CN119256215A - 使用质谱逆流泄漏检测装置测量轻质气体的环境浓度的方法 - Google Patents

使用质谱逆流泄漏检测装置测量轻质气体的环境浓度的方法 Download PDF

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Publication number
CN119256215A
CN119256215A CN202380042061.1A CN202380042061A CN119256215A CN 119256215 A CN119256215 A CN 119256215A CN 202380042061 A CN202380042061 A CN 202380042061A CN 119256215 A CN119256215 A CN 119256215A
Authority
CN
China
Prior art keywords
vacuum pump
gas
pump
air
gas detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380042061.1A
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English (en)
Chinese (zh)
Inventor
西蒙·马蒂乌达基斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of CN119256215A publication Critical patent/CN119256215A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN202380042061.1A 2022-06-22 2023-05-25 使用质谱逆流泄漏检测装置测量轻质气体的环境浓度的方法 Pending CN119256215A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102022115562.5A DE102022115562A1 (de) 2022-06-22 2022-06-22 Verfahren zur Messung der Umgebungskonzentration eines leichten Gases mit einer massenspektrometrischen Gegenstrom-Lecksuchvorrichtung
DE102022115562.5 2022-06-22
PCT/EP2023/064001 WO2023247132A1 (de) 2022-06-22 2023-05-25 Verfahren zur messung der umgebungskonzentration eines leichten gases mit einer massenspektrometrischen gegenstrom-lecksuchvorrichtung

Publications (1)

Publication Number Publication Date
CN119256215A true CN119256215A (zh) 2025-01-03

Family

ID=86657751

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380042061.1A Pending CN119256215A (zh) 2022-06-22 2023-05-25 使用质谱逆流泄漏检测装置测量轻质气体的环境浓度的方法

Country Status (6)

Country Link
EP (1) EP4544280A1 (https=)
JP (1) JP2025519694A (https=)
CN (1) CN119256215A (https=)
DE (1) DE102022115562A1 (https=)
TW (1) TW202413911A (https=)
WO (1) WO2023247132A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19522466A1 (de) 1995-06-21 1997-01-02 Leybold Ag Lecksuchgerät mit Vorvakuumpumpe
DE19846800A1 (de) * 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Folien-Lecksucher
DE19846799A1 (de) 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Verfahren zum Betrieb eines Folien-Lecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Folien-Lecksucher
DE10319633A1 (de) * 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
DE102015222213A1 (de) * 2015-11-11 2017-05-11 Inficon Gmbh Druckmessung am Prüfgaseinlass

Also Published As

Publication number Publication date
TW202413911A (zh) 2024-04-01
JP2025519694A (ja) 2025-06-26
DE102022115562A1 (de) 2023-12-28
WO2023247132A1 (de) 2023-12-28
EP4544280A1 (de) 2025-04-30

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