CN1276124C - 用作气相反应器清洗、蚀刻及掺杂气体的全氟酮 - Google Patents

用作气相反应器清洗、蚀刻及掺杂气体的全氟酮 Download PDF

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Publication number
CN1276124C
CN1276124C CNB028087828A CN02808782A CN1276124C CN 1276124 C CN1276124 C CN 1276124C CN B028087828 A CNB028087828 A CN B028087828A CN 02808782 A CN02808782 A CN 02808782A CN 1276124 C CN1276124 C CN 1276124C
Authority
CN
China
Prior art keywords
perfluoroketone
gas
perfluoroketones
etching
phase reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028087828A
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English (en)
Chinese (zh)
Other versions
CN1505694A (zh
Inventor
S·克萨里
F·E·比尔
M·G·柯斯特洛
R·M·弗林
R·M·明达耶
J·G·欧文斯
D·R·维塔克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN1505694A publication Critical patent/CN1505694A/zh
Application granted granted Critical
Publication of CN1276124C publication Critical patent/CN1276124C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/26—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials
    • H10P50/264—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means
    • H10P50/266—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
CNB028087828A 2001-04-24 2002-03-14 用作气相反应器清洗、蚀刻及掺杂气体的全氟酮 Expired - Fee Related CN1276124C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/841,376 2001-04-24
US09/841,376 US6540930B2 (en) 2001-04-24 2001-04-24 Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases

Publications (2)

Publication Number Publication Date
CN1505694A CN1505694A (zh) 2004-06-16
CN1276124C true CN1276124C (zh) 2006-09-20

Family

ID=25284710

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028087828A Expired - Fee Related CN1276124C (zh) 2001-04-24 2002-03-14 用作气相反应器清洗、蚀刻及掺杂气体的全氟酮

Country Status (8)

Country Link
US (1) US6540930B2 (https=)
EP (1) EP1383939B1 (https=)
JP (1) JP2004536448A (https=)
KR (1) KR20030092096A (https=)
CN (1) CN1276124C (https=)
AT (1) ATE310838T1 (https=)
DE (1) DE60207544T2 (https=)
WO (1) WO2002086192A1 (https=)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6837250B2 (en) * 2002-02-27 2005-01-04 Air Products And Chemicals, Inc. CVD chamber cleaning using mixed PFCs from capture/recycle
DE10255988A1 (de) * 2002-11-30 2004-06-17 Infineon Technologies Ag Verfahren zum Reinigen einer Prozesskammer
TWI230094B (en) * 2003-01-14 2005-04-01 Desiccant Technology Corp Method for exhaust treatment of perfluoro compounds
US20050011859A1 (en) * 2003-07-15 2005-01-20 Bing Ji Unsaturated oxygenated fluorocarbons for selective aniostropic etch applications
US20060093756A1 (en) * 2004-11-03 2006-05-04 Nagarajan Rajagopalan High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD films
US8791254B2 (en) * 2006-05-19 2014-07-29 3M Innovative Properties Company Cyclic hydrofluoroether compounds and processes for their preparation and use
US8193397B2 (en) * 2006-12-06 2012-06-05 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US20100263885A1 (en) * 2009-04-21 2010-10-21 3M Innovative Properties Company Protection systems and methods for electronic devices
BRPI0924862A2 (pt) 2009-06-12 2016-08-23 Abb Technology Ag meio de isolação dielétrica
DE202009009305U1 (de) 2009-06-17 2009-11-05 Ormazabal Gmbh Schalteinrichtung für Mittel-, Hoch- oder Höchstspannung mit einem Füllmedium
EP2511948A4 (en) 2010-02-01 2014-07-02 Central Glass Co Ltd DRYING AGENT AND DRYING PROCESS WITH THIS
JP5434970B2 (ja) 2010-07-12 2014-03-05 セントラル硝子株式会社 ドライエッチング剤
RU2460717C2 (ru) * 2010-12-06 2012-09-10 Федеральное государственное унитарное предприятие "Российский научный центр "Прикладная химия" Способ получения перфторэтилизопропилкетона в реакторе идеального вытеснения
DK2652752T3 (en) * 2010-12-14 2016-01-11 Abb Technology Ag Dielectric INSULATION MEDIUM
KR20130128433A (ko) 2010-12-14 2013-11-26 에이비비 리써치 리미티드 유전성 절연 매질
RU2567754C2 (ru) * 2010-12-16 2015-11-10 Абб Текнолоджи Аг Диэлектрическая изолирующая среда
FR2975820B1 (fr) * 2011-05-24 2013-07-05 Schneider Electric Ind Sas Melange de decafluoro-2-methylbutan-3-one et d'un gaz vecteur comme milieu d'isolation electrique et/ou d'extinction des arcs electriques en moyenne tension
JP2013030531A (ja) 2011-07-27 2013-02-07 Central Glass Co Ltd ドライエッチング剤
JP5953681B2 (ja) * 2011-09-09 2016-07-20 イビデン株式会社 プリント配線板の製造方法
RU2494086C2 (ru) * 2011-10-10 2013-09-27 Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) Способ получения перфторэтилизопропилкетона
WO2013087700A1 (en) 2011-12-13 2013-06-20 Abb Technology Ag Sealed and gas insulated high voltage converter environment for offshore platforms
CN114752386A (zh) * 2013-03-28 2022-07-15 得凯莫斯公司弗罗里达有限公司 氢氟烯烃蚀刻气体混合物
TWI642809B (zh) * 2013-09-09 2018-12-01 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 用蝕刻氣體蝕刻半導體結構的方法
JP2017022327A (ja) * 2015-07-15 2017-01-26 東京エレクトロン株式会社 自然酸化膜除去方法及び自然酸化膜除去装置
EP3421105A4 (en) 2016-02-26 2019-10-30 Sinochem Lantian Co., Ltd. COMPOSITION WITH FLUOROUS KETONE
CN106542981B (zh) * 2016-09-23 2022-05-20 天津市长芦化工新材料有限公司 全氟九碳酮的制备方法
CN106554262B (zh) * 2016-09-23 2022-05-20 天津市长芦化工新材料有限公司 全氟九碳酮及其应用
KR102303686B1 (ko) 2017-02-28 2021-09-17 샌트랄 글래스 컴퍼니 리미티드 드라이 에칭제, 드라이 에칭 방법 및 반도체 장치의 제조방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2521594C2 (de) 1975-05-15 1984-03-15 Hoechst Ag, 6230 Frankfurt Verfahren zur Herstellung perfluorierter Ketone
JPH082893B2 (ja) 1991-04-16 1996-01-17 信越化学工業株式会社 パーフルオロ環状ケトン及びその製造法
JPH06163476A (ja) 1992-11-18 1994-06-10 Sony Corp ドライエッチング方法
US5466877A (en) 1994-03-15 1995-11-14 Minnesota Mining And Manufacturing Company Process for converting perfluorinated esters to perfluorinated acyl fluorides and/or ketones
US5925611A (en) * 1995-01-20 1999-07-20 Minnesota Mining And Manufacturing Company Cleaning process and composition
JP2904723B2 (ja) 1995-04-21 1999-06-14 セントラル硝子株式会社 クリーニングガス
JPH1027781A (ja) 1996-07-10 1998-01-27 Daikin Ind Ltd エッチングガスおよびクリーニングガス
JP3141325B2 (ja) 1999-01-14 2001-03-05 工業技術院長 溶剤およびそれを用いる物品表面の清浄化方法
ES2230125T5 (es) 1999-07-20 2016-10-04 3M Innovative Properties Company Uso de cetonas fluoradas en composiciones extintoras de incendios
US6394107B1 (en) * 2001-04-24 2002-05-28 3M Innovative Properties Company Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components

Also Published As

Publication number Publication date
US6540930B2 (en) 2003-04-01
CN1505694A (zh) 2004-06-16
EP1383939B1 (en) 2005-11-23
ATE310838T1 (de) 2005-12-15
DE60207544T2 (de) 2006-08-10
KR20030092096A (ko) 2003-12-03
US20030019841A1 (en) 2003-01-30
WO2002086192A1 (en) 2002-10-31
JP2004536448A (ja) 2004-12-02
EP1383939A1 (en) 2004-01-28
DE60207544D1 (de) 2005-12-29

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Granted publication date: 20060920

Termination date: 20140314