JP7189394B1 - 真空ポンプ、真空ポンプの制御方法、真空ポンプ用電力変換装置、圧縮機用電力変換装置および圧縮機 - Google Patents

真空ポンプ、真空ポンプの制御方法、真空ポンプ用電力変換装置、圧縮機用電力変換装置および圧縮機 Download PDF

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JP7189394B1
JP7189394B1 JP2022536599A JP2022536599A JP7189394B1 JP 7189394 B1 JP7189394 B1 JP 7189394B1 JP 2022536599 A JP2022536599 A JP 2022536599A JP 2022536599 A JP2022536599 A JP 2022536599A JP 7189394 B1 JP7189394 B1 JP 7189394B1
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predetermined
motor
torque
vacuum pump
less
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Japanese (ja)
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JPWO2023079621A5 (https=
JPWO2023079621A1 (https=
Inventor
康宏 木村
栄秀 横澤
賢二 町家
英晃 井上
彬徳 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Ulvac Inc
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Yaskawa Electric Corp
Ulvac Inc
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2022536599A 2021-11-04 2021-11-04 真空ポンプ、真空ポンプの制御方法、真空ポンプ用電力変換装置、圧縮機用電力変換装置および圧縮機 Active JP7189394B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/040574 WO2023079621A1 (ja) 2021-11-04 2021-11-04 真空ポンプ、真空ポンプの制御方法、真空ポンプ用電力変換装置、圧縮機用電力変換装置および圧縮機

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JP7189394B1 true JP7189394B1 (ja) 2022-12-13
JPWO2023079621A1 JPWO2023079621A1 (https=) 2023-05-11
JPWO2023079621A5 JPWO2023079621A5 (https=) 2023-10-03

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JP (1) JP7189394B1 (https=)
CN (1) CN118176362A (https=)
WO (1) WO2023079621A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024132937A1 (en) * 2022-12-23 2024-06-27 Leybold Gmbh Method for operating a vacuum pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09324780A (ja) * 1996-06-03 1997-12-16 Ebara Corp 容積式真空ポンプ
JP2014074380A (ja) * 2012-10-05 2014-04-24 Ebara Corp ドライ真空ポンプ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09324780A (ja) * 1996-06-03 1997-12-16 Ebara Corp 容積式真空ポンプ
JP2014074380A (ja) * 2012-10-05 2014-04-24 Ebara Corp ドライ真空ポンプ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024132937A1 (en) * 2022-12-23 2024-06-27 Leybold Gmbh Method for operating a vacuum pump

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WO2023079621A1 (ja) 2023-05-11
CN118176362A (zh) 2024-06-11
JPWO2023079621A1 (https=) 2023-05-11

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