CN1255082A - 塑胶封装的模制方法与设备 - Google Patents

塑胶封装的模制方法与设备 Download PDF

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CN1255082A
CN1255082A CN98804825A CN98804825A CN1255082A CN 1255082 A CN1255082 A CN 1255082A CN 98804825 A CN98804825 A CN 98804825A CN 98804825 A CN98804825 A CN 98804825A CN 1255082 A CN1255082 A CN 1255082A
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cavity
bga
encapsulation
substrate
resin
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周辉星
陈炳辉
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Advanced Systems Automation Ltd Singapore
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1532Connection portion the connection portion being formed on the die mounting surface of the substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

本发明具有一上模,空腔板及一下模,用以使用传递铸模法来密封各种BGA封装。上模的特征在于一流道网络,与至少一竖浇道相通。该空腔板在面对下模的一侧具有至少一空腔用以形成一模于一基板之上,该基板夹紧时被夹于其间。空腔板面对上模的一侧具有至少一个锥形通道,用以接收来自流道的树脂。该锥形通道的尖端终结于一下沉浇口,其安置于空腔中间,用以引入树脂时,同时减少线摆动。流道网络及锥型通道的组合可靠经济地密封各种呈阵列的BGA封装。

Description

塑胶封装的模制方法与设备
发明领域
本发明涉及模制半导体塑胶封装的方法与设备。更具体地说,本发明涉及可靠而经济地模制球栅阵列(BGA)封装的方法与设备。
发明背景
球栅阵列(BGA)封装要求在成本,功率消耗,速度及输入/输出(I/O)接脚数方面克服传统封装的限制,例如四平包装(QFP)。完成这些要求的关键是电子工业能用现行表面安装技术及设备可靠而经济地模制BGA封装的能力。一般而言,BGA封装的实际尺寸比同等速度和I/O接脚数的传统封装小和薄。当然,当BGA封装用于更高速度及更多I/O接脚计数应用时,传统封装技术中的例如线摆动的不理想结果变得相当严重。
再者,建立更紧密内连系统,例如多晶片组件(MCM)的趋势持续进行。MCM指的是一封装具有一个以上晶片,组合几个至一百个以上的高效能硅IC与客户指定的基板结构。BGA封装自然地与MCM配合成为一电子工业,它们具有以高产量及低成本在印刷电路板(PCB)上组装标准单晶片组件的经验。然而,事实上MCM流行使用球形顶(glob top)密封使表面安装技术的产量及成本的优点下降。
发明概要
本发明的一个目的是可靠地密封球栅阵列(BGA)封装。
本发明的另一个目的是可靠及经济地密封多晶片组件(MCM)BGA封装。
本发明具有一上模,空腔板及一下模,用以使用传递铸模法来密封各种BGA封装。上模的特点在于与至少一竖浇道相通的一流道网络。该空腔板在面对下模的一侧具有至少一空腔用以形成一模型于一基板之上,该基板被夹紧时被夹在其间。空腔板面对上模的一侧具有至少一个锥形通道,用以接收来自流道的树脂。该锥形通道的尖端终结在一下沉浇口,该下沉浇口安置于空腔的中心,用以引入树脂,同时减少线摆动。流道的网络及锥型通道的组合可靠而经济地密封各种呈阵列的BGA封装。
附图简要说明
图1A是一种下空腔型球栅阵列封装的剖面图,其中,铸模或密封树脂以虚线示出。
图1B为一上空腔型球栅阵列封装的另一剖面图,其中,上铸模树脂以虚线示出。
图2为一用以密封塑胶封装的已有技术的浇口板铸模方法。
图3为一密封塑胶封装的另一已有技术的可除去空腔板铸模方法。
图4为用以将铸模树脂填满于塑胶封装的另一已有技术的成球状(globbing)方法。
图5示出由于使用成球状的铸模方法导致的矩阵球栅阵列(BGA)基板上翘,随后将基板裁剪成为适当的晶片大小已经不大可能。
图6为本发明的一俯视图,其中,可使用单一流道及锥型通道系统来模制一BGA矩阵基板以达到优良结果。
图7为沿图6中的线A-A截取的剖面图。
发明详细说明
下面描述一密封球栅阵列(BGA)封装的方法与设备。在以下说明中,说明了多种具体的细节,诸如竖浇道,流道及模板等,以便对本发明有完全的了解。熟悉本技术者应知道,本发明也可以不用这些具体的细节加以实施。在其他例子中,为了使本发明更清楚,已知部件,例如有关树脂加热及传递及传递模的夹住操作中的那些部件在图中未示出。
图1A及图1B示出两个最普通的BGA封装结构的简化剖面图。图1A中,BGA封装示于空腔下结构。这类BGA封装是美国专利第5,583,378号所公开的一种。BGA封装1包括一连接于散热片4的集成晶片(IC)2。图1A中未示出晶片2结合至基板6的细节。但熟悉本技术者可以知道,晶片不是被结合至基板6的线就是被引向基板6的TAB。一焊料球阵列8连接于BGA封装1的下侧。虚线及晶片2之间的区域代表一用树脂密封的空间10,并且是本发明所涉及的区域。现流行的工业习惯是使用一阻挡件及填充密封处理来保护该晶片。首先使用一高粘度密封剂,有选择地将一矩形阻挡件放置在晶片周围。然后,一旋转泵使用低粘度密封剂将一螺旋填料分配在阻挡件内。例如,CAM/ALOT液体分配系统。
参考图1B,BAG封装11被示于一空腔上结构。封装11采用一集成晶片(IC)12,该IC连接于基板16的上侧,同时,一焊料球阵列18连接于基板16下侧。如同图1A中的BGA封装1,省略IC如何被结合至基板的细节。一体积20代表密封树脂。封装11例示一普通等级的塑胶BAG结构,为摩托罗拉及精工社所开发,并被称为上模塑胶垫阵列载体。
图2至4示出已经被用以密封塑胶BGA结构的已有技术的铸模方法。在图2中,示出一用以密封塑胶封装的浇口(gate)板铸模方法。该封装20以一连接至一空腔21(未示出)的浇口22被横向模制。该方法描述于授于杜生·史列西之美国专利第4,442,056号中。在图3中,一采用至少一空腔21及一横向浇口32的可除去空腔板30被描述于也授于杜生·史列西的美国专利第4,332,537号中,用以密封塑胶封装。最后,图4示出密封BGA封装的最常用的方法:球状顶部。例如,见授于马等人的美国专利第5,355,283号的图6。球状顶部密封藉由层状分配的环氧树脂来填满BGA晶片,以防止气泡陷于树脂之中。
已有技术的密封塑胶封装的方法具有若干限制,而使得现行表面安装技术及设备不容易使用。首先,密封剂横向引入空腔中经常在较多的I/O接脚数(pin count)的BGA封装中造成线移动的问题。第二,于MCM中,测试程序缺乏标准,由线移动所造成的电气问题可能降低此先进BGA封装的可靠度。第三,球状顶部方法是费时并对品质控制有问题。用一球状顶部方法来密封一BGA矩阵基板的结果例示于图5中,其中,基板由于密封剂及基板的热膨胀系数不同,而使得基板上翘42严重。这使得随后的基板剪裁成为各个BGA晶片很难或近乎不可能。
图6及图7为用以密封塑胶封装的本发明的俯视及侧视图。本发明在传递铸模法上组合申请人/受让人用以成排罐(gang-pot)铸模及可除去空腔板铸模技术的知识。可以为熟悉本技术者所了解的是传递铸模不同于注射铸模,特别是有关于用以密封半导体元件的传递铸模中的热固树脂或密封剂除外。相反,注射铸模设备适合于热塑型材料。参考图6、7,本发明50的特征是一上模53,一可除去空腔板55,及一下模57,用以夹住一基板66,该基板66具有一包含BGA结构的塑胶封装的阵列。熟悉本技术者应了解,一上模底座51及下模底座59通常需要与本发明一起使用。模具底座51及59用以保持加热树脂颗粒或条(未示于图中)的罐所产生的热量。
再如图6所示,本发明的上模53的下侧包含至少一竖浇道,用以接收并再导引被一柱塞52所压缩的受热树脂。有关于其上采用BGA封装60阵列的基板60,可使用一个多重柱塞或成排罐模,例如本发明50。在本发明较佳实施例中,竖浇道54连接于在BGA封装中心部分之上的网络流道56中。这些流道56使得树脂容易流入在上模下的各个空腔中。因为流道56是相互连接的,所以流道中的树脂流可以平衡。
在图7中,剖面图示出可除去空腔板55插在上模53及下模57之间。在朝向上模53并与之对齐的表面上至少有一个锥形通道58,用以由流道接收树脂流。锥形通道58的窄端较佳终结在一下沉浇口,其与至少用于BGA封装的至少一个空腔60相通。再参阅图7,夹于空腔板55及下模57之间的是基板66。相对于空腔的锥形通道的定位是本发明的发明特征之一:由空腔的中心部分而不是横向引入树脂,确保空腔中的树脂流更平均。事实上,树脂流动方向与线结合或TAB引线的散开方向相同,因此,线移动的发生机会不可能多。再者,空腔中的树脂流粘度增加所带来的问题也降到最少。一般来说,本发明具有电子工业所有传递铸模技术的优点,而没有传统空腔铸模或板铸模的缺点。
密封BGA基板的过程如下:图7中的柱塞52在罐62中向上移动并强迫受热树脂进入竖浇道54并经由流道56及锥形通道58进入空腔60中。当柱塞52检测到来自流道网络的回压时,表示树脂已经完全填满空腔。当适当的密封剂固化时间到时,本发明的夹紧操作停止。可除去空腔板55的结构便于空腔与流道平顺分离,因此,降低了密封BGA基板的循环时间。
虽然图6及7示出一阵列BGA基板的密封,但本发明同时也很容易适用于密封一客户指定MCM BGA基板,其中,BGA结构的放置是随意的。因此,本发明具有适用于各种基板的适用性。
虽然,本发明已经特别地参考图1至图7加以说明,其中强调了用以密封塑胶封装特别是BGA封装的方法与装置,但应了解的是这些图只是用以例示,不应被认为是用以限制本发明。另外,很清楚本发明的方法与装置可用于很多的需要封装半导体元件应用中。可以知道任何熟悉本技术者可以在不脱离本发明范围及精神下完成各种改变及变化。例如本发明可直接应用至其他基板,例如陶瓷,TAB等。

Claims (2)

1.一种用以密封塑胶封装的系统,它包含:
一上模,包含至少一个竖浇道及至少一个流道系统,用以传送来自至少一柱塞及罐组件的树脂;
一下模,用以支持一基板,基板上至少要做成一个塑胶封装;
一空腔板,被安置于该上模及下模之间,用以接收来自流道系统的树脂,该空腔板的面对上模的表面上具有至少一个锥形通道,该通道相通于至少一空腔,用以密封基板,
由此该系统能可靠地密封该基板,同时减少在塑胶封装内的线移动的问题。
2.如权利要求1所述的密封系统,其特征在于所述空腔板更在于其端部终结有一下沉浇口。
CN98804825A 1997-05-06 1998-05-02 塑胶封装的模制方法与设备 Pending CN1255082A (zh)

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Publication number Priority date Publication date Assignee Title
US8198740B2 (en) 2009-04-09 2012-06-12 Advanced Semiconductor Engineering, Inc. Semiconductor package structure and encapsulating module for molding the same
CN101859690B (zh) * 2009-04-10 2012-09-05 日月光半导体制造股份有限公司 封装结构及封装其的封胶模块与封胶模具
CN102294781A (zh) * 2010-06-22 2011-12-28 禾晶能源科技股份有限公司 太阳能镜片多穴射出成型的方法
CN102285058A (zh) * 2011-05-24 2011-12-21 成都钟顺科技发展有限公司 玻璃基硅胶复眼聚光器生产工艺及其专用模具
CN102285058B (zh) * 2011-05-24 2014-01-15 四川钟顺太阳能开发有限公司 玻璃基硅胶复眼聚光器生产工艺及其专用模具

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JP4162720B2 (ja) 2008-10-08
JP2001522526A (ja) 2001-11-13
MY132795A (en) 2007-10-31
EP0980305A4 (en) 2001-08-16
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SG64985A1 (en) 1999-05-25
DE69828163D1 (de) 2005-01-20

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