CN118176362A - 真空泵、真空泵的控制方法、真空泵用功率转换装置、压缩机用功率转换装置以及压缩机 - Google Patents

真空泵、真空泵的控制方法、真空泵用功率转换装置、压缩机用功率转换装置以及压缩机 Download PDF

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Publication number
CN118176362A
CN118176362A CN202180103879.0A CN202180103879A CN118176362A CN 118176362 A CN118176362 A CN 118176362A CN 202180103879 A CN202180103879 A CN 202180103879A CN 118176362 A CN118176362 A CN 118176362A
Authority
CN
China
Prior art keywords
torque
motor
specified
vacuum pump
control mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180103879.0A
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English (en)
Chinese (zh)
Inventor
木村康宏
横泽荣秀
町家贤二
井上英晃
后藤彬德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of CN118176362A publication Critical patent/CN118176362A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
CN202180103879.0A 2021-11-04 2021-11-04 真空泵、真空泵的控制方法、真空泵用功率转换装置、压缩机用功率转换装置以及压缩机 Pending CN118176362A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/040574 WO2023079621A1 (ja) 2021-11-04 2021-11-04 真空ポンプ、真空ポンプの制御方法、真空ポンプ用電力変換装置、圧縮機用電力変換装置および圧縮機

Publications (1)

Publication Number Publication Date
CN118176362A true CN118176362A (zh) 2024-06-11

Family

ID=84441465

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180103879.0A Pending CN118176362A (zh) 2021-11-04 2021-11-04 真空泵、真空泵的控制方法、真空泵用功率转换装置、压缩机用功率转换装置以及压缩机

Country Status (3)

Country Link
JP (1) JP7189394B1 (https=)
CN (1) CN118176362A (https=)
WO (1) WO2023079621A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2625786A (en) * 2022-12-23 2024-07-03 Leybold Gmbh Method for operating a vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3432679B2 (ja) * 1996-06-03 2003-08-04 株式会社荏原製作所 容積式真空ポンプ
JP6050081B2 (ja) * 2012-10-05 2016-12-21 株式会社荏原製作所 ドライ真空ポンプ装置

Also Published As

Publication number Publication date
JP7189394B1 (ja) 2022-12-13
WO2023079621A1 (ja) 2023-05-11
JPWO2023079621A1 (https=) 2023-05-11

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