JP2002532167A - 電子ビーム多段加速器駆動プローブ装置 - Google Patents
電子ビーム多段加速器駆動プローブ装置Info
- Publication number
- JP2002532167A JP2002532167A JP2000587851A JP2000587851A JP2002532167A JP 2002532167 A JP2002532167 A JP 2002532167A JP 2000587851 A JP2000587851 A JP 2000587851A JP 2000587851 A JP2000587851 A JP 2000587851A JP 2002532167 A JP2002532167 A JP 2002532167A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- accelerator
- central axis
- anode
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 44
- 239000000523 sample Substances 0.000 title claims abstract description 40
- 238000005259 measurement Methods 0.000 claims abstract description 20
- 238000004846 x-ray emission Methods 0.000 claims abstract description 5
- 230000001902 propagating effect Effects 0.000 claims abstract 5
- 239000012212 insulator Substances 0.000 claims description 23
- 238000012544 monitoring process Methods 0.000 claims description 12
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000002560 therapeutic procedure Methods 0.000 abstract description 12
- 230000005855 radiation Effects 0.000 description 28
- 239000000919 ceramic Substances 0.000 description 14
- 239000002184 metal Substances 0.000 description 10
- 230000001133 acceleration Effects 0.000 description 9
- 239000011800 void material Substances 0.000 description 8
- 229910000595 mu-metal Inorganic materials 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 206010028980 Neoplasm Diseases 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 238000002725 brachytherapy Methods 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000008467 tissue growth Effects 0.000 description 2
- 208000003174 Brain Neoplasms Diseases 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 208000002780 macular degeneration Diseases 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 238000002638 palliative care Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000001959 radiotherapy Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N5/1001—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy using radiation sources introduced into or applied onto the body; brachytherapy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H15/00—Methods or devices for acceleration of charged particles not otherwise provided for, e.g. wakefield accelerators
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Plasma & Fusion (AREA)
- Public Health (AREA)
- Radiology & Medical Imaging (AREA)
- Pathology (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Veterinary Medicine (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Medical Informatics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Biophysics (AREA)
- High Energy & Nuclear Physics (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- X-Ray Techniques (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
- Radiation-Therapy Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/211,144 US6111932A (en) | 1998-12-14 | 1998-12-14 | Electron beam multistage accelerator |
| US09/211,144 | 1998-12-14 | ||
| PCT/US1999/028259 WO2000035535A1 (en) | 1998-12-14 | 1999-11-30 | Electron beam multistage accelerator driven probe device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002532167A true JP2002532167A (ja) | 2002-10-02 |
| JP2002532167A5 JP2002532167A5 (enExample) | 2007-01-25 |
Family
ID=22785742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000587851A Abandoned JP2002532167A (ja) | 1998-12-14 | 1999-11-30 | 電子ビーム多段加速器駆動プローブ装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US6111932A (enExample) |
| EP (1) | EP1146931A4 (enExample) |
| JP (1) | JP2002532167A (enExample) |
| KR (1) | KR20010101202A (enExample) |
| CN (1) | CN1334748A (enExample) |
| AU (1) | AU1927400A (enExample) |
| CA (1) | CA2356619A1 (enExample) |
| WO (1) | WO2000035535A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103140014A (zh) * | 2011-11-25 | 2013-06-05 | 中国原子能科学研究院 | 电子加速器的电子枪在线拆装设备 |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6195411B1 (en) * | 1999-05-13 | 2001-02-27 | Photoelectron Corporation | Miniature x-ray source with flexible probe |
| US6875165B2 (en) | 2001-02-22 | 2005-04-05 | Retinalabs, Inc. | Method of radiation delivery to the eye |
| WO2005055270A1 (de) * | 2003-12-02 | 2005-06-16 | Comet Holding Ag | Modulare röntgenröhre sowie verfahren zur herstellung einer solchen modularen röntgenröhre |
| RU2344513C2 (ru) * | 2003-12-02 | 2009-01-20 | Комет Холдинг АГ | Модульная рентгеновская трубка, а также способ изготовления такой модульной рентгеновской трубки |
| WO2005079915A1 (en) * | 2004-02-12 | 2005-09-01 | Neo Vista, Inc. | Methods and apparatus for intraocular brachytherapy |
| US7563222B2 (en) | 2004-02-12 | 2009-07-21 | Neovista, Inc. | Methods and apparatus for intraocular brachytherapy |
| US7336764B2 (en) * | 2005-10-20 | 2008-02-26 | Agilent Technologies, Inc. | Electron beam accelerator and ceramic stage with electrically-conductive layer or coating therefor |
| AU2006315425A1 (en) | 2005-11-15 | 2007-05-24 | Neovista Inc. | Methods and apparatus for intraocular brachytherapy |
| JP2011522603A (ja) | 2008-06-04 | 2011-08-04 | ネオビスタ、インコーポレイテッド | 放射線源ワイヤを前進させるための手持ち放射線送達システム |
| US9805903B2 (en) * | 2011-09-14 | 2017-10-31 | Schlumberger Technology Corporation | Energy radiation generator with uni-polar voltage ladder |
| US8953747B2 (en) * | 2012-03-28 | 2015-02-10 | Schlumberger Technology Corporation | Shielding electrode for an X-ray generator |
| EP2757571B1 (en) * | 2013-01-17 | 2017-09-20 | IMS Nanofabrication AG | High-voltage insulation device for charged-particle optical apparatus |
| DK2825000T3 (en) * | 2013-07-10 | 2016-06-13 | Adam S A | Self-shielded vertical linear proton accelerator for proton therapy |
| JP2015023286A (ja) | 2013-07-17 | 2015-02-02 | アイエムエス ナノファブリケーション アーゲー | 複数のブランキングアレイを有するパターン画定装置 |
| US9091777B2 (en) | 2013-12-18 | 2015-07-28 | Schlumberger Technology Corporation | Input voltage modulator for radiation generator |
| EP2913838B1 (en) | 2014-02-28 | 2018-09-19 | IMS Nanofabrication GmbH | Compensation of defective beamlets in a charged-particle multi-beam exposure tool |
| US10645788B2 (en) * | 2014-03-27 | 2020-05-05 | Nikon Corporation | X-ray generation device, X-ray device, and method for manufacturing structure |
| EP2937889B1 (en) | 2014-04-25 | 2017-02-15 | IMS Nanofabrication AG | Multi-beam tool for cutting patterns |
| EP3358599B1 (en) | 2014-05-30 | 2021-01-27 | IMS Nanofabrication GmbH | Compensation of dose inhomogeneity using row calibration |
| JP6890373B2 (ja) | 2014-07-10 | 2021-06-18 | アイエムエス ナノファブリケーション ゲーエムベーハー | 畳み込みカーネルを使用する粒子ビーム描画機における結像偏向の補償 |
| US9568907B2 (en) | 2014-09-05 | 2017-02-14 | Ims Nanofabrication Ag | Correction of short-range dislocations in a multi-beam writer |
| US9653263B2 (en) | 2015-03-17 | 2017-05-16 | Ims Nanofabrication Ag | Multi-beam writing of pattern areas of relaxed critical dimension |
| EP3096342B1 (en) | 2015-03-18 | 2017-09-20 | IMS Nanofabrication AG | Bi-directional double-pass multi-beam writing |
| US10410831B2 (en) | 2015-05-12 | 2019-09-10 | Ims Nanofabrication Gmbh | Multi-beam writing using inclined exposure stripes |
| US10143076B2 (en) * | 2016-04-12 | 2018-11-27 | Varian Medical Systems, Inc. | Shielding structures for linear accelerators |
| US10325756B2 (en) | 2016-06-13 | 2019-06-18 | Ims Nanofabrication Gmbh | Method for compensating pattern placement errors caused by variation of pattern exposure density in a multi-beam writer |
| CN106531592B (zh) * | 2016-12-29 | 2018-12-28 | 清华大学 | 电子枪以及具有该电子枪的x射线光源与ct设备 |
| US10325757B2 (en) | 2017-01-27 | 2019-06-18 | Ims Nanofabrication Gmbh | Advanced dose-level quantization of multibeam-writers |
| US10522329B2 (en) | 2017-08-25 | 2019-12-31 | Ims Nanofabrication Gmbh | Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus |
| US11569064B2 (en) | 2017-09-18 | 2023-01-31 | Ims Nanofabrication Gmbh | Method for irradiating a target using restricted placement grids |
| US10651010B2 (en) | 2018-01-09 | 2020-05-12 | Ims Nanofabrication Gmbh | Non-linear dose- and blur-dependent edge placement correction |
| US10840054B2 (en) | 2018-01-30 | 2020-11-17 | Ims Nanofabrication Gmbh | Charged-particle source and method for cleaning a charged-particle source using back-sputtering |
| US11099482B2 (en) | 2019-05-03 | 2021-08-24 | Ims Nanofabrication Gmbh | Adapting the duration of exposure slots in multi-beam writers |
| CN112399868B (zh) | 2019-06-20 | 2024-06-14 | 上海联影医疗科技股份有限公司 | 放射治疗的系统和方法 |
| KR20210099516A (ko) | 2020-02-03 | 2021-08-12 | 아이엠에스 나노패브릭케이션 게엠베하 | 멀티―빔 라이터의 블러 변화 보정 |
| KR20210132599A (ko) | 2020-04-24 | 2021-11-04 | 아이엠에스 나노패브릭케이션 게엠베하 | 대전 입자 소스 |
| EP4095882A1 (en) | 2021-05-25 | 2022-11-30 | IMS Nanofabrication GmbH | Pattern data processing for programmable direct-write apparatus |
| US12154756B2 (en) | 2021-08-12 | 2024-11-26 | Ims Nanofabrication Gmbh | Beam pattern device having beam absorber structure |
| KR102819452B1 (ko) * | 2022-12-29 | 2025-06-13 | 한국원자력의학원 | 붕소 중성자 포획치료용 다발식 정전형 가속기 |
| CN115823745B (zh) * | 2023-02-15 | 2023-04-11 | 中海(山东)净化工程有限公司 | 一种空气调节系统 |
| EP4557344A1 (en) * | 2023-11-15 | 2025-05-21 | Comet AG | Electron gun device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2030747C3 (de) * | 1970-06-23 | 1975-01-09 | Steigerwald Strahltechnik Gmbh, 8000 Muenchen | Beschleunigungsrohr für einen Ladungsträgerstrahl |
| DE2302938C3 (de) * | 1973-01-22 | 1979-07-12 | Polymer-Physik Gmbh & Co Kg, 2844 Lemfoerde | Mehrstufiger Beschleuniger für geladene Teilchen mit Hochvakuumisolation |
| US5124658A (en) * | 1988-06-13 | 1992-06-23 | Adler Richard J | Nested high voltage generator/particle accelerator |
| US5428658A (en) * | 1994-01-21 | 1995-06-27 | Photoelectron Corporation | X-ray source with flexible probe |
| US5153900A (en) | 1990-09-05 | 1992-10-06 | Photoelectron Corporation | Miniaturized low power x-ray source |
| US5077530A (en) * | 1990-10-16 | 1991-12-31 | Schlumberger Technology Corporation | Low-voltage modulator for circular induction accelerator |
| US5680431A (en) * | 1996-04-10 | 1997-10-21 | Schlumberger Technology Corporation | X-ray generator |
| US6009146A (en) * | 1997-06-23 | 1999-12-28 | Adler; Richard J. | MeVScan transmission x-ray and x-ray system utilizing a stationary collimator method and apparatus |
-
1998
- 1998-12-14 US US09/211,144 patent/US6111932A/en not_active Expired - Lifetime
-
1999
- 1999-11-30 WO PCT/US1999/028259 patent/WO2000035535A1/en not_active Ceased
- 1999-11-30 CN CN99816178A patent/CN1334748A/zh active Pending
- 1999-11-30 JP JP2000587851A patent/JP2002532167A/ja not_active Abandoned
- 1999-11-30 AU AU19274/00A patent/AU1927400A/en not_active Abandoned
- 1999-11-30 EP EP99962934A patent/EP1146931A4/en not_active Withdrawn
- 1999-11-30 KR KR1020017007393A patent/KR20010101202A/ko not_active Withdrawn
- 1999-11-30 CA CA002356619A patent/CA2356619A1/en not_active Abandoned
-
2000
- 2000-03-15 US US09/526,245 patent/US6198804B1/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103140014A (zh) * | 2011-11-25 | 2013-06-05 | 中国原子能科学研究院 | 电子加速器的电子枪在线拆装设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1146931A1 (en) | 2001-10-24 |
| US6198804B1 (en) | 2001-03-06 |
| KR20010101202A (ko) | 2001-11-14 |
| US6111932A (en) | 2000-08-29 |
| CA2356619A1 (en) | 2000-06-22 |
| WO2000035535A1 (en) | 2000-06-22 |
| AU1927400A (en) | 2000-07-03 |
| WO2000035535B1 (en) | 2000-09-08 |
| EP1146931A4 (en) | 2009-05-20 |
| CN1334748A (zh) | 2002-02-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061130 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061130 |
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| A762 | Written abandonment of application |
Free format text: JAPANESE INTERMEDIATE CODE: A762 Effective date: 20090428 |