CN1211129C - 用于工件的运载和支承装置以及商业上用的消毒方法 - Google Patents

用于工件的运载和支承装置以及商业上用的消毒方法 Download PDF

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Publication number
CN1211129C
CN1211129C CN01814055.6A CN01814055A CN1211129C CN 1211129 C CN1211129 C CN 1211129C CN 01814055 A CN01814055 A CN 01814055A CN 1211129 C CN1211129 C CN 1211129C
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CN
China
Prior art keywords
plate
plates
workpiece
carrier
workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN01814055.6A
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English (en)
Chinese (zh)
Other versions
CN1460027A (zh
Inventor
V·J·巴尔默
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Beam Applications SA
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Ion Beam Applications SA
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Publication date
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Publication of CN1460027A publication Critical patent/CN1460027A/zh
Application granted granted Critical
Publication of CN1211129C publication Critical patent/CN1211129C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/02—Disinfection or sterilisation of materials or objects, in general; Accessories therefor using physical processes
    • A61L2/08—Radiation
    • A61L2/087—Particle radiation, e.g. electron-beam, alpha or beta radiation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/02—Disinfection or sterilisation of materials or objects, in general; Accessories therefor using physical processes
    • A61L2/08—Radiation
    • A61L2/081—Gamma radiation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/26—Accessories
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/906—Cleaning of wafer as interim step

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  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Laminated Bodies (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Jigs For Machine Tools (AREA)
CN01814055.6A 2000-08-15 2001-08-14 用于工件的运载和支承装置以及商业上用的消毒方法 Expired - Fee Related CN1211129C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US22528700P 2000-08-15 2000-08-15
US60/225,287 2000-08-15
US09/826,978 US6475432B2 (en) 2000-08-15 2001-04-05 Carrier and support for work pieces
US09/826,978 2001-04-05

Publications (2)

Publication Number Publication Date
CN1460027A CN1460027A (zh) 2003-12-03
CN1211129C true CN1211129C (zh) 2005-07-20

Family

ID=26919475

Family Applications (1)

Application Number Title Priority Date Filing Date
CN01814055.6A Expired - Fee Related CN1211129C (zh) 2000-08-15 2001-08-14 用于工件的运载和支承装置以及商业上用的消毒方法

Country Status (8)

Country Link
US (1) US6475432B2 (https=)
EP (1) EP1361900B1 (https=)
CN (1) CN1211129C (https=)
AT (1) ATE429253T1 (https=)
AU (1) AU2001295006A1 (https=)
DE (1) DE60138485D1 (https=)
DK (1) DK1361900T3 (https=)
WO (1) WO2002014163A2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2847240B1 (fr) * 2002-11-15 2005-06-10 Bosch Gmbh Robert Element de rangement pour disque de frein et module comportant au moins un tel element.
WO2004097845A2 (en) * 2003-05-01 2004-11-11 Stirling Andrew J Improvements in shielded irradiation zone of production line
US20050077199A1 (en) * 2003-10-14 2005-04-14 Lori Ogaard Compact utility holder for drinking glasses, cups, mugs, utensils, condiment and cosmetic container
JP5632616B2 (ja) * 2010-01-26 2014-11-26 ラピスセミコンダクタ株式会社 半導体装置の製造方法及び基板収容構造
KR20130007594A (ko) * 2010-03-03 2013-01-18 비코 인스트루먼츠 인코포레이티드 경사진 에지를 가진 웨이퍼 캐리어
TWI486288B (zh) * 2011-05-06 2015-06-01 Hon Hai Prec Ind Co Ltd 承載裝置
JP6291981B2 (ja) 2013-04-08 2018-03-14 富士電機株式会社 半導体装置の製造方法
CN103170438B (zh) * 2013-04-11 2016-04-20 肇庆市宝利达机电设备有限公司 人造革漆皮淋漆生产线
FR3114081B1 (fr) 2020-09-11 2022-08-19 A Raymond Et Cie Plateau de livraison et systeme d’emballage d’elements medicaux
EP4296182A1 (en) * 2022-06-21 2023-12-27 SCHOTT Pharma Schweiz AG Frame for holding secondary pharmaceutical packaging
CN117839986B (zh) * 2023-12-28 2024-08-09 深圳市磐锋精密技术有限公司 一种基于视觉传感的组装工序检测系统及方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4350578A (en) * 1981-05-11 1982-09-21 International Business Machines Corporation Cathode for etching
DE3342104C2 (de) * 1983-11-18 1986-10-30 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Anordnung zur Siedekühlung eines zwischen zwei Wärmeableitern eingespannten scheibenförmigen Halbleiterbauelements
US5191224A (en) * 1987-04-22 1993-03-02 Hitachi, Ltd. Wafer scale of full wafer memory system, packaging method thereof, and wafer processing method employed therein
US5821175A (en) * 1988-07-08 1998-10-13 Cauldron Limited Partnership Removal of surface contaminants by irradiation using various methods to achieve desired inert gas flow over treated surface
EP0454447A3 (en) * 1990-04-26 1993-12-08 Hitachi Ltd Semiconductor device assembly
US5174453A (en) * 1992-05-27 1992-12-29 Jill Stoeffler Tray system for surgical instruments
US5422067A (en) * 1992-09-15 1995-06-06 Barney; Everett A. Instrument cassette and method for using the same
US5844683A (en) * 1996-05-22 1998-12-01 Applied Materials, Inc. Position sensor system for substrate holders
JP3920399B2 (ja) * 1997-04-25 2007-05-30 株式会社東芝 マルチチップ半導体装置用チップの位置合わせ方法、およびマルチチップ半導体装置の製造方法・製造装置
US6152075A (en) * 1998-08-31 2000-11-28 Advanced Micro Devices, Inc. Method and system for heating semiconductor wafers

Also Published As

Publication number Publication date
US20020021981A1 (en) 2002-02-21
WO2002014163A3 (en) 2002-06-06
EP1361900A4 (en) 2004-08-18
ATE429253T1 (de) 2009-05-15
DE60138485D1 (https=) 2009-06-04
WO2002014163A2 (en) 2002-02-21
EP1361900A2 (en) 2003-11-19
DK1361900T3 (da) 2009-08-03
EP1361900B1 (en) 2009-04-22
US6475432B2 (en) 2002-11-05
CN1460027A (zh) 2003-12-03
AU2001295006A1 (en) 2002-02-25

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SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20050720

Termination date: 20170814