KR20010101202A - 전자빔 다단가속기 구동형 프로우브장치 - Google Patents

전자빔 다단가속기 구동형 프로우브장치 Download PDF

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Publication number
KR20010101202A
KR20010101202A KR1020017007393A KR20017007393A KR20010101202A KR 20010101202 A KR20010101202 A KR 20010101202A KR 1020017007393 A KR1020017007393 A KR 1020017007393A KR 20017007393 A KR20017007393 A KR 20017007393A KR 20010101202 A KR20010101202 A KR 20010101202A
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KR
South Korea
Prior art keywords
stage
accelerator
anode
electron beam
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020017007393A
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English (en)
Korean (ko)
Inventor
딘스모어마크
Original Assignee
피터 이. 외팅거
포토일렉트론 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 피터 이. 외팅거, 포토일렉트론 코포레이션 filed Critical 피터 이. 외팅거
Publication of KR20010101202A publication Critical patent/KR20010101202A/ko
Withdrawn legal-status Critical Current

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00—Radiation therapy
    • A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
    • A61N5/1001—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy using radiation sources introduced into or applied onto the body; brachytherapy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H15/00—Methods or devices for acceleration of charged particles not otherwise provided for, e.g. wakefield accelerators

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Plasma & Fusion (AREA)
  • Public Health (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pathology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Veterinary Medicine (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Medical Informatics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biophysics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • X-Ray Techniques (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Radiation-Therapy Devices (AREA)
KR1020017007393A 1998-12-14 1999-11-30 전자빔 다단가속기 구동형 프로우브장치 Withdrawn KR20010101202A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/211,144 US6111932A (en) 1998-12-14 1998-12-14 Electron beam multistage accelerator
US09/211,144 1998-12-14
PCT/US1999/028259 WO2000035535A1 (en) 1998-12-14 1999-11-30 Electron beam multistage accelerator driven probe device

Publications (1)

Publication Number Publication Date
KR20010101202A true KR20010101202A (ko) 2001-11-14

Family

ID=22785742

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020017007393A Withdrawn KR20010101202A (ko) 1998-12-14 1999-11-30 전자빔 다단가속기 구동형 프로우브장치

Country Status (8)

Country Link
US (2) US6111932A (enExample)
EP (1) EP1146931A4 (enExample)
JP (1) JP2002532167A (enExample)
KR (1) KR20010101202A (enExample)
CN (1) CN1334748A (enExample)
AU (1) AU1927400A (enExample)
CA (1) CA2356619A1 (enExample)
WO (1) WO2000035535A1 (enExample)

Cited By (1)

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KR20240106761A (ko) * 2022-12-29 2024-07-08 한국원자력의학원 붕소 중성자 포획치료용 다발식 정전형 가속기

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US6195411B1 (en) * 1999-05-13 2001-02-27 Photoelectron Corporation Miniature x-ray source with flexible probe
US6875165B2 (en) 2001-02-22 2005-04-05 Retinalabs, Inc. Method of radiation delivery to the eye
WO2005055270A1 (de) * 2003-12-02 2005-06-16 Comet Holding Ag Modulare röntgenröhre sowie verfahren zur herstellung einer solchen modularen röntgenröhre
RU2344513C2 (ru) * 2003-12-02 2009-01-20 Комет Холдинг АГ Модульная рентгеновская трубка, а также способ изготовления такой модульной рентгеновской трубки
WO2005079915A1 (en) * 2004-02-12 2005-09-01 Neo Vista, Inc. Methods and apparatus for intraocular brachytherapy
US7563222B2 (en) 2004-02-12 2009-07-21 Neovista, Inc. Methods and apparatus for intraocular brachytherapy
US7336764B2 (en) * 2005-10-20 2008-02-26 Agilent Technologies, Inc. Electron beam accelerator and ceramic stage with electrically-conductive layer or coating therefor
AU2006315425A1 (en) 2005-11-15 2007-05-24 Neovista Inc. Methods and apparatus for intraocular brachytherapy
JP2011522603A (ja) 2008-06-04 2011-08-04 ネオビスタ、インコーポレイテッド 放射線源ワイヤを前進させるための手持ち放射線送達システム
US9805903B2 (en) * 2011-09-14 2017-10-31 Schlumberger Technology Corporation Energy radiation generator with uni-polar voltage ladder
CN103140014B (zh) * 2011-11-25 2015-12-09 中国原子能科学研究院 电子加速器的电子枪在线拆装设备
US8953747B2 (en) * 2012-03-28 2015-02-10 Schlumberger Technology Corporation Shielding electrode for an X-ray generator
EP2757571B1 (en) * 2013-01-17 2017-09-20 IMS Nanofabrication AG High-voltage insulation device for charged-particle optical apparatus
DK2825000T3 (en) * 2013-07-10 2016-06-13 Adam S A Self-shielded vertical linear proton accelerator for proton therapy
JP2015023286A (ja) 2013-07-17 2015-02-02 アイエムエス ナノファブリケーション アーゲー 複数のブランキングアレイを有するパターン画定装置
US9091777B2 (en) 2013-12-18 2015-07-28 Schlumberger Technology Corporation Input voltage modulator for radiation generator
EP2913838B1 (en) 2014-02-28 2018-09-19 IMS Nanofabrication GmbH Compensation of defective beamlets in a charged-particle multi-beam exposure tool
US10645788B2 (en) * 2014-03-27 2020-05-05 Nikon Corporation X-ray generation device, X-ray device, and method for manufacturing structure
EP2937889B1 (en) 2014-04-25 2017-02-15 IMS Nanofabrication AG Multi-beam tool for cutting patterns
EP3358599B1 (en) 2014-05-30 2021-01-27 IMS Nanofabrication GmbH Compensation of dose inhomogeneity using row calibration
JP6890373B2 (ja) 2014-07-10 2021-06-18 アイエムエス ナノファブリケーション ゲーエムベーハー 畳み込みカーネルを使用する粒子ビーム描画機における結像偏向の補償
US9568907B2 (en) 2014-09-05 2017-02-14 Ims Nanofabrication Ag Correction of short-range dislocations in a multi-beam writer
US9653263B2 (en) 2015-03-17 2017-05-16 Ims Nanofabrication Ag Multi-beam writing of pattern areas of relaxed critical dimension
EP3096342B1 (en) 2015-03-18 2017-09-20 IMS Nanofabrication AG Bi-directional double-pass multi-beam writing
US10410831B2 (en) 2015-05-12 2019-09-10 Ims Nanofabrication Gmbh Multi-beam writing using inclined exposure stripes
US10143076B2 (en) * 2016-04-12 2018-11-27 Varian Medical Systems, Inc. Shielding structures for linear accelerators
US10325756B2 (en) 2016-06-13 2019-06-18 Ims Nanofabrication Gmbh Method for compensating pattern placement errors caused by variation of pattern exposure density in a multi-beam writer
CN106531592B (zh) * 2016-12-29 2018-12-28 清华大学 电子枪以及具有该电子枪的x射线光源与ct设备
US10325757B2 (en) 2017-01-27 2019-06-18 Ims Nanofabrication Gmbh Advanced dose-level quantization of multibeam-writers
US10522329B2 (en) 2017-08-25 2019-12-31 Ims Nanofabrication Gmbh Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus
US11569064B2 (en) 2017-09-18 2023-01-31 Ims Nanofabrication Gmbh Method for irradiating a target using restricted placement grids
US10651010B2 (en) 2018-01-09 2020-05-12 Ims Nanofabrication Gmbh Non-linear dose- and blur-dependent edge placement correction
US10840054B2 (en) 2018-01-30 2020-11-17 Ims Nanofabrication Gmbh Charged-particle source and method for cleaning a charged-particle source using back-sputtering
US11099482B2 (en) 2019-05-03 2021-08-24 Ims Nanofabrication Gmbh Adapting the duration of exposure slots in multi-beam writers
CN112399868B (zh) 2019-06-20 2024-06-14 上海联影医疗科技股份有限公司 放射治疗的系统和方法
KR20210099516A (ko) 2020-02-03 2021-08-12 아이엠에스 나노패브릭케이션 게엠베하 멀티―빔 라이터의 블러 변화 보정
KR20210132599A (ko) 2020-04-24 2021-11-04 아이엠에스 나노패브릭케이션 게엠베하 대전 입자 소스
EP4095882A1 (en) 2021-05-25 2022-11-30 IMS Nanofabrication GmbH Pattern data processing for programmable direct-write apparatus
US12154756B2 (en) 2021-08-12 2024-11-26 Ims Nanofabrication Gmbh Beam pattern device having beam absorber structure
CN115823745B (zh) * 2023-02-15 2023-04-11 中海(山东)净化工程有限公司 一种空气调节系统
EP4557344A1 (en) * 2023-11-15 2025-05-21 Comet AG Electron gun device

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DE2302938C3 (de) * 1973-01-22 1979-07-12 Polymer-Physik Gmbh & Co Kg, 2844 Lemfoerde Mehrstufiger Beschleuniger für geladene Teilchen mit Hochvakuumisolation
US5124658A (en) * 1988-06-13 1992-06-23 Adler Richard J Nested high voltage generator/particle accelerator
US5428658A (en) * 1994-01-21 1995-06-27 Photoelectron Corporation X-ray source with flexible probe
US5153900A (en) 1990-09-05 1992-10-06 Photoelectron Corporation Miniaturized low power x-ray source
US5077530A (en) * 1990-10-16 1991-12-31 Schlumberger Technology Corporation Low-voltage modulator for circular induction accelerator
US5680431A (en) * 1996-04-10 1997-10-21 Schlumberger Technology Corporation X-ray generator
US6009146A (en) * 1997-06-23 1999-12-28 Adler; Richard J. MeVScan transmission x-ray and x-ray system utilizing a stationary collimator method and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240106761A (ko) * 2022-12-29 2024-07-08 한국원자력의학원 붕소 중성자 포획치료용 다발식 정전형 가속기

Also Published As

Publication number Publication date
EP1146931A1 (en) 2001-10-24
US6198804B1 (en) 2001-03-06
US6111932A (en) 2000-08-29
JP2002532167A (ja) 2002-10-02
CA2356619A1 (en) 2000-06-22
WO2000035535A1 (en) 2000-06-22
AU1927400A (en) 2000-07-03
WO2000035535B1 (en) 2000-09-08
EP1146931A4 (en) 2009-05-20
CN1334748A (zh) 2002-02-06

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20010614

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid