CN1259405A - 透明导电薄膜和减反射薄膜喷涂装置及其方法 - Google Patents
透明导电薄膜和减反射薄膜喷涂装置及其方法 Download PDFInfo
- Publication number
- CN1259405A CN1259405A CN 99116819 CN99116819A CN1259405A CN 1259405 A CN1259405 A CN 1259405A CN 99116819 CN99116819 CN 99116819 CN 99116819 A CN99116819 A CN 99116819A CN 1259405 A CN1259405 A CN 1259405A
- Authority
- CN
- China
- Prior art keywords
- container
- nozzle
- substrate
- transparent conductive
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005507 spraying Methods 0.000 title claims abstract description 38
- 230000009467 reduction Effects 0.000 title claims description 12
- 238000000034 method Methods 0.000 title description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000001301 oxygen Substances 0.000 claims abstract description 9
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 41
- 239000012159 carrier gas Substances 0.000 claims description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 230000000740 bleeding effect Effects 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 230000004907 flux Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 230000003760 hair shine Effects 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000002912 waste gas Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 abstract description 9
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 239000007789 gas Substances 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 32
- 230000008569 process Effects 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000000889 atomisation Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- -1 after tested Substances 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910021617 Indium monochloride Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- APHGZSBLRQFRCA-UHFFFAOYSA-M indium(1+);chloride Chemical compound [In]Cl APHGZSBLRQFRCA-UHFFFAOYSA-M 0.000 description 1
- 238000013332 literature search Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000391 smoking effect Effects 0.000 description 1
Landscapes
- Chemically Coating (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Non-Insulated Conductors (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN99116819A CN1086158C (zh) | 1999-08-30 | 1999-08-30 | 透明导电薄膜和减反射薄膜喷涂装置及其方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN99116819A CN1086158C (zh) | 1999-08-30 | 1999-08-30 | 透明导电薄膜和减反射薄膜喷涂装置及其方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1259405A true CN1259405A (zh) | 2000-07-12 |
CN1086158C CN1086158C (zh) | 2002-06-12 |
Family
ID=5279493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN99116819A Expired - Fee Related CN1086158C (zh) | 1999-08-30 | 1999-08-30 | 透明导电薄膜和减反射薄膜喷涂装置及其方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1086158C (zh) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100404142C (zh) * | 2006-07-24 | 2008-07-23 | 南开大学 | 超声喷雾热分解喷头 |
CN100411751C (zh) * | 2003-06-26 | 2008-08-20 | 阿耐思特岩田株式会社 | 旋转式自动涂装方法及涂装装置 |
CN101813889A (zh) * | 2010-03-15 | 2010-08-25 | 清华大学 | 液体材料薄膜的喷涂装置及其喷涂方法 |
CN102601015A (zh) * | 2012-03-21 | 2012-07-25 | 浙江洁美电子科技有限公司 | 一种应用于防静电喷涂的连续化生产系统及其方法 |
CN103482881A (zh) * | 2013-09-06 | 2014-01-01 | 浙江大学宁波理工学院 | 一种玻璃表面透明导电薄膜的制备方法 |
CN103752440A (zh) * | 2014-01-09 | 2014-04-30 | 上海交通大学 | 一种颗粒均匀分布的静电雾化方法 |
CN104211066A (zh) * | 2013-06-05 | 2014-12-17 | 福建省辉锐材料科技有限公司 | 一种硅粉的制备设备 |
CN104607344A (zh) * | 2015-01-26 | 2015-05-13 | 苏州晶洲装备科技有限公司 | 一种石墨烯薄膜掺杂设备 |
CN106000705A (zh) * | 2016-07-12 | 2016-10-12 | 河北大学 | 一种用于制备薄膜的全自动脉冲喷涂装置及喷涂方法 |
CN111678741A (zh) * | 2020-06-16 | 2020-09-18 | 中国科学院重庆绿色智能技术研究院 | 基于下垫面替代的大气氮沉降智能收集与在线分析系统 |
CN112135923A (zh) * | 2018-06-08 | 2020-12-25 | 东芝三菱电机产业系统株式会社 | 成膜装置 |
CN112221806A (zh) * | 2020-10-10 | 2021-01-15 | 宋起雄 | 一种溶液分散良好的超声雾化喷涂装置及其使用方法 |
CN112495671A (zh) * | 2020-12-04 | 2021-03-16 | 绍兴权电科技有限公司 | 一种超声雾化热解喷涂装置及喷涂方法 |
CN112714677A (zh) * | 2018-04-10 | 2021-04-27 | 日本烟草产业株式会社 | 吸取器 |
CN113042292A (zh) * | 2021-03-25 | 2021-06-29 | 苏州嘉炫精工科技有限公司 | 一种免堵塞的银浆超声波喷涂装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1322935C (zh) * | 2005-04-26 | 2007-06-27 | 南开大学 | 超声快速沉积法制备透明导电膜的专用喷头 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3042375A1 (de) * | 1980-11-10 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum zerstaeuben von fluessigkeiten |
US4397671A (en) * | 1981-11-30 | 1983-08-09 | Ford Motor Company | Method of placing a metal oxide film on a surface of a heated glass substrate |
JPH0280303A (ja) * | 1987-06-04 | 1990-03-20 | Tonen Corp | 超伝導体薄膜の形成方法及びその為の装置 |
-
1999
- 1999-08-30 CN CN99116819A patent/CN1086158C/zh not_active Expired - Fee Related
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100411751C (zh) * | 2003-06-26 | 2008-08-20 | 阿耐思特岩田株式会社 | 旋转式自动涂装方法及涂装装置 |
CN100404142C (zh) * | 2006-07-24 | 2008-07-23 | 南开大学 | 超声喷雾热分解喷头 |
CN101813889A (zh) * | 2010-03-15 | 2010-08-25 | 清华大学 | 液体材料薄膜的喷涂装置及其喷涂方法 |
CN101813889B (zh) * | 2010-03-15 | 2012-09-05 | 清华大学 | 液体材料薄膜的喷涂装置及其喷涂方法 |
CN102601015A (zh) * | 2012-03-21 | 2012-07-25 | 浙江洁美电子科技有限公司 | 一种应用于防静电喷涂的连续化生产系统及其方法 |
CN102601015B (zh) * | 2012-03-21 | 2015-04-15 | 浙江洁美电子科技股份有限公司 | 一种应用于防静电喷涂的连续化生产方法 |
CN104211066A (zh) * | 2013-06-05 | 2014-12-17 | 福建省辉锐材料科技有限公司 | 一种硅粉的制备设备 |
CN103482881B (zh) * | 2013-09-06 | 2016-01-27 | 浙江大学宁波理工学院 | 一种玻璃表面透明导电薄膜的制备方法 |
CN103482881A (zh) * | 2013-09-06 | 2014-01-01 | 浙江大学宁波理工学院 | 一种玻璃表面透明导电薄膜的制备方法 |
CN103752440A (zh) * | 2014-01-09 | 2014-04-30 | 上海交通大学 | 一种颗粒均匀分布的静电雾化方法 |
CN104607344A (zh) * | 2015-01-26 | 2015-05-13 | 苏州晶洲装备科技有限公司 | 一种石墨烯薄膜掺杂设备 |
CN104607344B (zh) * | 2015-01-26 | 2016-09-21 | 苏州晶洲装备科技有限公司 | 一种石墨烯薄膜掺杂设备 |
CN106000705A (zh) * | 2016-07-12 | 2016-10-12 | 河北大学 | 一种用于制备薄膜的全自动脉冲喷涂装置及喷涂方法 |
CN112714677A (zh) * | 2018-04-10 | 2021-04-27 | 日本烟草产业株式会社 | 吸取器 |
CN112135923A (zh) * | 2018-06-08 | 2020-12-25 | 东芝三菱电机产业系统株式会社 | 成膜装置 |
CN112135923B (zh) * | 2018-06-08 | 2022-11-22 | 东芝三菱电机产业系统株式会社 | 成膜装置 |
CN111678741A (zh) * | 2020-06-16 | 2020-09-18 | 中国科学院重庆绿色智能技术研究院 | 基于下垫面替代的大气氮沉降智能收集与在线分析系统 |
CN112221806A (zh) * | 2020-10-10 | 2021-01-15 | 宋起雄 | 一种溶液分散良好的超声雾化喷涂装置及其使用方法 |
CN112221806B (zh) * | 2020-10-10 | 2021-11-30 | 威海盛洁医疗科技有限公司 | 一种溶液分散良好的超声雾化喷涂装置及其使用方法 |
CN112495671A (zh) * | 2020-12-04 | 2021-03-16 | 绍兴权电科技有限公司 | 一种超声雾化热解喷涂装置及喷涂方法 |
CN113042292A (zh) * | 2021-03-25 | 2021-06-29 | 苏州嘉炫精工科技有限公司 | 一种免堵塞的银浆超声波喷涂装置 |
Also Published As
Publication number | Publication date |
---|---|
CN1086158C (zh) | 2002-06-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1086158C (zh) | 透明导电薄膜和减反射薄膜喷涂装置及其方法 | |
CN2812303Y (zh) | 超声快速沉积法制备纳米氧化物透明导电膜的设备 | |
JP5744899B2 (ja) | 防汚表面を有するガラス製品およびその製造方法 | |
CN102597316A (zh) | 用于控制涂覆沉积的方法和设备 | |
CN101805891B (zh) | 一种低温高速沉积氢化非晶氮化硅薄膜的方法 | |
US5009928A (en) | Method for forming a transparent conductive metal oxide film | |
CN101630702B (zh) | 一种太阳能电池组件镀膜盖板玻璃的制造方法 | |
CN1670252A (zh) | 超声快速沉积法制备纳米氧化物透明导电膜的设备及方法 | |
CN108385089B (zh) | 一种超声雾化热解沉积装置及利用该装置制备薄膜的方法 | |
CN1194821C (zh) | 大面积均匀透明导电薄膜的喷嘴 | |
CN207357482U (zh) | 一种超声波雾化镀膜装置 | |
JPH05503395A (ja) | 太陽電池基材の拡散接合部を形成するための方法及び装置 | |
CN101942661A (zh) | 用雾状化学剂进行单面连续化学湿处理的系统及方法 | |
CN100558934C (zh) | 甩胶喷雾热分解薄膜制备设备 | |
CN115463777A (zh) | 一种超声喷雾热解旋转镀膜机及其镀膜方法 | |
CN113385811B (zh) | 一种表面镀金属的透明硬质晶圆激光加工保护膜 | |
JPS61244025A (ja) | 薄膜製造方法 | |
CN112467042B (zh) | 一种钙钛矿太阳能电池组件智能自动化生产系统 | |
CN108262184A (zh) | 一种高压喷涂涂覆装置 | |
CN101768730B (zh) | 一种薄膜制备装置 | |
CN104148312A (zh) | 一种用于对经过激光刻蚀清边后tco基板玻璃的清洗工艺 | |
CN102584019B (zh) | 化学汽相沉积法镀制玻璃减反射膜的设备及方法 | |
CN106630669B (zh) | 制备太阳电池用镀膜玻璃的设备及其制作方法 | |
CN106646686A (zh) | 一种批量制备聚光光伏模组二次光学元件增透射膜的装置 | |
CN205944124U (zh) | 一种多列动态扫描式透明导电膜制绒设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: ENGINEERING RESEARCH CENTER OF SOLAR POWER & REFR Free format text: FORMER OWNER: SHANGHAI JIAOTONG UNIV. Effective date: 20060728 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20060728 Address after: 420 room 333, 200030 Hongqiao Road, Shanghai Patentee after: Shanghai Jiaotong University solar energy power generation and Refrigeration Engineering Research Center Address before: 200030 No. 1954, Huashan Road, Shanghai Patentee before: Shanghai Jiao Tong University |
|
C56 | Change in the name or address of the patentee |
Owner name: SHANGHAI SOLAR ENERGY ENGINEERING TECHNOLOGY RESEA Free format text: FORMER NAME OR ADDRESS: ENGINEERING RESEARCH CENTER OF SOLAR POWER + REFRIGERATION OF SHANGHAI JIAO TONG UNIVERSITY |
|
CP03 | Change of name, title or address |
Address after: 201108, 3, Shen Nan Road, 555, Shanghai, Minhang District Patentee after: Shanghai Solar Energy Engineering Technic Research Centre Co., Ltd. Address before: 420 room 333, 200030 Hongqiao Road, Shanghai Patentee before: Shanghai Jiaotong University solar energy power generation and Refrigeration Engineering Research Center |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20020612 Termination date: 20170830 |
|
CF01 | Termination of patent right due to non-payment of annual fee |