CN119563230A - 装载端口安装位置调整机构 - Google Patents

装载端口安装位置调整机构 Download PDF

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Publication number
CN119563230A
CN119563230A CN202380054204.0A CN202380054204A CN119563230A CN 119563230 A CN119563230 A CN 119563230A CN 202380054204 A CN202380054204 A CN 202380054204A CN 119563230 A CN119563230 A CN 119563230A
Authority
CN
China
Prior art keywords
load port
wall surface
axis
transfer chamber
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380054204.0A
Other languages
English (en)
Chinese (zh)
Inventor
三浦辰弥
小木曾真平
石原裕挥
小川建
铃木淳志
松本祐贵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sinfonia Technology Co Ltd
Original Assignee
Sinfonia Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sinfonia Technology Co Ltd filed Critical Sinfonia Technology Co Ltd
Publication of CN119563230A publication Critical patent/CN119563230A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408—Docking arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN202380054204.0A 2022-07-19 2023-06-30 装载端口安装位置调整机构 Pending CN119563230A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-114694 2022-07-19
JP2022114694 2022-07-19
PCT/JP2023/024330 WO2024018872A1 (ja) 2022-07-19 2023-06-30 ロードポート取付位置調整機構

Publications (1)

Publication Number Publication Date
CN119563230A true CN119563230A (zh) 2025-03-04

Family

ID=89617690

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380054204.0A Pending CN119563230A (zh) 2022-07-19 2023-06-30 装载端口安装位置调整机构

Country Status (6)

Country Link
US (1) US20260018447A1 (https=)
JP (1) JPWO2024018872A1 (https=)
KR (1) KR20250040629A (https=)
CN (1) CN119563230A (https=)
TW (1) TW202422762A (https=)
WO (1) WO2024018872A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910019U (ja) 1982-07-12 1984-01-21 日産自動車株式会社 液面計測装置
JPS5988076U (ja) 1982-12-07 1984-06-14 三菱電機株式会社 乗客コンベヤの欄干装置
US6138721A (en) * 1997-09-03 2000-10-31 Asyst Technologies, Inc. Tilt and go load port interface alignment system
JP2000332079A (ja) * 1999-05-18 2000-11-30 Tdk Corp 半導体製造装置用ロードポート、ロードポート取り付け機構及びロードポート取り付け方法
TW461014B (en) * 2000-10-11 2001-10-21 Ind Tech Res Inst A positioning method and device for wafer loading devices
JP3871535B2 (ja) * 2001-09-17 2007-01-24 大日本スクリーン製造株式会社 ロードポート装置及びこの装置と上位装置との取り付け機構
US10541165B2 (en) * 2016-11-10 2020-01-21 Applied Materials, Inc. Systems, apparatus, and methods for an improved load port backplane

Also Published As

Publication number Publication date
TW202422762A (zh) 2024-06-01
US20260018447A1 (en) 2026-01-15
KR20250040629A (ko) 2025-03-24
WO2024018872A1 (ja) 2024-01-25
JPWO2024018872A1 (https=) 2024-01-25

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