 电子加速器的电子枪在线拆装设备
US8953747B2 (en) * 2012-03-28 2015-02-10 Schlumberger Technology Corporation Shielding electrode for an X-ray generator
EP2757571B1 (en) * 2013-01-17 2017-09-20 IMS Nanofabrication AG High-voltage insulation device for charged-particle optical apparatus
JP2015023286A (ja) 2013-07-17 2015-02-02 アイエムエス ナノファブリケーション アーゲー 複数のブランキングアレイを有するパターン画定装置
US9091777B2 (en) 2013-12-18 2015-07-28 Schlumberger Technology Corporation Input voltage modulator for radiation generator
EP2913838B1 (en) 2014-02-28 2018-09-19 IMS Nanofabrication GmbH Compensation of defective beamlets in a charged-particle multi-beam exposure tool
US10645788B2 (en) * 2014-03-27 2020-05-05 Nikon Corporation X-ray generation device, X-ray device, and method for manufacturing structure
EP2937889B1 (en) 2014-04-25 2017-02-15 IMS Nanofabrication AG Multi-beam tool for cutting patterns
EP3358599B1 (en) 2014-05-30 2021-01-27 IMS Nanofabrication GmbH Compensation of dose inhomogeneity using row calibration
JP6890373B2 (ja) 2014-07-10 2021-06-18 アイエムエス ナノファブリケーション ゲーエムベーハー 畳み込みカーネルを使用する粒子ビーム描画機における結像偏向の補償
US9568907B2 (en) 2014-09-05 2017-02-14 Ims Nanofabrication Ag Correction of short-range dislocations in a multi-beam writer
US9653263B2 (en) 2015-03-17 2017-05-16 Ims Nanofabrication Ag Multi-beam writing of pattern areas of relaxed critical dimension
EP3096342B1 (en) 2015-03-18 2017-09-20 IMS Nanofabrication AG Bi-directional double-pass multi-beam writing
US10410831B2 (en) 2015-05-12 2019-09-10 Ims Nanofabrication Gmbh Multi-beam writing using inclined exposure stripes
US10325756B2 (en) 2016-06-13 2019-06-18 Ims Nanofabrication Gmbh Method for compensating pattern placement errors caused by variation of pattern exposure density in a multi-beam writer
CN106531592B (zh) * 2016-12-29 2018-12-28 清华大学 电子枪以及具有该电子枪的x射线光源与ct设备
US10325757B2 (en) 2017-01-27 2019-06-18 Ims Nanofabrication Gmbh Advanced dose-level quantization of multibeam-writers
US10522329B2 (en) 2017-08-25 2019-12-31 Ims Nanofabrication Gmbh Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus
US11569064B2 (en) 2017-09-18 2023-01-31 Ims Nanofabrication Gmbh Method for irradiating a target using restricted placement grids
US10651010B2 (en) 2018-01-09 2020-05-12 Ims Nanofabrication Gmbh Non-linear dose- and blur-dependent edge placement correction
US10840054B2 (en) 2018-01-30 2020-11-17 Ims Nanofabrication Gmbh Charged-particle source and method for cleaning a charged-particle source using back-sputtering
US11099482B2 (en) 2019-05-03 2021-08-24 Ims Nanofabrication Gmbh Adapting the duration of exposure slots in multi-beam writers
KR20210099516A (ko) 2020-02-03 2021-08-12 아이엠에스 나노패브릭케이션 게엠베하 멀티―빔 라이터의 블러 변화 보정
KR20210132599A (ko) 2020-04-24 2021-11-04 아이엠에스 나노패브릭케이션 게엠베하 대전 입자 소스
EP4095882A1 (en) 2021-05-25 2022-11-30 IMS Nanofabrication GmbH Pattern data processing for programmable direct-write apparatus
US12154756B2 (en) 2021-08-12 2024-11-26 Ims Nanofabrication Gmbh Beam pattern device having beam absorber structure
KR102819452B1 (ko) * 2022-12-29 2025-06-13 한국원자력의학원 붕소 중성자 포획치료용 다발식 정전형 가속기
CN115823745B (zh) * 2023-02-15 2023-04-11 中海(山东)净化工程有限公司 一种空气调节系统
EP4557344A1 (en) * 2023-11-15 2025-05-21 Comet AG Electron gun device

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DE2030747C3 (de) * 1970-06-23 1975-01-09 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Beschleunigungsrohr für einen Ladungsträgerstrahl
DE2302938C3 (de) * 1973-01-22 1979-07-12 Polymer-Physik Gmbh & Co Kg, 2844 Lemfoerde Mehrstufiger Beschleuniger für geladene Teilchen mit Hochvakuumisolation
US5124658A (en) * 1988-06-13 1992-06-23 Adler Richard J Nested high voltage generator/particle accelerator
US5428658A (en) * 1994-01-21 1995-06-27 Photoelectron Corporation X-ray source with flexible probe
US5153900A (en) 1990-09-05 1992-10-06 Photoelectron Corporation Miniaturized low power x-ray source
US5077530A (en) * 1990-10-16 1991-12-31 Schlumberger Technology Corporation Low-voltage modulator for circular induction accelerator
US5680431A (en) * 1996-04-10 1997-10-21 Schlumberger Technology Corporation X-ray generator
US6009146A (en) * 1997-06-23 1999-12-28 Adler; Richard J. MeVScan transmission x-ray and x-ray system utilizing a stationary collimator method and apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1879187B (zh) * 2003-12-02 2010-04-28 康姆艾德控股公司 模块化的x射线管以及制造这种模块化的x射线管的方法
CN104284507A (zh) * 2013-07-10 2015-01-14 阿戴姆股份公司 线性质子加速器
CN104284507B (zh) * 2013-07-10 2018-02-13 阿戴姆股份公司 线性质子加速器
CN107293342A (zh) * 2016-04-12 2017-10-24 瓦里安医疗系统公司 线性加速器的屏蔽结构
CN107293342B (zh) * 2016-04-12 2023-01-13 瓦里安医疗系统公司 线性加速器的屏蔽结构
WO2020252750A1 (en) * 2019-06-20 2020-12-24 Shanghai United Imaging Healthcare Co., Ltd. System and method for radiation therapy

Also Published As

Publication number Publication date
EP1146931A1 (en) 2001-10-24
US6198804B1 (en) 2001-03-06
KR20010101202A (ko) 2001-11-14
US6111932A (en) 2000-08-29
JP2002532167A (ja) 2002-10-02
CA2356619A1 (en) 2000-06-22
WO2000035535A1 (en) 2000-06-22
AU1927400A (en) 2000-07-03
WO2000035535B1 (en) 2000-09-08
EP1146931A4 (en) 2009-05-20

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