CN117555106B - Large stroke and high precision micro-displacement actuator - Google Patents
Large stroke and high precision micro-displacement actuator Download PDFInfo
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- CN117555106B CN117555106B CN202410043220.6A CN202410043220A CN117555106B CN 117555106 B CN117555106 B CN 117555106B CN 202410043220 A CN202410043220 A CN 202410043220A CN 117555106 B CN117555106 B CN 117555106B
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Abstract
本发明涉及航天遥感技术领域,尤其涉及一种大行程高精度的微位移促动装置,包括第一底座组件、大行程机构、微位移促动机构和第二底座组件;大行程机构包括滚珠丝杠、减速箱和消间隙结构,滚珠丝杠与减速箱配合使减速箱沿所述滚珠丝杠进行直线运动;微位移促动机构包括直线运动组件、一级放大机构和二级放大机构;直线运动组件垂直固定在减速箱上,一级放大机构的底端固定在直线运动组件上,一级放大机构的顶端与所述二级放大机构相连,使一级放大机构受直线运动组件的驱动,带动二级放大机构不同方向调节运动,并将调节运动共同转换为竖直方向的调节,通过多级缩放机构可实现大行程和纳米级运动精度。
The invention relates to the field of aerospace remote sensing technology, and in particular to a large-stroke and high-precision micro-displacement actuator, which includes a first base assembly, a large-stroke mechanism, a micro-displacement actuator and a second base assembly; the large-stroke mechanism includes a ball wire rod, reduction box and gap-eliminating structure. The ball screw and the reduction box cooperate to make the reduction box move linearly along the ball screw; the micro-displacement actuating mechanism includes a linear motion component, a first-level amplification mechanism and a second-level amplification mechanism; linear motion The motion component is fixed vertically on the reduction box, the bottom end of the first-level amplification mechanism is fixed on the linear motion component, and the top of the first-level amplification mechanism is connected to the second-level amplification mechanism, so that the first-level amplification mechanism is driven by the linear motion component. It drives the secondary amplification mechanism to adjust movements in different directions, and jointly converts the adjustment movements into adjustments in the vertical direction. Through the multi-stage zoom mechanism, large strokes and nanometer-level movement accuracy can be achieved.
Description
技术领域Technical Field
本发明涉及航天遥感技术领域,尤其涉及一种大行程高精度的微位移促动装置。The invention relates to the field of aerospace remote sensing technology, and in particular to a large-stroke and high-precision micro-displacement actuator.
背景技术Background technique
随着技术的发展,望远镜对主反射镜口径要求越来越大,受限于多种因素单体反射镜已经无法满足使用要求,一方面,空间望远镜口径受限于运载火箭直径,另一方面,受限于目前制造能力;由多块子镜组成的拼接式反射镜被提出能很好的解决上述问题,拼接式反射镜不仅可实现折叠功能满足运载火箭的空间要求,同时子镜口径较小使得反射镜的制备难度也随之下降。但随之带来的问题就是如何调整子镜的正确姿态保证反射镜光学性能,微位移驱动技术作为拼接镜的关键技术可解决该问题,一般通过高精度微位移促动装置来完成子镜姿态调整。为实现子镜高精度拼接,一般要求微位移促动装置达到纳米级调整精度,同时还有大行程调整需求。With the development of technology, the requirements for the diameter of the main reflector of telescopes are getting larger and larger. Due to various factors, the single reflector cannot meet the requirements. On the one hand, the diameter of the space telescope is limited by the diameter of the launch vehicle; on the other hand, the diameter of the space telescope is limited by the diameter of the launch vehicle. , limited by current manufacturing capabilities; a spliced reflector composed of multiple sub-mirrors has been proposed to solve the above problems well. The spliced reflector can not only achieve the folding function to meet the space requirements of the launch vehicle, but also has a smaller sub-mirror diameter. The small size makes the preparation of mirrors less difficult. But the problem that comes with it is how to adjust the correct posture of the sub-mirror to ensure the optical performance of the mirror. Micro-displacement drive technology, as a key technology for spliced mirrors, can solve this problem. Generally, the posture of the sub-mirror is completed through a high-precision micro-displacement actuator. Adjustment. In order to achieve high-precision splicing of sub-mirrors, the micro-displacement actuator is generally required to achieve nanometer-level adjustment accuracy, and there is also a need for large-stroke adjustment.
发明内容Contents of the invention
本发明为解决上述问题,提供一种大行程高精度的微位移促动装置,同时具备大行程和高精度运动的功能。采用多级缩放机构可实现大行程和纳米级运动精度,并设计消间隙结构实现大行程机构间隙消除。In order to solve the above problems, the present invention provides a large-stroke and high-precision micro-displacement actuator device, which has the functions of large-stroke and high-precision movement at the same time. The multi-stage scaling mechanism can be used to achieve large strokes and nano-level motion accuracy, and the gap elimination structure is designed to eliminate the gaps in the large stroke mechanism.
本发明提供的大行程高精度的微位移促动装置,包括第一底座组件、大行程机构、微位移促动机构和第二底座组件;微位移促动机构通过螺钉固定在大行程机构上,使大行程机构带动微位移促动机构进行微位移调节;第一底座组件通过螺钉固定在大行程机构上远离微位移促动机构的一端;第二底座组件通过螺钉固定在微位移促动机构上远离大行程机构的一端;其中,大行程机构包括滚珠丝杠、减速箱和消间隙结构;滚珠丝杠的一端通过消间隙结构与第一底座组件相连,滚珠丝杠的另一端通过预紧螺母固定在减速箱套装的顶端,滚珠丝杠与减速箱配合使减速箱沿滚珠丝杠进行直线运动;微位移促动机构包括直线运动组件、一级放大机构和二级放大机构;直线运动组件垂直固定在减速箱上,二级放大机构为对称的方形门结构,二级放大机构的底端通过螺钉与消间隙结构相连,第二底座组件通过螺钉固定在二级放大机构的顶端;一级放大机构为对称的梯形门结构,一级放大机构的底端固定在直线运动组件上,一级放大机构的顶端与二级放大机构相连,使一级放大机构受直线运动组件的驱动,带动二级放大机构完成微位移调节。The large-stroke and high-precision micro-displacement actuating device provided by the present invention includes a first base component, a large-stroke mechanism, a micro-displacement actuating mechanism and a second base component; the micro-displacement actuating mechanism is fixed on the large-stroke mechanism through screws. The large-stroke mechanism drives the micro-displacement actuating mechanism for micro-displacement adjustment; the first base component is fixed on the large-stroke mechanism at one end away from the micro-displacement actuating mechanism through screws; the second base component is fixed on the micro-displacement actuating mechanism through screws One end away from the large-stroke mechanism; where the large-stroke mechanism includes a ball screw, a reduction box and a backlash-eliminating structure; one end of the ball screw is connected to the first base component through the backlash-eliminating structure, and the other end of the ball screw is connected through a preload nut Fixed on the top of the reduction box set, the ball screw cooperates with the reduction box to make the reduction box move linearly along the ball screw; the micro-displacement actuating mechanism includes a linear motion component, a first-level amplification mechanism and a second-level amplification mechanism; the linear motion component is vertical Fixed on the reduction box, the second-level amplification mechanism is a symmetrical square door structure. The bottom end of the second-level amplification mechanism is connected to the gap-eliminating structure through screws. The second base component is fixed on the top of the second-level amplification mechanism through screws; the first-level amplification mechanism The mechanism is a symmetrical trapezoidal door structure. The bottom end of the first-level amplification mechanism is fixed on the linear motion component. The top of the first-level amplification mechanism is connected to the second-level amplification mechanism, so that the first-level amplification mechanism is driven by the linear motion component and drives the second-level amplification mechanism. The amplification mechanism completes micro-displacement adjustment.
进一步的,减速箱包括减速箱体、步进电机、蜗轮、蜗杆、轴承和预紧螺母。其中,减速箱体为带有安装台的中空柱体结构。轴承嵌入减速箱体的顶板和底板,使滚珠丝杠通过轴承穿过减速箱体,并通过预紧螺母固定在减速箱体的顶板中。蜗轮沿切面方向嵌入减速箱体中,并位于两个轴承之间。步进电机固定在减速箱体的外壁上,并使步进电机中的蜗杆穿过减速箱体的侧壁与蜗轮啮合,步进电机驱动蜗杆,使蜗轮与蜗杆配合实现减速箱的减速调节。Further, the reduction box includes a reduction box body, a stepper motor, a worm gear, a worm, a bearing and a preload nut. Among them, the reduction box body is a hollow cylinder structure with a mounting platform. The bearings are embedded in the top and bottom plates of the reduction box, so that the ball screw passes through the reduction box through the bearings and is fixed in the top plate of the reduction box through the preload nut. The worm gear is embedded in the reduction box along the tangential direction and is located between the two bearings. The stepper motor is fixed on the outer wall of the reduction box, and the worm in the stepper motor passes through the side wall of the reduction box to mesh with the worm gear. The stepper motor drives the worm, so that the worm wheel and the worm cooperate to realize the deceleration adjustment of the reduction box.
进一步的,一级放大机构包括一级放大顶板和两个一级放大支撑臂,一级放大支撑臂通过柔性铰链将一级放大顶板支撑起。一级放大支撑臂包括一级放大侧板和一级放大底一级放大侧板和一级放大底板通过柔性铰链相连,一级放大底板通过螺钉与直线运动组件相连,使直线运动组件驱动一级放大底板做直线运动,使一级放大顶板受柔性铰链牵引进行纵向运动。Further, the first-level amplification mechanism includes a first-level amplification top plate and two first-level amplification support arms. The first-level amplification support arms support the first-level amplification top plate through flexible hinges. The first-level amplification support arm includes a first-level amplification side plate and a first-level amplification bottom. The first-level amplification side plate and the first-level amplification bottom plate are connected through a flexible hinge. The first-level amplification base plate is connected to the linear motion component through screws, so that the linear motion component drives the first-level amplification. The enlarging base plate moves linearly, and the first-level enlarging top plate is pulled by the flexible hinge to move longitudinally.
进一步的,二级放大机构包括二级放大顶板、二级放大支撑臂,二级放大连接板以及二级放大连接臂;其中,二级放大支撑臂和二级放大连接臂的数量均为两个,二级放大支撑臂通过柔性铰链与二级放大顶板相连,使二级放大支撑臂将二级放大顶板支撑;Further, the second-level amplification mechanism includes a second-level amplification top plate, a second-level amplification support arm, a second-level amplification connecting plate and a second-level amplification connecting arm; wherein, the number of the second-level amplifying support arms and the second-level amplifying connecting arms is two. , the secondary amplification support arm is connected to the secondary amplification top plate through a flexible hinge, so that the secondary amplification support arm supports the secondary amplification top plate;
二级放大支撑臂包括二级放大底座、二级放大下臂、二级放大连接块和二级放大上臂;二级放大上臂和二级放大下臂的一端通过柔性铰链与二级放大连接块相连,二级放大上臂的另一端通过柔性铰链与二级放大顶板相连;二级放大下臂的另一端通过柔性铰链与二级放大底座相连;二级放大底座通过螺钉固定在减速箱体的顶板上;The secondary amplification support arm includes a secondary amplification base, a secondary amplification lower arm, a secondary amplification connecting block and a secondary amplification upper arm; one end of the secondary amplification upper arm and the secondary amplification lower arm is connected to the secondary amplification connecting block through a flexible hinge , the other end of the upper arm of the second-level amplification is connected to the top plate of the second-level amplification through a flexible hinge; the other end of the lower arm of the second-level amplification is connected to the base of the second-level amplification through a flexible hinge; the base of the second-level amplification is fixed on the top plate of the reduction box through screws ;
二级放大连接臂的一端通过柔性铰链与二级放大连接板相连,二级放大连接臂的另一端通过螺钉与同侧的二级放大连接块相连,使二级放大连接臂将二级放大连接板安装在二级放大顶板的下方;One end of the secondary amplification connecting arm is connected to the secondary amplification connecting plate through a flexible hinge, and the other end of the secondary amplification connecting arm is connected to the secondary amplification connecting block on the same side through a screw, so that the secondary amplification connecting arm installs the secondary amplification connecting plate below the secondary amplification top plate;
二级放大连接板通过螺钉与一级放大顶板相连,使一级放大顶板带动二级放大连接板进行纵向运动,进而使二级放大顶板受柔性铰链牵引进行纵向运动。The second-level amplification connecting plate is connected to the first-level amplifying top plate through screws, so that the first-level amplifying top plate drives the second-level amplifying connecting plate to move longitudinally, and then the second-level amplifying top plate is pulled by the flexible hinge to move longitudinally.
进一步的,消间隙结构为对称结构,包括固定座、消间隙薄片、消间隙支撑臂和消间隙底板;其中,固定座和消间隙支撑臂的数量均为两个,且固定座和消间隙支撑臂的一端通过柔性铰链相连,消间隙支撑臂的另一端固定在消间隙底板上;消间隙薄片固定在消间隙底板的中心处;固定座对应于二级放大底座,通过螺钉固定在减速箱体的顶板的下方。Furthermore, the gap eliminating structure is a symmetrical structure, including a fixed seat, a gap eliminating sheet, a gap eliminating support arm and a gap eliminating base plate; wherein, the number of the fixed seat and the gap eliminating support arm are two, and the fixed seat and one end of the gap eliminating support arm are connected by a flexible hinge, and the other end of the gap eliminating support arm is fixed on the gap eliminating base plate; the gap eliminating sheet is fixed at the center of the gap eliminating base plate; the fixed seat corresponds to the secondary amplifying base, and is fixed to the bottom of the top plate of the reduction gear box body by screws.
进一步的,第一底座组件与第二底座组件的结构一致,均包括底座和十字柔性铰链;其中,十字柔性铰链通过螺钉与底座相连;第一底座组件中的十字柔性铰链与消间隙薄片相连,第二底座组件中的十字柔性铰链通过螺钉与二级放大顶板相连。Further, the structures of the first base component and the second base component are consistent, and both include a base and a cross flexible hinge; wherein the cross flexible hinge is connected to the base through screws; the cross flexible hinge in the first base component is connected to the gap-eliminating sheet, The cross flexible hinge in the second base assembly is connected to the secondary amplification top plate through screws.
与现有技术相比,本发明能够取得如下有益效果:Compared with the existing technology, the present invention can achieve the following beneficial effects:
1)本发明采用多级缩放机构可实现大行程和纳米级运动精度;1) The present invention adopts a multi-level scaling mechanism to achieve large stroke and nanometer-level motion accuracy;
2)在一级放大机构和二级放大机构中的不同调节方向共同转换为竖直方向的调节;2) The different adjustment directions in the first-level amplification mechanism and the second-level amplification mechanism are jointly converted into vertical adjustment;
3)设计消间隙结构实现大行程机构间隙消除。3) Design the clearance elimination structure to eliminate the clearance of the large stroke mechanism.
附图说明Description of drawings
图1是根据本发明实施例提供的大行程高精度的微位移促动装置的主视图;FIG1 is a front view of a large-stroke and high-precision micro-displacement actuating device according to an embodiment of the present invention;
图2是根据本发明实施例提供的大行程高精度的微位移促动装置的剖视图;Figure 2 is a cross-sectional view of a large-stroke, high-precision micro-displacement actuator provided according to an embodiment of the present invention;
图3是根据本发明实施例提供的减速箱的剖视结构图;Figure 3 is a cross-sectional structural view of a reduction gearbox provided according to an embodiment of the present invention;
图4是根据本发明实施例提供的减速箱的外部结构图;Figure 4 is an external structural diagram of a reduction gearbox provided according to an embodiment of the present invention;
图5是根据本发明实施例提供的一级放大机构的结构示意图;FIG5 is a schematic structural diagram of a primary amplification mechanism provided according to an embodiment of the present invention;
图6是根据本发明实施例提供的二级放大机构的结构示意图;Figure 6 is a schematic structural diagram of a two-stage amplification mechanism provided according to an embodiment of the present invention;
图7是根据本发明实施例提供的消间隙结构的结构示意图;FIG7 is a schematic structural diagram of a gap elimination structure provided according to an embodiment of the present invention;
图8是根据本发明实施例提供的大行程高精度的微位移促动装置的原理示意图。FIG. 8 is a schematic diagram of the principle of a large-stroke and high-precision micro-displacement actuator provided according to an embodiment of the present invention.
附图标记:底座1、十字柔性铰链2、滚珠丝杠3、减速箱体4、步进电机5、蜗轮6、蜗杆7、轴承8、预紧螺母9、直线运动组件10、一级放大机构11、一级放大顶板11_1、一级放大侧板11_2、一级放大底板11_3、二级放大机构12、二级放大顶板12_1、二级放大连接板12_2、二级放大上臂12_3、二级放大连接块12_4、二级放大下臂12_5、二级放大底座12_6、二级放大连接臂12_7、消间隙结构13、固定座13_1、消间隙支撑臂13_2、消间隙薄片13_3、消间隙底板13_4、柔性铰链14、转动铰链15。Reference signs: base 1, cross flexible hinge 2, ball screw 3, reduction box 4, stepper motor 5, worm gear 6, worm 7, bearing 8, preload nut 9, linear motion component 10, first-level amplification mechanism 11. The first-level amplification top plate 11_1, the first-level amplification side plate 11_2, the first-level amplification bottom plate 11_3, the second-level amplification mechanism 12, the second-level amplification top plate 12_1, the second-level amplification connection plate 12_2, the second-level amplification upper arm 12_3, and the second-level amplification connection Block 12_4, secondary amplification lower arm 12_5, secondary amplification base 12_6, secondary amplification connecting arm 12_7, gap elimination structure 13, fixed seat 13_1, gap elimination support arm 13_2, gap elimination sheet 13_3, gap elimination bottom plate 13_4, flexible hinge 14. Turn hinge 15.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及具体实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本发明,而不构成对本发明的限制。In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention and do not constitute limitations of the present invention.
本发明提供的大行程高精度的微位移促动装置,同时具备大行程和高精度运动的功能。装置采用多级缩放机构,将不同方向的调节转换为纵向的单方向调节,可实现大行程和纳米级运动精度,并设计消间隙结构实现大行程机构间隙消除。The large-stroke and high-precision micro-displacement actuator provided by the present invention has the functions of large-stroke and high-precision motion. The device adopts a multi-stage zoom mechanism to convert the adjustment in different directions into a longitudinal single-direction adjustment, which can achieve a large stroke and nanometer-level motion accuracy, and a clearance elimination structure is designed to eliminate the clearance of the large-stroke mechanism.
图1和图2分别示出了根据本发明实施例提供的大行程高精度的微位移促动装置的主视结构和剖视结构。Figures 1 and 2 respectively show the front structure and cross-sectional structure of a large-stroke, high-precision micro-displacement actuator provided according to an embodiment of the present invention.
如图1和图2所示,本发明实施例提供的大行程高精度的微位移促动装置包括第一底座组件、大行程机构、微位移促动机构和第二底座组件。微位移促动机构通过螺钉固定在大行程机构上,使大行程机构带动微位移促动机构进行微位移调节;第一底座组件通过螺钉固定在大行程机构上远离微位移促动机构的一端;第二底座组件通过螺钉固定在微位移促动机构上远离大行程机构的一端。As shown in Figures 1 and 2, the large-stroke and high-precision micro-displacement actuating device provided by the embodiment of the present invention includes a first base component, a large-stroke mechanism, a micro-displacement actuating mechanism and a second base component. The micro-displacement actuating mechanism is fixed on the large-stroke mechanism through screws, so that the large-stroke mechanism drives the micro-displacement actuating mechanism for micro-displacement adjustment; the first base component is fixed on the large-stroke mechanism through screws at one end away from the micro-displacement actuating mechanism; The second base assembly is fixed on an end of the micro-displacement actuating mechanism away from the large-stroke mechanism through screws.
其中,第一底座组件与第二底座组件的结构一致,均包括底座1和十字柔性铰链2。Among them, the first base component and the second base component have the same structure, and both include a base 1 and a cross flexible hinge 2 .
大行程机构包括滚珠丝杠3、减速箱和消间隙结构13。滚珠丝杠3的一端通过消间隙结构13与第一底座组件相连,滚珠丝杠3的另一端通过预紧螺母9固定在减速箱套装的顶端,滚珠丝杠3与减速箱配合使减速箱沿滚珠丝杠3进行直线运动。The long-stroke mechanism includes a ball screw 3, a reduction box and a clearance elimination structure 13. One end of the ball screw 3 is connected to the first base assembly through the clearance elimination structure 13, and the other end of the ball screw 3 is fixed to the top of the reduction box set through a pre-tightening nut 9. The ball screw 3 cooperates with the reduction box to make the reduction box move linearly along the ball screw 3.
图3和图4分别示出了根据本发明实施例提供的减速箱的剖视结构和外部结构。Figures 3 and 4 respectively show the cross-sectional structure and external structure of the reduction gearbox provided according to the embodiment of the present invention.
如图3所示,减速箱包括减速箱体4、步进电机5、蜗轮6、蜗杆7、轴承8和预紧螺母9。其中,减速箱体4为带有安装台的中空柱体结构。轴承8嵌入减速箱体4的顶板和底板,使滚珠丝杠3通过轴承8穿过减速箱体4,并通过预紧螺母9固定在减速箱体4的顶板中。蜗轮6沿切面方向嵌入减速箱体4中,并位于两个轴承8之间。As shown in Figure 3, the reduction box includes a reduction box body 4, a stepper motor 5, a worm gear 6, a worm 7, a bearing 8 and a preload nut 9. Among them, the deceleration box 4 is a hollow cylindrical structure with a mounting platform. The bearing 8 is embedded in the top and bottom plates of the reduction box 4 so that the ball screw 3 passes through the reduction box 4 through the bearing 8 and is fixed in the top plate of the reduction box 4 through the preload nut 9 . The worm gear 6 is embedded in the reduction box 4 along the tangential direction and is located between the two bearings 8 .
如图3和图4所示,步进电机5固定在减速箱体4的外壁上,并使步进电机5中的蜗杆7穿过减速箱体4的侧壁与蜗轮6啮合,步进电机5驱动蜗杆7,使蜗轮6与蜗杆7配合实现减速箱的减速调节。As shown in Figures 3 and 4, the stepper motor 5 is fixed on the outer wall of the reduction box 4, and the worm 7 in the stepper motor 5 passes through the side wall of the reduction box 4 to engage with the worm gear 6. The stepper motor 5 drives the worm 7 so that the worm gear 6 and the worm 7 cooperate to realize the deceleration adjustment of the reduction box.
如图2所示,微位移促动机构包括直线运动组件10、一级放大机构11和二级放大机构12;直线运动组件10垂直固定在减速箱体4的安装台上,二级放大机构12为对称的方形门结构,二级放大机构12的底端通过螺钉与消间隙结构13相连,第二底座组件通过螺钉固定在二级放大机构12的顶端;一级放大机11构为对称的梯形门结构,一级放大机构11的底端固定在直线运动组件10上,一级放大机构11的顶端与二级放大机构12相连,使一级放大机构11受直线运动组件10的驱动,带动二级放大机构12完成微位移调节。As shown in Figure 2, the micro-displacement actuator mechanism includes a linear motion component 10, a first-level amplification mechanism 11 and a second-level amplification mechanism 12; the linear motion component 10 is vertically fixed on the installation platform of the deceleration box 4, and the second-level amplification mechanism 12 It is a symmetrical square door structure. The bottom end of the secondary amplifier mechanism 12 is connected to the gap elimination structure 13 through screws. The second base assembly is fixed on the top of the secondary amplifier mechanism 12 through screws. The primary amplifier 11 is structured as a symmetrical trapezoid. Door structure, the bottom end of the first-level amplification mechanism 11 is fixed on the linear motion assembly 10, and the top end of the first-level amplification mechanism 11 is connected to the second-level amplification mechanism 12, so that the first-level amplification mechanism 11 is driven by the linear motion assembly 10 to drive the second-level amplification mechanism 11. The stage amplification mechanism 12 completes micro-displacement adjustment.
图5示出了根据本发明实施例提供的一级放大机构的结构。FIG. 5 shows the structure of a first-stage amplification mechanism provided according to an embodiment of the present invention.
如图5所示,一级放大机构11包括一级放大顶板11_1和两个一级放大支撑臂,一级放大支撑臂通过柔性铰链14将一级放大顶板11_1支撑起。As shown in FIG. 5 , the first-level amplification mechanism 11 includes a first-level amplification top plate 11_1 and two first-level amplification support arms. The first-level amplification support arms support the first-level amplification top plate 11_1 through a flexible hinge 14 .
一级放大支撑臂包括一级放大侧板11_2和一级放大底板11_3,一级放大侧板11_2和一级放大底板11_3通过柔性铰链14相连,一级放大底板11_3通过螺钉与直线运动组件10相连,使直线运动组件10驱动一级放大底板11_3做直线运动,使一级放大顶板11_1受柔性铰链14牵引进行纵向运动。The first-level amplification support arm includes a first-level amplification side plate 11_2 and a first-level amplification bottom plate 11_3. The first-level amplification side plate 11_2 and the first-level amplification bottom plate 11_3 are connected through a flexible hinge 14. The first-level amplification bottom plate 11_3 is connected to the linear motion assembly 10 through screws. , so that the linear motion assembly 10 drives the first-level amplification base plate 11_3 to make linear motion, and the first-level amplification top plate 11_1 is pulled by the flexible hinge 14 to move longitudinally.
图6示出了根据本发明实施例提供的二级放大机构的结构。Figure 6 shows the structure of a two-stage amplification mechanism provided according to an embodiment of the present invention.
如图6所示,二级放大机构12包括二级放大顶板12_1、二级放大支撑臂,二级放大连接板12_2以及二级放大连接臂12_7。其中,二级放大支撑臂和二级放大连接臂12_7的数量均为两个,二级放大支撑臂通过柔性铰链14与二级放大顶板12_1相连,使二级放大支撑臂将二级放大顶板12_1支撑。As shown in Figure 6, the secondary amplification mechanism 12 includes a secondary amplification top plate 12_1, a secondary amplification support arm, a secondary amplification connecting plate 12_2 and a secondary amplification connecting arm 12_7. Among them, the number of the second-level amplification support arm and the second-level amplification connecting arm 12_7 is two. The second-level amplification support arm is connected to the second-level amplification top plate 12_1 through a flexible hinge 14, so that the second-level amplification support arm connects the second-level amplification top plate 12_1 support.
二级放大支撑臂包括二级放大上臂12_3、二级放大连接块12_4、二级放大下臂12_5和二级放大底座12_6;二级放大上臂12_3和二级放大下臂12_5的一端通过柔性铰链14与二级放大连接块12_4相连,二级放大上臂12_3的另一端通过柔性铰链14与二级放大顶板12_1相连;二级放大下臂12_5的另一端通过柔性铰链14与二级放大底座12_6相连;二级放大底座12_6通过螺钉固定在减速箱体4的顶板上。The second-level amplification support arm includes a second-level amplification upper arm 12_3, a second-level amplification connecting block 12_4, a second-level amplification lower arm 12_5 and a second-level amplification base 12_6; one end of the second-level amplification upper arm 12_3 and the second-level amplification lower arm 12_5 passes through a flexible hinge 14 Connected to the secondary amplification connection block 12_4, the other end of the secondary amplification upper arm 12_3 is connected to the secondary amplification top plate 12_1 through a flexible hinge 14; the other end of the secondary amplification lower arm 12_5 is connected to the secondary amplification base 12_6 through a flexible hinge 14; The secondary amplification base 12_6 is fixed on the top plate of the reduction box 4 through screws.
二级放大连接臂12_7的一端通过柔性铰链14与二级放大连接板12_2相连,二级放大连接臂12_7的另一端通过螺钉与同侧的二级放大连接块12_4相连,使二级放大连接臂12_7将二级放大连接板12_2安装在二级放大顶板12_1的下方。One end of the secondary amplification connection arm 12_7 is connected to the secondary amplification connection plate 12_2 through a flexible hinge 14, and the other end of the secondary amplification connection arm 12_7 is connected to the secondary amplification connection block 12_4 on the same side through a screw, so that the secondary amplification connection arm 12_7 Install the secondary amplification connecting plate 12_2 under the secondary amplification top plate 12_1.
二级放大连接板12_2通过螺钉与一级放大顶板11_1相连,使一级放大顶板11_1带动二级放大连接板12_2进行纵向运动,进而使二级放大顶板12_1受柔性铰链14牵引进行纵向运动。The second-level amplification connecting plate 12_2 is connected to the first-level amplifying top plate 11_1 through screws, so that the first-level amplifying top plate 11_1 drives the second-level amplifying connecting plate 12_2 to move longitudinally, and then the second-level amplifying top plate 12_1 is pulled by the flexible hinge 14 to move longitudinally.
图7示出了根据本发明实施例提供的消间隙结构的结构。Figure 7 shows the structure of a gap elimination structure provided according to an embodiment of the present invention.
如图7所示,消间隙结构13为对称结构,包括固定座13_1、消间隙支撑臂13_2、消间隙薄片13_3和消间隙底板13_4;其中,固定座13_1和消间隙支撑臂13_2的数量均为两个,且固定座13_1和消间隙支撑臂13_2的一端通过柔性铰链14相连,消间隙支撑臂13_2的另一端固定在消间隙底板13_4上;消间隙薄片13_3固定在消间隙底板13_4的中心处;固定座13_1对应于二级放大底座12_6,通过螺钉固定在减速箱体4的顶板的下方。As shown in Figure 7, the gap-eliminating structure 13 is a symmetrical structure, including a fixed base 13_1, a gap-eliminating support arm 13_2, a gap-eliminating sheet 13_3 and a gap-eliminating base plate 13_4; among which, the number of the fixed base 13_1 and the gap-eliminating support arm 13_2 is Two, and one end of the fixed seat 13_1 and the gap-eliminating support arm 13_2 is connected through a flexible hinge 14, and the other end of the gap-eliminating support arm 13_2 is fixed on the gap-eliminating base plate 13_4; the gap-eliminating sheet 13_3 is fixed on the center of the gap-eliminating base plate 13_4 ; The fixed base 13_1 corresponds to the secondary amplification base 12_6 and is fixed below the top plate of the deceleration box 4 through screws.
十字柔性铰链2通过螺钉与底座1相连;第一底座组件中的十字柔性铰链2与消间隙薄片13_3相连,第二底座组件中的十字柔性铰链2通过螺钉与二级放大顶板12_1相连。The cross flexible hinge 2 is connected to the base 1 through screws; the cross flexible hinge 2 in the first base assembly is connected to the gap elimination sheet 13_3, and the cross flexible hinge 2 in the second base assembly is connected to the secondary amplification top plate 12_1 through screws.
图8示出了根据本发明实施例提供的大行程高精度的微位移促动装置的原理,其中图8(a)为图8(b)的垂直方向的投影,一级放大底板11_3的运动方向与二级放大顶板12_1的运动方向互相垂直。如图8(a)所示,当一级放大底板11_3带动一级放大侧板11_2从与中轴线的角度为的位置向中心运动时,使一级放大顶板11_1带动二级放大连接板12_2向上运动。如图8(b)所示,二级放大连接板12_2带动二级放大连接臂12_7上抬/>角度,进而二级放大连接块12_4外展,使二级放大上臂12_3带动二级放大顶板12_1向下运动,且二级放大上臂12_3的张开角度为/>。最终得到一级放大机构11和二级放大机构12的总的缩放比例为。FIG8 shows the principle of a large-stroke, high-precision micro-displacement actuator according to an embodiment of the present invention, wherein FIG8 (a) is a vertical projection of FIG8 (b), and the movement direction of the primary amplifying bottom plate 11_3 is perpendicular to the movement direction of the secondary amplifying top plate 12_1. As shown in FIG8 (a), when the primary amplifying bottom plate 11_3 drives the primary amplifying side plate 11_2 to move from an angle of 11.1 to 11.1 with respect to the central axis, the primary amplifying bottom plate 11_3 moves to the secondary amplifying top plate 12_1. When the position of the first-stage amplifying top plate 11_1 moves toward the center, the second-stage amplifying connecting plate 12_2 moves upward. As shown in FIG8(b), the second-stage amplifying connecting plate 12_2 drives the second-stage amplifying connecting arm 12_7 to move upward. The secondary enlarged connecting block 12_4 is extended outward, so that the secondary enlarged upper arm 12_3 drives the secondary enlarged top plate 12_1 to move downward, and the opening angle of the secondary enlarged upper arm 12_3 is / > Finally, the total scaling ratio of the primary amplification mechanism 11 and the secondary amplification mechanism 12 is .
在本发明实施例中,步进电机5的步距角1.8°,蜗轮6与蜗杆7的减速比1/25,滚珠丝杠3的导程2mm,重复定位精度可达2μm,这使得大行程运动分辨率可达0.4μm,重复定位精度可达2μm。In the embodiment of the present invention, the step angle of the stepper motor 5 is 1.8°, the reduction ratio of the worm gear 6 and the worm 7 is 1/25, the lead of the ball screw 3 is 2 mm, and the repeat positioning accuracy can reach 2 μm, which enables a large stroke The motion resolution can reach 0.4μm, and the repeated positioning accuracy can reach 2μm.
上述具体实施方式,并不构成对本发明保护范围的限制。本领域技术人员应该明白的是,根据设计要求和其他因素,可以进行各种修改、组合、子组合和替代。任何在本发明的精神和原则之内所作的修改、等同替换和改进等,均应包含在本发明保护范围之内。The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
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