CN1261727C - 载冷剂供给装置 - Google Patents
载冷剂供给装置 Download PDFInfo
- Publication number
- CN1261727C CN1261727C CNB021557780A CN02155778A CN1261727C CN 1261727 C CN1261727 C CN 1261727C CN B021557780 A CNB021557780 A CN B021557780A CN 02155778 A CN02155778 A CN 02155778A CN 1261727 C CN1261727 C CN 1261727C
- Authority
- CN
- China
- Prior art keywords
- refrigerating medium
- pure water
- brine
- outlet side
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 173
- 238000002156 mixing Methods 0.000 claims abstract description 43
- 238000010438 heat treatment Methods 0.000 claims abstract description 39
- 238000001816 cooling Methods 0.000 claims abstract description 31
- 239000003507 refrigerant Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000012267 brine Substances 0.000 abstract 14
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 abstract 14
- 239000000498 cooling water Substances 0.000 description 10
- 230000002040 relaxant effect Effects 0.000 description 8
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 6
- 239000003456 ion exchange resin Substances 0.000 description 6
- 229920003303 ion-exchange polymer Polymers 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000320 mechanical mixture Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/01—Control of temperature without auxiliary power
- G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
- G05D23/1393—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures characterised by the use of electric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B45/00—Arrangements for charging or discharging refrigerant
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Temperature (AREA)
- Air Conditioning Control Device (AREA)
- Other Air-Conditioning Systems (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001369655A JP2003172570A (ja) | 2001-12-04 | 2001-12-04 | ブライン供給装置 |
JP2001369655 | 2001-12-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1423103A CN1423103A (zh) | 2003-06-11 |
CN1261727C true CN1261727C (zh) | 2006-06-28 |
Family
ID=19179013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021557780A Expired - Fee Related CN1261727C (zh) | 2001-12-04 | 2002-12-04 | 载冷剂供给装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7011744B2 (zh) |
JP (1) | JP2003172570A (zh) |
KR (1) | KR100881746B1 (zh) |
CN (1) | CN1261727C (zh) |
TW (1) | TWI224185B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7044213B2 (en) * | 2002-12-31 | 2006-05-16 | Industrial Technology Research Institute | Constant temperature refrigeration system for extensive temperature range application and control method thereof |
CN100434830C (zh) * | 2004-09-29 | 2008-11-19 | 周庆龙 | 去阴阳离子防止氧化作用的冷却系统 |
US6973958B1 (en) * | 2004-10-19 | 2005-12-13 | Ching-Lung Chou | Heat transfer apparatus having anti-oxidization device |
CN100394127C (zh) * | 2006-04-04 | 2008-06-11 | 烟台冰轮股份有限公司 | 一种采用二氧化碳做载冷剂的热交换系统 |
CN109269332A (zh) * | 2017-07-17 | 2019-01-25 | 上海微电子装备(集团)股份有限公司 | 热交换装置及其热交换方法与气相沉积设备 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2644896B2 (ja) * | 1989-09-18 | 1997-08-25 | 株式会社日立製作所 | 冷却装置の温度制御方法 |
JPH05164434A (ja) | 1991-12-17 | 1993-06-29 | Mitsubishi Heavy Ind Ltd | 冷凍装置 |
JP2746047B2 (ja) | 1993-03-26 | 1998-04-28 | 三菱電機株式会社 | 純水使用の循環冷却装置 |
JP2762028B2 (ja) | 1993-11-11 | 1998-06-04 | 鹿島建設株式会社 | 熱源システム |
JP3319662B2 (ja) * | 1994-11-17 | 2002-09-03 | 株式会社日立製作所 | 蓄熱式冷暖房装置およびその制御方法 |
JP2796955B2 (ja) * | 1995-09-25 | 1998-09-10 | 伸和コントロールズ株式会社 | ブラインの供給装置 |
JP3735399B2 (ja) | 1996-01-16 | 2006-01-18 | 松下電器産業株式会社 | 冷凍サイクル |
JP3604245B2 (ja) * | 1996-12-03 | 2004-12-22 | 三菱電機株式会社 | 間欠オゾン供給装置 |
JP3577196B2 (ja) * | 1997-06-09 | 2004-10-13 | 株式会社東芝 | 半導体冷却装置、及び半導体冷却装置を有する電力変換装置 |
JPH11248269A (ja) | 1998-02-27 | 1999-09-14 | Matsushita Electric Ind Co Ltd | 冷凍サイクル |
JP3728945B2 (ja) * | 1998-10-30 | 2005-12-21 | オルガノ株式会社 | フォトレジスト現像廃液からの現像液の回収再利用方法及び装置 |
US6286764B1 (en) * | 1999-07-14 | 2001-09-11 | Edward C. Garvey | Fluid and gas supply system |
TW505770B (en) * | 2000-05-02 | 2002-10-11 | Nishiyama Corp | Temperature controller |
JP3504608B2 (ja) * | 2000-12-06 | 2004-03-08 | イノテック株式会社 | 冷却システム |
-
2001
- 2001-12-04 JP JP2001369655A patent/JP2003172570A/ja active Pending
-
2002
- 2002-11-21 TW TW091133994A patent/TWI224185B/zh not_active IP Right Cessation
- 2002-12-03 US US10/308,164 patent/US7011744B2/en not_active Expired - Fee Related
- 2002-12-03 KR KR1020020076390A patent/KR100881746B1/ko not_active IP Right Cessation
- 2002-12-04 CN CNB021557780A patent/CN1261727C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20030045648A (ko) | 2003-06-11 |
TW200300837A (en) | 2003-06-16 |
US20030209609A1 (en) | 2003-11-13 |
US7011744B2 (en) | 2006-03-14 |
KR100881746B1 (ko) | 2009-02-06 |
TWI224185B (en) | 2004-11-21 |
JP2003172570A (ja) | 2003-06-20 |
CN1423103A (zh) | 2003-06-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: CANON ANELVA Free format text: FORMER OWNER: CHOSHU INDUSTRY CO., LTD.; CANON ANELVA Effective date: 20070216 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: CHOSHU INDUSTRY CO., LTD.; CANON ANELVA Free format text: FORMER NAME OR ADDRESS: CHOSHU INDUSTRY CO., LTD.; ANNEWHA CO., LTD. |
|
CP03 | Change of name, title or address |
Address after: Yamaguchi Japan Co-patentee after: Canon anuchihana Patentee after: CHOSHU INDUSTRY CO.,LTD. Address before: Yamaguchi Japan Co-patentee before: ANELVA Corp. Patentee before: CHOSHU INDUSTRY CO.,LTD. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20070216 Address after: Tokyo, Japan Patentee after: Canon anuchihana Address before: Yamaguchi Japan Co-patentee before: Canon anuchihana Patentee before: CHOSHU INDUSTRY CO.,LTD. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060628 Termination date: 20161204 |
|
CF01 | Termination of patent right due to non-payment of annual fee |