CN1261751C - Inspecting method for end faces of brittle-material-made substrate and device therefor - Google Patents
Inspecting method for end faces of brittle-material-made substrate and device therefor Download PDFInfo
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- CN1261751C CN1261751C CNB028132459A CN02813245A CN1261751C CN 1261751 C CN1261751 C CN 1261751C CN B028132459 A CNB028132459 A CN B028132459A CN 02813245 A CN02813245 A CN 02813245A CN 1261751 C CN1261751 C CN 1261751C
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- Optics & Photonics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Liquid Crystal (AREA)
Abstract
An inspecting device for the end faces of a brittle-material-made substrate is provided, comprising light sources (16a, 17a, 16b, 17b) for applying light beams to the end faces (Va, Vb) of the brittle-material-made substrate (2) placed horizontally on a table moving in a specified direction, and a quantity-of-light detecting means (14a, 15a, 14b, 15b) for receiving light beams reflected from the end faces (Va, Vb) of the substrate (2), whereby the device determines that the end faces (Va, Vb) of the substrate (2) have a chip when the light quantity of a received reflected beam is above a specified upper limit or below a specified lower limit.
Description
Technical field
The present invention relates to a kind of method and device of checking the end face portion of brittle substrate.
Background technology
Thereby display panels normally is provided with liquid crystal layer and forms between the base plate of liquid crystal panel that a pair of glass substrate forms.The surface of one side's base plate of liquid crystal panel is provided with many wirings, in addition, the electrode terminal of each wiring is set respectively on each adjacent side edge part surface.Such base plate of liquid crystal panel can be made multi-disc simultaneously by blocking large-area mother liquor crystal panel substrate.
As a kind of glass substrate of brittle substrate, on glass surface, form line by chalker, then, on glass substrate, apply bending moment by breaking device (Block レ イ Network device), thus, blocked along line.Base plate of liquid crystal panel also can be made the multi-disc base plate of liquid crystal panel simultaneously by blocking mother liquor crystal panel substrate.And mother liquor crystal panel substrate can set in advance wiring and electrode terminal in intercepted base plate of liquid crystal panel zone separately, in addition, forms wiring and electrode terminal in the end of intercepted base plate of liquid crystal panel.
Thereby under the situation of blocking such mother liquor crystal panel substrate manufacturing base plate of liquid crystal panel, if on the end face of intercepted base plate of liquid crystal panel, produce breach, because this breach probably has damage on the electrode terminal of making in electrode terminal that sets in advance or subsequent handling.In addition, if this breach develops into shell cutting shape (tool cuts the れ shape) defective (conchoidal breach), the electrode terminal that is set on the base plate of liquid crystal panel probably can be cut off.Like this, make display panels if produce the base plate of liquid crystal panel of defective on the use end face, the display panels that is made into will become the defective products of cisco unity malfunction, therefore, produce the problem that the manufacturing cost of yield rate reduction, display panels increases.
In order to prevent such problem, thereby when blocking mother liquor crystal panel substrate and making base plate of liquid crystal panel, before the base plate of liquid crystal panel that will be made into was sent to subsequent handling, finding had zero defect very important on the end face of liquid crystal panel.
In the prior art, thereby after blocking mother liquor crystal panel substrate and making base plate of liquid crystal panel, observing by eyes has non-notch (owing け) etc. on the end face of checking base plate of liquid crystal panel, but, observe in the method check by eyes like this, probably can ignore the trickle breach etc. of the end face of base plate of liquid crystal panel.And, because be the side edge part of observing base plate of liquid crystal panel by eyes, the overlooker must be arranged, therefore, just become to make the main cause of the manufacturing cost increase of display panels.
So relatively inspection method is considered by camera head near the part end face of base plate of liquid crystal panel to be made a video recording, and by the view data that is taken is carried out Flame Image Process, also can check the method that has or not of defectives such as breach.But, for having or not by such defectives such as method inspection breach, must carry out 3D processing to view data, and, because the shape as breach of defective etc. is different, whether goodly be not easy to judge, therefore, produced the problem that can't realize cheap testing fixture by view data.
Summary of the invention
For addressing the above problem, the purpose of this invention is to provide a kind of novel inspection method and testing fixture that defectives such as non-notch are arranged on can the end face of self-verifying brittle substrate.
Testing fixture of the present invention possesses: with the worktable of horizontality mounting brittle substrate; Make this worktable towards movable workbench mechanism that predetermined direction moves; Make the worktable horizontal rotating mechanism of this worktable along the horizontal direction rotation; The light source of irradiates light on the end face portion of this brittle substrate; Thereby reception is by the catoptrical light quantity testing agency of this light source irradiation by the reflection of the end face portion of this brittle substrate; And, judge the decision mechanism of quality of the quality of described end face portion according to the catoptrical light quantity that is received by this light quantity testing agency from described end face portion.Reach described purpose thus.
It is characterized in that, described decision mechanism is, preestablish the higher limit and the lower limit of the catoptrical light quantity that described light quantity testing agency receives, when the catoptrical light quantity that receives in this light quantity testing agency surpasses this higher limit or when being lower than this lower limit, the end face portion quality that is judged to be described brittle substrate is bad.
It is characterized in that described decision mechanism is distinguished the bad type of the quality of the end face portion of described brittle substrate.
It is characterized in that, the end face portion that described light source has a described relatively brittle substrate in vertical direction irradiates light the 1st light source and from the 2nd light source of the both sides adipping irradiation of the end face portion of described brittle substrate, described light quantity testing agency has: by the 1st light source under the situation of irradiates light on the end face portion of this brittle substrate, detection is from the 1st light quantity testing agency of the catoptrical light quantity of the end face portion of this brittle substrate, and, passing through the 2nd light source under the situation of irradiates light on the end face portion of this brittle substrate, detect the 2nd light quantity testing agency from the catoptrical light quantity of the end face portion of brittle substrate of irradiates light, and use at least one the light quantity testing agency in described the 1st light quantity testing agency and described the 2nd light quantity testing agency.
It is characterized in that described light quantity testing agency is a ccd video camera.
It is characterized in that described light quantity testing agency is a photo detector.
It is characterized in that, thereby have the both sides at the formation angle of the described brittle substrate image mechanism of view data on both sides at the formation angle that obtains this brittle substrate of making a video recording, and discern the position at the angle of described brittle substrate based on this view data.
It is characterized in that described image mechanism is a ccd video camera.
Inspection method of the present invention is used to judge the quality of quality of the end face portion of brittle substrate it is characterized in that having: along this end face portion relatively move on this end face portion the step of irradiates light; Reception is from the catoptrical step of this end face portion; And, judge the step of quality of the quality of this end face portion based on this catoptrical light quantity that receives.Reach described purpose thus.
It is characterized in that, described determination step is, preestablish the higher limit and the lower limit of the described catoptrical light quantity of reception, during above higher limit or when being lower than lower limit, judge the bad step of end face portion quality of described brittle substrate in this catoptrical light quantity that receives.
It is characterized in that described determination step further has the step of the bad type of the quality of end face portion of the described brittle substrate of difference.
It is characterized in that, the end face portion that described irradiating step has a described relatively brittle substrate in vertical direction irradiates light the 1st irradiating step and from the both sides of the end face portion of described brittle substrate the 2nd irradiating step of irradiates light in an inclined direction, the step of described reception light has, under situation by irradiates light on the end face portion of the 1st irradiating step at described brittle substrate, reception is from the 1st reception light step of the catoptrical light quantity of the end face portion of this brittle substrate, and, by the 2nd irradiating step under the situation of irradiates light on the end face portion of this brittle substrate, what receive irradiates light receives the light step from the 2nd of the catoptrical light quantity of the end face portion of brittle substrate, and carry out the described the 1st receive light step and the described the 2nd receive in the light step at least any one.
It is characterized in that described reception light step is undertaken by ccd video camera.
It is characterized in that described reception light step is undertaken by photo detector.
It is characterized in that, have and made a video recording in the both sides at the formation angle of described brittle substrate, and obtain the step of view data on both sides at the formation angle of this brittle substrate, and, the step of position at the angle of described brittle substrate discerned based on this view data.
It is characterized in that, obtain the step of the view data on described both sides and undertaken by ccd video camera.
The simple declaration of accompanying drawing
Fig. 1 is the stereographic map that is used to illustrate inspection principle of the present invention;
Fig. 2 is the stereographic map of testing fixture of end face of the inspection brittle substrate of expression 1 embodiment of the present invention;
Fig. 3 is the process flow diagram of control action of the testing fixture of presentation graphs 2;
Fig. 4 is the process flow diagram of the step S14 in the process flow diagram of detailed presentation graphs 3;
Fig. 5 is the synoptic diagram of the method at the expression angle of checking brittle substrate;
Fig. 6 is the histogrammic figure that expression will be represented from the catoptrical light quantity of the end face of brittle substrate;
Fig. 7 is that expression is used for the led light source of embodiments of the invention and the location diagram of brittle substrate;
Fig. 8 a is that expression is used for the transmitted light source of 1 embodiment of the present invention and the location diagram that the transparent brittle substrate of object is checked in conduct;
Fig. 8 b is that expression is used for the transmitted light source of 1 embodiment of the present invention and the location diagram that the transparent brittle substrate of object is checked in conduct.
The embodiment of invention
Below, based on accompanying drawing embodiments of the invention are elaborated.
Fig. 1 is the stereographic map of principle of the breach of the expression end face of checking brittle substrate of the present invention.What use in the inspection method of the present invention is, move with certain speed on the direction of arrow A as the end face portion of the glass plate 101 of brittle substrate on the led light source 102 of irradiation point-like light 103, and, reception is from the irradiation of this led light source and from the catoptrical ccd video camera 104 of the end face portion reflection of glass plate 101, the reflection light quantity of checking from the end face portion of glass plate 101 by ccd video camera 104.Exist on the end face portion of glass plate 101 under the situation of breach, when the light of led light source irradiation was reflected by this breach, this reflection light quantity was compared with other positions that do not have breach, reduced a certain amount ofly, perhaps opposite, increased a certain amount of.
In fact, from led light source 102 irradiates light and when checking this reflection light quantity on the end face portion of glass plate 101, on the roughly certain position of catoptrical light quantity, do not have breach, and catoptrical light quantity increases significantly and the position of significantly minimizing all is the position that has breach.Thereby, set in advance the catoptrical higher limit and the lower limit that are reflected from led light source 102 irradiation and the end face portion by glass plate 101, when surpassing this higher limit from the reflected light of this end face portion, and when being lower than this lower limit, can being judged to be this end face portion and having breach (the end face portion quality is bad).
Fig. 2 is the stereographic map of expression as the testing fixture 50 of the brittle substrate end face portion of 1 embodiment of the present invention.Thereby worktable 1 by vacuum suction fixedly brittle substrate 2 be arranged on the mobile foundation 4, and can be by servomotor 3 along continuous straight runs (direction shown in the arrow theta) rotation on mobile foundation 4.This mobile foundation 4 moves on the direction shown in the arrow X along two tracks 7 by servomotor 5 and by its ball screw 6 that carries out the axle rotation.
The bridge plate (Block リ Star ヅ plate) that supports by the pillar 8 of both sides thus 9 cross over tracks 7 and extend in the direction shown in the arrow Y.This bridge plate 9 is provided with by servomotor 10a and by it and carries out a mobile foundation 12a that ball screw 11a of rotation moves on the Y direction.This mobile foundation 12a be provided be in plumbness and with the directions X of bridge plate 9 quadratures on the checkout facility installing plate 13a that extends.In addition, with above-mentioned same structure in, be provided with on the Y direction mobile foundation 12b that moves, this mobile foundation 12b be provided be in plumbness and with the directions X of bridge plate 9 quadratures on the checkout facility installing plate 13b that extends.
On checkout facility installing plate 13a,, separate proper spacing along directions X down a pair of 1CCD video camera 14a and 2CCD video camera 15a are installed respectively side by side for the end face portion Va to a side of brittle substrate 2 makes a video recording.On the bottom that is set at away from the 1CCD video camera 14a of a side of, bridge plate 9,, the 1LED light source 16a that is configured to " mouth " font around the bottom of 1CCD video camera 14a is installed in order to shine this camera watch region from the top.This 1LED light source 16a with the state of the light shaft coaxle of 1CCD video camera 14a under irradiates light.
Shone respectively by the light that shines from a pair of 2LED light source 17a that has predetermined length at directions X by the camera watch region of the 2CCD video camera 15a that is provided with near bridge plate 9.Each 2LED light source 17a is installed on the checkout facility installing plate 13a by suitable support component, and from the described front end face Va of both sides irradiation as the brittle substrate 2 of the camera watch region of 2CCD video camera 15a.As each 2LED light source 17a, for example, use White LED, still,, be not limited in this so long as the light source of necessary brightness can be provided for the shooting of the described end face portion Va of brittle substrate 2.
On the opposing party's checkout facility installing plate 13b,, separate proper spacing along directions X down a pair of 3CCD video camera 14b and 4CCD video camera 15b are installed respectively side by side for the end face portion Vb to the opposing party of brittle substrate 2 makes a video recording.On the bottom that is set at away from the 3CCD video camera 14b of a side of bridge plate 9,, the 3LED light source 16b that is configured to " mouth " font around the bottom of 3CCD video camera 14b is installed in order to shine this camera watch region from the top.This 3LED light source 16b with the state of the light shaft coaxle of 3CCD video camera 14b under irradiates light.
Shone respectively by the light that shines from a pair of 4LED light source 17b that has predetermined length at directions X by the camera watch region of the 4CCD video camera 15b that is provided with near bridge plate 9.Each 4LED light source 17b is installed on the checkout facility installing plate 13b by suitable support component, and from the described front end face Vb of both sides irradiation as the brittle substrate 2 of the camera watch region of 4CCD video camera 15b.As each 4LED light source 17b, for example, use White LED, still,, be not limited in this so long as the light source of necessary brightness can be provided for the shooting of the described end face portion Vb of brittle substrate 2.
Fig. 3 is the process flow diagram of the action of the described testing fixture 50 of expression, and the action to testing fixture 50 describes according to this process flow diagram below.
When implementing to check, at first, carry out initial setting from step S1 to step S5 by this testing fixture 50.
In step S1, set the time shutter of 1CCD video camera 14a, 3CCD video camera 14b, 2CCD video camera 15a and 4CCD video camera 15b, in step S2, that sets 1CCD video camera 14a, 3CCD video camera 14b, 2CCD video camera 15a and 4CCD video camera 15b obtains (reflection) line number (initial value: for example 480).In step S3, set the visual field of 1CCD video camera 14a, 3CCD video camera 14b, 2CCD video camera 15a and 4CCD video camera 15b.Here, the visual field of 1CCD video camera 14a, 3CCD video camera 14b, 2CCD video camera 15a and 4CCD video camera 15b be 1CCD video camera 14a, 3CCD video camera 14b, 2CCD video camera 15a and 4CCD video camera 15b itself resolution (for example: arbitrarily setting scope 512 * 480 pixels) in.
In step S4, set the essential various parameters that are used for the view data that 1CCD video camera 14a, 3CCD video camera 14b, 2CCD video camera 15a and 4CCD video camera 15b obtain is carried out Flame Image Process.In step S5, setting is used to make the testing fixture 50 necessary mechanical parameters of running automatically.
After the initial setting of testing fixture 50 is finished, in step S6, the automatic running of beginning testing fixture 50.Thereby light the camera watch region that led light source 16a, 16b, 17a and 17b shine 1CCD video camera 14a, 3CCD video camera 14b, 2CCD video camera 15a and 4CCD video camera 15b.By (bright) some size that these light sources produce, be the size that can fully cover the camera watch region of 1CCD video camera 14a, 3CCD video camera 14b, 2CCD video camera 15a and 4CCD video camera 15b.That is, camera watch region is made a video recording to camera watch region at ccd video camera by these light sources, and illuminated with certain brightness, and this brightness is the essential brightness of obtaining the view data of camera watch region in inspection with required precision.Then, in step S7, by transmitting aut.eq. (robot) (not shown), brittle substrate 2 to worktable 1, and is adsorbed fixing by mounting.In step S8, for angle Ca, the Cb of brittle substrate 2 being made a video recording, will adsorb fixing worktable 1 and locate as the brittle substrate 2 of checking object thereby drive servomotor 3 and servomotor 5 by 4 ccd video camera 14a and 14b or 15a and 15b.
In step S9, view data to the end face portion of the brittle substrate 2 of being made a video recording by 4 ccd video camera 14a and 14b or 15a and 15b is carried out Flame Image Process, carry out image recognition by the end face portion to brittle substrate 2, the both sides separately that constitute 2 angle Ca, Cb of brittle substrate 2 are defined in rectangular extent.The both sides that Fig. 5 is illustrated among the step S9 any one angle among 2 angle Ca, the Cb that constitute brittle substrate 2 in rectangular extent by the synoptic diagram of the state of image recognition.And view data is not as pixel, but is acquired as the line (ラ イ Application) of pixel by ccd video camera.
In step S10, the both sides that constitute angle Ca are determined, and the intersection point of these two straight lines by linear-apporximation, and is calculated by computing in these both sides, and the position of a side angle Ca is identified.In step S11, the both sides that constitute angle Ca are instructed to out, and the intersection point of these two straight lines by linear-apporximation, and is calculated by computing in these both sides, and the position of the opposing party's angle Cb is identified.
Then, in step S12, for the end face portion of the brittle substrate 2 that makes inspection is consistent with the moving direction of worktable 1, by servomotor 3 worktable 1 to the rotation of θ direction, thereby be positioned.In addition, in step S13, worktable 1 carries out axle rotation by the driving of servomotor 5 ball-screw 6 moves to directions X along two tracks 7 by predetermined speed.Worktable 1 is during directions X moves by predetermined speed, in step S14, by i.e. the 1st testing fixture (10a～17a) and the 2nd testing fixture (10b～17b), check 2 end face portion U (Va, Vb) of brittle substrate 2 of two groups of testing fixtures.
Fig. 4 is a process flow diagram of representing the inspection of this step S14 in detail; Below, the inspection to step S14 is described in detail with reference to the process flow diagram of Fig. 4.
In step S51, with respect to the brittle substrate 2 on the worktable 1 that moves, use 1CCD video camera 14a, 2CCD video camera 15a that the end face portion Va of brittle substrate 2 is made a video recording, obtain the view data of the end face portion Va of brittle substrate 2, and this view data is carried out Flame Image Process.And, the camera watch region of 1CCD video camera 14a and 2CCD video camera 15a, for example 1 limit is 0.5mm～2mm.Equally, carry out simultaneously with the obtaining of image of 1CCD video camera 14a and 2CCD video camera 15a, 3CCD video camera 14b and 4CCD video camera 15b also carry out obtaining of same image.
In step S52, judge whether worktable 1 has moved predetermined distance (the length 40mm length that for example, is equivalent to image pickup scope).Be judged as under the situation that has moved preset distance at worktable 1, enter step S53.Be judged as at worktable 1 under the situation of mobile preset distance not, repeat step S51 and step S52 up to mobile preset distance (40mm), by 1CCD video camera 14a, 2CCD video camera 15a the end face portion Va of brittle substrate 2 is made a video recording, obtain the view data of the end face portion Va of brittle substrate 2, and this view data is carried out Flame Image Process.In addition, simultaneously, the end face portion Vb of brittle substrate 2 is made a video recording, obtain the view data of the end face portion Vb of brittle substrate 2, and this view data is carried out Flame Image Process by 3CCD video camera 14b, 4CCD video camera 15b.
In step S53, the view data of the end face portion Va of the brittle substrate 2 of the corresponding leap preset distance that is obtained by 1CCD video camera 14a, 2CCD video camera 15a (40mm is long), the end face portion of judging brittle substrate 2 have non-notch (quality of end face portion whether good).Equally, the view data of the end face portion Vb of the brittle substrate 2 of the corresponding leap preset distance that obtains by 3CCD video camera 14b, 4CCD video camera 15b (40mm is long), the end face portion of judging brittle substrate 2 have non-notch (quality of end face portion whether good).
Fig. 6 is the histogrammic figure of expression from the catoptrical light quantity of the end face reflection of brittle substrate 2.In this histogram, from the Flame Image Process that the catoptrical light quantity of the end face portion of brittle substrate 2 reflection is undertaken by the view data of the end face portion of the brittle substrate 2 of the leap preset distance (40mm is long) that obtained by ccd video camera, be represented as having the concentration of the gradation in stage (grade) of 0～255.With catoptrical light quantity be in as the judgement maximum concentration of preset upper limit value and as between the judgement least concentration of predetermined lower limit value as the criterion of end face portion quality.Promptly, be under the situation about judging between maximum concentration and the judgement least concentration in the catoptrical light quantity that reflects from the somewhere of end face portion, the somewhere that is judged to be this end face portion is not unusual, surpass under the situation of this judgements maximum concentration or be lower than under the situation of judging least concentration in the catoptrical light quantity from the reflection of the somewhere of end face portion, the somewhere that is judged to be this end face portion exists unusually.
When judging end face portion whether superior in quality of brittle substrate 2, have by neither the judging maximum concentration and judging situation between the least concentration of 1CCD video camera 14a and 2CCD video camera 15a shooting from the light quantity of the same position reflection of the end face portion of brittle substrate 2, also have by 1CCD video camera 14a and 2CCD video camera 15a shooting from the only side of the light quantity of the same position reflection of the end face portion of brittle substrate 2 not in situation about judging between maximum concentration and the judgement least concentration.Under the circumstances, do not judging maximum concentration and judging that this place's quality that is judged to be this end face portion is bad under the situation between the least concentration in the catoptrical light quantity from the same position reflection of the end face portion of brittle substrate 2 of at least any one party shooting by 1CCD video camera 14a and 2CCD video camera 15a.Equally, do not judging maximum concentration and judging that this place's quality that is judged to be this end face portion is bad under the situation between the least concentration in the catoptrical light quantity from the same position reflection of the end face portion of brittle substrate 2 of any one party shooting by 3CCD video camera 14b and 4CCD video camera 15b.
In step S54, whether judgement has been crossed over the total length on one side of brittle substrate 2 and has been finished scanning.Finish under the scan condition in the total length of not passing through one side of brittle substrate 2, in step S51, re-execute following leap preset distance (40mm is long) and carry out the making of the view data of end face portion.Here, the whether good judgement of the quality of the end face portion of brittle substrate 2 with each preset distance (40mm long) divide be for, when worktable 1 is moved by predetermined speed, if the data of in preset distance (40mm is long), collecting, can in the traveling time of this preset distance (40mm is long), carry out spectral discrimination, the processing power of correspondence image treatment facility and sequencer can make the translational speed of worktable 1 and preset distance (being the long setting value of 40mm in the explanation here) change.In addition, under the situation of selected digital image treating apparatus and ccd video camera, about the storer of the image processing apparatus that the translational speed of the checking ability of testing fixture of the present invention and worktable 1 is chosen and the pixel count of ccd video camera institute.
In step S14, be judged to be the quality of end face portion of brittle substrate 2 bad after, in step S15, with worktable 1 half-twist, 90 ° of rotations of corresponding worktable 1 make the 1st testing fixture (10a～17a) and the 2nd testing fixture (10b～17b) move towards the precalculated position.In addition, in step S16, worktable begins to move to predetermined unloading position (removing the material position), then, in step S17, the end face portion on residue both sides is carried out the inspection same with step S14.
In step S18, checked aftertable 1 and moved to predetermined unloading position.Then, in step S19, the view data of the end face portion that so far gets access to is reset, and in step S20, judges whether the brittle substrate of then checking 2 is in predetermined position of readiness.Be under the situation of predetermined position of readiness at the brittle substrate of then checking 2, return step S7, repeat described a series of inspection.The brittle substrate of then checking 2 under the situation on the predetermined position of readiness, has not checked.
As mentioned above, in order to discern the angle of brittle substrate, the image mechanism of ccd video camera and so on is essential, but, thereby the catoptrical light quantity of the reflection of the end face portion iff inspection from brittle substrate only checks that end face portion has non-notch, also can only use cheap photo detector (being subjected to the light sub-prime) replaced C CD video camera.
The invention provides a kind of testing fixture of breach of the end face portion that can check brittle substrate.For the breach of the end face portion of checking such brittle substrate, must carry out slight adjusting to the angle of illumination etc.Among the present invention, make the optical axis of 1LED light source 16a, 3LED light source 16b roughly consistent with the shooting center of 1CCD video camera 14a, 3CCD video camera 14b, and the angle of 2LED light source 17a, 4LED light source 17b, as shown in Figure 7, the surface of brittle substrate is shone from the end face portion both sides of brittle substrate 2 with 30 °～60 ° angle (preferably 30 °～45 ° angles) relatively, can carry out the inspection of aforesaid breach automatically thus.
And, shown in Fig. 8 a and Fig. 8 b, when shining the lower surface of transparent brittle substrate 111 from the below, can check out the end face portion of transparent brittle substrate and the crack of end face portion inside etc. by transillumination 112.Fig. 8 a is the side view of the location diagram of expression transillumination 112, transparent brittle substrate 111, ccd video camera 113, and Fig. 8 b is its front view (FV).In the example of Fig. 8 a and Fig. 8 b, ccd video camera 113 is the structures that are subjected to light under the surface of the transparent relatively brittle substrate 111 of light that makes the transparent brittle substrate 111 of transmission approximately tilts 60 ° state in one direction.
And, testing fixture of the present invention, can based on from the catoptrical light quantity of the somewhere reflection of the end face portion of brittle substrate with judge maximum concentration and judge the concentration difference of least concentration, judge the bad type of quality of the end face portion of brittle substrate.The bad type of quality as the end face portion of the brittle substrate that can judge, using 1LED light source 16a, under the situation of 3LED light source 16b as light source, can list and survey long (Measuring Long), breach, cut out mouthful (a エ グ レ), the conchoidal breach, (end face) fluctuating, the sealing section (シ one Le is cut れ) of (on the brittle substrate) applying sealing, breakage etc., using 2LED light source 17a, under the situation of 4LED light source 17b as light source, can enumerate breach, cut out mouth, the conchoidal breach, broken residual (disrumpent feelings residual り), thin skin residual (the residual り of thin skin), (on the base plate of liquid crystal panel) inclosure dry shellfish shape breach (enclose a mouthful Tony post and owe け) etc.In addition, the bad kind of quality as the end face portion of the transparent brittle substrate that can judge, vertically be provided with under the situation of video camera at relative transillumination as light source, can enumerate breach, conchoidal breach, unfilled corner (コ one Na is owed け) etc., be provided with obliquely under the situation of video camera at relative transillumination, can enumerate crack etc. as light source.
Industrial utilizability
As mentioned above, the invention provides a kind of end face portion at brittle substrate and shine light, The catoptrical light quantity from the end face portion of brittle substrate surpass predetermined higher limit, And when being lower than predetermined lower limit, being judged to be and having on the end face portion of brittle substrate and lack Fall into relevant breach (quality is bad), provide thus a kind of usage comparison simple equipment structure Achievements can check out the inspection method of defective of the end face portion of brittle substrate accurately And device.
Claims (12)
1. the testing fixture of a brittle substrate end face portion is characterized in that possessing:
Worktable with horizontality mounting brittle substrate;
Make this worktable towards movable workbench mechanism that predetermined direction moves;
Make the worktable horizontal rotating mechanism of this worktable along the horizontal direction rotation;
The light source of irradiates light on the end face portion of this brittle substrate;
Thereby reception is by this light source irradiation catoptrical at least one image mechanism by the end face portion reflection of this brittle substrate;
Judge the decision mechanism of the quality of this end face portion based on what receive from the catoptrical light quantity of this end face portion by this image mechanism,
By this image mechanism, thereby the angle of this brittle substrate is identified the both sides shooting at the formation angle of this brittle substrate, makes the moving direction of the end face portion of this brittle substrate and this worktable consistent by the horizontal rotating mechanism of this worktable according to the position at the angle of identifying.
2. the testing fixture of brittle substrate end face portion according to claim 1, it is characterized in that, described decision mechanism is, preserve as the higher limit of the catoptrical light quantity that receives by described image mechanism and the predefined value of lower limit, when the catoptrical light quantity that receives in this image mechanism surpasses this higher limit or when being lower than this lower limit, the end face portion quality that is judged to be described brittle substrate is bad.
3. the testing fixture of brittle substrate end face portion according to claim 1 is characterized in that, the size of the corresponding described light quantity of described decision mechanism is distinguished the bad type of quality of the end face portion of described brittle substrate.
4. the testing fixture of brittle substrate end face portion according to claim 1, it is characterized in that, the end face portion that described light source has a described relatively brittle substrate is the 1st light source of irradiates light and the 2nd light source that in an inclined direction shines from the both sides of the end face portion of described brittle substrate in vertical direction
Thereby thereby described image mechanism have reception by the 1st light source irradiation by catoptrical the 1st image mechanism of the end face portion of above-mentioned brittle substrate reflection with receive by catoptrical the 2nd image mechanism of the 2nd light source irradiation by the end face portion reflection of above-mentioned brittle substrate
Use at least one image mechanism in the 1st image mechanism and the 2nd image mechanism.
5. the testing fixture of brittle substrate end face portion according to claim 1 is characterized in that, described image mechanism is a ccd video camera.
6. the inspection method of a brittle substrate end face portion is used to judge it is characterized in that the quality of quality of the end face portion of brittle substrate having:
Thereby the both sides shooting at the formation angle of this brittle substrate is obtained the step of view data on both sides at the formation angle of this brittle substrate;
Based on this view data the position at the angle of this brittle substrate is identified, and makes the end face portion of this brittle substrate and the corresponding to step of moving direction of this brittle substrate;
When relatively moving along this end face portion, the irradiating step of irradiates light on this end face portion;
Reception is from the catoptrical reception light step of this end face portion; And,
Judge the determination step of quality of the quality of this end face portion based on this catoptrical light quantity that is received.
7. the inspection method of brittle substrate end face portion according to claim 6, it is characterized in that, described determination step is, preserve as the higher limit of the described catoptrical light quantity that receives and lower limit and after the predefined value, during above higher limit or when being lower than lower limit, be judged to be the bad step of end face portion quality of described brittle substrate in this catoptrical light quantity that receives.
8. the inspection method of brittle substrate end face portion according to claim 6 is characterized in that, described determination step further has the step of the bad type of the quality of end face portion of the described brittle substrate of difference.
9. according to the inspection method of claim 6 or 7 described brittle substrate end face portion, it is characterized in that described irradiating step has: the end face portion of described relatively brittle substrate is the 1st irradiating step of irradiates light in vertical direction,
The 2nd irradiating step of irradiates light in an inclined direction from the both sides of the end face portion of described brittle substrate,
Passing through the 1st irradiating step under the situation of irradiates light on the end face portion of described brittle substrate, reception is from the 1st reception light step of the catoptrical light quantity of the end face portion of this brittle substrate, and, passing through the 2nd irradiating step under the situation of irradiates light on the end face portion of this brittle substrate, reception receives the light step from the 2nd of the catoptrical light quantity of described end face portion, and carry out the described the 1st receive light step and the described the 2nd receive in the light step at least any one.
10. the inspection method of brittle substrate end face portion according to claim 6 is characterized in that, described reception light step is undertaken by ccd video camera.
11. the inspection method of brittle substrate end face portion according to claim 6 is characterized in that, described reception light step is undertaken by photo detector.
12. the inspection method of brittle substrate end face portion according to claim 6 is characterized in that, obtains the step of the view data on described both sides and is undertaken by ccd video camera.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP354784/2001 | 2001-11-20 | ||
| JP2001354784 | 2001-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1537227A CN1537227A (en) | 2004-10-13 |
| CN1261751C true CN1261751C (en) | 2006-06-28 |
Family
ID=19166585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028132459A Expired - Fee Related CN1261751C (en) | 2001-11-20 | 2002-11-18 | Inspecting method for end faces of brittle-material-made substrate and device therefor |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP3875236B2 (en) |
| KR (1) | KR100565413B1 (en) |
| CN (1) | CN1261751C (en) |
| AU (1) | AU2002349646A1 (en) |
| TW (1) | TWI232931B (en) |
| WO (1) | WO2003044507A1 (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4626982B2 (en) * | 2005-02-10 | 2011-02-09 | セントラル硝子株式会社 | Defect detection device and detection method for end face of glass plate |
| KR20110110041A (en) * | 2010-03-31 | 2011-10-06 | 아사히 가라스 가부시키가이샤 | Method and device for inspecting the end face of the light transmitting rectangular plate-like object |
| JP5022507B1 (en) * | 2011-08-30 | 2012-09-12 | 日東電工株式会社 | Product panel continuous manufacturing method, detection system, and detection method |
| WO2014057881A1 (en) * | 2012-10-12 | 2014-04-17 | 住友化学株式会社 | Detection apparatus, method for manufacturing optical member-bonded body, and method for manufacturing optical member-bonded body |
| KR101535945B1 (en) * | 2014-01-10 | 2015-07-13 | 크룹스(주) | System and method for inspecting burrs on cases of mobile phones and tablet PCs |
| CN104391390B (en) * | 2014-12-18 | 2017-05-10 | 合肥鑫晟光电科技有限公司 | Substrate checking device and method |
| CN104655645B (en) | 2015-03-06 | 2017-05-24 | 合肥京东方光电科技有限公司 | Base plate damage detecting device, production system and detecting method |
| CN105157954A (en) * | 2015-08-25 | 2015-12-16 | 广州赛西标准检测研究院有限公司 | Lighting and video display photoelectric characteristic detection device |
| CN106442560A (en) * | 2016-08-23 | 2017-02-22 | 汕头大学 | Positioning measurement and defect detection method of display screen |
| CN107884417A (en) * | 2017-12-11 | 2018-04-06 | 苏州精濑光电有限公司 | A kind of substrate edges check machine and marginal check method |
| JP2018072355A (en) * | 2017-12-25 | 2018-05-10 | 三星ダイヤモンド工業株式会社 | Substrate inspection device |
| KR102580389B1 (en) * | 2018-02-13 | 2023-09-19 | 코닝 인코포레이티드 | Apparatus and method for inspecting a glass sheet |
| CN113196042A (en) * | 2019-02-28 | 2021-07-30 | 吉野石膏株式会社 | Plate-like body inspection device |
| KR102175502B1 (en) * | 2019-03-28 | 2020-11-06 | 주식회사 에이치비테크놀러지 | Hybrid Display Panel Inspection Device Capable of Aligning the Theta Axis of Both the Original Plate and the Separated Plate |
| JP2021124401A (en) * | 2020-02-05 | 2021-08-30 | 住友金属鉱山株式会社 | Device and method for inspecting substrate |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841459B2 (en) * | 1974-10-28 | 1983-09-12 | キヤノン株式会社 | BUTSUTAIRIYO BUKETSUKAN KENSAHOHO |
| JPH01169343A (en) * | 1987-12-25 | 1989-07-04 | Nippon Sheet Glass Co Ltd | Cut defect detector for glass plate |
| JP3013903B2 (en) * | 1991-01-31 | 2000-02-28 | セントラル硝子株式会社 | Defect detection device for sheet glass |
| JPH0894541A (en) * | 1994-09-21 | 1996-04-12 | Nachi Fujikoshi Corp | Method for detecting chipped corner of subject for inspection |
| JPH10213551A (en) * | 1997-01-30 | 1998-08-11 | Advanced Display:Kk | Chipping detection device for glass substrate and chipping detecting method |
| JP2002062267A (en) * | 2000-08-21 | 2002-02-28 | Asahi Glass Co Ltd | Device for inspecting defect |
-
2002
- 2002-11-18 AU AU2002349646A patent/AU2002349646A1/en not_active Abandoned
- 2002-11-18 WO PCT/JP2002/012032 patent/WO2003044507A1/en active Application Filing
- 2002-11-18 KR KR1020037015374A patent/KR100565413B1/en not_active IP Right Cessation
- 2002-11-18 JP JP2003546089A patent/JP3875236B2/en not_active Expired - Fee Related
- 2002-11-18 CN CNB028132459A patent/CN1261751C/en not_active Expired - Fee Related
- 2002-11-20 TW TW091133882A patent/TWI232931B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003044507A1 (en) | 2003-05-30 |
| TWI232931B (en) | 2005-05-21 |
| JPWO2003044507A1 (en) | 2005-03-24 |
| KR100565413B1 (en) | 2006-03-30 |
| CN1537227A (en) | 2004-10-13 |
| JP3875236B2 (en) | 2007-01-31 |
| AU2002349646A1 (en) | 2003-06-10 |
| KR20040044410A (en) | 2004-05-28 |
| TW200300493A (en) | 2003-06-01 |
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