KR20250040629A - 로드 포트 설치 위치 조정 기구 - Google Patents

로드 포트 설치 위치 조정 기구 Download PDF

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Publication number
KR20250040629A
KR20250040629A KR1020257001402A KR20257001402A KR20250040629A KR 20250040629 A KR20250040629 A KR 20250040629A KR 1020257001402 A KR1020257001402 A KR 1020257001402A KR 20257001402 A KR20257001402 A KR 20257001402A KR 20250040629 A KR20250040629 A KR 20250040629A
Authority
KR
South Korea
Prior art keywords
load port
wall surface
axis direction
axis
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257001402A
Other languages
English (en)
Korean (ko)
Inventor
다츠야 미우라
신페이 고기소
유키 이시하라
다츠루 오가와
아츠시 스즈키
유키 마츠모토
Original Assignee
신포니아 테크놀로지 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신포니아 테크놀로지 가부시끼가이샤 filed Critical 신포니아 테크놀로지 가부시끼가이샤
Publication of KR20250040629A publication Critical patent/KR20250040629A/ko
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408—Docking arrangements
    • H01L21/67775—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H01L21/68—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020257001402A 2022-07-19 2023-06-30 로드 포트 설치 위치 조정 기구 Pending KR20250040629A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022114694 2022-07-19
JPJP-P-2022-114694 2022-07-19
PCT/JP2023/024330 WO2024018872A1 (ja) 2022-07-19 2023-06-30 ロードポート取付位置調整機構

Publications (1)

Publication Number Publication Date
KR20250040629A true KR20250040629A (ko) 2025-03-24

Family

ID=89617690

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257001402A Pending KR20250040629A (ko) 2022-07-19 2023-06-30 로드 포트 설치 위치 조정 기구

Country Status (6)

Country Link
US (1) US20260018447A1 (https=)
JP (1) JPWO2024018872A1 (https=)
KR (1) KR20250040629A (https=)
CN (1) CN119563230A (https=)
TW (1) TW202422762A (https=)
WO (1) WO2024018872A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910019U (ja) 1982-07-12 1984-01-21 日産自動車株式会社 液面計測装置
JPS5988076U (ja) 1982-12-07 1984-06-14 三菱電機株式会社 乗客コンベヤの欄干装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6138721A (en) * 1997-09-03 2000-10-31 Asyst Technologies, Inc. Tilt and go load port interface alignment system
JP2000332079A (ja) * 1999-05-18 2000-11-30 Tdk Corp 半導体製造装置用ロードポート、ロードポート取り付け機構及びロードポート取り付け方法
TW461014B (en) * 2000-10-11 2001-10-21 Ind Tech Res Inst A positioning method and device for wafer loading devices
JP3871535B2 (ja) * 2001-09-17 2007-01-24 大日本スクリーン製造株式会社 ロードポート装置及びこの装置と上位装置との取り付け機構
US10541165B2 (en) * 2016-11-10 2020-01-21 Applied Materials, Inc. Systems, apparatus, and methods for an improved load port backplane

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910019U (ja) 1982-07-12 1984-01-21 日産自動車株式会社 液面計測装置
JPS5988076U (ja) 1982-12-07 1984-06-14 三菱電機株式会社 乗客コンベヤの欄干装置

Also Published As

Publication number Publication date
TW202422762A (zh) 2024-06-01
US20260018447A1 (en) 2026-01-15
WO2024018872A1 (ja) 2024-01-25
JPWO2024018872A1 (https=) 2024-01-25
CN119563230A (zh) 2025-03-04

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Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000